Invited Speaker

Philip Feng

University of Florida

Atomically Thin Nanoelectromechanical Systems (NEMS): Nanofabrication Techniques, Challenges, and Perspectives

Authors: Fan Ye, Jaesung Lee, Xu-Qian Zheng, Philip X.-L. Feng

This presentation will describe a holistic view of our latest endeavors and results on advancing nanofabrication techniques for realizing resonant NEMS based on 2D materials and van der Waals heterostructures – from individual devices to arrays of devices, and toward path-finding for scalable nanofabrication of emerging 2D NEMS.

Atomically Thin Nanoelectromechanical Systems (NEMS): Nanofabrication Techniques, Challenges, and Perspectives

Session 5C-1: Micro- and Nano- Electromechanical Systems
Date: Thursday, June 2
Time: 1:40 pm
Location: Napoleon A

Invited Speakers

Christopher Ober

Evolving Approaches to EUV Photoresists: Polyacetals and Polypeptoids Offer New Options

View Abstract

Sunggook Park

Polymer Nanopore Devices for Sensing Biomolecules

View Abstract

Henock Yallew

Long, Stitch-free Slot Waveguide for IR-Sensing Applications Using E-beam Lithography

View Abstract