Cornelis (Kees) W. Hagen

Cleanroom in SEM

C.W. Hagen, G. Jeevanandam, M. Scotuzzi, V. van der Meijden, N. Noordzij, R. van Tol, Y. van Goozen, P. Kruit, Delft University of Technology

Experiments involving micro-scale or nanoscale devices often require only one, or at most a few, functional devices. To fabricate such devices we propose a low cost and more sustainable solution by bringing together all required process steps in a single tool.