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Conference
History
The International Conference on Electron, Ion and Photon Beam
Technology and Nanofabrication, or EIPBN, meets for the 50th
time this year. This conference's origin dates back to March
20, 1959 in Boston, Massachusetts, and a very different conference
name, the "Symposium on Electron Beam Melting" which
hosted 16 scheduled papers. Its record of 93 pages was compiled
by James S. Hetherington and published by the sponsor, Alloyd
Research Corporation of Watertown, Massachusetts. In 1960 the
name changed to the "Symposium on Electron Beam Processes"
and was sponsored through 1965 by the same company, but now
renamed Alloyd Electronics (later Alloyd General) located in
Cambridge, Massachusetts. Robert Bakish chaired the 1960-1962
meetings and edited their proceedings, and John Morley chaired
and edited the 1963-1964 meetings.
The 1965 meeting was
chaired by Auguste B. El-Kareh and held at Penn State University,
again renamed the "Electron and Laser Beam Symposium."
In 1966 the IEEE Electron Devices Society began sponsorship
of the "Alloyd" meeting, a relationship that continues
to the present day. The 1967 meeting was chaired by Charles
Suskind and Fabian Pease, again renamed the "Symposium
on Electron, Ion and Laser Beam Technology," marking the
first time that all three beams are mentioned.
In 1973, the AVS became
involved with the "IEEE" biannual meeting and agreed
to publish the proceedings as an issue of the Journal of Vacuum
Science and Technology. In 1975, the name of the meeting changed
to the "Symposium on Electron, Ion and Photon Beam Technology,"
marking the emerging interest in x-ray beams.
In 1964 AIME and the
Electrochemical Society sponsored the start of a new conference
in a similar field, the "International Conference on Electron
and Ion Beam Science and Technology." Robert Bakish chaired
and edited the proceedings of this biannual from 1964 to 1982.
The AIME dropped its co-sponsorship after the 1966 conference,
leaving the Electrochemical Society as sole sponsor. In 1967
it was arranged that these two meetings, the IEEE and the ECS
sponsored venues, would alternate annually.
In 1983, there was
a merger of these alternate year meetings into a single annual
event. It was named "The International Symposium on Electron,
Ion and Photon Beams" a.k.a. "The Three Beam Symposium."
In 1985, the conference was incorporated and became an independent
entity with proceedings published by the AVS. In 1991 OSA co-sponsorship
was started and in 1995 the meeting was renamed "The International
Conference on Electron, Ion and Photon Technology and Nanofabrication,"
to more accurately reflect its stand-alone status since it was
no longer a symposium within the larger conferences, and to
acknowledge the growing importance of nanofabrication.
Today, it is a non-profit
corporation which is run by a Steering Committee with an Advisory
Committee comprising past members of the Steering Committee
and representatives from sister conferences in Europe and Japan.
Ed Karek, EIPBN historian,
Feb. 3, 2004
EIPBN Conference
Chronology
# Year Location Date Conference
Chair Program
Chair
1* 1959 Boston, MA Mar 20
James Hetherington James
Hetherington
2 1960 Boston, MA Mar 24
Robert A. Bakish Robert
A. Bakish
3 1961 Boston, MA Mar 23
Robert A. Bakish Robert
A. Bakish
4 1962 Boston, MA Mar 29
Robert A. Bakish Robert
A. Bakish
5 1963 Boston, MA Mar 28
John R. Morley John
R. Morley
6 1964 Boston, MA Apr 27
John R. Morley John
R. Morley
7* 1964 Toronto, Canada May 3 Robert
A. Bakish Robert A.
Bakish
8 1965 University Park, PA Mar 31 Auguste
B. El-Kareh Auguste B.
El-Kareh
9 1966 Ann Arbor, MI Apr 6 George
I. Haddad Joseph
E. Rowe &
A.B. El-Kareh
10 1966 New York, NY Apr 17
Robert A. Bakish Robert
A. Bakish
11 1967 Berkeley, CA May 9
Charles Suskind R.
Fabian W. Pease
12 1968 Boston, MA May 6
Robert A. Bakish Robert
A. Bakish
13 1969 Gaithersburg, MD May 21 Louis
L. Marton Louis L.
Marton
14 1970 Los Angeles, CA May 10 Robert
A. Bakish Robert A.
Bakish
15 1971 Boulder, CO May 12
R.F.M. Thornley R.F.M.
Thornley
16 1972 Houston, TX May 7
Robert A. Bakish Robert
A. Bakish
17 1973 Cambridge, MA May 21 Alec
N. Broers Edward
D. Wolf
18 1974 San Francisco, CA May 12 Robert
A. Bakish Robert A.
Bakish
19 1975 Colorado Springs May 21 George
Brewer R.
Fabian W. Pease
20 1976 Washington, DC May 4 Robert
A. Bakish Robert A.
Bakish
21 1977 Palo Alto, CA May 25 Tom
E. Everhart Gilbert
L. Varnel
22 1978 Seattle, WA May 22
Robert A. Bakish Robert
A. Bakish
23 1979 Boston, MA May 29 Henry I. Smith T.H. Philip
Chang &
Mike Hatzakis
24 1980 St. Louis, MO May 12 Robert
A. Bakish Robert A.
Bakish
25 1981 Dallas, TX May 26
Gilbert L. Varnell Don
R. Harriot &
John H. Bruning
26 1982 Montreal, Canada May 10 Robert
A. Bakish Robert A.
Bakish
27* 1983 Los Angeles, CA May 31 Robert L. Seliger Mike Hatzakis &
T.H. Philip Chang
28 1984 Tarrytown, NY May 29 Michael Hatzakis John Kelly
29 1985 Portland, OR May 28 Lynwood W. Swanson John H. Bruning
30 1986 Boston, MA May 27 Nicholas Economou Andrew
R. Neureuther
31 1987 Woodland Hills, CA May 26 John L. Bartelt Richard E. Howard
32 1988 Ft. Lauderdale, FL May 31 Hans
C. Pfeiffer Evelyn
L. Hu
33 1989 Monterey, CA May 30 Jerome C. Wiesner
Alan D. Wilson
34 1990 San Antonio, TX May 29 Noel MacDonald Jon Orloff
35 1991 Seattle, WA May 28 Daniel J. Ehrlich
Jane M. Shaw
36 1992 Orlando, FL May 26 Larry F. Thomson
Randall L. Kubena
37 1993 San Diego, CA June 1 Fritz Hohn Franco Cerrina
38 1994 New Orleans, LA May 31 Harold Craighead Ilesanmi Adesida
39 1995 Scottsdale, AZ May 30 John N. Randall Dieter P. Kern
40 1996 Atlanta, GA May 28 Donald M. Tennant
Stella W. Pang
41 1997 Dana Point, CA May 27 Anthony Novembre Geraint Owen
42 1998 Chicago, IL May 26 Alfred Wagner Christie R.K. Marrian
43 1999 Marco Island, FL June 1 Mark Gesley John C. Wolfe
44 2000 Rancho Mirage, CA May 30 Lloyd
R. Harriott John Melngailis
45 2001 Washington, DC May 29 Douglas J. Resnick
Mark McCord
46 2002 Anaheim, CA May 28 Raman Viswanathan Roderick
R. Kunz
47 2003 Tampa, FL May 27 Timothy R.
Groves Mark L. Schattenburg
48 2004 San Diego, CA June 1 W. Dan Meisburger
Roxann L.
Engelstad
49 2005 Orlando, FL May 31 Kevin Cummings Martin Peckerar
50 2006 Baltimore,
MD May 30 Shane R. Palmer
Shalom J. Wind
51 2007 Denver,
CO May 29 J. Alexander
Liddle Gregory M. Walraff
52 2008 Portland,
OR May 29 Steven Brueck Cynthia
Hanson
53 2009 Marco
Island, FL Jun 01 Stephen Chou Elizabeth
Dobisz
53 2010 ? May
29 M. Feldman F.
Schellenberg
54 2011 ? Jun 01 Alan Brodie Richard
Blaikie
*Blue indicates IEEE
meetings; Green indicates ECS meetings; Black indicates merged meetings.
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