Dear Colleagues:

Welcome to the 64th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication. This year’s abstracts span 23 countries, highlighting “3-Beams” as the premier international conference for cutting-edge nanoscale lithography and nanofabrication research and innovation. While virtual, three outstanding plenary speakers kick-off our meeting coupled with Short Course lectures followed by exceptional invited presentations throughout the week.

This past year challenged us in ways unimaginable. Following the abrupt cancellation of the 2020 Conference, we pivoted to a virtual meeting early in the EIPBN 2021 planning process. The effort for the Virtual Conference has been both great and uncharted. While it is the first time the Conference will be online, I certainly hope it is the last for the sake of my successors. As a virtual conference, we are releasing presentations for on-demand viewing on May 24, 2021. The planned Conference activities center around the golden minutes of engagement which include Q&A Sessions, Poster Sessions, Exhibitor engagement and much more. This “flipped” conference allows us to deliver the same amount of content in a compressed timeframe and reduced scheduled commitment in front of a screen.

I am fortunate to have locked step with our Program Chair, Martha I. Sanchez. In our three years as Steering Committee members, she has been both a wonderful colleague and friend. Her professionalism, dedication, and conference programming experience have shone throughout the entire process. I hope you will come to appreciate the fruits of her labor as we embark on this virtual journey together. Thank you, Martha. It has been a pleasure and honor. Words honestly cannot describe how lucky I am to have served with you..

We are grateful for the generous support we have received as we carry the spirit of the conference onto its virtual platform. In particular, we’d like to thank all our sponsors; namely, our Platinum Sponsors: Heidelberg Instruments and STS-Elionix; our Gold Sponsors: Raith and GenISys; our Silver Sponsors: JEOL USA and AllResist; and the rest of our Sponsors and Exhibitors: Agilent Technologies, AJA International, Inc., ANCORP, Cornell University, DisChem, Inc., Intel Corporation, Kapteyn-Murnane Laboratories, Inc., KemLab Inc., LatticeGear, micro resist technology GmbH, Nanonex Corporation, Nanoscribe GmbH, NuFlare Technology, Inc., SAES Group, SmarAct Inc., STS-Elionix, TED PELLA INC, Tousimis, Vistec Electron Beam GmbH, Wafer World, Inc., and Zyvex Labs.

Of course, Martha and I did not work alone. Thanks go out to our Steering Committee members, Shida Tan, Aaron Stein, Regina Luttge (WIN and Startup Contest), James Spallas (Student Breakfast and Mentor Lunch), Rob Ilic, Qiangfei Xia (Commercial Session Chair), and Chih-Hao Chang (Short Course Chair) for their valuable time. None of the behind-the-scenes operations would be possible without John Randall, our Financial Trustee; Denise Hayner, our Corporate Accountant; Melissa Widerkehr, our Conference Coordinator; Nichole Ballard, our Registrar at YesEvents; and Nicki Davis, our Conference Website Manager. There has also been an incredible effort by Nick Petrone, Startup Contest Communications and Chair; Gina Adam, Academic Outreach Chair; Rick Livengood, Student Breakfast Chair; and our Commercial Session Committee members: Aimee Price, Guy DeRose, Zach Russell. Finally, my final thanks go to you and all members of the EIPBN Community for keeping the conference spirit alive with us.

I am indebted to the EIPBN Steering and Advisory Committee for their continued support and dedication to the conference and the community. Thank you for the distinction and honor to serve. I look forward to seeing you again soon and in person,

Sincerely,
Gerald G. Lopez, Ph.D.
EIPBN 2021 Conference Chair

Dear EIPBN Community:

We hear the term “unprecedented time” frequently now, but it is inspirational how we manage to find ways to cope and adjust. This conference is a first for EIPBN and I cannot impress on all of you how much research and effort my co-chair, Gerald Lopez, has put into bringing you a conference mimicking the technical exchange and networking that we all value in an EIPBN conference. I hope you take full advantage of the opportunities we are trying to provide you to interact with your fellow EIPBNers – attend the Short Courses (free to all attendees), actively participate in the session Q&A’s, meet in GatherTown to talk to Exhibitors, view Posters, the Start-up Contest, attend WIN, the Mentor Mixer, and Student Recruitment.

This technical exchange would not be possible without all of you willing to accept this new format and requirements and to go the extra effort of recording your presentations. I want to thank the Plenary speakers, C. Shan Xu, Sharon Weiss, and Neil Gershenfeld, and all the presenters for your contributions that will make this a successful conference. It is also exciting to see how the topics of interest change with time, and this year is no exception. There are many talks that are of new materials and in new scientific areas.

Gerald and I did not do all this alone. There are many people helping us with the logistics of not only organizing the conference, but also organizing the special events that are integral to our community. I would love to name all the contributors but there are many. I want you all to know how much I appreciate your time and enthusiasm. It is a joy to work with so many people who feel passionate about EIPBN.

Finally, I hope you enjoy the 2021 EIPBN conference. I am sure it will be memorable!!

Best wishes for health and happiness,

Martha I. Sanchez
EIPBN 2021 Program Chair