Xiuling Li
University of Texas at Austin
Wet Etch, Dry Etch, and Now MacEtch
Metal-assisted chemical etching (MacEtch) is an unorthodox semiconductor etching method, that defies the isotropic nature of chemical etch through local catalysis and carrier transport effect and enables site-controlled nanostructure fabrication with unprecedented aspect ratio without plasma related damage. This talk will discuss the mechanism and applications in aggressively scaled devices.
About Xiuling Li
Xiuling Li received her B.S. degree from Peking University and Ph.D. degree from the University of California at Los Angeles. Following post-doctoral positions at California Institute of Technology and University of Illinois, as well as industry experience at Coherent, Inc. (formerly EpiWorks, Inc.), she joined the faculty of the University of Illinois, Urbana-Champaign (UIUC) in 2007. At UIUC, she was the Donald Biggar Willett Professor in Engineering and the interim director of the Nick Holonyak Jr. Micro and Nanotechnology Laboratory. She joined the faculty of the University of Texas at Austin in Aug. 2021. She holds the Temple Foundation Endowed Professorship in Department of Electrical and Computer Engineering. She also has an affiliate appointment in Chemistry as the Fellow of the Dow Professorship.
Her research focuses on nanostructured semiconductor materials and devices. She has published >170 journal papers and holds >25 patents, delivered > 150 invited lectures worldwide. She has been honored with the NSF CAREER award, DARPA Young Faculty Award, and ONR Young Investigator Award, and the IEEE Pioneer Award in Nanotechnology. She is a Fellow of the IEEE, the American Physics Society (APS), Optica (formerly OSA), the National Academy of Inventors (NAI), and the American Association for the Advancement of Science (AAAS). Among her services to professional societies, she was the VP of Finance and Administration and an elected member of the board of governors of IEEE Photonics Society, and the fellow evaluation committee of IEEE Electron Device Society and IEEE Nanotechnology Council, IEEE Andrew Grove award committee chair, and the executive committee of APS Division of Materials Physics. She has been a Deputy Editor of Applied Physics Letters since 2015.
