Gregor Hlawacek Gregor Hlawacek

Spatially resolved materials modification using Helium Ion Microscopy

SESSION: 6A – Advanced Ion-Beam Technologies II
DATE: Thursday, May 30, 2019
TIME: 5:20 pm
LOCATION: Nicollet A

Spatially resolved materials modification using Helium Ion Microscopy

Gregor Hlawacek, Helmholtz Zentrum Dresden Rossendorf

Helium Ion Microscopy is a high resolution imaging and nanofabrication technique. In this contribution I will present highlights that utilize in-situ characterization and additional instrumentation to create new functionality on the nanometer scale. The examples include fabrication and characterization of ion beam induced nanomagnets and future low power device technologies.