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Invited Speaker
Philip Feng
University of Florida
Atomically Thin Nanoelectromechanical Systems (NEMS): Nanofabrication Techniques, Challenges, and Perspectives
Authors: Fan Ye, Jaesung Lee, Xu-Qian Zheng, Philip X.-L. Feng
This presentation will describe a holistic view of our latest endeavors and results on advancing nanofabrication techniques for realizing resonant NEMS based on 2D materials and van der Waals heterostructures – from individual devices to arrays of devices, and toward path-finding for scalable nanofabrication of emerging 2D NEMS.
![Philip Feng](https://eipbn.org/2022/wp-content/uploads/2022/05/PhilipFeng.jpg)
Atomically Thin Nanoelectromechanical Systems (NEMS): Nanofabrication Techniques, Challenges, and Perspectives
Session 5C-1: Micro- and Nano- Electromechanical Systems
Date: Thursday, June 2
Time: 1:40 pm
Location: Napoleon A
Date: Thursday, June 2
Time: 1:40 pm
Location: Napoleon A
Invited Speakers
Leeya Engel
Micropatterning of Electron Microscopy Grids for Improved Cellular Cryo-electron Tomography Throughput
View Abstract