Invited Speaker
Chang-Hwan Choi
Stevens Institute of Technologyย
Nanofabrication via Laser Interference Lithography
Author: Chang-Hwan Choi
In this invited talk, the versatility of the laser interference lithography for the various routes to novel nanofabrication processes will be presented.
Nanofabrication via Laser Interference Lithography
Session 1C-1: Advanced Pattern Transfer
Date: Wednesday, June 1
Time: 1:20 pm
Location: Napoleon A
Date: Wednesday, June 1
Time: 1:20 pm
Location: Napoleon A
Invited Speakers
Henock Yallew
Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
View Abstract
Adam Steele
Ion Microscopy, Machining, and Elemental Analysis with the Cesium Low Temperature Ion Source (LoTIS)
View Abstract