Invited Speaker
Henock Yallew
UiT The Arctic University of Norway
Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
Authors: Henock Yallew, Jana Jágerská and Martin Møller Greve
The Raith e_line FBMS mode is used to pattern 1 cm long slot waveguides with s-bend tapered couplers. The fabrication method solves two major limitations of the FBMS mode, namely the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths.
Invited Speakers
Michael Cullinan
Microscale Additive Manufacturing of Metal Interconnects Using Microscale Selective Laser Sintering
View Abstract
Leeya Engel
Micropatterning of Electron Microscopy Grids for Improved Cellular Cryo-electron Tomography Throughput
View Abstract