EIPBN 2012 Conference Program
Technical Sessions
| EIPBN Draft Day-by-Day Program: 13 April 2011 | Please note: this program
version remains subject to change |
|
| Session/ Paper # | Title | Authors |
| PLENARY SESSION | ||
| WEDS (0830-1030) | ||
| 4D Electron Microscopy: History, Developments and Applications2 | Ahmed Zewail | |
| History and Development of the Helium Ion Microscope | Nicholas P. Economou | |
| Moore for Less: Lithography for the 15nm Node and Beyond | Sam Sivakumar | |
| WEDS (1430-1550) | ||
| 1A | Directed Self Assembly I | |
| 1A.1 | Multi-Layer Block Copolymer Self-Assembled Structures Using Tilted Pillar Templates | Shin’ichi Warisawa, Jeong Gon Son, Jae Byum Chang, Caroline Ross and Karl Berggren |
| 1A.2 | Towards an all-track process for DSA | Chi-Chun Liu, Christopher Thode, Paulina Rincon Delgadillo, Paul Nealey and Roel Gronheid |
| 1A.3 | Pattern Transfer of Block Copolymer Template from Density Multiplication on Chemically Patterned Surface | Guoliang Liu, Ricardo Ruiz, Elizabeth Dobisz, Kanaiyalal Patel, Paul F. Nealey and Thomas Albrecht |
| 1A.4 | Spatial-Frequency Doubling Below the Block Copolymer Period by Templated Self-Assembly | Amir Tavakkoli K. G., Kevin Gotrik, Adam Floyd Hannon, Jae-Byum Chang, Sam Nicaise, Caroline Ross and Karl K. Berggren |
| 1B | Nanoimprint I | |
| 1B.1 | Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3-D structures | Arne Schleunitz, Christian Spreu, Hakan Atasoy, Marko Vogler and Helmut Schift |
| 1B.2 | Roll Diameter Amplification Method using Direct Transfer of Fine Patterned Small Roll Mold Fabricated by Electron Beam Lithography | Jun Taniguchi, Noriyuki Unno and Hiroki Maruyama |
| 1B.3 | Digital Planar Holograms fabricated by Step and Repeat UV nanoimprint lithography | Christophe Peroz, Scott Dhuey, Alexander Goltsov, Bruce Harteneck, Igor Ivonin, Deirdre Olynick, Stefano Cabrini, Sergey Babin and Vladimir Yankov |
| 1B.4 | Mapping Resist Flow into Nanoscale Channels during Nanoimprint Lithography | HYUN WOOK RO, BULENT AKGUN, SUSHIL SATIJA and CHRISTOPHER SOLES |
| 1C | Emerging Technologies I | |
| 1C.1 | Fabrication of Nanopores using a Helium Ion Microscope | Colin Sanford, David Ferranti, Lewis Stern, Jijin Yang, Jason Huang and Adam Hall |
| 1C.2 | 3D Fabrication by Stacking Pre-patterned, Rigidly-held Membranes | Amil Patel, Corey Fucetola, Euclid Moon and Henry Smith |
| 1C.3 | Fabrication of Nanoparticles Deposited Photonic Crystals | Jingyu zhang |
| 1C.4 | A Novel Low Energy Electron Imaging Technique for DNA Sequencing and Surface Analysis | Marian Mankos |
