Xiangyu Liu Xiangyu Liu

Scanning Probe-Based Lithography

Xiangyu Liu, Department of Chemical Engineering, NYU

Abstract:

The capability of scanning probe microscopes to manipulating objects at nanoscale has prompted the development of a wide variety of scanning probe-based lithography (SPL) methods. These methods commonly induce local modification of materials through heat, mechanical forces, or electric fields. Some of these methods have demonstrated a high degree of robustness and patterning capabilities, as well as sub-20 nm patterning resolution, that are unparalleled by other lithographic techniques. Although SPL is a serial process, the ease of implementing probe arrays significantly scales up its throughput, making it a promising method for nano-manufacturing nanomaterials. In this lecture, the focus will be on thermal (t)- and thermochemical (tc)- SPL. We will discuss the applications of t- and tc-SPL in nanoelectronics and in biochemistry, with a focus on the fabrication of 2D materials-based field effect transistors, large area sub-10 nm enzyme/proteins arrays, and tissue engineering scaffolds.


Bio:

Xiangyu Liu is currently a PhD student in the lab of Prof. Elisa Riedo, in the department of Chemical Engineering at the New York University (NYU). His research is focused on the use and development of Thermal- and Thermochemical-Scanning Probe Lithography (t-SPL and tc-SPL) for applications in biochemical nano-patterning and the fabrication of two-dimensional materials-based electronics.