Dear EIPBN Community:

Welcome to the 69th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN or 3-Beams). I hope you have a memorable time in Denver at the Hyatt Regency Denver at Colorado Convention Center sharing your impactful scientific research and technological breakthroughs and building long-lasting professional connections and life-long friendships. Our banquet this year is at beautiful Coors Field, home of the Colorado Rockies with great food, music, tours of the ball field, and use of the jumbotron as we celebrate the accomplishments of our community members and share plans for the future. Our attendees come from 18 countries, including 102 first timers, and 52 students.

I first attended EIPBN in 2004 in San Diego tasked as a new Member of Technical Staff at Sandia National Laboratories to investigate all the latest devices coming out of EIPBN. I soon realized that EIPBN was the premiere gathering for expert scientists, physicists, and engineers across academia, industry, government, and National Laboratories to share their findings and meet lifelong colleagues and friends. EIPBN has been my favorite conference ever since. I am honored 22 years later to continue the excellence of EIPBN, providing a venue for deep, long-lasting connections between nanofabrication experts from around the world.

The layout of our parallel sessions adjacent to the exhibit hall, where access to the sessions is through the exhibit hall should prove to enhance quality interactions between our attendees and our gracious commercial sponsors. Thank you to our Diamond Sponsor KLA; Gold Sponsors AllResist and STS-Elionix; Silver Sponsors GenISys and Raith; and Bronze Sponsor Heidelberg Instruments; and all our exhibitors and sponsors: AJA International, Angstrom Engineering, Crestec, DisChem, JEOL, Montana Tech Nanotechnology Laboratory, Nabu Optical Systems, NuFlare, Pozzetta Products, SAES, University of Pennsylvania Singh Center for Nanotechnology, Vistec Electron Beam, Beamfox, Colorado School of Mines, University of Colorado Boulder COSINC, FabuBlox, Ionoptika, Jenoptik, Lab 14, Nanoscribe, scia Systems, and Tescan. I also want to thank our society sponsor AVS. Note that contributions to and/or sponsorship of any event does not constitute departmental or institutional endorsement of the specific program, speakers, or views presented.

Program Chair Rajesh Menon has developed a phenomenal program focused on “Precision Nanomanufacturing and Metrology.” We are honored with three superbly accomplished plenary speakers on Wednesday: Professor Henry Smith (Massachusetts Institute of Technology), Professor Martin Wegener (Karlsruhe Institute of Technology), and Nackieb Kamin (United States Space Force). Rajesh will lead our plenary speakers in an engaging panel immediately following the plenary presentations. Carla Perez-Martinez will lead our Thursday plenary focused on maximizing AI and human efforts towards precision nanomanufacturing and metrology with a panel of experts. I am very thankful to have Rajesh as our Program Chair and for the high-quality and engaging set of speakers he has arranged for EIPBN 2026.

EIPBN is run by a dedicated group of volunteer steering committee members working year-round to ensure a successful conference. I am grateful for the dedication by the 2026 Steering Committee: Aimee Price, Wei Wu, James Owen, Rick Silver, Gina Adam (Commercial Session), Ming Lu, Guy DeRose, and Carla Perez-Martinez (WIN and Short Course). Thanks to John Randall (Micrograph Contest and Financial Trustee) and Gerald Lopez (Mentor Lunch and Operations Trustee) for their institutional support and guidance. We could not run the conference without our organizational team: Jonni Adams (Conference Coordinator); Nichole Ballard and Yes Events (Registrar); Photographer Michael Huson; and Nicki Davis (Website and Whova App Manager). Thanks also to the program committee and other volunteers. Finally, I want to express my immense gratitude to our Advisory Committee for chairing EIPBN before us so that we can stand on their shoulders and continue their legacy today.

Thanks for being part of our 3-Beams Community and making lasting connections and memories in Denver at EIPBN 2026!

Jack L. Skinner, Conference Chair and CEO, EIPBN 2026
Dean, Lance College of Mines and Engineering, Montana Technological University

Dear EIPBN Community,

It is my great pleasure to welcome you to EIPBN 2026 in Denver. For nearly seven decades, EIPBN has brought together the scientists and engineers who develop the tools, processes, and measurements that make the nanoscale useful. That mission has never felt more important or more exciting. The focus of this year’s conference, Precision Nanomanufacturing and Metrology, captures a defining challenge for our field. We are no longer concerned only with making smaller features. We are learning to fabricate with atomic, molecular, and three-dimensional control; to measure complex structures with greater confidence; and to combine human expertise with automation, modeling, and AI to accelerate discovery and manufacturing.

That breadth is reflected throughout the program. Selected presentations highlight photonics-enabled quantum memory, superconducting through-silicon vias, STM-based and mechanosynthetic approaches to atomically precise fabrication, electron-enhanced ALD and ALE, additive manufacturing toward the atomic scale, large-area metasurfaces, automated SEM metrology, and AI-enabled FIB–SEM workflows. Together, these contributions show a field advancing simultaneously in resolution, placement accuracy, materials control, throughput, and measurement fidelity.

Our plenary program reinforces this vision, with perspectives spanning science and technology strategy, 3D laser nanoprinting, and lensless lithography. The conference-wide panel, “Maximizing AI and Human Efforts Towards Precision Nanomanufacturing and Metrology,” will provide an important forum for discussing how computational tools can strengthen the creativity, judgment, and experimental rigor of our community.

EIPBN is also a community, and I am especially proud of the continued emphasis on students and early- career researchers. The Student Mentor Lunch, Best Student Paper Awards, poster sessions, and many informal discussions give the next generation opportunities not only to present excellent work, but also to find mentors, collaborators, and a professional home. The Women in Nanofabrication Luncheon, Micrograph Contest, inaugural FabuBlox Design Contest, Commercial Session, and banquet at Coors Field further add to the energy and openness that make EIPBN unique.

I would like to thank the Conference Chair, Steering Committee, Advisory Committee, session chairs, reviewers, invited speakers, panelists, sponsors, exhibitors, authors, students, and all attendees for making this program possible. Your contributions continue to make EIPBN the premier forum for beam technology and nanofabrication.

Welcome to EIPBN 2026. I look forward to an inspiring week of technical excellence, new ideas, and renewed connections.

Sincerely,
Rajesh Menon
EIPBN 2026 Program Chair