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Invited Speaker
Henock Yallew
UiT The Arctic University of Norway
Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
Authors: Henock Yallew, Jana Jágerská and Martin Møller Greve
The Raith e_line FBMS mode is used to pattern 1 cm long slot waveguides with s-bend tapered couplers. The fabrication method solves two major limitations of the FBMS mode, namely the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths.
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Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
Session 7B-1: Nanophotonics and Nanoplasmonics II
Date: Friday, June 3
Time: 8:00 am
Location: Bayside
Date: Friday, June 3
Time: 8:00 am
Location: Bayside
Invited Speakers
Michael Cullinan
Microscale Additive Manufacturing of Metal Interconnects Using Microscale Selective Laser Sintering
View Abstract
Leeya Engel
Micropatterning of Electron Microscopy Grids for Improved Cellular Cryo-electron Tomography Throughput
View Abstract