Ines Stolberg Ines Stolberg, Matthias Slodowski, Bernd Schnabel, Ulf Weidenmueller, Vistec Electron Beam GmbH
These days VSB technology serves various applications. The paper will discuss some application demands and how they can be transformed into hard – and software requirements on the Variable Shaped Beam equipment side. The potentials as well as the high flexibility of VSB lithography systems will be discussed.