EIPBN 2013 Program
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| ID | Session Name | Start Date & Time | End Date & Time | Session Type | Speakers | Venue |
|---|---|---|---|---|---|---|
| 01-Plenary 1 | Breaking through the scaling boundaries, key for a sustainable society | 5/29/2013 8:30am | 5/29/2013 9:15am | Plenary Session | Jo De Boeck | Tennessee Ballroom |
| 01-Plenary 2 | Nanotechnology Convergence for IT, ET, and BTs | 5/29/2013 9:15am | 5/29/2013 10:00am | Plenary Session | Jongmin Kim | Tennessee Ballroom |
| 01-Plenary 3 | Designing Bio-inorganic Nanomaterials for Ultrasensitive Biosensing | 5/29/2013 10:30am | 5/29/2013 11:15am | Plenary Session | Molly Stevens | Tennessee Ballroom |
| 01-Plenary 4 | Single Molecule and Single Cell Sensing with Nanomechanical Systems | 5/29/2013 11:15am | 5/29/2013 12:00noon | Plenary Session | Michael Roukes | Tennessee Ballroom |
| 1A-1 | Proof of 50keV Electron Multi-Beam Writing at 0.1nm Address Grid (Invited) | 5/29/2013 2:30pm | 5/29/2013 3:00pm | Session 1A - Electron Beam 1 | Hans Loeschner | Tennessee Ballroom A/B |
| 1A-2 | Optically Actuated Nanostructured Electron-Emitter Arrays | 5/29/2013 3:00pm | 5/29/2013 3:20pm | Session 1A - Electron Beam 1 | Richard Hobbs | Tennessee Ballroom A/B |
| 1A-3 | Image distortion in REBL system: the correctable and the residual | 5/29/2013 3:20pm | 5/29/2013 3:40pm | Session 1A - Electron Beam 1 | Sameet Shriyan | Tennessee Ballroom A/B |
| 1A-4 | Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source | 5/29/2013 3:40pm | 5/29/2013 4:00pm | Session 1A - Electron Beam 1 | Ing-Shouh Hwang | Tennessee Ballroom A/B |
| 1A-5 | Shaped and multiple electron beams from a single thermionic cathode | 5/29/2013 4:00pm | 5/29/2013 4:20pm | Session 1A - Electron Beam 1 | Mehran Vahdani Moghaddam | Tennessee Ballroom A/B |
| 1A-6 | High throughput scanning electron microscopes with MEMS-based multi-beam optics | 5/29/2013 4:20pm | 5/29/2013 4:40pm | Session 1A - Electron Beam 1 | Pieter Kruit | Tennessee Ballroom A/B |
| 1B-1 | Multifunctional Nanostructured Materials: Blurring the Lines between Optical Interfaces (Invited) | 5/29/2013 2:30pm | 5/29/2013 3:00pm | Session 1B - Nanophotonics 1 | Chih-Hao Chang | Tennessee Ballroom C |
| 1B-2 | Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas | 5/29/2013 3:00pm | 5/29/2013 3:20pm | Session 1B - Nanophotonics 1 | Joel Yang | Tennessee Ballroom C |
| 1B-3 | Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope | 5/29/2013 3:20pm | 5/29/2013 3:40pm | Session 1B - Nanophotonics 1 | Mauro Melli | Tennessee Ballroom C |
| 1B-4 | Moving Towards Structural Color Display: Angle Insensitive Structural Colors Based on Metallic Gratings and Color Pixels beyond the Diffraction Limit | 5/29/2013 3:40pm | 5/29/2013 4:00pm | Session 1B - Nanophotonics 1 | Cheng Zhang | Tennessee Ballroom C |
| 1B-5 | Double External Quantum Efficiency/Light Extraction and Widen Viewing Angle of Organic Light-Emitting Diodes with New Plasmonic Cavity with Subwavelength Hole Array (PlaCSH) | 5/29/2013 4:00pm | 5/29/2013 4:20pm | Session 1B - Nanophotonics 1 | Wei Ding | Tennessee Ballroom C |
| 1B-6 | Direct write and nanoprinting for plasmon resonance color filters (Invited) | 5/29/2013 4:20pm | 5/29/2013 4:50pm | Session 1B - Nanophotonics 1 | David Cumming | Tennessee Ballroom C |
| 1C-1 | NGL for NGL: Next Generation Lithography for Next Generation Logic (Invited), | 5/29/2013 2:30pm | 5/29/2013 3:00pm | Session 1C - EUV 1 | Yan Borodovsky | Tennessee Ballroom D/E |
| 1C-2 | Efficient Packaged Zoneplates for EUV Instruments | 5/29/2013 3:00pm | 5/29/2013 3:20pm | Session 1C - EUV 1 | Erik Anderson | Tennessee Ballroom D/E |
| 1C-3 | Continuous and Stochastic effects for 2D structures in EUV Lithography | 5/29/2013 3:20pm | 5/29/2013 3:40pm | Session 1C - EUV 1 | Alessandro Vaglio Pret | Tennessee Ballroom D/E |
| 1C-4 | Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope | 5/29/2013 3:40pm | 5/29/2013 4:00pm | Session 1C - EUV 1 | Tetsuo Harada | Tennessee Ballroom D/E |
| 1C-5 | EUV Bessel beam lithography | 5/29/2013 4:00pm | 5/29/2013 4:20pm | Session 1C - EUV 1 | Li Wang | Tennessee Ballroom D/E |
| 1C-6 | EUV Lithography and 3D IC (Invited) | 5/29/2013 4:20pm | 5/29/2013 4:50pm | Session 1C - EUV 1 | Banqiu Wu | Tennessee Ballroom D/E |
| 2A-1 | Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) | 5/30/2013 8:10am | 5/30/2013 8:40am | Session 2A - Nanostructures 1 | Axel Scherer | Tennessee Ballroom A/B |
| 2A-2 | Soft- and near-field lithography on glass hemisphere surface for spherical zone plates | 5/30/2013 8:40am | 5/30/2013 9:00am | Session 2A - Nanostructures 1 | Bing-Rui Lu | Tennessee Ballroom A/B |
| 2A-3 | Fabrication of hierarchical nanostructures using free-standing tri-layer membrane | 5/30/2013 9:00am | 5/30/2013 9:20am | Session 2A - Nanostructures 1 | Ke Du | Tennessee Ballroom A/B |
| 2A-4 | Out-of-plane nanofabrication using evaporated electron beam resist | 5/30/2013 9:20am | 5/30/2013 9:40am | Session 2A - Nanostructures 1 | Sondos Alqarni | Tennessee Ballroom A/B |
| 2A-5 | Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond | 5/30/2013 9:40am | 5/30/2013 10:00am | Session 2A - Nanostructures 1 | Michael Burek | Tennessee Ballroom A/B |
| 2B-1 | HfC(310) high brightness sources for advanced imaging applications (Invited) | 5/30/2013 8:10am | 5/30/2013 8:40am | Session 2B - Focused Ion Beam or Sources 1 | Willilam Mackie | Tennessee Ballroom C |
| 2B-2 | Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography | 5/30/2013 8:40am | 5/30/2013 9:00am | Session 2B - Focused Ion Beam or Sources 1 | Xianghui Zhang | Tennessee Ballroom C |
| 2B-3 | Understanding Nanomachining in Gold Substrates | 5/30/2013 9:00am | 5/30/2013 9:20am | Session 2B - Focused Ion Beam or Sources 1 | Kate L. Klein | Tennessee Ballroom C |
| 2B-4 | Development of a low energy neutral particle printer for atomically precise patterning of desorption resists | 5/30/2013 9:20am | 5/30/2013 9:40am | Session 2B - Focused Ion Beam or Sources 1 | Hong-Jie Guo | Tennessee Ballroom C |
| 2B-5 | Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane | 5/30/2013 9:40am | 5/30/2013 10:00am | Session 2B - Focused Ion Beam or Sources 1 | Jingxuan Cai | Tennessee Ballroom C |
| 2C-1 | Non Equilibrium Block Copolymer Directed Self Assembly. Multiblocks, Solvents, and Thick Films (Invited) | 5/30/2013 8:10am | 5/30/2013 8:40am | Session 2C - Modeling | Juan de Pablo | Tennessee Ballroom D/E |
| 2C-2 | Study of multilayer systems in electron beam lithography | 5/30/2013 8:40am | 5/30/2013 9:00am | Session 2C - Modeling | Robert F. Peters | Tennessee Ballroom D/E |
| 2C-3 | Off Axis Modeling and Measurement of Emission Parameters for the Schottky Emitter | 5/30/2013 9:00am | 5/30/2013 9:20am | Session 2C - Modeling | Sean Kellogg | Tennessee Ballroom D/E |
| 2C-4 | Simulation of dose variation and charging due to fogging in electron beam lithography | 5/30/2013 9:20am | 5/30/2013 9:40am | Session 2C - Modeling | Sergey Babin | Tennessee Ballroom D/E |
| 2C-5 | Simulation Study on Template Releasing Process in Nanoimprint Lithography | 5/30/2013 9:40am | 5/30/2013 10:00am | Session 2C - Modeling | Takahiro Shiotsu | Tennessee Ballroom D/E |
| 3A-1 | Infrared nanospectroscopy meets FIB and TEM (Invited) | 5/30/2013 10:20am | 5/30/2013 10:50am | Session 3A - Novel imaging/metrology | Rainer Hillenbrand | Tennessee Ballroom A/B |
| 3A-2 | Modulus Mapping in High Resolution Patterned Features | 5/30/2013 10:50am | 5/30/2013 11:10am | Session 3A - Novel imaging/metrology | Prashant K. Kulshreshtha | Tennessee Ballroom A/B |
| 3A-3 | Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis | 5/30/2013 11:10am | 5/30/2013 11:30am | Session 3A - Novel imaging/metrology | Yves Fleming | Tennessee Ballroom A/B |
| 3A-4 | Process Monitoring of an Electron Beam Lithography Process for Silicon Photonics in a University Facility | 5/30/2013 11:30am | 5/30/2013 11:50am | Session 3A - Novel imaging/metrology | Richard Bojko | Tennessee Ballroom A/B |
| 3A-5 | Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION | 5/30/2013 11:50am | 5/30/2013 12:10pm | Session 3A - Novel imaging/metrology | David Dowsett | Tennessee Ballroom A/B |
| 3B-1 | Nanochemistry in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography (Invited) | 5/30/2013 10:20am | 5/30/2013 10:50am | Session 3B - Resists | Takahiro Kozawa | Tennessee Ballroom C |
| 3B-2 | Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning | 5/30/2013 10:50am | 5/30/2013 11:10am | Session 3B - Resists | Markus Brink | Tennessee Ballroom C |
| 3B-3 | Methods for Controlled Polymerization in Negative Tone Resists | 5/30/2013 11:10am | 5/30/2013 11:30am | Session 3B - Resists | Richard A. Lawson | Tennessee Ballroom C |
| 3B-4 | Negative-Tone Chemically-Amplified for Sub-20nm Lithography | 5/30/2013 11:30am | 5/30/2013 11:50am | Session 3B - Resists | Prashant K. Kulshreshtha | Tennessee Ballroom C |
| 3B-5 | Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) | 5/30/2013 11:50am | 5/30/2013 12:20pm | Session 3B - Resists | Marie Krysak | Tennessee Ballroom C |
| 3C-1 | MEMRISTIVE NANODEVICES: MECHANISMS, PROMISES AND CHALLENGES (Invited) | 5/30/2013 10:20am | 5/30/2013 10:50am | Session 3C - Nanoelectronics 1 | J. Joshua Yang | Tennessee Ballroom D/E |
| 3C-2 | Integration of Planar Memristors with CMOS for Hybrid Circuits | 5/30/2013 10:50am | 5/30/2013 11:10am | Session 3C - Nanoelectronics 1 | Peng Lin | Tennessee Ballroom D/E |
| 3C-3 | Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) | 5/30/2013 11:10am | 5/30/2013 11:30am | Session 3C - Nanoelectronics 1 | Sebastien Pauliac-Vaujour | Tennessee Ballroom D/E |
| 3C-4 | Improved Switching Uniformity for TiO2/HfO2 Bi-layer Memristive Devices | 5/30/2013 11:30am | 5/30/2013 11:50am | Session 3C - Nanoelectronics 1 | Hao Jiang | Tennessee Ballroom D/E |
| 3C-5 | Si MOSFET with a Nanoscale Void Channel (Invited) | 5/30/2013 11:50am | 5/30/2013 12:20pm | Session 3C - Nanoelectronics 1 | Hong Koo Kim | Tennessee Ballroom D/E |
| 4A-1 | Substrate Conformal Imprint Lithography for nanophotonics in applications (Invited) | 5/30/2013 1:30pm | 5/30/2013 2:00pm | Session 4A - Nanoimprint 1 | Marc Verschuuren | Tennessee Ballroom A/B |
| 4A-2 | Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography | 5/30/2013 2:00pm | 5/30/2013 2:20pm | Session 4A - Nanoimprint 1 | Yixing Liang | Tennessee Ballroom A/B |
| 4A-3 | Thermally-Modulated Alignment for Nanoimprinting | 5/30/2013 2:20pm | 5/30/2013 2:40pm | Session 4A - Nanoimprint 1 | Euclid Moon | Tennessee Ballroom A/B |
| 4A-4 | Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint | 5/30/2013 2:40pm | 5/30/2013 3:00pm | Session 4A - Nanoimprint 1 | Shuso Iyoshi | Tennessee Ballroom A/B |
| 4A-5 | Sub-30 nm Roller Nanoimprint Lithography Using Flexible Hybrid Molds and Applications to Large-Area High-Performance Nanoplasmonic Sensors and Solar Cells | 5/30/2013 3:00pm | 5/30/2013 3:20pm | Session 4A - Nanoimprint 1 | Qi Zhang | Tennessee Ballroom A/B |
| 4B-1 | Diamond based Micro and Nano Systems (Invited) | 5/30/2013 1:30pm | 5/30/2013 2:00pm | Session 4B - Carbon-based devices/systems | Anirudha Sumant | Tennessee Ballroom C |
| 4B-2 | Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials | 5/30/2013 2:00pm | 5/30/2013 2:20pm | Session 4B - Carbon-based devices/systems | Li Tao | Tennessee Ballroom C |
| 4B-3 | Morphological characterization of metallic nano-structures evaporated through stencil on graphene | 5/30/2013 2:20pm | 5/30/2013 2:40pm | Session 4B - Carbon-based devices/systems | Veronica Savu | Tennessee Ballroom C |
| 4B-4 | Graphene Field-Effect Transistors with Gigahertz-Frequency Power Gain on Flexible Substrates | 5/30/2013 2:40pm | 5/30/2013 3:00pm | Session 4B - Carbon-based devices/systems | Nicholas Petrone | Tennessee Ballroom C |
| 4B-5 | High-resolution Nanopatterning of Graphene Using Direct Helium Ion Beam Milling | 5/30/2013 3:00pm | 5/30/2013 3:20pm | Session 4B - Carbon-based devices/systems | Ahmad Abbas | Tennessee Ballroom C |
| 4C-1 | Chemical Assisted Etching with Ne+ & He+ (GFIS) FIB -A Study of Nanomachining Properties for O2 and XeF2 (Invited) | 5/30/2013 1:30pm | 5/30/2013 2:00pm | Session 4C - Focused Ion Beam or Sources 2 | Rick Livengood | Tennessee Ballroom D/E |
| 4C-2 | First focused ion beam images using a novel electron impact gas ion source | 5/30/2013 2:00pm | 5/30/2013 2:20pm | Session 4C - Focused Ion Beam or Sources 2 | David Jun | Tennessee Ballroom D/E |
| 4C-3 | A laser-cooled atomic beam for application in high resolution FIB | 5/30/2013 2:20pm | 5/30/2013 2:40pm | Session 4C - Focused Ion Beam or Sources 2 | S. H. W. Wouters | Tennessee Ballroom D/E |
| 4C-4 | Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications | 5/30/2013 2:40pm | 5/30/2013 3:00pm | Session 4C - Focused Ion Beam or Sources 2 | Sven Bauerdick | Tennessee Ballroom D/E |
| 4C-5 | Metal Depositions Induced by Helium and Neon Ion Beams | 5/30/2013 3:00pm | 5/30/2013 3:20pm | Session 4C - Focused Ion Beam or Sources 2 | Huimeng Wu | Tennessee Ballroom D/E |
| 5A-1 | Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) | 5/30/2013 3:40pm | 5/30/2013 4:10pm | Session 5A - Directed Self Assembly (DSA)/Self Assembly (SA) 1 | Akira Kikitsu | Tennessee Ballroom A/B |
| 5A-2 | Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns | 5/30/2013 4:10pm | 5/30/2013 4:40pm | Session 5A - Directed Self Assembly (DSA)/Self Assembly (SA) 1 | Jae-Byum Chang | Tennessee Ballroom A/B |
| 5A-3 | Directed Self-Assembly of Ternary Blends of Block Copolymer and Homopolymers on Chemical Patterns | 5/30/2013 4:40pm | 5/30/2013 5:00pm | Session 5A - Directed Self Assembly (DSA)/Self Assembly (SA) 1 | Ling-Shu Wan | Tennessee Ballroom A/B |
| 5A-4 | Sacrificial Post Templating Method for Block Copolymer Self-Assembly | 5/30/2013 5:00pm | 5/30/2013 5:20pm | Session 5A - Directed Self Assembly (DSA)/Self Assembly (SA) 1 | Amir Tavakkoli K. G. | Tennessee Ballroom A/B |
| 5A-5 | Fabrication of Hierarchical Three-Dimensional Nanostructures Using Template-Directed Assembly of Colloidal Particles | 5/30/2013 5:20pm | 5/30/2013 5:40pm | Session 5A - Directed Self Assembly (DSA)/Self Assembly (SA) 1 | Jonathan Elek | Tennessee Ballroom A/B |
| 5B-1 | Label-Free Cell Screening (Invited) | 5/30/2013 3:40pm | 5/30/2013 4:10pm | Session 5B - Nanobiology/fluidic | Lydia Sohn | Tennessee Ballroom C |
| 5B-2 | Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint | 5/30/2013 4:10pm | 5/30/2013 4:40pm | Session 5B - Nanobiology/fluidic | Ruoming Peng | Tennessee Ballroom C |
| 5B-3 | Nanowire-Based Electrode for Neural Recordings in the Brain | 5/30/2013 4:40pm | 5/30/2013 5:00pm | Session 5B - Nanobiology/fluidic | Dmitry Suyatin | Tennessee Ballroom C |
| 5B-4 | Ionic Transportation through DNA-based Nanochannels | 5/30/2013 5:00pm | 5/30/2013 5:20pm | Session 5B - Nanobiology/fluidic | Paul Bertani | Tennessee Ballroom C |
| 5B-5 | Targeted nanopatterning for medical applications (Invited) | 5/30/2013 5:20pm | 5/30/2013 5:50pm | Session 5B - Nanobiology/fluidic | Nikolaj Gadegaard | Tennessee Ballroom C |
| 5C-1 | Silicon Carbide Nanoelectromechanical Systems and Nanomechanical Logic (Invited) | 5/30/2013 3:40pm | 5/30/2013 4:10pm | Session 5C - Microelectromechanical Systems (MEMS) 1 | Philip Feng | Tennessee Ballroom D/E |
| 5C-2 | Design and Fabrication of Ultrananocrystalline Diamond Based Nanoelectromechanical Switches | 5/30/2013 4:10pm | 5/30/2013 4:40pm | Session 5C - Microelectromechanical Systems (MEMS) 1 | Kenneth Perez Quintero | Tennessee Ballroom D/E |
| 5C-3 | Towards an RF Planar Waveguide Electron LINAC | 5/30/2013 4:40pm | 5/30/2013 5:00pm | Session 5C - Microelectromechanical Systems (MEMS) 1 | JuneHo Hwang | Tennessee Ballroom D/E |
| 5C-4 | Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout | 5/30/2013 5:00pm | 5/30/2013 5:20pm | Session 5C - Microelectromechanical Systems (MEMS) 1 | Enrico Mastropaolo | Tennessee Ballroom D/E |
| 5C-5 | Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition | 5/30/2013 5:20pm | 5/30/2013 5:40pm | Session 5C - Microelectromechanical Systems (MEMS) 1 | Christian Arrington | Tennessee Ballroom D/E |
| 6A-1 | Determining the range and intensity of backscattered electrons from the substrate density and atomic number (Invited) | 5/31/2013 8:10am | 5/31/2013 8:40am | Session 6A - Electron Beam 2 | David Czaplewski | Tennessee Ballroom A/B |
| 6A-2 | Design of ring-cathode focused electron beam columns | 5/31/2013 8:40am | 5/31/2013 9:00am | Session 6A - Electron Beam 2 | Anjam Khursheed | Tennessee Ballroom A/B |
| 6A-3 | Dual Layer Negative Tone Metal Liftoff Electron Beam Lithography process for nanometer scale Plasmonic and Photonic devices | 5/31/2013 9:00am | 5/31/2013 9:20am | Session 6A - Electron Beam 2 | Yao-Te Cheng | Tennessee Ballroom A/B |
| 6A-4 | Fabrication of a rotation corrector for electron multi beam array micro-lenses | 5/31/2013 9:20am | 5/31/2013 9:40am | Session 6A - Electron Beam 2 | Aernout Christiaan Zonnevylle | Tennessee Ballroom A/B |
| 6A-5 | Liquid-phase electron-beam-induced-deposition on bulk substrates without liquid cells | 5/31/2013 9:40am | 5/31/2013 10:00am | Session 6A - Electron Beam 2 | Matthew Bresin | Tennessee Ballroom A/B |
| 6B-1 | Active Cantilever-free Scanning Probe Lithography (Invited) | 5/31/2013 8:10am | 5/31/2013 8:40am | Session 6B - Tip-based Processing | Keith A. Brown | Tennessee Ballroom C |
| 6B-2 | Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) | 5/31/2013 8:40am | 5/31/2013 9:00am | Session 6B - Tip-based Processing | Huan Hu | Tennessee Ballroom C |
| 6B-3 | Mix&Match Electron Beam and Scanning Probe Lithography for sub-5 nm Patterning | 5/31/2013 9:00am | 5/31/2013 9:20am | Session 6B - Tip-based Processing | Marcus Kaestner | Tennessee Ballroom C |
| 6B-4 | Multi-spot-size vector writing approach to atomically precise H depassivation lithography | 5/31/2013 9:20am | 5/31/2013 9:40am | Session 6B - Tip-based Processing | James Owen | Tennessee Ballroom C |
| 6B-5 | Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography | 5/31/2013 9:40am | 5/31/2013 10:00am | Session 6B - Tip-based Processing | Rudzani Nemutudi | Tennessee Ballroom C |
| 6C-1 | All-angle Negative Refraction and Active Flat Lensing in the Ultraviolet (Invited) | 5/31/2013 8:10am | 5/31/2013 8:40am | Session 6C - Nanophotonics 2 | Henri Lezec | Tennessee Ballroom D/E |
| 6C-2 | Ultrathin, High-Efficiency, Broad-Band, Omni-Acceptance Organic Solar Cells Using New Plasmonic Cavity with Subwavelength Hole Array | 5/31/2013 8:40am | 5/31/2013 9:00am | Session 6C - Nanophotonics 2 | Stephen Chou | Tennessee Ballroom D/E |
| 6C-3 | Freestanding Photonic Crystals in Lithium Niobate | 5/31/2013 9:00am | 5/31/2013 9:20am | Session 6C - Nanophotonics 2 | Reinhard Geiss | Tennessee Ballroom D/E |
| 6C-4 | Optimization of Electron Beam Patterned HSQ Mask Edge Roughness for Low-Loss Silicon Waveguides | 5/31/2013 9:20am | 5/31/2013 9:40am | Session 6C - Nanophotonics 2 | Michael Wood | Tennessee Ballroom D/E |
| 6C-5 | A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna | 5/31/2013 9:40am | 5/31/2013 10:00am | Session 6C - Nanophotonics 2 | Irene Fernandez-Cuesta | Tennessee Ballroom D/E |
| 7A-1 | Controlled bottom-up assembly of functional molecules: From wires to networks (Invited) | 5/31/2013 10:20am | 5/31/2013 10:50am | Session 7A - Emerging Technologies | Christophe Nacci | Tennessee Ballroom A/B |
| 7A-2 | 3 D Nanostructures via Aligned Stacking of Pre-patterned Membranes | 5/31/2013 10:50am | 5/31/2013 11:10am | Session 7A - Emerging Technologies | Corey Fucetola | Tennessee Ballroom A/B |
| 7A-3 | NanogratingMediated Growth of Bismuth Selenide Topological Insulator Nanoribbons | 5/31/2013 11:10am | 5/31/2013 11:30am | Session 7A - Emerging Technologies | Sungjin Wi | Tennessee Ballroom A/B |
| 7A-4 | Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes | 5/31/2013 11:30am | 5/31/2013 11:50am | Session 7A - Emerging Technologies | Xiaolong Hu | Tennessee Ballroom A/B |
| 7A-5 | The nano-optics of plasmonic optical tweezers, SERS substrates and multi-colored silicon nanowires (Invited) | 5/31/2013 11:50am | 5/31/2013 12:20pm | Session 7A - Emerging Technologies | Kenneth Crozier | Tennessee Ballroom A/B |
| 7B-1 | MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) | 5/31/2013 10:20am | 5/31/2013 10:50am | Session 7B - Maskless Lithography | Pieter Kruit | Tennessee Ballroom C |
| 7B-2 | Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column | 5/31/2013 10:50am | 5/31/2013 11:10am | Session 7B - Maskless Lithography | William Tong | Tennessee Ballroom C |
| 7B-3 | Patterning via Optical Saturable Transformations via Solubility Rate Difference | 5/31/2013 11:10am | 5/31/2013 11:30am | Session 7B - Maskless Lithography | Precious Cantu | Tennessee Ballroom C |
| 7B-4 | Optical patterning of features with spacing below the far-field diffraction limit using absorbance modulation | 5/31/2013 11:30am | 5/31/2013 11:50am | Session 7B - Maskless Lithography | Farhana Masid | Tennessee Ballroom C |
| 7B-5 | Direct laser writing: Finer, faster and more flexible | 5/31/2013 11:50am | 5/31/2013 12:10pm | Session 7B - Maskless Lithography | Erik Waller | Tennessee Ballroom C |
| 7C-1 | Field Effect Transistor Performance of Hydrothermal ZnO Nanowires (Invited) | 5/31/2013 10:20am | 5/31/2013 10:50am | Session 7C - Nanostructures 2 | Natalie Plank | Tennessee Ballroom D/E |
| 7C-2 | Fabrication of Periodic Hollow-Shell Nano-Volcano Arrays for Particle Trapping | 5/31/2013 10:50am | 5/31/2013 11:10am | Session 7C - Nanostructures 2 | Xu Zhang | Tennessee Ballroom D/E |
| 7C-3 | Fabrication of single-crystal diamond nano-slabs for photonic applications | 5/31/2013 11:10am | 5/31/2013 11:30am | Session 7C - Nanostructures 2 | Luozhou Li | Tennessee Ballroom D/E |
| 7C-4 | Nanofabrication of high aspect ratio structures using evaporated polystyrene resist containing metal | 5/31/2013 11:30am | 5/31/2013 11:50am | Session 7C - Nanostructures 2 | Celal Con | Tennessee Ballroom D/E |
| 7C-5 | Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) | 5/31/2013 11:50am | 5/31/2013 12:20pm | Session 7C - Nanostructures 2 | April Jewell | Tennessee Ballroom D/E |
| 8A-1 | Defect Management of EUV Masks: Progress and Outlook (Invited) | 5/31/2013 1:30pm | 5/31/2013 2:00pm | Session 8A - EUV 2 | Anthony Yen | Tennessee Ballroom A/B |
| 8A-2 | Single-digit patterning using EUV light | 5/31/2013 2:00pm | 5/31/2013 2:20pm | Session 8A - EUV 2 | Li Wang | Tennessee Ballroom A/B |
| 8A-3 | Stochastic Exposure Kinetics of EUV Photoresists: A Simulation Study | 5/31/2013 2:20pm | 5/31/2013 2:40pm | Session 8A - EUV 2 | Chris Mack | Tennessee Ballroom A/B |
| 8A-4 | Periodic metallic structures fabricated by coherent Talbot lithography in a table top system | 5/31/2013 2:40pm | 5/31/2013 3:00pm | Session 8A - EUV 2 | Wei Li | Tennessee Ballroom A/B |
| 8A-5 | Unveiling success rate of defect mitigation by experiment with EUV Actinic Blank Inspection Prototype for 16 nm hp | 5/31/2013 3:00pm | 5/31/2013 3:20pm | Session 8A - EUV 2 | Tetsunori Murachi | Tennessee Ballroom A/B |
| 8B-1 | 8 and 12 wafer scale Nano Imprint Lithography: from process control to optical functions (Invited) | 5/31/2013 1:30pm | 5/31/2013 2:00pm | Session 8B - Nanoimprint 2 | Stefan Landis | Tennessee Ballroom C |
| 8B-2 | Polymer filling behaviors with imprinting velocity in NIL | 5/31/2013 2:00pm | 5/31/2013 2:20pm | Session 8B - Nanoimprint 2 | JiHyeong Ryu | Tennessee Ballroom C |
| 8B-3 | Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold | 5/31/2013 2:20pm | 5/31/2013 2:40pm | Session 8B - Nanoimprint 2 | Kohei Tomohiro | Tennessee Ballroom C |
| 8B-4 | Fabrication of Large-area Flexible Roll-to-Roll Nanoimprint Molds with Sub-100nm Features Using Step-and-Repeat Duplication, Bonding and Lift-off | 5/31/2013 2:40pm | 5/31/2013 3:00pm | Session 8B - Nanoimprint 2 | Hao Chen | Tennessee Ballroom C |
| 8B-5 | Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography | 5/31/2013 3:00pm | 5/31/2013 3:20pm | Session 8B - Nanoimprint 2 | Robert Fader | Tennessee Ballroom C |
| 8C-1 | Ionic memory and the future of the semiconductor industry (Invited) | 5/31/2013 1:30pm | 5/31/2013 2:00pm | Session 8C - Nanoelectronics | Michael Kozicki | Tennessee Ballroom D/E |
| 8C-2 | Transfer-Printing of Prepatterned Semiconducting Few-Layer-Molybdenum Disulfide Structures for Electronic Applications | 5/31/2013 2:00pm | 5/31/2013 2:20pm | Session 8C - Nanoelectronics | Hongsuk Nam | Tennessee Ballroom D/E |
| 8C-3 | Voltage Dependent Electroforming of TiO2-based Memristive Devices | 5/31/2013 2:20pm | 5/31/2013 2:40pm | Session 8C - Nanoelectronics | Hao Jiang | Tennessee Ballroom D/E |
| 8C-4 | GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes | 5/31/2013 2:40pm | 5/31/2013 3:00pm | Session 8C - Nanoelectronics | Ye Shao | Tennessee Ballroom D/E |
| 8C-5 | Oxide Nanoelectronics On Demand | 5/31/2013 3:00pm | 5/31/2013 3:20pm | Session 8C - Nanoelectronics | Guanglei Cheng | Tennessee Ballroom D/E |
| 9A-1 | Extendability of LPP EUV source technology in kW average power and 6.x nm wavelength operation (Invited) | 5/31/2013 3:40pm | 5/31/2013 4:10pm | Session 9A - Focused Ion Beam or Sources 3 | Akira Endo | Tennessee Ballroom A/B |
| 9A-2 | Monte Carlo Simulations of Helium and Neon Ions Beam Induced Deposition | 5/31/2013 4:10pm | 5/31/2013 4:40pm | Session 9A - Focused Ion Beam or Sources 3 | Rajendra Timilsina | Tennessee Ballroom A/B |
| 9A-3 | Patterning Plasmonic Nanostructures - Regimes of the Gallium Focused Ion Beam and Helium Ion Microscope | 5/31/2013 4:40pm | 5/31/2013 5:00pm | Session 9A - Focused Ion Beam or Sources 3 | Hangfang Hao | Tennessee Ballroom A/B |
| 9A-4 | Advances in Ion Beam micromachining for complex 3D microfluidics | 5/31/2013 5:00pm | 5/31/2013 5:20pm | Session 9A - Focused Ion Beam or Sources 3 | Leonidas E. Ocola | Tennessee Ballroom A/B |
| 9A-5 | Mechanical characteristics of the ultra-long horizontal free-space-nanowire grown by real-time feedback control on focused-ion-beam chemical vapor deposition | 5/31/2013 5:20pm | 5/31/2013 5:40pm | Session 9A - Focused Ion Beam or Sources 3 | Dengji Guo | Tennessee Ballroom A/B |
| 9B-1 | Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) | 5/31/2013 3:40pm | 5/31/2013 4:10pm | Session 9B - Directed Self Assembly/Self Assembly 2 | Deirdre Olynick | Tennessee Ballroom C |
| 9B-2 | Thermodynamic origin of placement errors for contact holes created by directed self-assembly | 5/31/2013 4:10pm | 5/31/2013 4:40pm | Session 9B - Directed Self Assembly/Self Assembly 2 | Sander Wuister | Tennessee Ballroom C |
| 9B-3 | Block Copolymer Directed Self-Assembly Two-Hole Pattern inside Peanut-Shaped Templates | 5/31/2013 4:40pm | 5/31/2013 5:00pm | Session 9B - Directed Self Assembly/Self Assembly 2 | He Yi and H.-S. Philip Wong | Tennessee Ballroom C |
| 9B-4 | DNA Origami: Prospects for Nanomanufacturing | 5/31/2013 5:00pm | 5/31/2013 5:20pm | Session 9B - Directed Self Assembly/Self Assembly 2 | James A. Liddle | Tennessee Ballroom C |
| 9B-5 | Ordered arrays of carbon nanotube segments by directed assembly | 5/31/2013 5:20pm | 5/31/2013 5:40pm | Session 9B - Directed Self Assembly/Self Assembly 2 | Erika Penzo | Tennessee Ballroom C |
| 9C-1 | Triboelectric Generators for Self-Powered Electronics (Invited) | 5/31/2013 3:40pm | 5/31/2013 4:10pm | Session 9C - MEMS | Guang Zhu | Tennessee Ballroom C |
| 9C-2 | Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection | 5/31/2013 4:10pm | 5/31/2013 4:40pm | Session 9C - MEMS | Reo Kometani | Tennessee Ballroom C |
| 9C-3 | Planar Electronic Picosecond Electron Pulser | 5/31/2013 4:40pm | 5/31/2013 5:00pm | Session 9C - MEMS | JuneHo Hwang | Tennessee Ballroom C |
| 9C-4 | Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain | 5/31/2013 5:00pm | 5/31/2013 5:20pm | Session 9C - MEMS | Mufaddal Gheewala | Tennessee Ballroom C |
| 9C-5 | Fabrication of Complex Three-Dimensional Multilevel Silicon Micro- and Nano-Structures using High Energy Ion Irradiation | 5/31/2013 5:20pm | 5/31/2013 5:40pm | Session 9C - MEMS | Sara Azimi | Tennessee Ballroom C |
| P01-01 | Plasmonic Nanogap Arrays Fabricated via Moiré Holographic Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Ishan Wathuthanthri | Ryman Exhibit Hall |
| P01-02 | Application of Proton Beam Writing to a Direct Etching of PTFE for PDMS Replica Molding | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Hiroyuki Nishikawa | Ryman Exhibit Hall |
| P01-03 | Ga+ Focused Ion Beam Micromachining of Thermoplastic Polymers | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Ka Wong | Ryman Exhibit Hall |
| P01-04 | Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Naokatsu Ikegami | Ryman Exhibit Hall |
| P01-05 | Advanced Maskless Grayscale Lithography using a new writing strategy to increase the number of grayscale levels | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Dominique Colle | Ryman Exhibit Hall |
| P01-06 | Maskless Subwavelength Nanopatterning Using Vortex Phase Plates and Absorbance Modulation | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Apratim Majumder | Ryman Exhibit Hall |
| P01-07 | Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Jaroslav Jirue | Ryman Exhibit Hall |
| P01-08 | Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Sven Bauerdick | Ryman Exhibit Hall |
| P01-09 | Lloyds Mirror Interferometer Using a Single-Mode Fiber Spatial Filter | 5/29/2013 12:00 | 5/29/2013 14:00 | P01 - Focused Ion Beam or Maskless Lithography | Kuo-Chun Tseng | Ryman Exhibit Hall |
| P02-01 | Control of stress in sputtered tantalum films for MEMS applications | 5/29/2013 12:00 | 5/29/2013 14:00 | P02 - MEMS | Enrico Mastropaolo | Ryman Exhibit Hall |
| P02-02 | Improvement of Bonding Strength in Room Temperature Wafer Bonding using Surface Smoothing by Ne Beam | 5/29/2013 12:00 | 5/29/2013 14:00 | P02 - MEMS | Yuichi Kurashima | Ryman Exhibit Hall |
| P02-03 | Optical microlithography on oblique surfaces via a novel diffractive phase mask | 5/29/2013 12:00 | 5/29/2013 14:00 | P02 - MEMS | Peng Wang | Ryman Exhibit Hall |
| P03-01 | A method for dynamic parameterized shape reconstruction. Application to scatterometry | 5/29/2013 12:00 | 5/29/2013 14:00 | P03 - Novel imaging | Sébastien Soulan | Ryman Exhibit Hall |
| P03-02 | Investigating effects of aerial image averaging and pupil plane filtering on line edge roughness (LER) | 5/29/2013 12:00 | 5/29/2013 14:00 | P03 - Novel imaging | Burak Baylav | Ryman Exhibit Hall |
| P03-03 | Active-illumination parallel Raman/SERS imaging | 5/29/2013 12:00 | 5/29/2013 14:00 | P03 - Novel imaging | Wei-Chuan Shih | Ryman Exhibit Hall |
| P04-01 | Theoretical study of the effects of substrate material refractive index on the optical transmission of nano-hole arrays | 5/29/2013 12:00 | 5/29/2013 14:00 | P04 - Modeling | Mehrdad Irannejad | Ryman Exhibit Hall |
| P04-02 | Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM | 5/29/2013 12:00 | 5/29/2013 14:00 | P04 - Modeling | Serguei Ovtchinnikov | Ryman Exhibit Hall |
| P04-03 | Fluctuation Control of Measurement Interferometers: Application of algorithms to correct for local stage-motion induced pressure surges | 5/29/2013 12:00 | 5/29/2013 14:00 | P04 - Modeling | Shane R. Palmer | Ryman Exhibit Hall |
| P04-04 | Detailed Molecular Dynamics Studies of Block Copolymer Directed Self-Assembly: Effect of Guiding Layer Properties on Block Copolymer Directed Self-Assembly | 5/29/2013 12:00 | 5/29/2013 14:00 | P04 - Modeling | Andrew Peters | Ryman Exhibit Hall |
| P04-05 | Pattern-integrated interference lithography: vector modeling of the single-exposure recording of integrated photonic-crystal structures | 5/29/2013 12:00 | 5/29/2013 14:00 | P04 - Modeling | Matthieu C. R. Leibovici | Ryman Exhibit Hall |
| P05-01 | Parallel Auger Electron Analysis inside Scanning Electron Microscopes | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | K. H. Cheong | Ryman Exhibit Hall |
| P05-02 | Measuring Field-Stitch Boundary Error of Electron Beam Lithography With X-ray Diffraction | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Aaron Stein | Ryman Exhibit Hall |
| P05-03 | CD Matching between CD-SEM and Scatterometry Metrology | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Yi Song | Ryman Exhibit Hall |
| P05-04 | Reconstructing Cross-Sectional Profiles from Top-View SEM Images Using Edge Fluctuation Characteristics | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Hiroshi Fukuda | Ryman Exhibit Hall |
| P05-05 | Liquid-Immersion Lloyds Mirror Interference Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Abhijeet Bagal | Ryman Exhibit Hall |
| P05-06 | EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Germain Fenger | Ryman Exhibit Hall |
| P05-07 | Defect-tracking For Nanoimprint Lithography Using Optical Surface Analyzer and Scanning Electron Microscope | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Zhaoning Yu | Ryman Exhibit Hall |
| P05-08 | Abrasion Test for Antisticking Layer by Scanning Probe Microscopy | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Makoto Okada | Ryman Exhibit Hall |
| P05-09 | Atom-based Pitch and Length Standards | 5/29/2013 12:00 | 5/29/2013 14:00 | P05 - Nanometrology | Kai Li | Ryman Exhibit Hall |
| P06-01 | Magnetic domain wall motion in permalloy wires with nanometer-scaled notches | 5/29/2013 12:00 | 5/29/2013 14:00 | P06 - Patterned media | T. C. Chen | Ryman Exhibit Hall |
| P06-02 | Magnetic patterning by oxygen reduction using low energy Helium irradiation | 5/29/2013 12:00 | 5/29/2013 14:00 | P06 - Patterned media | Zhen Zheng | Ryman Exhibit Hall |
| P07-01 | Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Uwe Huebner | Ryman Exhibit Hall |
| P07-02 | Pronounced Effects of Anisotropy on Plasmonic Properties of Nanorings Fabricated by Electron Beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Rachel Near | Ryman Exhibit Hall |
| P07-03 | Plasmonic Conductors for Organic Solar Cells | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Fernando E. Camino | Ryman Exhibit Hall |
| P07-04 | SPR-based Surface-enhanced Raman Scattering for the Detection of Organophosphorus Pesticide | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Jie-Hui Li | Ryman Exhibit Hall |
| P07-05 | Nano-Rough Gold for Enhanced Raman Scattering | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Jeonghwan Kim | Ryman Exhibit Hall |
| P07-06 | Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Ji Qi | Ryman Exhibit Hall |
| P07-07 | Infrared nanophotonics based on indium-tin-oxide nanorod array | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Shi-Qiang Li | Ryman Exhibit Hall |
| P07-08 | Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Adam Schwartzberg | Ryman Exhibit Hall |
| P07-09 | 2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Manohar Chirumamilla | Ryman Exhibit Hall |
| P07-10 | Tapered hyperbolic metamaterials for broadband absorption | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Alex Kaplan | Ryman Exhibit Hall |
| P07-11 | Advances on e-beam fabrication of photonic crystal membranes | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Jon Olav Grepstad | Ryman Exhibit Hall |
| P07-12 | Enhanced up-conversion luminescence in a microtubular optical resonator | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Jing Zhang | Ryman Exhibit Hall |
| P07-13 | A Light-driven Micro-motor Based on Angular Momentum Transfer through Subwavelength Grating Waveplates | 5/29/2013 12:00 | 5/29/2013 14:00 | P07 - Nanophotonics | Zhouyang Zhu | Ryman Exhibit Hall |
| P08-01 | Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Maxime Argoud | Ryman Exhibit Hall |
| P08-02 | Patterning of Nanoparticles Using Electric Field Assisted Coffee Ring Effect | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Jinhua Mu | Ryman Exhibit Hall |
| P08-03 | PS-b-PHEMA: A Promising High ? Polymer for Directed Self-Assembly Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Jing Cheng | Ryman Exhibit Hall |
| P08-04 | Controlling the Morphology of Silver Nanoparticle Films formed by Laser-induced Deposition from Liquids | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Carlos A. Jarro | Ryman Exhibit Hall |
| P08-05 | Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Lei Wan | Ryman Exhibit Hall |
| P08-06 | Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning | 5/29/2013 12:00 | 5/29/2013 14:00 | P08 - DSA/SA | Jing Cheng | Ryman Exhibit Hall |
| P09-01 | Mm^2 size arrays of metal nano-particles for solar cell applications fabricated by Electron Beam Lithography (EBL) | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Martin Greve | Ryman Exhibit Hall |
| P09-02 | Print based estimation of probe size distribution in electron beam lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Ananthan Raghunathan | Ryman Exhibit Hall |
| P09-03 | Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Masaki Kurokawa | Ryman Exhibit Hall |
| P09-04 | A Multiple electron beam wafer inspection system design using permanent magnetic lens arrays | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Tao Luo | Ryman Exhibit Hall |
| P09-05 | Small-Pitch Electron Diffraction Holograms Patterned on Inorganic Resist with Electron Beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Tyler Harvey | Ryman Exhibit Hall |
| P09-06 | Dependency Analysis of Line Edge Roughness in Electron-beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Xinyu Zhao | Ryman Exhibit Hall |
| P09-07 | Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Rui Guo | Ryman Exhibit Hall |
| P09-08 | Synthesis of metal nanoparticles in polymeric films induced by electron beam | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Hiroki Yamamoto | Ryman Exhibit Hall |
| P09-09 | A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Qing Dai | Ryman Exhibit Hall |
| P09-10 | Influence of EUV mask structure on electron trajectories | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Susumu Iida | Ryman Exhibit Hall |
| P09-11 | Fabrication of Gold Bowtie Nano-antenna by E-beam Lithography on Si3N4 Membrane for SERS | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Jian Zhang | Ryman Exhibit Hall |
| P09-12 | Electron beam optimization using self-developing resist for large write-field electron beam lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Ripon Kumar Dey | Ryman Exhibit Hall |
| P09-13 | Write-field alignment optimization using self-developing electron beam resist | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Ripon Kumar Dey | Ryman Exhibit Hall |
| P09-14 | Dot-Matrix Marks for Dynamic Overlay Measurements in Electron Beam Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | Ernst Kratschmer | Ryman Exhibit Hall |
| P09-15 | Hexagonal three-dimensional plasmonic nanoantenna arrays | 5/29/2013 12:00 | 5/29/2013 14:00 | P09 - Electron Beams | XX Xia | Ryman Exhibit Hall |
| P10-01 | Impact of pattern profile on surface plasmon polaritons in computational lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P10 - Emerging Technologies | Sang-Kon Kim | Ryman Exhibit Hall |
| P10-02 | Enhanced purity via laser assisted electron beam induced deposition of tungsten | 5/29/2013 12:00 | 5/29/2013 14:00 | P10 - Emerging Technologies | Nicholas A. Roberts | Ryman Exhibit Hall |
| P10-03 | Forward sputtering of thin films using focused helium ion beam | 5/29/2013 12:00 | 5/29/2013 14:00 | P10 - Emerging Technologies | Peiyan Yang | Ryman Exhibit Hall |
| P10-04 | In-situ Microfluidics using a Liquid Injector for the Study of Beam Induced and Dynamic Processes | 5/29/2013 12:00 | 5/29/2013 14:00 | P10 - Emerging Technologies | Aurelien Botman | Ryman Exhibit Hall |
| P10-05 | Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD | 5/29/2013 12:00 | 5/29/2013 14:00 | P10 - Emerging Technologies | Richard Phillips | Ryman Exhibit Hall |
| P11-01 | Analysis and understanding the regrowth of Multi-walled carbon nanotube forests | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Daewoong Jung | Ryman Exhibit Hall |
| P11-02 | Effect of thickness of the catalyst film and the hydrogen gas on the spin-capability of a MWCNT forest | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Daewoong Jung | Ryman Exhibit Hall |
| P11-03 | Tracking the Movement of Carbon Nanotubes during Dielectrophoretic Deposition | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Ali Kashefian Naieni | Ryman Exhibit Hall |
| P11-04 | Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Yoshinori Chihara | Ryman Exhibit Hall |
| P11-05 | Control of carbon nanofibers configuration on glassy carbon by two-step ion beam irradiation method | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Jun Taniguchi | Ryman Exhibit Hall |
| P11-06 | Laser Induced Structural Damage to Multi-walled Carbon Nanotubes in a Controlled-Pressure Environment | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Amir Khoshaman | Ryman Exhibit Hall |
| P11-07 | Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Xian Zhang | Ryman Exhibit Hall |
| P11-08 | High Temperature Gradient in a Conductor: Carbon Nanotube Forest under the Heat Trap Condition | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Mike Chang | Ryman Exhibit Hall |
| P11-09 | Nano-structure Modified Thin-Film Paper Energy Storage Device | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Naga Korivi | Ryman Exhibit Hall |
| P11-10 | Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Yu-Lun Liu | Ryman Exhibit Hall |
| P11-11 | Graphene-based Broadband THz Modulators | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Haidong Zhang | Ryman Exhibit Hall |
| P11-12 | High yield fabrication of graphene resonators array with poly-Si sacrificial layer | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Tao Chen | Ryman Exhibit Hall |
| P11-13 | A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes | 5/29/2013 12:00 | 5/29/2013 14:00 | P11 - Carbon-based devices/systems | Alokik Kanwa | Ryman Exhibit Hall |
| P12-01 | Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Sanghun An | Ryman Exhibit Hall |
| P12-03 | Fabrication of p-type Silicon Nanowires for 3D FETs Using Focused Ion Beam | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Marcos Vinicius Puydinger dos Santos | Ryman Exhibit Hall |
| P12-04 | Crossbar Arrays of Sub-10 nm Memristive Devices Fabricated with Nanoimprint Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Shuang Pi | Ryman Exhibit Hall |
| P12-05 | Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Jong G. Ok | Ryman Exhibit Hall |
| P12-06 | Low Temperature Electrical and Optical Characterization of Lithographically-Defined Au Microchannels on an Elastomeric Substrate | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Firouzeh Sabri | Ryman Exhibit Hall |
| P12-07 | Electromagnetically Induced Transparency in Au:VO2 Nanoparticles | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Christina McGahan | Ryman Exhibit Hall |
| P12-08 | Low-power Resistive Switching in Ultra-smooth Native AlOx Thin Films Fabricated by Template Stripping | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Hao Jiang | Ryman Exhibit Hall |
| P12-09 | Ultralow Voltage Resistive Switching in Ultrathin Silicon Oxide | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Can Li | Ryman Exhibit Hall |
| P12-10 | Fabrication of organic MESFET device by dual-layer thermal nanoimprint | 5/29/2013 12:00 | 5/29/2013 14:00 | P12 - Nanoelectronics | Yunbum Jung | Ryman Exhibit Hall |
| P13-01 | The five whys (and one h) of super hydrophobic surfaces in medicine (Invited) | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Francesco Gentile | Ryman Exhibit Hall |
| P13-02 | Approach to an on-chip 3D neural-network in a hydrogel based bioreactor | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Bart Schurink | Ryman Exhibit Hall |
| P13-03 | Electro-Active Single Mode Integrated Optical Waveguide Application in Spectroelectrochemistry | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Xue Han | Ryman Exhibit Hall |
| P13-04 | Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Gerald Kreindl | Ryman Exhibit Hall |
| P13-05 | Cryogenic imaging of biological specimens using Helium Ion Microscope | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Jing Gu | Ryman Exhibit Hall |
| P13-06 | An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Kevin E. Burcham | Ryman Exhibit Hall |
| P13-07 | Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Haogang Cai | Ryman Exhibit Hall |
| P13-08 | Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Marco Matteucci | Ryman Exhibit Hall |
| P13-09 | Influence of Engineered Surface on Cell Motility and Directionality | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Q. Y. Tang | Ryman Exhibit Hall |
| P13-10 | Application of EBL fabricated nanostructured substrates for SERS detection of protein A in aqueous solution | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Luis Gutierrez-Rivera | Ryman Exhibit Hall |
| P13-11 | Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood | 5/29/2013 12:00 | 5/29/2013 14:00 | P13 - Nanobiology | Olga Makarova | Ryman Exhibit Hall |
| P14-01 | Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Andreas Finn | Ryman Exhibit Hall |
| P14-02 | The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Geehong Kim | Ryman Exhibit Hall |
| P14-03 | Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Takahiro Oyama | Ryman Exhibit Hall |
| P14-04 | Replication of NIL Stamps by Metal-Assisted Chemical Etching of Silicon | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Mohammad Tarequzzaman | Ryman Exhibit Hall |
| P14-05 | Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Takuya Uehara | Ryman Exhibit Hall |
| P14-06 | Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Chul-Hyun Kim | Ryman Exhibit Hall |
| P14-07 | Polymer filling behaviors with imprinting velocity in NIL | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | JiHyeong Ryu | Ryman Exhibit Hall |
| P14-08 | High-Throughput Transfer Imprinting for Organic Semiconductor | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Gihoon Choo | Ryman Exhibit Hall |
| P14-09 | A novel route for fabricating Printable Photonic Devices with a high refractive index | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Carlos Pina Hernandez | Ryman Exhibit Hall |
| P14-10 | Exceptional Thermal Stability of Thermoplastic Polymer Nanostructures Patterned by Nanoimprint | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Youwei Jiang | Ryman Exhibit Hall |
| P14-11 | Free-standing filaments in thermal nanoimprint induced by pre-filling | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Andre Mayer | Ryman Exhibit Hall |
| P14-12 | Reflow minimization via viscosity control by exposure | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Khalid Dhima | Ryman Exhibit Hall |
| P14-13 | Underestimated impact of instabilities with nanoimprint | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Andre Mayer | Ryman Exhibit Hall |
| P14-14 | Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Hitomi Wakaba | Ryman Exhibit Hall |
| P14-15 | Effect of toluene treatment on PDMS molding into nanoholes | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Celal Con | Ryman Exhibit Hall |
| P14-16 | Dual scale controlled surface roughness by wrinkling of polymer imprints | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Hyun Wook Ro | Ryman Exhibit Hall |
| P14-17 | Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Hayato Noma | Ryman Exhibit Hall |
| P14-18 | Nanopatterned micromechanical elements by polymer injection molding with hybrid molds | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Helmut Schift | Ryman Exhibit Hall |
| P14-19 | Three dimensional hologram-ROM duplication by UV-NIL | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Noriyuki Unno | Ryman Exhibit Hall |
| P14-20 | Novel nanofabrication method to achieve high aspect ratio metallic patterns by thermal nanoimprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Nerea Alayo | Ryman Exhibit Hall |
| P14-21 | An investigation into the role of self-assembled monolayers of silane in UV nano-imprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Alborz Amirsadeghi | Ryman Exhibit Hall |
| P14-22 | Pre-hardening Ultraviolet nanoimprint lithography using opaque mold | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Jun Taniguchi | Ryman Exhibit Hall |
| P14-23 | DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Kristian Smistrup | Ryman Exhibit Hall |
| P14-24 | 2D Azobenzene Liquid-crystalline Polymer-based Switchable Photonic Crystals via Nanoimprint | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Xinming Ji | Ryman Exhibit Hall |
| P14-25 | Durability assessment of mold release agents for ultraviolet nanoimprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Kota Funakoshi | Ryman Exhibit Hall |
| P14-26 | Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Tomoki Nishino | Ryman Exhibit Hall |
| P14-27 | Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Mariusz Graczyk | Ryman Exhibit Hall |
| P14-28 | Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Makoto Okada | Ryman Exhibit Hall |
| P14-29 | 2D- visualization of imprint-induced flow by means of crystallizing polymers | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Si Wang | Ryman Exhibit Hall |
| P14-30 | Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Scott Dhuey | Ryman Exhibit Hall |
| P14-31 | Magnetic field assisted micro contact printing: a new concept of fully automated and calibrated process | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Jean-Christophe Cau | Ryman Exhibit Hall |
| P14-32 | Functional Nano Patterns realized by Thermal and UV Nano Imprint Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P14 - Nanoimprint | Mario Baum | Ryman Exhibit Hall |
| P15-01 | Contrast curve engineering by using multi-layer polystyrene electron beam resist | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Manal Alhazmi | Ryman Exhibit Hall |
| P15-02 | Line width roughness reduction strategies for resist patterns printed via electron beam lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Julien Jussot | Ryman Exhibit Hall |
| P15-03 | Polycarbonate as an ideal grayscale electron beam resist using diluted cyclopentanone developer | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Arwa ?Abbas | Ryman Exhibit Hall |
| P15-04 | Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Scott Lewis | Ryman Exhibit Hall |
| P15-05 | Process Dependence of Line Width Roughness in Electron Beam Resists | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Tomoharu Yamazaki | Ryman Exhibit Hall |
| P15-07 | Hard resist masks prepared with sequential infiltration synthesis process for high-resolution deep etch | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Xianghai Meng | Ryman Exhibit Hall |
| P15-08 | Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Alan Brodie | Ryman Exhibit Hall |
| P15-09 | Pattern exposure order dependence in hydrogen silsequioxane | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Devin Brown | Ryman Exhibit Hall |
| P15-10 | Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Vitor Manfrinato | Ryman Exhibit Hall |
| P15-11 | Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Rose Ruther | Ryman Exhibit Hall |
| P15-12 | An in situ analysis of EUV resist dissolution characteristics by high speed AFM | 5/29/2013 12:00 | 5/29/2013 14:00 | P15 - Resists | Julius Joseph Santillan | Ryman Exhibit Hall |
| P16-01 | Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Marcus Rommel | Ryman Exhibit Hall |
| P16-02 | Wafer Scale Fabrication of High-Aspect Ratio Gold Nanostructures using Ar+ - Ion Beam Etching | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Richard Kasica | Ryman Exhibit Hall |
| P16-03 | Fabrication of Nano-Bowl Arrays via Simple Holographic Patterning and Lift-Off Process | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Yuyang Liu | Ryman Exhibit Hall |
| P16-04 | High accuracy dual side overlay with KOH through wafer etching | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Henk Van Zeijl | Ryman Exhibit Hall |
| P16-05 | Development of a Mask-less Nanofabrication Process for SnO2 Periodic Nanostructure | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Debabrot Borgohain | Ryman Exhibit Hall |
| P16-06 | Inductively Coupled Plasma Etching of Through-Cell Vias in Indium-Bearing III-V Solar Cells Using SiCl4/Ar plasma | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Yuning Zhao | Ryman Exhibit Hall |
| P16-07 | Polymeric Sidewall Transfer Lithography | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Yi-Chen Lo | Ryman Exhibit Hall |
| P16-08 | Thermal dewetting of gold particles on a template surface | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Zhaoqian Liu | Ryman Exhibit Hall |
| P16-09 | Patterning of Light-Extraction Nanostructures on Sapphire Substrates Using Nanoimprint, SiO2 Masking and ICP Dry Etching | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Hao Chen | Ryman Exhibit Hall |
| P16-10 | KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Alexander Bruccoleri | Ryman Exhibit Hall |
| P16-11 | Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Hyungryul Choi | Ryman Exhibit Hall |
| P16-12 | Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | David Carlton | Ryman Exhibit Hall |
| P16-13 | Lithographically-Defined ZnO Nanowire Growth | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Samuel Nicaise | Ryman Exhibit Hall |
| P16-14 | Metal-Assisted Etching of Silicon Molds for Electroforming | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Ralu Divan | Ryman Exhibit Hall |
| P16-15 | Fabrication of Patterned Interference-Based and Absorption-Based Polarizers | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Wei-Liang Hsu | Ryman Exhibit Hall |
| P16-16 | Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal | 5/29/2013 12:00 | 5/29/2013 14:00 | P16 - Nanostructures and Pattern Transfer | Pradeep Perera | Ryman Exhibit Hall |
Please contact the Program Chair should you have more questions on the details of the program.
TECHNICAL SECTIONS
The various technology sections and the Section heads that are contributing to the Program organization can be found by clicking here.
The EIPBN conference abstracts from the most recent years are available by clicking here.
PROGRAM CHAIR
Professor Rebecca CheungScottish Microelectronics Centre
School of Engineering
West Mains Road
University of Edinburgh
EH9 3JF
United Kingdom
Phone: ++ 44 131 650 5749
Email: r.cheung@ed.ac.uk or eipbn13program@gmail.com
