Invited Speaker
Owen Medeiros
Massachusetts Institute of Technologyย
Multilayer Superconducting Fabrication Process for Microwave and Digital Electronics
Authors: Owen Medeiros, Brenden Butters, Marco Colangelo, Matteo Castellani and Karl Berggren
We present a multilayer fabrication process using thin film niobium nitride (NbN) and plasma enhanced chemical vapor deposition silicon dioxide (PECVD SiO2) as electrical isolation between superconducting and normal metal layers. Using this process we fabricate tunable superconducting microstrip resonators and superconducting vias.ย
Invited Speakers
Leeya Engel
Micropatterning of Electron Microscopy Grids for Improved Cellular Cryo-electron Tomography Throughput
View Abstract
Leonidas Ocola
Trilayer Process for T-gate and Gamma-gate Lithography Using Ternary Developer and Proximity Effect Correction Superposition
View Abstract