Rimjhim Chaudhary R. Chaudhary, H. Yamamoto, G. P. Watson*, University of Pennsylvania
Horizontal, enclosed nanochannels have interesting potential applications in nanofluidics, nanobiotechnology, DNA sensing, photonic crystals, and optical waveguides. Membrane projection lithography and metal assisted chemical etching are combined to fabricate 100 to 400 nm nanochannels in the sidewalls of patterned Si substrates.