EIPBN

The 54th International Conference on
Electron, Ion, and Photon Beam Technology and Nanofabrication

The world’s leading symposium on lithography and nanofabrication

Abstracts from 2010


Hilton Anchorage, Anchorage, Alaska, June 1st to June 4th, 2010

Dear Colleagues:

On behalf of the entire conference organization, I welcome you to the 54th EIPBN Conference and to our “central” location between the Lower 48 States of the USA, Asia, and Europe: Anchorage, Alaska.

Thanks to your contributions, EIPBN Conference this year received over 400 abstracts – of which 356 have been accepted either for poster or oral presentation. These papers cover a wide range of topics; not only our traditional Electron, Ion and Photon beam patterning and technology talks, but also fill 4 sessions on Nanoimprint technology, 3 sessions on Nanophotonics, 2 on Directed Assembly, and others in Nanobiology and Microfluidics.

For this excellent program, we must thank Prof. Marty Feldman of Louisiana State University, the EIPBN 2010 Program Chair. His dedication not only to selecting excellent papers, but also aligning sessions to minimize the potential conflicts between overlapping disciplines has been a tremendous amount of work. I think we will all appreciate the results this week.

This year, we are trying something a bit different with our agenda. In response to the complaints that poster presenters often felt like “second class citizens”, we are putting the poster presentations front and center on the first day of the conference. We hope this helps convince you that our posters are second to nothing. We are also hosting a panel discussion on Wednesday evening, something that has been done in the past but not in recent years. We appreciate your feedback on these changes.

Students are the life blood of our future conferences, and so we have made a special effort to make students welcome, by providing financial discounts on registration, discounted housing at the University of Alaska, Anchorage, and by giving travel support to 68 students this year. We especially thank the Department of Energy (DoE), the National Science Foundation (NSF), and Raith USA for the grants and financial contributions that help make this possible, and Prof. Hank Smith (MIT), Reggie Farrow (NJIT), and Brian Whitehead (Raith USA) for facilitating this support.

I’d also like to thank the sponsors of the conference and conference-related events for their support: FEI, GenISys, JEOL USA, Raith USA, Vistec, and especially Zyvex Labs for their sponsorship of the Micrograph Contest. We are also grateful to IEEE and AVS for their institutional support of the conference.

I am also especially grateful to the City of Anchorage and the Anchorage Convention and Visitor’s Bureau for making Anchorage such a hospitable place for our conference. We are glad many of you are planning on staying some extra time to explore the natural beauty that can still be found here on the roof of the world.

I’d like to thank Reggie Farrow (NJIT), Alan Brodie (KLA-Tencor), and Rob Ilic (Cornell Univ.) for their help planning the Exhibit/Commercial Session. I am also grateful to Philippe Alexis and Kris Loew (NoDiamonds Web Services) for their help in the EIPBN 2010 Website redesign, to Alan Rowe (Mindful Planet) for the design of his excellent conference logo, and to Mike Rooks (Yale Univ.) for his ongoing support of our web and broadcast e-mail presence.

Finally, this conference would not be possible without the logistical support of Melissa Widerkehr and her associate, Corin Ford (Widerkehr and Associates). They have worked very hard to plan the room layouts, AV support, and the meal arrangements you will all now enjoy. This meeting could not happen without them, and we appreciate their time, effort and hard work.

We hope you will find this a memorable conference, and will also take the time while “in the neighborhood” to enjoy some of the mountain peaks, wildlife, and glaciers of Alaska.

Sincerely,

Franklin Schellenberg, Ph.D.

EIPBN 2010 Conference Chair

Dear EIPBN10 Attendees,

Welcome to Anchorage, Alaska and the 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication! We represent industry, academia, and government organizations from all over the world, and we will be reporting the latest advances in integrated circuit production and nanofabrication technology. This year the laser is 50 years old, and our program is dedicated to celebrating its birthday.

The conference is continuing to grow, with well over 400 submissions this year. To contain such a large conference within 3 days of sessions and only 3 parallel sessions is no easy task. We’ve done this first of all with a large, and outstanding poster session. The poster session will be divided into two parts, with lunch served between them. The posters will remain up throughout the conference.

In addition we’ve attempted to avoid scheduling sessions at the same time that are likely to be of interest to the same attendees. Further, within the sessions, we’ve tried to avoid scheduling papers simultaneously that might interest the same attendees. Finally, we will adhere strictly to the scheduled time slots, to facilitate attendees moving gracefully between simultaneous sessions.

The high quality technical program for this conference would not have been possible without the hard work and dedication of many people. Special thanks go to the members of the Steering and Advisory Committees, to the Section Heads, and to the Reviewers. They have been helpful throughout, guiding the course of the program, selecting invited speakers, and generating over 2750 reviews, an average of over 7 reviews for each contributed submission. (Many of you will be called upon shortly to review manuscripts for the conference proceedings, which will be published in the Journal of Vacuum Science and Technology). Thanks also to Mike Rooks for his patience in sending out countless announcements, Rich Gerber for his help in the computer analysis of the conference papers, Melissa Widerkehr and Corin Ford for their help with the technical program, and of course to Conference chair Frank Schellenberg for making Anchorage happen.

Most of all, I thank you, the attendees, who ultimately are the conference. Enjoy yourselves, and learn a lot.

Sincerely,

Martin Feldman

Program Chair, EIPBN 2010

EIPBN 2010