EIPBN

The 67th International Conference on
Electron, Ion, and Photon Beam Technology and Nanofabrication

The world’s leading symposium on lithography and nanofabrication

Abstracts from 2024


Hilton La Jolla Torrey Pines, La Jolla, California, May 28 - 31, 2024

Dear EIPBN Community:

Welcome to the 67th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN). San Diego has been a popular location for EIPBN and La Jolla Torrey Pines continues the trend. We have 400 attendees from 19 countries, including 148 first time attendees, and over 90 students. The Hilton La Jolla Torrey Pines was scheduled to host EIPBN in 2021 before the conference was forced to go virtual and we are grateful for the opportunity hold the conference here in 2024.

I first attended EIPBN in 2002 in Anaheim as a young EBL engineer at TriQuint Semiconductor (now Qorvo), too intimidated to leave the hotel except for the banquet, spending all breaks in my room. Thankfully, I quickly learned that 3-Beams is a welcoming, supportive community of researchers and industry professionals. Learning about cutting edge research, new equipment technology, and mentorship by long time 3-Beamers was critical to my remaining in the field. Serving the same community as Conference Chair is an honor and privilege that I do not take lightly, and I am humbled to be the first woman to serve in this role.

The dynamic interactions between attendees, exhibitors, and sponsors help define the community of EIPBN that makes this conference special.

Relationships established in exhibit halls and networking events continue for years and even decades. Thank you to our Platinum Sponsor Heidelberg Instruments; Gold Sponsor STS-Elionix; Silver Sponsors AllResist, GenISys, JEOL, and Raith; and all our exhibitors and sponsors: Beamfox, Cleanroom Labware, Cornell NanoScale Science and Technology Facility, Crestec, Dischem EVG, Herzan, Heteromerge, Ionoptika, Jenoptik, KLA, Lab14, MAEBL, Microlightt 3D, Nanoscribe, Nuflare, Oregon Physics, Prinano, Quantum Design, SAES, Secure Foundry, TEL, Tescan, Tetramem, Tousimis, Valutek, Vanguard Automation, Vistec Electron Beam, XRNanotech, Zeiss, Zeon, and Zyvex Labs. I also thank our government and society sponsors: DOE, AVS, and IEEE Nano. New this year is an opportunity for academic nanofabs to sponsor students and highlight their facilities; thank you to University of Pennsylvania Singh Center for Nanotechnology, The Ohio State Institute for Materials & Manufacturing Research, University of Colorado Boulder Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC), Georgia Tech Institute for Matter and Systems, Montana Tech, NFCF Nano Pittsburgh, and Texas A&M AggieFab. Note that contributions to and/or sponsorship of any event does not constitute departmental or institutional endorsement of the specific program, speakers, or views presented.

Program Chair Wei Wu has developed an incredible program with 30 sessions over a broad range of topics. The program will be kicked off by true giants in our field: Professor John Rogers (Northwestern University), Professor Paul Weiss (UCLA), and Dr. Carlos Diaz (TSMC). They will set the tone for the conference, and I am thrilled that my undergraduate research advisor, Paul Weiss, agreed to share his work here more than 20 years after instilling in me a love for surface science. Thank you, Wei, for your thoughtfully designed program and positive spirit in creating it.

EIPBN is a run by a dedicated group of volunteer steering committee members working year-round to ensure a successful conference. I am grateful for the dedication by the 2024 steering committee: Qiangfei Xia, Chih-Hao Chang, Gerald Lopez (Student Lunch & Interim Ops Trustee), Martha Sanchez (WIN), James Owen (Commercial Session), Rick Silver (Startup Contest), Jack Skinner, and Rajesh Menon (Short Course). Thank you to our behind-the-scenes team working tirelessly on our behalf: Financial Trustee John Randall; Corporate Accountant Denise Hayner; Attorney Lynne Schoenling; Conference Coordinator Jonni Adams; Nichole Ballard and Yes Events (Registrar); Photographer Mike Huson; and Nicki Davis who manages our website and Guidebook App. I appreciate the efforts of the program committee, abstract reviewers, and volunteers including Gina Adam, Regina Luttge, Emine Cagin (WIN); Vishva Ray, and Guy DeRose (Commercial Session). Thank you also to the Advisory Committee for their continued service to the conference and community. Finally thank you to all members of the EIPBN Community for joining us in beautiful La Jolla Torrey Pines. Enjoy the conference!

Aimee Bross Price
EIPBN 2024 Conference Chair
Nanotech West Lab, The Ohio State University

Dear EIPBN Community:

I am thrilled to welcome each one of you to EIPBN 2024. Having attended every EIPBN since 1998, when I first joined as a graduate student, I truly believe that the EIPBN community has become like family to me. It is with great honor that I now serve as your Program Chair, and I am eager to make this conference both enjoyable and memorable for all. Let us look forward to an engaging and fruitful gathering as we continue to advance our field together.

As we convene for EIPBN 2024, it's worth reflecting on the extraordinary times we are living through—arguably the most exciting in human history. Technological progress is accelerating at an unprecedented pace, transforming lives in ways our ancestors could never have imagined. Today, we can video call someone on the other side of the globe with ease, and cars with the power of hundreds of horses can nearly drive themselves. For more than fifty years, we have reaped the benefits of "Moore's Law.” Although we may be approaching the end of "Moore's Law,” it signifies not an end but the beginning of a new era. We are poised to use nanofabrication technologies and knowledge to make an even greater and broader impact on society. Looking forward, future generations may well see our current time as the starting point of this transformative era.

In addition to our rich technical program, EIPBN 2024 will feature several special events that reflect both current trends and our community’s interests. This year, we cannot overlook the impact of artificial intelligence, which is reshaping daily life and presenting both opportunities and challenges to the nanofabrication and nanomanufacturing sectors. To address this, we have organized a panel discussion on "Nanomanufacturing in the AI Era." Other highlights include the Commercial Lightning Talks, the Women in Nanotechnology (WIN) Luncheon, the Conference Banquet, and the Student Mentor Lunch. These events are designed to foster networking, collaboration, and inspiration among all attendees.

I would like to express my deep appreciation to everyone who has played a pivotal role in bringing EIPBN 2024 to fruition. Special thanks to our Conference Chair, Ms. Aimee Price, whose relentless dedication and hard work have been instrumental in organizing this event. Aimee has truly done all the heavy lifting, and I am immensely grateful for her support and guidance, as well as for her patience in correcting my mistakes along the way. Furthermore, my heartfelt thanks go to the steering committee, advisory committee, session chairs, paper reviewers, panelists, plenary and invited speakers, all authors, and, of course, all our attendees. Your collective efforts enrich our conference and strengthen our community, ensuring that EIPBN remains a premier event in our field.

Sincerely,
Wei Wu, EIPBN 2024 Program Chair
Professor, the Ming Hsieh Department of Electrical and Computer Engineering
University of Southern California

EIPBN 2024