Adam V. Steele

EIPBN 2018 Short Course

Cold Ion Source Technologies: History and Outlook

Co presenting with Anne Delobbe


Abstract:
A new class of ion sources featuring laser-cooled particles have recently been developed that offer enhanced performance and new capabilities for focused ion beam instruments. The first generation of systems using this technology are currently poised for commercial deployment. In this short course we will first compare and contrast the mechanisms of action for these ion sources with the more traditional GFIS, LMIS, and ICP sources. This new class of ion source employs laser-cooling to bring gaseous atoms to very low (micro-Kelvin) temperatures; we will review the physics, history, and limitations of laser-cooling techniques. Subsequently we will show how the application of laser-cooling enables the creation of ion beams of high brightness, low-energy spread, or those that possess other exotic properties. The present and projected performance of prototype systems employing cold-atoms will be reviewed, and followed by a discussions of the anticipated applications where this technology will yield immediate benefits; these include nanomachining, semiconductor circuit edit and failure analysis, lithium battery research, and secondary ion mass spectrometry (SIMS).

Bio:
Adam V. Steele is co-founder of zeroK NanoTech, a startup that aims to commercialize new ion source technology based on laser-cooled atoms. He has expertise in atomic physics and the development of ion sources for focused ion beam applications. He is also the author of numerous publications and inventor of several patents, including zeroK’s core technology. He holds a B.S. in physics and computer science from Carnegie-Mellon University (2002) and a PhD in physics from Georgia Tech (2008).

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