Invited Speaker
Henock Yallew
UiT The Arctic University of Norway
Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography
Authors: Henock Yallew, Jana Jágerská and Martin Møller Greve
The Raith e_line FBMS mode is used to pattern 1 cm long slot waveguides with s-bend tapered couplers. The fabrication method solves two major limitations of the FBMS mode, namely the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths.
Invited Speakers
Sourabh Saha
High-Throughput Patterning of Sub-Diffraction 3D Structures Through Projection of Femtosecond Light
View Abstract
Leeya Engel
Micropatterning of Electron Microscopy Grids for Improved Cellular Cryo-electron Tomography Throughput
View Abstract