About / Archives

About EIPBN   /   More About EIPBN   /   Organizing Committee   /   Advisory Committee   /   Advisor Emeritus   /   Past Conference Websites   /   Abstract Archives   /   EIPBN History   /   Related Conferences

The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends.

More About EIPBN
Meeting Format
The conference opens on Tuesday afternoon with a special commercial session, which features vendors of materials and equipment relevant to this conference. The plenary session is on Wednesday morning. The rest of the conference has three parallel sessions. The length of presentation is 40 minutes for invited papers and 20 minutes for contributed papers, discussion time included. A special feature of the technical program is the poster session that includes invited and contributed papers. There is only one formal poster session, but posters will be displayed for informal viewing throughout the entire conference. No distinction is made between the importance of poster and oral presentations. Click here for more on the conference program.

Technical Program
The Technical Program is organized by the Program Chair and assisted by volunteers that compromise the Technical Section Head panel. Over a 140 experts in the different fields of nanofabrication lend their time and expertise to suggest invited speakers, review abstracts and review manuscripts.  Any researcher can be part of the Technical Section Head panel. Contact the Program Chair for information. By renewing the members of this panel the EIPBN Community is kept vibrant and up-to-date with all the recent advances in nanofabrication technology.

History of EIPBN
We are pleased to feature the following paper on the history of the EIPBN conference:
History of the “Three Beams” Conference, the Birth of the Information Age and the Era of Lithography Wars
by Mark L. Schattenburg, Space Nanotechnology Laboratory, Massachusetts Institute of Technology.
Click here to download the paper in PDF Format.
Another item of historical interest is Richard Feynman’s 1959 lecture,
“There’s Plenty of Room at the Bottom.”

Click here to read a transcript.

Student Support
Limited funds are available to support student travel. The Conference Chair must receive a request for support from the student’s advisor by May 1. Decisions about student support will be returned by about May 15.

Organizing Committee
The EIPBN Conference is incorporated as a non-profit organization in the State of New Jersey. The Organizing Committee serve as the corporate Board of Directors, with the Conference Chair having the Responsibilities of CEO for the year in which he/she serves. The Organizing Committee has 8 members. Each year, 2 Organizing Committee members are elected for a 5 year term. Initially, they participate in the organization of the conference for 2 years. In the 3rd year of their term, they run the conference as Conference and Program Chairs. For the remaining 2 years of their term, they assist the successor chairs in their duties.Once the 5 year term is completed, Organizing Committee members become permanent members of the Advisory Committee.

EIPBN 2016 Organizing Committee
2016 Conference Chair:
Prof. John G. Hartley
R&D Fellow
NuFlare Technology America, Inc.
10 Corporate Park Drive, Suite C
Hopewell Junction, NY 12533
Tel: +1.845.896.0692, ext 236
Email: eipbn2016cc@gmail.com
2016 Program Chair:
George Patrick Watson, PhD
Director, Micro/Nano Fabrication Lab
Princeton University
J301A Engineering Quad
Princeton, New Jersey 08540
Tel: +1.609.258.4626
Email: eipbn2016pc@gmail.com
Theodore H. Fedynyshyn, Ph.D.
MIT Lincoln Laboratory
244 Wood Street
Lexington, MA 02420
Tel: +1.781.981.7811
Email: eipbn2014@gmail.com
Prof. Karl Berggren
Department of Electrical Engineering
Massachusetts Institute of Technology
Cambridge, MA 02139
Tel: +1.617.324.0272
Email: eipbn2014program@mit.edu
Shida Tan, PhD
Intel Corporation
2200 Mission College Blvd
Tel: +1.408.765.8806
Clifford L. Henderson
Professor, Georgia Tech
School of Chemical and Biomolecular Engineering
ES&T 1226
Tel: +1.404.385.0525
Michael A. Guillorn, PhD
Thomas J. Watson Research Center
Yorktown Heights, NY
Tel: +1.914.924.9557
Email: maguillorn@us.ibm.com
Prof. Todd Hastings
College of Engineering
University of Kentucky
Lexington, KY
Tel: +1.857.218.6544
Email: hastings@engr.uky.edu
Lawrence Muray, Ph.D.
Agilent Technologies
M/S 54U-SU
5301 Stevens Creek Blvd.
Santa Clara, CA 95051
Phone: +1.408.345.8168
Email: larry_muray@agilent.com
Stefano Cabrini, Ph.D.
Lawrence Berkeley National Laboratory
1 Cyclotron Road Mailstop 67R2206
Berkeley, CA 94720
Phone: +1.510.486.7339
Email: SCabrini@lbl.gov

The corporate Chief Financial Officer is:
Don Tennant, Ph.D.
Cornell NanoScale Science & Technology Facility (CNF)
262 Duffield Hall
Cornell University
Ithaca, NY 14853-2700
Tel: +1.607.254.6203
Email: tennant@cornell.edu

Advisory Committee
The advisory committee consists of individuals who have served on the EIPBN Steering Committee and those that have dedicated valuable service to the organization over the years.

 I. Adesida  E. Anderson  R. Blaikie  A. D. Brodie  S. Brueck
 J. H. Brunning  S. Chou  H. Craighead  K. Cummings  E. Dobizs
 N. Economou  R. L. Engelstad  M. Feldman  M. . Gesley  T. R. Groves
 C. Hanson  L. R. Harriot  M. Hatzakis  E. L. Hu  D. P Kern
 R. L. Kubena  J. A. Liddle  J. Maldonado  C. R. K. Marrian  S. Matsui
 M. McCord  J. Melngailis  W. D. Meisburger  A. Neureuther  A. Novembre
 S. Palmer  S. Pang  R. F. Pease  M. Peckerar  H. C. Pfeiffer
 M. L. Schattenburg  F. Schellenberg  H. I. Smith  D. Tennant*  L. F. Thompson
 J. N. Randall  D. Resnick  M. L. Schattenburg  F. Schellenberg  H. I. Smith
 D. Tennant*  L. F. Thompson  G. Wallraff  J. C. Wiesner  C. D. W. Wilkinson
 S. Wind R. Farrow M. Fritze R. Cheung L. Ocola

*Financial Trustee

Advisor Emeritus
Advisor Emeritus is a special designation given by the EIPBN Board of Directors to recognize lifelong service to the EIPBN community. Beginning in 2016, members of the steering committee who feel that they reached a point in their life where it is time to move on from active service to the EIPBN community, please notify the conference chair to begin the transfer to Advisor Emeritus status.

Thank you,
The EIPBN Steering Committee

Letter for Inaugural Member to Advisor Emeritus

Past Conference Websites

Abstract Archives
Abstract Archives can be found at http://eipbn.omnibooksonline.com/

EIPBN History

# Year Date Location Conference Chair Program Chair Symposium Name Archived Proceedings
1 1959 March 20 Boston, MA James S. Hetherington James S. Hetherington First SEBM PDF of Proceedings
2 1960 March 24-25 Boston, MA Robert A. Bakish Robert A. Bakish Second SEBP PDF of Proceedings
3 1961 March 23-24 Boston, MA Robert A. Bakish Robert A. Bakish Third SEBP PDF of Proceedings
4 1962 March 29-30 Boston, MA Robert A. Bakish Robert A. Bakish Fourth SEBT PDF of Proceedings
5 1963 March 28-29 Boston, MA John R. Morley John R. Morley Fifth Annual MEBS PDF of Proceedings
6 1964 April 27-28 Boston, MA John R. Morley John R. Morley Sixth Annual MEBS PDF of Proceedings
7 1964 May 3-7 Toronto, Canada Robert A. Bakish Robert A. Bakish First ICEIBST PDF of Proceedings
8 1965 Mar 31-April 2 University Park, PA Auguste B. El-Kareh Auguste B. El-Kareh ELBS PDF of Proceedings
9 1966 April 6-8 Ann Arbor, MI Joseph E. Rowe,Auguste B. El-Kareh George I. Haddad Eighth Annual ELBS PDF of Proceedings
10 1966 April 17-20 New York, NY Robert A. Bakish Robert A. Bakish 2nd ICEIBST PDF of Proceedings, Vol. 1
PDF of Proceedings, Vol. 2
11 1967 May 9-11 Berkeley, CA Charles Susskind R. Fabian W. Pease IEEE 9th Annual SEILBT PDF of Proceedings
12 1968 May 6-9 Boston, MA Robert A. Bakish Robert A. Bakish 3rd ICEIBST PDF of Proceedings
13 1969 May 21-23 Gaithersburg, MD Louis L. Marton Louis L. Marton 10th SEILBT PDF of Proceedings
14 1970 May 10-15 Los Angeles, CA Robert A. Bakish Robert A. Bakish 4th ICEIBST PDF of Proceedings
15 1971 May 12-14 Boulder, CO Frank S. Barnes Richard F.M. Thornley 11th SEILBT PDF of Proceedings
16 1972 May 7-12 Houston, TX Robert A. Bakish Robert A. Bakish 5th ICEIBST PDF of Proceedings
17 1973 May 21-23 Cambridge, MA Alec N. Broers Edward D. Wolf 12th SEILBT
18 1974 May 12-17 San Francisco,CA Robert A. Bakish Robert A. Bakish 6th ICEIBST PDF of Proceedings
19 1975 May 21-23 Colorado Spr.,CO George R. Brewer R. Fabian W. Pease 13th SEIPBT
20 1976 May 4-7 Washington, DC Robert A. Bakish Robert A. Bakish 7th ICEIBST PDF of Proceedings
21 1977 May 25-27 Palo Alto, CA Thomas E.Everhart Gilbert L. Varnell 14th SEIPBT
22 1978 May 22-26 Seattle, WA Robert A. Bakish Robert A. Bakish 8th ICEIBST PDF of Proceedings
23 1979 May 29- June 1 Boston, MA Henry I. Smith T.H. Philip Chang 15th SEIPBT
24 1980 May 12-16 St. Louis, MO Robert A. Bakish Robert A. Bakish 9th ICEIBST PDF of Proceedings
25 1981 May 26-29 Dallas, TX Gilbert L. Varnell Don R. Harriott,John H. Bruning 16th SEIPBT
26 1982 May 10-14 Montreal,Canada Robert A. Bakish Robert A. Bakish 10th ICEIBST PDF of Proceedings
27 1983 May 31-June 3 Los Angeles, CA Robert L. Seliger Mike Hatzakis 1983 ISEIPB
28 1984 May 29-June 1 Tarrytown, NY Michael Hatzakis John Kelly 1984 ISEIPB
29 1985 May 28-31 Portland, OR Lynwood W. Swanson John H. Bruning 29th ISEIPB
30 1986 May 27-30 Boston, MA Nicholas P. Economou Andrew R. Neureuther 30th ISEIPB
31 1987 May 26-29 Woodland Hills, CA John L. Bartelt Richard E. Howard 31st ISEIPB
32 1988 May 31-June 3 Ft. Lauderdale, FL Hans C. Pfeiffer Evelyn L. Hu 32nd ISEIPB
33 1989 May 30-June 2 Monterey, CA John C. Wiesner Alan D. Wilson 33rd ISEIPB
34 1990 May 29-June 1 San Antonio, TX Noel MacDonald Jon Orloff 34th ISEIPB
35 1991 May 28-31 Seattle, WA Daniel J. Ehrlich Jane M. Shaw 35th ISEIPB
36 1992 May 26-29 Orlando, FL Larry F. Thomson Randall L. Kubena 36th ISEIPB
37 1993 June 1-4 San Diego, CA Fritz Hohn Franco Cerrina 37th ISEIPB
38 1994 May 31-June 3 New Orleans, LA Harold Craighead Ilesanmi Adesida 38th ISEIPB
39 1995 May 30-June 2 Scottsdale, AZ John N. Randall Dieter P. Kern 39th ICEIPBTN
40 1996 May 28-31 Atlanta, GA Donald M. Tennant Stella W. Pang 40th ICEIPBTN
41 1997 May 27-30 Dana Point, CA Anthony Novembre Geraint Owen 41st ICEIPBTN
42 1998 May 26-29 Chicago, IL Alfred Wagner Christie R.K. Marrian 42nd ICEIPBTN
43 1999 June 1-4 Marco Island, FL Mark Gesley John C. Wolfe 43rd ICEIPBTN
44 2000 May 30-June 2 Rancho Mirage, CA Lloyd R. Harriott John Melngailis 44th ICEIPBTN
45 2001 May 29-June 1 Washington, DC Douglas J. Resnick Mark McCord 45th ICEIPBTN
46 2002 May 28-31 Anaheim, CA Raman G. Viswanathan Roderick R. Kunz 46th ICEIPBTN
47 2003 May 27-30 Tampa, FL Timothy R. Groves Mark L. Schattenburg 47th ICEIPBTN
48 2004 June 1-4 San Diego, CA W. Dan Meisburger Roxann L. Engelstad 48th ICEIPBTN
49 2005 May 31-June 3 Orlando, FL Kevin Cummings Martin Peckerar 49th ICEIPBTN
50 2006 May 30-June 2 Baltimore, MD Shane R. Palmer Shalom J. Wind 50th ICEIPBTN
51 2007 May 29-June 1 Denver, CO J Alexander Liddle Greg Wallraff 51st ICEIPBTN
52 2008 May 27 – 30 Portland, OR Steven Brueck Cindy Hanson 52nd ICEIPBTN
53 2009 May 26 – 29 Marco Island, FL Steven Chou Elizabeth Dobisz 53rd ICEIPBTN
54 2010 June 1-4 Anchorage, AK Frank Schellenberg Marty Feldman 54th ICEIPBTN
55 2011 May 31 – June 3 Las Vegas, NV Alan Brodie Richard Blaikie 55th ICEIPBTN
56 2012 May 29 – June 1 Waikaloa, HI Reginald C. Farrow Michael Fritze 56th ICEIPBTN
57 2013 May 28 – 31 Nashville, TN Leonidas E. Ocola Rebecca Cheung 57th ICEIPBTN
58 2014 May 27 – 30 Washington, DC Theodore H. Fedynyshyn Karl K. Berggren 58th ICEIPBTN
59 2015 May 26 – 39 San Diego, CA Todd Hastings Michael A. Guillorn 59th ICEIPBTN

Related Conferences
EIPBN is the foremost conference on Nanofabrication in the US. EIPBN also has “sister” conferences to be a forum for presentations of similar topics in nanofabrication in Europe and Asia.The Premier Nanofabrication Conference in Europe is the Micro-and Nano-Enginering conference. For more information, visit http://www.mne2014.org/The premier Nanofabrication Conference in Asia is the Microprocess and Nanotechnology Conference conference. For more information on MNC, visit http://imnc.jp/

Other Conferences

In addition to these affiliated conferences, there are related conferences on certain topics that may be of special interest to researchers in our nanofabrication community. These are:
Gordon Research Conferences, covering multiple topics in advanced scientific and technology research.

The Lithography Workshop, specializing in advanced lithography

The Nanoimprint and Nanoprint Technology (NNT) Conference, specializing in nanoimprint technology