Invited Speaker

Owen Medeiros

Massachusetts Institute of Technology

Multilayer Superconducting Fabrication Process for Microwave and Digital Electronics

Authors: Owen Medeiros, Brenden Butters, Marco Colangelo, Matteo Castellani and Karl Berggren

We present a multilayer fabrication process using thin film niobium nitride (NbN) and plasma enhanced chemical vapor deposition silicon dioxide (PECVD SiO2) as electrical isolation between superconducting and normal metal layers. Using this process we fabricate tunable superconducting microstrip resonators and superconducting vias.

Multilayer Superconducting Fabrication Process for Microwave and Digital Electronics

Session 6A-1: Nanoelectronics
Date: Thursday, June 2
Time: 4:20 pm
Location: Napoleon B

Invited Speakers

Jiawei Zuo

Chip-Integrated Full-Stokes Polarimetric Imaging Sensor

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Maxim Zalalutdinov

Coherent Acoustic Phonons in 2D Layered Materials

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Lars Thorben Neustock

Lars Thorben Neustock Stanford University Shape Optimization of Electrostatic Ion Beam Systems with a 3D Adjoint Boundary Element Method Authors: Lars Thorben Neustock and Lambertus ...

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