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Invited Speaker
Chang-Hwan Choi
Stevens Institute of Technologyย
Nanofabrication via Laser Interference Lithography
Author: Chang-Hwan Choi
In this invited talk, the versatility of the laser interference lithography for the various routes to novel nanofabrication processes will be presented.
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Nanofabrication via Laser Interference Lithography
Session 1C-1: Advanced Pattern Transfer
Date: Wednesday, June 1
Time: 1:20 pm
Location: Napoleon A
Date: Wednesday, June 1
Time: 1:20 pm
Location: Napoleon A
Invited Speakers
Henock Yallew
Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
View Abstract
Adam Steele
Ion Microscopy, Machining, and Elemental Analysis with the Cesium Low Temperature Ion Source (LoTIS)
View Abstract