Armin Gölzhäuser Armin Gölzhäuser

Imaging and Modification of 2D Materials: How Helium Ion Microscopy helps to fabricate novel filters and capacitors

SESSION: 6A – Advanced Ion-Beam Technologies II
DATE: Thursday, May 30, 2019
TIME: 4:10 pm
LOCATION: Nicollet A

Imaging and Modification of 2D Materials: How Helium Ion Microscopy helps to fabricate novel filters and capacitors

Armin Gölzhäuser, Bielefeld University

The presentation is a progress report on HIM imaging and lithography with two-dimensional (2D) materials, with a particular focus on the integration of 1 nm thick carbon nanomembranes (CNMs) in functional devices. Examples of fabricating novel 2D filters and the implementation of 2D materials in nanocapacitors are discussed.