Dear EIPBN Community,

Welcome to the 64th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication. This year’s abstracts span 23 countries, highlighting “3-Beams” as the premier international conference for cutting-edge nanoscale lithography and nanofabrication research and innovation. While virtual, three outstanding plenary speakers kick-off our meeting coupled with Short Course lectures followed by exceptional invited presentations throughout the week.

These past few years have challenged us all in ways we never imagined. My first attempt at bringing 3-Beams to the Big Easy in 2020 didn’t go as planned as dozens of COVID cases grew to hundreds, then to millions. Unfortunately, the decision to abruptly cancel the conference became inevitable. However, I am grateful to my colleagues on the Steering Committee for giving me a second opportunity to serve as Conference Chair.

This year, as we emerge out of the pandemic, unforeseen new challenges presented themselves. The uncertainty of how long restrictions would last combine with the volatility of the economy all presented interesting new challenges. There were many unanswered questions. Would we be able to meet in person? Would people be able to travel? And others. Gratefully the reality of an in-person conference is coming together and I am looking forward to seeing all my friends, colleagues and the entire EIPBN community this year in the Big Easy.

As I look back, I fondly recall the very first EIPBN conference I attended in New Orleans in 1994. It is serendipitous that I am chairman of this conference in the same city where my EIPBN history began. I continue to attend and support EIPBN because I have gained so much through the 28 years I have been involved. I realize this conference brings value found nowhere else. I have connected with top professionals and benefitted by new relationships that resulted in collaborations that might not have otherwise formed. The Technical Sessions have kept me current on new research and cutting-edge technologies. And, I became aware of new tools, materials and technologies that have enhance my research through our Commercial Sessions.

I am grateful for our loyal and generous exhibitors and sponsors who continue to support us year after year, especially during uncertain times. I am pleased to welcome several new exhibitors to this year’s Commercial Session. Our sponsors and exhibitors are an important part of our EIPBN community. Thank you to our Gold Sponsors STS-Elionix and Raith America, our Silver Sponsors Heidelberg Instruments, KLA, and GenIsys; and all our exhibitors and sponsors: Allresist, Applied Quantum Materials, ASI, Carl Zeiss Microscopy, Cornell University, Crestec, DisChem, Electron Microscopy Science, Intel, InterLitho Technology, Jenoptik Optical Systems, JEOL USA, KemLab, Microlight3D, Munro's Electron Beam Software., Nanoscribe, NuFlare Technology, Oasis Materials, Pollen Metrology, Raith America, RSBG-AMT, SAES Group, S-Cubed, TESCAN, Tokyo Electron, Vistec Electron Beam, Wafer World, TDK Lambda, Zeon Specialty Materials.

I am very fortunate that Rob Ilic is this year’s Program Chair. Getting to know him while on the Steering Committee and working together on this year’s conference has been a pleasure. He has faced down every challenge putting together this year’s program. Thank you, Rob.

It takes a strong team to run EIPBN. Special thanks go out to our Steering Committee: Aaron Stein, Regina Luttge, Gerald Lopez, Martha Sanchez, Qiangfei Xia, Chih-Hao Chang, Aimee Price and Wei Wu for their valuable time and effort. None of the behind-the-scenes operations would be possible without John Randall, our Financial Trustee; Denise Hayner, our Corporate Accountant; Melissa Widerkehr, our Conference Coordinator; Nichole Ballard, our Registrar at YesEvents; and Nicki Davis, our Conference Website Manager. There has also been incredible efforts by Nick Petrone (Startup Session and Contest), Gina Adam (Technical Program), and Guy DeRose (Commercial Session). Thanks to the Advisory Committee for their continued support and dedication to the conference and the community. A special thanks to the team at Accent New Orleans for helping with many of the fantastic events that we’ll be enjoying during the conference. Finally, thank you to all members of the EIPBN Community for joining us this year in the Big Easy ... Laissez Les Bon Temps Rouler!

James Spallas, PhD
EIPBN President and Conference Chair

Dear EIPBN Community,

Due to the unprecedented circumstances surrounding the ongoing COVID-19 pandemic and the surge of its variants, our community has not met in person since EIPBN 2019. This year we are delighted to host the 64th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication in New Orleans, Louisiana. We strongly encourage you to attend the short courses, actively participate in session Q&A discussions, the start-up contest, and attend WIN event, exhibitor and poster sessions, the mentor mixer and student recruitment events.

Our program will highlight recent advances in the state-of-the-art emerging areas of nanometer science and technology, ranging from recent advances in electron, ion and photon beam lithography to fundamental studies of new materials and functional nanostructures spanning disparate areas of engineering, physical and life sciences. This year’s sessions will cover a broad spectrum of areas that are thematically related to nanofabrication and nanocharacterization methods, nanometer scale lithography, fabrication of atomically precise devices, and sessions on: biomedical devices; nanoelectromechanical systems; nanophotonics and optomechanics; metamaterials; and nanoscale biology inspired devices for medical applications. Our three plenary speakers, Marko Lončar, HsinYu Sidney Tsai and Walter Everett Voit will provide perspective from the forefront of their research programs in integrated lithium niobate nanophotonics, analog memory-based techniques for accelerating deep neural networks, and scaled additive manufacturing techniques, respectively.

James and I did not do this alone. We are grateful to our administrative and accounting staff, the steering committee, and our sponsors for their hard work and dedication in building a strong EIPBN 2022 technical program and we thank our entire EIPBN community for their continued support.

Best Regards,

Rob Ilic, EIPBN Vice President and Program Chair