Ricardo Ruiz

EIPBN 2022

Invited Speaker

Ricardo Ruiz

Lawrence Berkeley National Laboratory 

Soft-Matter Hierarchical Assemblies for Nanopatterning Applications

Authors: Boyce Chang, Whitney Loo, Beihang Yu, Scott Dhuey and Ricardo Ruiz

Macromolecular self-assembly with hierarchical order has evolved to become an important and valuable tool for bottom-up patterning and fabrication at the nanometer scale. In the current lithography landscape where precision is gaining relevance over resolution, the high degree of uniformity and functionality of self-assembling hierarchical materials offers new valuable options. 

Ricardo Ruiz

Invited Speakers

Leonidas Ocola

Trilayer Process for T-gate and Gamma-gate Lithography Using Ternary Developer and Proximity Effect Correction Superposition
View Abstract

Chang-Hwan Choi

Nanofabrication via Laser Interference Lithography
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Jiawei Zuo

Chip-Integrated Full-Stokes Polarimetric Imaging Sensor
View Abstract