A |
| Abramson, Justin |
(Invited) Biomolecular-Scale Engineering
Lithographically Driven Nanoscale Assembly of DNA Nanostructures |
| Adato, Ronen |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Adesida, Ilesanmi |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Adeyenuwo, A.P. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Agarwal, Ritesh |
In situ TEM Investigation of Electrically-Driven Phase Change Behavior in Ge2Sb2Te5 Nanowire Memory Devices |
| Agraffeil, Claire |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Ahn, Jinho |
Fabrication of Nanosphere Patterns by Using Micro-contact Transfer Printing |
| Ahn, Se Hyun |
Continuous Formation of Nano-Scale Periodic Patterns by Localized Dynamic Wrinkling |
| Aitchison, J. Stewart |
A Tunable Optofluidic Nano-Bragg Microcavity Filter |
| Ajmera, Pratul |
Incorporation of Micro and Nano Scale Porosity on a Silicon Surface |
| Akasaka, Satoshi |
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends |
| Aksoy, Funda |
Ambient Pressure Photoelectron Spectromicroscopy at Advanced Light Source |
| Aktary, M. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Alam, Kawsar |
Monte Carlo Modeling of Electron Backscattering from Carbon Nanotube Forests |
| Alessi, David |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Alexandar, Morgan |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control |
| Alexander-Katz, Alfredo |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Alkaisi, Maan |
Microfluidics-assisted Photo Nanoimprint Lithography for the Formation of Cellular Bioimprints |
| Alkemade, Paul F.A. |
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| Alkemade, Paul |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition |
| Alsina, Francesc |
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Alti, K. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Altug, Hatice |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays
Lift-off Free Nanofabrication of Suspended Plasmonic Nanohole Arrays To Overcome Mass Transport Limitations in Bio-Sensors |
| Alvaro, Virginie Maffini |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Amin-Shahidi, Darya |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Amirsadeghi, Alborz |
An Experimental Approach to Measurement and Reduction of Demolding Force in UV-Nanoimprint Lithography |
| Amos, Nissim |
Terabit-Per-Square-Inch Magnetic Bit Patterned Media With a 26-nm Pitch and a 9-nm Square Bit |
| Amsden, Jason |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Anazawa, Toshihisa |
Novel Ozone-based Contamination Cleaning for EUV Optics
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Anderson, Eric |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Anderson, Erik H. |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Anderson, Richard |
Fabrication of Large Arrays of Ordered 3D Nanocups for Plasmonic Applications |
| Andrew, Trihsha |
Sub-Wavelength Optical Patterning via Optical-Saturable Transformations |
| Andrew, Trisha |
Deep Subwavelength Patterning via Absorbance Modulation |
| Aratani, Masao |
Fabrication of Seamless Three-Dimensional Roll Mold using Electron Beam Direct Writing to Rotating Cylindrical Substrate |
| Arisawa, Yukiyasu |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Artar, Alp |
Lift-off Free Nanofabrication of Suspended Plasmonic Nanohole Arrays To Overcome Mass Transport Limitations in Bio-Sensors |
| Aryal, Mukti |
Hole Mobility Enhancement by Chain Alignment in Imprinted P3HT Nanogratings for Organic Solar Cells
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings |
| Asbeck, P. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Atmar, Robert |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Atobe, Hidemasa |
Residual Layer Uniformity using Complementary Patterns to Compensate Pattern Density Variation in UV Nanoimprint Lithography |
| Attwood, David |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Auciello, Orlando |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography
Nanowire-Arrays via Block Copolymer Lithography |
B |
| Babin, Sergey |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields
Improvement of Accuracy of SEM Based Dimensional Metrology
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Bae, Misuk |
Fabrication of PEG Hydrogel Particles for Pharmaceutics using Electron Beam and Optical Lithography |
| Bahm, Alan |
Accurate Calculation of the Field Factor for the Schottky Cathode |
| Bang, Min-Hyuk |
Fabrication of Nanosphere Patterns by Using Micro-contact Transfer Printing |
| Bangsaruntip, Sarunya |
Multiple Double XTEM Sample Preparation of Site Specific Sub-10 nm Si Nanowires |
| Barbastathis, George |
Fabrication of Antireflection Structures for Binary Diffraction Gratings
Assembling Nanoparticle Catalysts with Nanospheres for Periodic Growth of Carbon Nanotube Arrays |
| Barnola, Sebastien |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Baron, Thierry |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Basilio, Lorena |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Bates, Christopher |
Pitch Division by Selective Acid Quenching |
| Battistella, Lorenzo |
Simulated Secondary-Electron Trajectories in Helium-Ion-Beam Lithography |
| Bauer, Günther |
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| Bauerdick, Sven |
3-D Microfluidics Devices using Ion Beam Lithography |
| Bay, Konstantin |
Improvement of Accuracy of SEM Based Dimensional Metrology |
| Bedzyk, Michael J. |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography |
| Belova, Lyubov |
Electron Beam Induced Deposition of Gold using the Au(CO)Cl Precursor |
| Bentley, Steven |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs
Copper–Plated 50 nm T–Gate Fabrication |
| Berggren, K. |
Electrochemical Development of Hydrogen Silsesquioxane |
| Berggren, Karl K. |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays
Controlled Surface Nanostructures for Performance-Analysis on Solid Support Fuel Cells |
| Berggren, Karl |
Sub-5 keV Scanning-Electron-Beam Lithography
(Invited) Electron-Beam Templating of Capillary-Force-Induced Nanocollapse
Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist
Simulated Secondary-Electron Trajectories in Helium-Ion-Beam Lithography
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography
Sub-30-nm Patterning of Au dots on GaAs for Templated Nanowire Growth
Temporal Coherence Effects on a Low-Cost Interference Lithography System |
| Berglund, Andrew |
Measurement of Acid-Generated Latent Image in Polymer Matrix by Fluorescence Microscopy |
| Bergmair, Iris |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Bergmair, Michael |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Berro, Adam |
Measurement of Acid-Generated Latent Image in Polymer Matrix by Fluorescence Microscopy |
| Berse, Matthias |
3-D Microfluidics Devices using Ion Beam Lithography |
| Bertagnolli, Emmerich |
Experimental Evaluation of Gas-Flux Distribution with Gas Injection Systems for Focused Beam Induced Deposition
Thermally Assisted Focused Electron Beam Induced Deposition
Electron Beam Induced Etching of Silicon using Chlorine Gas
Nanowire Synthesis on Catalyst Arrays Produced with Electron Beam Induced Deposition
Particle Beam Induced Fabrication of Nanoimprint Lithography Templates |
| Berton, Kevin |
Colloidal Optical Waveguides with Integrated Local Light Sources Built by Capillary Force Assembly
Rotation Speed Control of Janus Particles by Dielectrophoresis in a Microfluidic Channel |
| Besacier, Maxime |
Real Time Scatterometry for 193 nm Photoresist Trimming Monitoring: Influence of the Refractive Index Modification on CD Accuracy |
| Bevis, Chris |
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Beyer, A. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Biais, Nicolas |
Magnetically Actuated Elastomeric Pillars for Cellular Force Measurement |
| Bielefeld, U |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Biggs, Manus |
(Invited) Biomolecular-Scale Engineering
Magnetically Actuated Elastomeric Pillars for Cellular Force Measurement |
| Bishop, James |
Effect of Precursor Sticking Coefficient on Electron Beam Induced Deposition and Etching |
| Blaikie, Richard |
Absorbance-Modulation Interference Lithography Enhanced by a Planar Silver Lens |
| Blake, David |
Carbon Nanotube Field Emission Electron Gun Array for Micro-Column Scanning Electron Microsocopy and Maskless Lithography |
| Blick, Robert |
(Invited) Mode-Locked Nanomechanical Electron Shuttles for Phase Coherent Frequency Conversion |
| Bliznyuk, Valery |
Structure and Electrical Properties of Polymer Core-Shell Latex Systems Revealed by Helium Ion Microscopy |
| Bogdanski, Nicolas |
Sputtering for an Etch-Free Lift-Off in T-NIL |
| Bokor, Jeff |
PEEM Studies of Coupled-Nanomagnet Systems |
| Bokor, Jeffrey |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly |
| Bonam, Ravi |
Performance Optimization of Sub-10nm Electron Beam Lithography |
| Borisov, Sergey |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Borrisé, Xavier |
Batch Wafer Fabrication of Passivated Carbon Nanotube Transistors for Electrochemical Sensing Applications |
| Bosse, August |
Theory, Modeling, and Simulation of Line Edge Roughness in Diblock Copolymer Resists |
| Boswell, Rod |
(Invited) High Brightness Plasma Ion Source Developments for Next Generation FIB and Surface Analysis |
| Bot, Corina |
Carbon Nanotube Cellular Probes |
| Boussey, Jumana |
Organized Porous Alumina Membranes for High Density Silicon Nanowires Growth
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Bove, Nadine |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Brammer, Karla |
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering |
| Branz, Howard M. |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Braunschweig, PTB |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Brehm, Moritz |
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| Brener, I. |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Brener, Igal |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Brennecka, Geoff |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides |
| Brenner, Kevin |
Single-step, Complementary Doping of Graphene |
| Bresin, Matthew D. |
Gas-Mediated Electron and Ion Beam Induced Deposition using Ammonia as a Purification Medium |
| Bresin, Matthew |
Condensed Phase Electron Beam-Induced-Deposition: 3D Lithography and Growth Rate Enhancement using Cryogenic Cooling |
| Brewster, Megan |
Sub-30-nm Patterning of Au dots on GaAs for Templated Nanowire Growth |
| Brianceau, Pierre |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Brien, John |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Brimhall, Nicole |
Sub-Wavelength Optical Patterning via Optical-Saturable Transformations
Deep Subwavelength Patterning via Absorbance Modulation |
| Bristol, Robert |
Pitch Division by Selective Acid Quenching |
| Brizuela, Fernando |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Brodie, Alan |
(Invited) High-Current Electron Optical Design for REBL Direct Write Lithography
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Brooks, Cynthia |
(Invited) Defect Inspection for High Volume Patterned Media |
| Brousse, D. |
Cl2-based ICP Etching of Photonic Crystals for the Visible Spectrum in GaN and SiC |
| Brown, Devin |
Decomposing Polynorbornene to Form Millimeter to Nanometer Sized Cavities
Nanometer Scale Bosch Process Silicon Etching |
| Bruccoleri, Alexander |
Ultra-High Aspect Ratio Silicon Dry-Etch Process |
| Bruck, Roman |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Brueck, S.R.J. |
Large Area 3D Photonic Crystals with Embedded Waveguides |
| Brueck, Steven |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response
The Integration of Block Copolymer Directed Assembly with 193 Immersion Lithography
(Invited) Large-Area Linear and Nonlinear Nanophotonics |
| Brugger, Juergen |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography
Flexible Membranes Improve Resolution in Stencil Lithography
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Brugger, Jürgen |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Bu, Caixia |
Tuning Transport and Two-State Noise in Carbon Nanotubes using Precisely Controlled Electron Beam |
| Bucchignano, James |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Büenfeld, M. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Bugrov, Alexey |
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Bühler, Wolfram |
Thermally Assisted Focused Electron Beam Induced Deposition |
| Bunk, Oliver |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Bunting, Andrew |
Piezo-Electrically Driven Silicon Carbide Resonators |
| Bunting, Andy |
MEMS Systems for Biomimetical Applications |
| Burckel, D. B. |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Burckel, D. Bruce |
Fabrication and Applications of Sub-Micron 2D/3D Periodic Carbon Structures |
| Bureau, Jean-Baptiste |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Burk, Dorothea |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Burkhardt, Claus |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Burnier, Luc |
Organized Porous Alumina Membranes for High Density Silicon Nanowires Growth |
| Buttard, Denis |
Organized Porous Alumina Membranes for High Density Silicon Nanowires Growth |
C |
| Cabrini, Stefano |
Manipulating the Local Symmetry and Geometry of Bowtie Optical Antennae for Controlling Spectral Properties while Maintaining the Near-Field Enhancement
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Cacao, Elliedonna |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Cadarso, Víctor J. |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Campbell, P.M. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Candeloro, P. |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Cantu, Precious |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Carbajo, Sergio |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Carlton, David |
PEEM Studies of Coupled-Nanomagnet Systems |
| Carmichael, P. T. |
A Dry-on, Dry-off, Long Wavelength Photoresist for Nano-Plasmonic Field Metrologoy and Lithography |
| Carmichael, Peter |
Measurement of Acid-Generated Latent Image in Polymer Matrix by Fluorescence Microscopy |
| Caroff, Philippe |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Carroll, Allen |
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Caskey, Greg |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Castaldo, Vincenzo |
Ion-Induced Secondary Electron Yields and Simulation of Ion Imaging |
| Cha, Jennifer |
(Invited) Biomolecular Architectures and Systems for Nanoscience Engineering |
| Chan, Jack |
Tuning Transport and Two-State Noise in Carbon Nanotubes using Precisely Controlled Electron Beam |
| Chan, Tina |
Compensation Methods for Buried Defects in Extreme Ultraviolet Lithography Masks |
| Chang, Chih-Hao |
Fabrication of Antireflection Structures for Binary Diffraction Gratings
Assembling Nanoparticle Catalysts with Nanospheres for Periodic Growth of Carbon Nanotube Arrays |
| Chang, Jae-Byum |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Chang, Josephine |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Chang, Tsung-Yao |
Lift-off Free Nanofabrication of Suspended Plasmonic Nanohole Arrays To Overcome Mass Transport Limitations in Bio-Sensors |
| Chang, Wei-Yi |
A Two-Step Hot Embossing Process for Fabrication of Nano/Micro Hybrid Lens |
| Chao, Weilun |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Chen, Chen-Chia |
Rapid Ablation of Polymer Film and Self-Aligned Formation Gold Nanoparticles by Localized Joule Heating |
| Chen, Feng |
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends |
| Chen, J. H. |
Monte Carlo Study of Inelastic Scattering Models of Low Energy Electrons |
| Chen, Li-Han |
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Chen, Ping |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition |
| Chen, Ray T. |
(Invited) Three Dimensional Silicon-on-Insulator based Optical Phased Array for Agile and Large Angle Laser Beam Steering Systems |
| Chen, Robert |
Extreme Ultraviolet Mask Surface Cleaning Effects on Lithography Process Performance |
| Chen, Sheng-Yung |
Analysis of Fabrication Misalignment Effects in a MEMS-based Electron-Optical System Design for Direct-Write Lithography
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Chen, Shin-Chuan |
Analysis of Fabrication Misalignment Effects in a MEMS-based Electron-Optical System Design for Direct-Write Lithography |
| Chen, Teresa |
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Chen, Wenyu |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Chen, Xiaoshuang |
Application of Hydrogen Silsesquioxane (HSQ) as Etching Mask for Dense and Ultra-Sharp Silicon Tip Arrays |
| Chen, Yi-Fang |
Characterization of Nanoembossed PZT Ferroelectric Films |
| Chen, Yifang |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control
Application of Hydrogen Silsesquioxane (HSQ) as Etching Mask for Dense and Ultra-Sharp Silicon Tip Arrays |
| Chen, Yung-Pin |
A Novel Method to Fabricate Microlens Array with Normal Subwavelength Structures
Fabrication of Binary Phase Grating on the Fiber End by using Two- Beam Interference Lithography |
| Chen, Yung-Yaw |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Chen, Zhihong |
(Invited) Scaling in Carbon Electronics |
| Cheng, Jing |
Novel Designs for Non-Chemically Amplified Molecular Resists |
| Cheng, Mosong |
Optimizing Photon Sieves to Approach Fresnel Diffraction Limit via Pixel-based Inverse Lithography |
| Cheng, Xing |
Hybrid Solar Cells Based on ZnO Nanoparticles and Nanorods
Ordered Carbon Nanotube Deposition by Electrophoresis-Enhanced Self-Assembly
A Raman Spectroscopic Study of Polymer Chain Conformation after Nanoimprint
SERS-Active Substrate Based on Gap Surface Plasmon Polaritons |
| Cheong, Kang Hao |
Design of Parallel Mass Detection using Focused Ion Beam Columns |
| Cheong, Lin Lee |
Sub-5 keV Scanning-Electron-Beam Lithography |
| Cheung, Rebecca |
MEMS Systems for Biomimetical Applications
Piezo-Electrically Driven Silicon Carbide Resonators |
| Chevolleau, Thierry |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Chiesa, Marco |
Large-Scale Nanopatterning of Single Proteins used as Carriers of Magnetic Nanoparticles |
| Cho, Han-Ku |
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography
Experiment-based Estimation of Point Spread Function in Electron-beam Lithography |
| Cho, Younjin |
Pitch Division by Selective Acid Quenching |
| Choi, Chulmin |
Toward Successful Nanoimprint Mould Fabrication: Large Area Hexagonally Ordered Si Daughter Stamps by Guided Anodization
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Choi, Heon |
Surface Electromagnetic Wave Assisted Photoelectron Source for Multi-beam Applications |
| Choi, Jun-Hyuk |
Fabrication of Si Nanotemplate using Nanosilver Colloids for Anti-Reflection Films. |
| Choi, Kwangsik |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Choi, Kyung-Hak |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Choi, Sookyung |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Choi, Young-Jae |
Fabrication of Nanosphere Patterns by Using Micro-contact Transfer Printing |
| Choo, Hyuck |
Experimental and Simulation Studies on Raman-Enhancing Surface Features from Process-Engineered Substrates
Single-Step, Wafer-Scale, Hermetic Sealing Using Silicon Migration |
| Chou, Stephen Y. |
Multiple Double-Nanoimprint Fabrication of Wafer-scale Nanopillar Array Mold with Varying Pillar Shape, Pillar density, and Pillar Spacing Without EBL |
| Chou, Stephen |
Growth of Straight Crystal Silicon Nanowires on Nanopatterned Amorphous Substrate with Uniform Diameter and Length, Preferred Orientation, and Predetermined Location
Nanoimprint Mold Fabrication by Quantum Lithography on Nanoimprinted Blanks |
| Chouiki, Mustapha |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp |
| Chow, Edmond |
Cathodoluminescence Imaging of Plasmonic modes of Au Nanostructures |
| Chryssis, Athanasios |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Chuang, Vivian P. |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Chung, Jin Wook |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Clifford, Chris |
Compensation Methods for Buried Defects in Extreme Ultraviolet Lithography Masks |
| Clime, Liviu |
Fabrication of Nanostar Array by Nanoimprint Lithography |
| Cohen, Guy |
Multiple Double XTEM Sample Preparation of Site Specific Sub-10 nm Si Nanowires |
| Colburn, Matthew |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Coll, Mariona |
Flip Chip Lamination Approach to Fabricate Ultrasmooth Metal Contacts for Organic-Based Electronic Devices |
| Comboroure, Corinne |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET)
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Constantoudis, Vassilios |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Cook, Ben |
Statistical Coulomb Forces In Electron Guns
Ultra Fast Electron Sources A New Conclusion |
| Cooke, Simon |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Cord, Bryan |
Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography
Methylsilsesquioxane (MSQ) - A Novel Resist for Electron Beam Lithography |
| Costner, Elizabeth |
Pitch Division by Selective Acid Quenching |
| Craig, Gordon |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Crnogorac, Filip |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration
Semiconductor Crystal Islands for 3-Dimensional Integration |
| Cuffe, John |
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Cui, Bo |
Nanofluidic Channels Fabricated by e-beam Lithography and Polymer Reflow Sealing
Fabrication of Nanostar Array by Nanoimprint Lithography
Ultrasmooth, 3D Nanostructured Gold Films for Enhanced SPR Detection by Nanoimprint Lithography and Template Stripping |
| Cui, Dehu |
A Raman Spectroscopic Study of Polymer Chain Conformation after Nanoimprint |
| Cui, Yonghao |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Cumming, David R. S. |
Imprinted Quarter Wave Plate at Terahertz Frequency |
| Cummings, Kevin |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Cunge, Gilles |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Curtis, D. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Czaplewski, David |
Chemical Changes during Exposure of ZEP 520A Electron Beam Resist |
| Czepl, Peter |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
D |
| Dagenais, Mario |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Dai, Bing |
Algorithmic Reconstruction Methods in Diffraction Microscopy using a Priori Information
Coherent Diffractive Imaging for Extended Samples with a Pre-defined Illumination Pattern
Scaled-Up Optical Simulation of X-Ray Diffraction Microscopy |
| Dai, Qing |
Experiment-based Estimation of Point Spread Function in Electron-beam Lithography |
| Danielsen, Nils |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Darling, Seth |
Nanowire-Arrays via Block Copolymer Lithography |
| Das, Gobind |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Dastmalchi, Babak |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| David, Christian |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Davis, Ronald |
Nanoneedle Biosensor Array for High-Throughput DNA Sequencing
Integrated Differential Silicon Nano-Calorimeter with on-chip Microfluidic for Real-Time High-Throughput Drug Discovery |
| De Angelis, Francesco |
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution |
| de Pablo, Juan J. |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| de Pablo, Juan |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
(Invited) Multiscale Modeling of Block Copolymer Directed Assembly and its Application to Sub-Lithographic Patterning |
| Delcambre, Sean |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Derks, Henk |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| DeRose, Christopher |
(Invited) Silicon Photonics in High Performance Computing |
| Detcheverry, Francois |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers |
| Deterre, Martin |
Assembling Nanoparticle Catalysts with Nanospheres for Periodic Growth of Carbon Nanotube Arrays |
| Devices, Nano-Optic |
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Devin, Nicole |
Decomposing Polynorbornene to Form Millimeter to Nanometer Sized Cavities |
| Devlin, Nicole |
Nanometer Scale Bosch Process Silicon Etching |
| Dew, S.K. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Dew, Steven |
Nano-Machining of Silicon Carbon Nitride Resonators Using Low Voltage Electron Beam Lithography and Cold Development |
| Dhima, Khalid |
(Invited) Convenience of T-NIL with Combined Processing |
| Dhuey, Scott |
Manipulating the Local Symmetry and Geometry of Bowtie Optical Antennae for Controlling Spectral Properties while Maintaining the Near-Field Enhancement
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Di Fabrizio, E. |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Diego, San |
(Invited) Biomolecular Architectures and Systems for Nanoscience Engineering
Toward Successful Nanoimprint Mould Fabrication: Large Area Hexagonally Ordered Si Daughter Stamps by Guided Anodization
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering |
| Ding, Fei |
Multiple Double-Nanoimprint Fabrication of Wafer-scale Nanopillar Array Mold with Varying Pillar Shape, Pillar density, and Pillar Spacing Without EBL |
| Display, LG |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Divan, Ralu |
Nanoporous Ultrananocrystalline Diamond Membranes
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming
Fabrication of PEG Hydrogel Particles for Pharmaceutics using Electron Beam and Optical Lithography |
| Diwekar, Mohit |
Deep Subwavelength Patterning via Absorbance Modulation |
| Dobisz, Elizabeth |
(Invited) Patterned Media: Pushing the Limits of Lithography in Manufacturing |
| Docherty, Kevin |
(Invited) Batch Fabrication of Cantilever Array Apertured Probes for Scanning Near-Field Optical Microscopy |
| Doktycz, Mitchel J. |
Nanostructured Silicon Membranes for Control of Molecular Transport |
| Doktycz, Mitchel |
Understanding Biology Through Nanostructured Interfaces |
| Dommelen, Youri |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Donev, Eugene |
Focused Electron-Beam-Induced Deposition of Platinum and Gold Nanostructures from Aqueous Solutions |
| Dou, James |
A Tunable Optofluidic Nano-Bragg Microcavity Filter |
| Drezek, Rebekah |
Experimental and Simulation Studies on Raman-Enhancing Surface Features from Process-Engineered Substrates |
| Duan, Huigao |
Sub-5 keV Scanning-Electron-Beam Lithography
(Invited) Electron-Beam Templating of Capillary-Force-Induced Nanocollapse
Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography
Electrochemical Development of Hydrogen Silsesquioxane |
| Dubois, Geraud |
Methylsilsesquioxane (MSQ) - A Novel Resist for Electron Beam Lithography |
| Dudek, Damian |
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Dunn, Kathleen A. |
Gas-Mediated Electron and Ion Beam Induced Deposition using Ammonia as a Purification Medium
Condensed Phase Electron Beam-Induced-Deposition: 3D Lithography and Growth Rate Enhancement using Cryogenic Cooling |
| Dunn, Kathleen |
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Dupre, Cecilia |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Duval, Fabrice |
Mask Aligner Lithography Simulation |
E |
| Ebm, Christoph |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Eddy, C., Jr. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Eddy, C.R. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Eder-Kapl, Stefan |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Edwards, Amanda |
Understanding Biology Through Nanostructured Interfaces |
| Ekerdt, John |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides |
| El Kodadi, Mohamed |
Real Time Scatterometry for 193 nm Photoresist Trimming Monitoring: Influence of the Refractive Index Modification on CD Accuracy |
| Electron, Tokyo |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Ellis, A. R. |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Emerson, Mark |
Employing Reactive Gas-phase Etch Precursors to Mitigate Redeposition During Ultrashort Pulsed Laser Ablation |
| Engelmann, Sebastian |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Engelstad, Roxann |
Assessment of IP Error Compensation Techniques for EUVL
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck
Local and Global Response of EUV Reticles due to Entrapped Particles during Exposure Chucking |
| Engineering |
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Erdmann, Andreas |
(Invited) Mask topography Induced Phase Effects and Wave Aberrations in Optical and EUV Lithography |
| Ernst, Thomas |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Erramilli, Shyam |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Esfandyarpour, Hesaam |
Nano-Bridge FET Array for DNA Hybridization Detection
Nanoneedle Biosensor Array for High-Throughput DNA Sequencing
Integrated Differential Silicon Nano-Calorimeter with on-chip Microfluidic for Real-Time High-Throughput Drug Discovery |
| Esfandyarpour, Rahim |
Nanoneedle Biosensor Array for High-Throughput DNA Sequencing |
| Evans, John |
Microfluidics-assisted Photo Nanoimprint Lithography for the Formation of Cellular Bioimprints |
| Evanschitzky, Peter |
(Invited) Mask topography Induced Phase Effects and Wave Aberrations in Optical and EUV Lithography |
| Evoy, Stephane |
Nano-Machining of Silicon Carbon Nitride Resonators Using Low Voltage Electron Beam Lithography and Cold Development |
| Eyck, G. A. Ten |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Eyck, Gregory Ten |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
F |
| Fan, Chi-Hsiung |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Fan, Li |
Fast Turn-Around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals
Sub-10nm Lines using PMMA and HSQ Double Patterning |
| Fang, Nicholas |
Cathodoluminescence Imaging of Plasmonic modes of Au Nanostructures |
| Fanton, M.A. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Farm, Elina |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Farrow, Reginald |
Carbon Nanotube Cellular Probes |
| Fazio, Teresa |
(Invited) Biomolecular-Scale Engineering
Supported Lipid Membranes Corralled by Nanoscale HSQ and PDMS Barriers
Biocompatible Surfaces with Locally Variable Rigidity |
| Federsel, Peter |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Feldbaum, Michael |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media |
| Ferguson, Susan |
Copper–Plated 50 nm T–Gate Fabrication |
| Ferranti, David |
Fabrication and Characterization of Ultrahigh Aspect Ratio vias in Gold using the Helium Ion Microscope |
| Ferrera, Juan |
Simulated Secondary-Electron Trajectories in Helium-Ion-Beam Lithography |
| Finders, Jo |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Fink, Kathryn |
Microfluidic Dynamics in Micro-Scale Truss Structures Formed From Self-Propagating Photopolymer Waveguides for Heat Transfer Applications |
| Fischer, Daniel |
Thermally Assisted Focused Electron Beam Induced Deposition |
| Fischer, Eugen |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Fito, T. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Fleischer, Monika |
(Invited) Application Specific CVD Growth of Carbon Nanotubes
Gold Nanocone Probes for Near-Field Scanning Optical Microscopy
Structured Titanium Surfaces for Biomedical Applications |
| Fletcher, Benjamin |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Floresca, Carlo |
(Invited) High Performance Lithographically Defined Back-Gated Si-nanowire MOSFETs with sub-5 nm Channel Width |
| Forchheimer, Daniel |
(Invited) Molecularly Selective Nanopatterns using Nanoimprint Lithography: A Label-Free Sensor Architecture |
| Fouad, Mina |
Nanofluidic Channels Fabricated by e-beam Lithography and Polymer Reflow Sealing |
| Foulkes, John |
Absorbance-Modulation Interference Lithography Enhanced by a Planar Silver Lens |
| Francone, Achille |
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Frank, Andreas |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Freed, Regina |
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Fresnel, Institut |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals |
| Fretwell, John |
(Invited) Defect Inspection for High Volume Patterned Media |
| Fromherz, Thomas |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| Fu, Xin |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Fuard, David |
Fabrication of 3D Structures for the Assessment of Cell Mechanical Interactions within Cell Monolayers |
| Fucetola, Corey |
Temporal Coherence Effects on a Low-Cost Interference Lithography System |
| Fühner, Tim |
(Invited) Mask topography Induced Phase Effects and Wave Aberrations in Optical and EUV Lithography |
| Fujita, Jun-ichi |
Direct Transformation of a Resist Pattern into a Graphene FET Through Interfacial Graphitization of Liquid Gallium |
| Furubayashi, Masaki |
Direct Synthesis of Vertical a-Fe2O3 Nanowires from Sputtered Fe Thin Film |
G |
| Gadegaard, Nikolaj |
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling |
| Gale, Bruce |
(Invited) A Microfluidic Toolbox for Lab on a Chip Devices |
| Gao, Jinming |
Reliable Si Nanowire FETs Defined by Lithography for pH Sensing and Ultrasensitive Detection of Protein |
| Garching, TUM |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Garcia, Andrei |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration |
| Garcia, Ricardo |
Large-Scale Nanopatterning of Single Proteins used as Carriers of Magnetic Nanoparticles |
| Gaskill, D. Kurt |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Gaskill, D.K. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Gauzner, Gene |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Gawidziel, Stephen |
Effect of Precursor Sticking Coefficient on Electron Beam Induced Deposition and Etching |
| Geiss, Reinhard |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Gemeinhart, Richard |
Fabrication of PEG Hydrogel Particles for Pharmaceutics using Electron Beam and Optical Lithography |
| George, Hubert C. |
Fabrication of Platinum Single-Electron Transistors with Tunnel Barriers Made by Atomic Layer Deposition |
| George, Hubert |
Experimental Demonstration of Hybrid SET-CMOS Circuits |
| George, Simi A. |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| George, Simi |
Extreme Ultraviolet Mask Surface Cleaning Effects on Lithography Process Performance |
| Gergel-Hackett, Nadine |
Flip Chip Lamination Approach to Fabricate Ultrasmooth Metal Contacts for Organic-Based Electronic Devices |
| Gerstand, Karen |
Electro-Osmotic Flow Through Carbon Nanotube Membranes for Programmed Transdermal Drug Delivery |
| Geurts, Remco |
Towards Automated Fabrication of 3D Photonic Devices by Focused Ion Beam |
| Ghassemi, Saba |
(Invited) Biomolecular-Scale Engineering
Magnetically Actuated Elastomeric Pillars for Cellular Force Measurement |
| Gheidari, Ali Mohammadi |
Transmission Images of a 196 Beam Scanning Electron Microscope |
| Gignac, Lynne |
Multiple Double XTEM Sample Preparation of Site Specific Sub-10 nm Si Nanowires |
| Gin, Aaron |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides |
| Gischkat, Thomas |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Glinsner, Thomas |
High Accuracy UV-NIL Step and Repeat Master Stamp Fabrication for Wafer-Level Camera Application |
| GlobalFoundries |
Evolution of Line Edge and Line Width Roughness in a Frequency Doubling Directed Self Assembly Process
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Glodde, Martin |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Godignon, Philippe |
Batch Wafer Fabrication of Passivated Carbon Nanotube Transistors for Electrochemical Sensing Applications |
| Gogolides, Evangelos |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Goldberg, Kenneth A. |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Goldberg, Kenneth |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks
(Invited) Wavelength Specific Reflections--A Decade of EUV Mask Inspection Research
Actinic Imaging and Evaluation of Phase Structures on EUV Lithography Masks |
| Goldsman, Neil |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Goltsov, Alexander |
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Gölzhäuser, A. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Gong, Guofang |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Gopalan, Padma |
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Gorelick, Sergey |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Gotszalk, Teodor |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Grabiec, Piotr |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Gradecak, Silvija |
Sub-30-nm Patterning of Au dots on GaAs for Templated Nanowire Growth |
| Graham, William |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Grant, James P. |
Imprinted Quarter Wave Plate at Terahertz Frequency |
| Grass, Michael |
Ambient Pressure Photoelectron Spectromicroscopy at Advanced Light Source |
| Greene, Eric |
Supported Lipid Membranes Corralled by Nanoscale HSQ and PDMS Barriers |
| Greer, Julia |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Grella, Luca |
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Grenville, Andrew |
Photopatternable Inorganic Hardmask
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Gronheid, Roel |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Groves, Tim |
Surface Electromagnetic Wave Assisted Photoelectron Source for Multi-beam Applications |
| Groves, Timothy |
(Invited) Electron Beam Lithography, the First Fifty Years, and Prospects for the Future |
| Gruetzner, Gabi |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Grydlik, Martyna |
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| GST, Hitachi |
Geometrical Limitations for Ar Ion Beam Etching |
| Gu, Xinyu |
Pitch Division by Selective Acid Quenching |
| Gual, Isaac |
Piezo-Electrically Driven Silicon Carbide Resonators |
| Guillaume, Gay |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Guillorn, Michael |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Gullikson, Eric M. |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Gullikson, Eric |
High Transmission Pellicles for EUVL Reticle Protection |
| Guo, L. Jay |
Ultra-High Aspect Ratio Silicon Dry-Etch Process
Surface Plasmon Enhanced Efficiency of Organic Solar Cells using Transparent Ag Nanowire Electrodes
Continuous Formation of Nano-Scale Periodic Patterns by Localized Dynamic Wrinkling
Transmissive Color Filters Fabricated Using Pattern Transfer Lithography
Plasmonic Color Filter Based on Metal-Insulator-Metal Resonators |
| Gupta, Himanshu |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Guthy, Csaba |
Nano-Machining of Silicon Carbon Nitride Resonators Using Low Voltage Electron Beam Lithography and Cold Development |
| Guzenko, Vitaliy A. |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Guziy, O. |
Cl2-based ICP Etching of Photonic Crystals for the Visible Spectrum in GaN and SiC |
| Gwyther, Jessica |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
H |
| Haase, Gaddi |
(Invited) Defect Inspection for High Volume Patterned Media |
| Haatainen, Tomi |
Fabrication of Mesas with Micro- and Nanopatterned Surface Relief used as Working Stamps for Step & Stamp Imprint Lithography |
| Hacker, Christina |
Flip Chip Lamination Approach to Fabricate Ultrasmooth Metal Contacts for Organic-Based Electronic Devices |
| Häffner, Michael |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Hagen, Cornelis W. |
Monte Carlo Simulations to Study FEBID and EBL Resolution Limits |
| Hagen, Cornelis Wouter |
Ion-Induced Secondary Electron Yields and Simulation of Ion Imaging |
| Hahn, Roland |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Hainberger, Rainer |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Hakeem, Philip |
The Integration of Block Copolymer Directed Assembly with 193 Immersion Lithography |
| Hällström, Waldemar |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Hamaguchi, Tetsuya |
Rapid Thermal Imprint of High-Aspect-Ratio Nanostructures with Dynamic Heating of Mold Surface
Direct Synthesis of Vertical a-Fe2O3 Nanowires from Sputtered Fe Thin Film |
| Hamilton, Alister |
MEMS Systems for Biomimetical Applications |
| Hammarin, Greger |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Han, Gang |
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Han, Sang-in |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Han, Seungoh |
Characterization of Less-Diffractive Nano-Scale Beam from a Ring Aperture Type Plasmonic Lens |
| Harriott, Lloyd |
Tuning Transport and Two-State Noise in Carbon Nanotubes using Precisely Controlled Electron Beam |
| Harry, Katherine |
Electrochemical Development of Hydrogen Silsesquioxane |
| Harteneck, B. |
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness |
| Harteneck, Bruce |
Experimental and Simulation Studies on Raman-Enhancing Surface Features from Process-Engineered Substrates
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Hartley, John |
Performance Optimization of Sub-10nm Electron Beam Lithography |
| Hartung, Holger |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Haruyama, Yuichi |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Hasegawa, Hirokazu |
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends |
| Hastings, J. Todd |
Photopatterning 3-Amino-Propyl-Triethoxy-Silane (APTES) Self-Assembled Molecular Layers on Alumina |
| Hastings, Jeffrey |
Focused Electron-Beam-Induced Deposition of Platinum and Gold Nanostructures from Aqueous Solutions |
| Hatakeyama, Taiki |
Vibration Characteristics of Monolayer Graphene Resonator |
| Hattori, Shuntaro |
Rapid Thermal Imprint of High-Aspect-Ratio Nanostructures with Dynamic Heating of Mold Surface |
| Hayakawa, Teruaki |
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Hecker, Michael |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Heilmann, Ralf K. |
Ultra-High Aspect Ratio Silicon Dry-Etch Process |
| Heinzelmann, Harry |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography |
| Heitkamp, B. |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Hendel, Rudi |
(Invited) A 1D Gridded Design Style for Hybrid Optical and e-Beam Patterning |
| Henderson, Clifford |
Effect of Crosslinker Structure on a Novel Post-Development Strategy to Prevent Pattern Collapse in Photoresist Nanostructures
Understanding the Relationship Between True and Measured Resist Feature CD and LER using a Detailed SEM Simulator
Novel Designs for Non-Chemically Amplified Molecular Resists
Comparison of Positive Tone vs. Negative Tone Resist Pattern Collapse Behavior |
| Henry, Michael |
Silicon Nanowires Fabricated using FIB Implanted Gallium Etch Masks for Plasma Etching |
| Henslee, Brian |
Single Cell Poly e-caprolacton (PCL) Membrane Electroporation Device for Gene Delivery |
| Hesser, Guenter |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Hessman, Dan |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Hewlett-Packard |
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Hicks, Bryan |
Tip-based Precise, Repeatable Etching of Highly Ordered Pyrolytic Graphite |
| High-Technologies, Hitachi |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Hill, Ray |
An Analysis of Sub-Surface Beam Spread and its Impact on the Image Resolution of the Helium Ion Microscope |
| Hinds, Bruce |
Electro-Osmotic Flow Through Carbon Nanotube Membranes for Programmed Transdermal Drug Delivery |
| Hingerl, Kurt |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Hirai, Tomoyasu |
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Hirai, Yoshihiko |
Process Simulator for UV-Nanoimprint Lithography
(Invited) Research and Development on Process Science and CD Control in High-Throughput UV Nanoimprint
Impact of Wafer Deformation on Demolding Force for Thermal Imprint Process
Impact of Molecular Size on Resist Filling Process in Nanoimprint Lithography : Molecular Dynamics Study |
| Hiroshima, Hiroshi |
(Invited) Research and Development on Process Science and CD Control in High-Throughput UV Nanoimprint
Residual Layer Uniformity using Complementary Patterns to Compensate Pattern Density Variation in UV Nanoimprint Lithography
45 nm hp Line/Space Patterning into a Thin Spin Coat Film by UV Nanoimprint Based on Condensation |
| Hitachi |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers |
| Hite, J. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Hoang, Hung Quang |
A High Resolution Low Noise Secondary Electron Spectrometer for IC Failure Analysis |
| Hochleitner, Gottfried |
Experimental Evaluation of Gas-Flux Distribution with Gas Injection Systems for Focused Beam Induced Deposition
Thermally Assisted Focused Electron Beam Induced Deposition
Electron Beam Induced Etching of Silicon using Chlorine Gas
Nanowire Synthesis on Catalyst Arrays Produced with Electron Beam Induced Deposition |
| Hocken, Robert |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Holland, Martin C. |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs |
| Holleitner, Alexander |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Holzwarth, Charles |
Equivalent Phase-Shift Bragg Gratings on SOI using Optical Lithography
Absorbance-Modulation Interference Lithography Enhanced by a Planar Silver Lens |
| Hone, James |
(Invited) Biomolecular-Scale Engineering
Magnetically Actuated Elastomeric Pillars for Cellular Force Measurement |
| Honegger, Thibault |
Colloidal Optical Waveguides with Integrated Local Light Sources Built by Capillary Force Assembly
Rotation Speed Control of Janus Particles by Dielectrophoresis in a Microfluidic Channel |
| Hong, Daehoon |
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Hong, Mi |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Hong, Seungbum |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography |
| Horiba, Akira |
Process Simulator for UV-Nanoimprint Lithography |
| Hornung, Michael |
Customised Illumination for Process Window Optimisation and Yield Improvement in Mask Aligner Lithography Systems
Full-field Substrate Conformal Imprint Lithography (SCIL) on Mask Aligners |
| Horsley, David |
Fabrication of Large Arrays of Ordered 3D Nanocups for Plasmonic Applications |
| Hörtlackner, Michael |
Experimental Evaluation of Gas-Flux Distribution with Gas Injection Systems for Focused Beam Induced Deposition
Thermally Assisted Focused Electron Beam Induced Deposition |
| Hosseini, Amir |
(Invited) Three Dimensional Silicon-on-Insulator based Optical Phased Array for Agile and Large Angle Laser Beam Steering Systems |
| Howe, Roger |
Single-Step, Wafer-Scale, Hermetic Sealing Using Silicon Migration |
| HRL |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Hsu, Pen-Hsieh |
Silicon Nanobelt Field Effect Transistors Toward Hepatocellular Carcinoma Detection |
| Hsu, Yautzong |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Hu, Chia-Yu |
Monte Carlo Study of Inelastic Scattering Models of Low Energy Electrons |
| Hu, M. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Hu, Min |
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Hu, Walter |
Reliable Si Nanowire FETs Defined by Lithography for pH Sensing and Ultrasensitive Detection of Protein
Hole Mobility Enhancement by Chain Alignment in Imprinted P3HT Nanogratings for Organic Solar Cells
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings
(Invited) High Performance Lithographically Defined Back-Gated Si-nanowire MOSFETs with sub-5 nm Channel Width |
| Hu, Wei |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Hu, Wenchuang |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Hu, Xin |
Single Cell Poly e-caprolacton (PCL) Membrane Electroporation Device for Gene Delivery |
| Hu, Ying |
Experimental and Simulation Studies on Raman-Enhancing Surface Features from Process-Engineered Substrates |
| Huang, Chieh-Chien |
Analysis of Fabrication Misalignment Effects in a MEMS-based Electron-Optical System Design for Direct-Write Lithography |
| Huang, Cyncia |
Silicon Nanobelt Field Effect Transistors Toward Hepatocellular Carcinoma Detection |
| Huang, Min |
Lift-off Free Nanofabrication of Suspended Plasmonic Nanohole Arrays To Overcome Mass Transport Limitations in Bio-Sensors |
| Huang, Mingyuan |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Hubert, Alexandre |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Huebner-, Uwe |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Huh, Jin Woo |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Huh, Sungmin |
(Invited) Wavelength Specific Reflections--A Decade of EUV Mask Inspection Research
Actinic Imaging and Evaluation of Phase Structures on EUV Lithography Masks
A Study of Extreme Ultraviolet Lithography Defectivity |
| Huq, Ejaz |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control
Application of Hydrogen Silsesquioxane (HSQ) as Etching Mask for Dense and Ultra-Sharp Silicon Tip Arrays |
| Hussain, Zahid |
Ambient Pressure Photoelectron Spectromicroscopy at Advanced Light Source |
| Hutchens, Shelby |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Huynh, Chuong |
Structure and Electrical Properties of Polymer Core-Shell Latex Systems Revealed by Helium Ion Microscopy |
| Hwu, Justin |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications
Improvement of Accuracy of SEM Based Dimensional Metrology |
I |
| Icard, Béatrice |
5kV Multi Electron Beam Lithography: MAPPER Tool and Resist Process Characterization |
| Ide, Shouichi |
Electrical Properties of Transferred Nano Metal Pattern using Metal Oxide Release Layer Method |
| In, Hyun Jin |
Assembling Nanoparticle Catalysts with Nanospheres for Periodic Growth of Carbon Nanotube Arrays |
| Iojoiu, Cristina |
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Iqbal, Zafar |
Carbon Nanotube Cellular Probes |
| Irmscher, Mathias |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Ishida, Yoshihito |
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Ishihara, Sunao |
The Piezoresistive Effect in the 3-D Diamond-Like Carbon Nanostructure Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
Nanostructure Fabrication by Self-Assembly of Block Copolymer on 3-D DLC Structure
Vibration Characteristics of Monolayer Graphene Resonator |
| Ismach, Ariel |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly |
| Itani, Toshiro |
TBAH-based Developer Solutions in Extreme Ultra Violet Lithography |
| Ito, Hiroyuki |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Ivanchikov, Andrei |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Ivanov, Tzvetan |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Iwasa, Masashi |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Iwasa, Masayuki |
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Iwasa, Yoshihiro |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
J |
| Jacobsen, Alan |
Microfluidic Dynamics in Micro-Scale Truss Structures Formed From Self-Propagating Photopolymer Waveguides for Heat Transfer Applications |
| Jain, Faquir |
Novel Lateral Size Reduction Technique to Fabricate sub-12 nm Si Integrated Circuits |
| Jang, Dongchan |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Jang, Jae-Hyung |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Janus, Pawel |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Jaroensri, Ronnachai |
Scaled-Up Optical Simulation of X-Ray Diffraction Microscopy |
| Jedrasik, Piotr |
Writing Strategies for sub-10nm Pattering Node |
| Jehl, Xavier |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Jennings, Andrew |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Jeon, Jaeseok |
Experimental and Simulation Studies on Raman-Enhancing Surface Features from Process-Engineered Substrates |
| Jeong, Jun-Ho |
Fabrication of Si Nanotemplate using Nanosilver Colloids for Anti-Reflection Films. |
| Jernigan, G. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Jernigan, G.G. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Ji, Ran |
Full-field Substrate Conformal Imprint Lithography (SCIL) on Mask Aligners |
| Ji, Shengxiang |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides
Creation of Chemical Pre-patterns from Graphoepitaxially Assembled Block Copolymer Films by Molecular Transfer Printing |
| Jiang, An-Quan |
Characterization of Nanoembossed PZT Ferroelectric Films |
| Jin, Sungho |
Toward Successful Nanoimprint Mould Fabrication: Large Area Hexagonally Ordered Si Daughter Stamps by Guided Anodization
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Joechl, Peter |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Johnson, Eric |
(Invited) Analog Lithography with Phase Masks in Projection Exposure Tools |
| Johnson, Jeremy |
Temporal Coherence Effects on a Low-Cost Interference Lithography System |
| Joshi-Imre, Alexandra |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography
3-D Microfluidics Devices using Ion Beam Lithography
Focused Ion Beam-based Fabrication of sub-200 nm Permalloy Islands for Lorentz TEM |
| Joshi, Bhuwan |
Fabrication and Characterization of Metal-Dielectric-Metal (MDM) Nanoantennas |
| Joshi, Vishwanath |
Si Single Electron Transistor Fabricated by Chemical Mechanical Polishing
Ultrananocrystalline Diamond Nanowires Fabricated using Electron-Beam Lithography and Reactive Ion Etching
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming |
| Jover, Roger Piqueras |
(Invited) Biomolecular-Scale Engineering
Biocompatible Surfaces with Locally Variable Rigidity |
| Joy, David |
(Invited) Re-Inventing the SEM - Electrons, Protons, and Ions |
| Ju, Byeong-Kwon |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Jugessur, Aju |
A Tunable Optofluidic Nano-Bragg Microcavity Filter |
| Jun, David |
A Novel Concept for Producing High Brightness, Low Energy Spread Ion Beams from a Miniaturized Gas Ionization Chamber |
| Jung, Hyunchul |
Single Cell Poly e-caprolacton (PCL) Membrane Electroporation Device for Gene Delivery |
| Jung, Woo-Shik |
Semiconductor Crystal Islands for 3-Dimensional Integration |
| Jung, Yeon Sik |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Jung, Yeon-Sik |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Jung, Yeonwoong |
In situ TEM Investigation of Electrically-Driven Phase Change Behavior in Ge2Sb2Te5 Nanowire Memory Devices |
| Jurchescu, Oana D. |
Flip Chip Lamination Approach to Fabricate Ultrasmooth Metal Contacts for Organic-Based Electronic Devices |
K |
| Kadowaki, Yasuhiro |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Kafesa, Maria |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Kaiblinger, Kurt |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Kalkowski, Gerhard |
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck |
| Kamins, Theodore |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration |
| Kamiya, Yasuhiro |
Assessment of Release Properties on UV-NIL using Nano-Scale High Aspect Ratio Mold |
| Kampherbeek, Bert Jan |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Kanda, Kazuhiro |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Kang, Huiman |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
Directed Assembly of Cylinder-Forming Ternary Blend of Block Copolymer and their Respective Homopolymers on Chemical Patterns with Density Multiplication of Features |
| Kang, Myung-Gyu |
Surface Plasmon Enhanced Efficiency of Organic Solar Cells using Transparent Ag Nanowire Electrodes |
| Kang, Yuji |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition |
| Kanje, Martin |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Kant, Rishi |
Single-Step, Wafer-Scale, Hermetic Sealing Using Silicon Migration |
| Kanwal, Alokik |
Carbon Nanotube Cellular Probes |
| Kaplan, Alex F. |
Ultra-High Aspect Ratio Silicon Dry-Etch Process |
| Kaplan, Alex |
Transmissive Color Filters Fabricated Using Pattern Transfer Lithography |
| Kaplan, David |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Karrai, Khaled |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Kasahara, Yuichi |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Kase, Yuduru |
Low Energy Ar+ ion Beam Machining of ULE® and CLEARCERAM® Substrates for TMT Primary Mirrors |
| Kast, Michael |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp |
| Katase, Tetsuya |
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting |
| Kawakami, Takanori |
Pitch Division by Selective Acid Quenching |
| Kawata, Hiroaki |
Process Simulator for UV-Nanoimprint Lithography
Impact of Wafer Deformation on Demolding Force for Thermal Imprint Process
Impact of Molecular Size on Resist Filling Process in Nanoimprint Lithography : Molecular Dynamics Study |
| Kehagias, Nikolaos |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Kehoe, Tim |
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling |
| Kekura, Mitsuru |
Novel Ozone-based Contamination Cleaning for EUV Optics |
| Kemper, Steve |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Kercher, Dan |
Geometrical Limitations for Ar Ion Beam Etching |
| Kern, Dieter P. |
Gold Nanocone Probes for Near-Field Scanning Optical Microscopy |
| Kern, Dieter P |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Kern, Dieter |
Structured Titanium Surfaces for Biomedical Applications |
| Keszler, Douglas A. |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Keszler, Douglas |
Photopatternable Inorganic Hardmask |
| Khalid, Ata |
Imprinted Quarter Wave Plate at Terahertz Frequency |
| Khine, Michelle |
(Invited) Shrink-Induced Nanofabrication |
| Khizroev, Sakhrat |
Fabrication and Characterization of Giant Magnetoresistive Biosensors for Cancer Diagnostics
Terabit-Per-Square-Inch Magnetic Bit Patterned Media With a 26-nm Pitch and a 9-nm Square Bit
Self-Limiting Low-Energy Glow Discharge Process for Close-Packed Non-Circular Pattern Generation |
| Khokhar, Ali K. |
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling |
| Khondaker, Saiful |
Directed Assembly of Solution Processed Single Walled Carbon Nanotubes via Dielectrophoresis: from Aligned Array to Individual Nanotube Devices |
| Khursheed, Anjam |
Design of Parallel Mass Detection using Focused Ion Beam Columns
A High Resolution Low Noise Secondary Electron Spectrometer for IC Failure Analysis |
| Kidd, Deborah |
Tuning Transport and Two-State Noise in Carbon Nanotubes using Precisely Controlled Electron Beam |
| Kiko, Meisyo |
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting |
| Kim, Byung-Guk |
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography
Experiment-based Estimation of Point Spread Function in Electron-beam Lithography |
| Kim, Chulki |
(Invited) Mode-Locked Nanomechanical Electron Shuttles for Phase Coherent Frequency Conversion |
| Kim, Dae-Wook |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Kim, Ho Seob |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Kim, Hyun Chul |
SERS-Active Substrate Based on Gap Surface Plasmon Polaritons |
| Kim, Hyun-Mi |
Nanostamp with High Density and High Aspect Ratio Over 1 Tera Bit/Inch2 |
| Kim, Jae Hak |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Kim, Jin-Yeol |
Toward Successful Nanoimprint Mould Fabrication: Large Area Hexagonally Ordered Si Daughter Stamps by Guided Anodization
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering |
| Kim, Ju-Young |
(Invited) Focused Ion Beam (FIB), E-beam lithography, and in-situ Microscopy in Investigating Mechanical Properties of Nano-Scale Materials |
| Kim, Ki-Bum |
Nanostamp with High Density and High Aspect Ratio Over 1 Tera Bit/Inch2
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Kim, Kyung Hwan |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Kim, Moon |
(Invited) High Performance Lithographically Defined Back-Gated Si-nanowire MOSFETs with sub-5 nm Channel Width |
| Kim, Nak Hyun |
A Vision-Based Approach to Automated Analysis of Structure Boundaries in SEM Images |
| Kim, Ryoung-han |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Kim, S.-J. |
Fabrication of Nano SQUID in Multilayered Thin Film of Y123/P123 using Focused Ion Beam |
| Kim, Sang Jae |
Nano-scale Stack Fabrication on Thin Graphite Flake using Focused Ion Beam 3-D Etching Technique |
| Kim, Young Chul |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Kim, Young Heon |
TEM Study of Interface Between Silicon Substrate and Platinum Films made by Electron or Ion Beam-Induced Deposition |
| Kimura, Y. |
A Novel Scanning Electron Microscopy with Charging Control |
| Kini, Sumanth |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Kirkendall, Christopher |
Controlled Surface Nanostructures for Performance-Analysis on Solid Support Fuel Cells |
| Kisielowski, C. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Kitano, Junichi |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Klaus, David |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Klein, Mona J. K. |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography |
| Kley, Ernst-Bernard |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Kley, Ernst-Bernhard |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Klingfus, Joseph |
3-D Microfluidics Devices using Ion Beam Lithography |
| Klug, Jeffrey A. |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography |
| Klukowska, Anna |
Fabrication of Mesas with Micro- and Nanopatterned Surface Relief used as Working Stamps for Step & Stamp Imprint Lithography |
| Knuffman, B. |
A Focused Chromium Ion Beam |
| Knuffman, Brenton |
Lithium Ion Source for Focused Ion Beam Microscopy |
| Ko, Fu-Hsiang |
Silicon Nanobelt Field Effect Transistors Toward Hepatocellular Carcinoma Detection |
| Ko, Hyungduk |
Characterization of Less-Diffractive Nano-Scale Beam from a Ring Aperture Type Plasmonic Lens |
| Ko, Ki-Young |
Fabrication of Nanosphere Patterns by Using Micro-contact Transfer Printing |
| Kobayashi, Kei |
Facile Wide-Scale Defect Detection of UV-Nanoimprinted Resist Patterns by Fluorescent Microscopy |
| Koeck, Anton |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Koh, Ai Leen |
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization |
| Koickal, Thomas |
MEMS Systems for Biomimetical Applications |
| Kojima, Shinichi |
(Invited) High-Current Electron Optical Design for REBL Direct Write Lithography |
| Kokkoris, George |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Koleske, Daniel |
Fabrication and Applications of Sub-Micron 2D/3D Periodic Carbon Structures |
| Kolodziejska, Joanna |
Microfluidic Dynamics in Micro-Scale Truss Structures Formed From Self-Propagating Photopolymer Waveguides for Heat Transfer Applications |
| Kometani, Reo |
The Piezoresistive Effect in the 3-D Diamond-Like Carbon Nanostructure Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
Nanostructure Fabrication by Self-Assembly of Block Copolymer on 3-D DLC Structure
Vibration Characteristics of Monolayer Graphene Resonator |
| Kong, Jing |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Kong, Yunchuan |
Parallel Fabrication of down to 3nm Gaps in Metallic Nano-Antennas |
| Kontziampasis, Dimitrios |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Koop, Hans |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Korivi, Naga |
Incorporation of Micro and Nano Scale Porosity on a Silicon Surface |
| Korre, Hasan |
Temporal Coherence Effects on a Low-Cost Interference Lithography System |
| Koshelev, K. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Kostas, Christopher |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Kratschmer, Ernst |
Controlling the Adhesion of Nanoscale Hydrogen Silsesquioxane Patterns |
| Kreindl, Gerald |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp |
| Kreindl, Gerald |
High Accuracy UV-NIL Step and Repeat Master Stamp Fabrication for Wafer-Level Camera Application |
| Kruit, Pieter |
Transmission Images of a 196 Beam Scanning Electron Microscope
Statistical Coulomb Forces In Electron Guns
Ultra Fast Electron Sources A New Conclusion
Ion-Induced Secondary Electron Yields and Simulation of Ion Imaging
A Novel Concept for Producing High Brightness, Low Energy Spread Ion Beams from a Miniaturized Gas Ionization Chamber |
| Ku, Zahyun |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Kuan, Chieh-Hsiung |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography
10 nm Lines with 14 nm Half Pitch Grating Written in HSQ by Electron Beam Direct Write at 5 keV |
| Kubo, Shoichi |
Facile Wide-Scale Defect Detection of UV-Nanoimprinted Resist Patterns by Fluorescent Microscopy |
| Kulalert, Kanokwan |
Scaled-Up Optical Simulation of X-Ray Diffraction Microscopy |
| Kumar, Anil |
Cathodoluminescence Imaging of Plasmonic modes of Au Nanostructures |
| Kuo, David |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Kuo, Yi-Hung |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Kurataka, Nobuo |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Kutkurezovic, Sasa |
Particle Beam Induced Fabrication of Nanoimprint Lithography Templates |
| Kwak, Kwang Joo |
Electrochemical Impedance Spectroscopy Study of Tethered Bilayer Lipid Membranes with Artificial Nanopores |
L |
| LaFontaine, Bruno |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Lahiri, Soumendra |
Robust Estimation of Line Width Roughness (LWR) Parameters |
| Laine, Richard |
Organosilicate Materials for High Resolution Patterning using NIL and Self-Assembly |
| Lakshmanan, Shanmugamurthy |
Carbon Nanotube Cellular Probes |
| Lal, Amit |
Tip-based Precise, Repeatable Etching of Highly Ordered Pyrolytic Graphite
Nanometrology Optical Ruler Imaging System for Wafer-Scale Precision Metrology for Tip-Based Microscopes
Mask Technology for Self-Powered Electron Lithography with sub-35nm Resolution |
| Lamard, Nathalie |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Lambson, Brian |
PEEM Studies of Coupled-Nanomagnet Systems |
| Langston, W |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Lanniel, Mathieu |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control |
| Latif, Rhonira |
MEMS Systems for Biomimetical Applications |
| Laursen, Thomas |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Lausecker, Elisabeth |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| Lawson, Richard |
Understanding the Relationship Between True and Measured Resist Feature CD and LER using a Detailed SEM Simulator
Novel Designs for Non-Chemically Amplified Molecular Resists |
| Lazic, Ivan |
Monte Carlo Simulations to Study FEBID and EBL Resolution Limits |
| Le Gac, Severine |
(Invited) From Cells-on-Chip Towards Lab-in-a-Cell |
| Lecarme, Olivier |
Colloidal Optical Waveguides with Integrated Local Light Sources Built by Capillary Force Assembly
Rotation Speed Control of Janus Particles by Dielectrophoresis in a Microfluidic Channel |
| Lee, Benjamin G. |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Lee, Beomseop |
Terabit-Per-Square-Inch Magnetic Bit Patterned Media With a 26-nm Pitch and a 9-nm Square Bit |
| Lee, Chih-Hsien |
A Novel Method to Fabricate Microlens Array with Normal Subwavelength Structures |
| Lee, Do-Joong |
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Lee, Gil |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Lee, GunHee |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Lee, Hwack Joo |
TEM Study of Interface Between Silicon Substrate and Platinum Films made by Electron or Ion Beam-Induced Deposition |
| Lee, JaeJong |
Fabrication of Ordered Nanospheres using a Combination of Nanoimprint Lithography and Controlled Dewetting
An Experimental Approach to Measurement and Reduction of Demolding Force in UV-Nanoimprint Lithography |
| Lee, Jaesun |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Lee, James L. |
Electrochemical Impedance Spectroscopy Study of Tethered Bilayer Lipid Membranes with Artificial Nanopores |
| Lee, James |
Single Cell Poly e-caprolacton (PCL) Membrane Electroporation Device for Gene Delivery |
| Lee, Jeong-Bong |
Massive Replication of Nanophotonic Crystals using Combined-Nanoimprint-and-Photolithography |
| Lee, Kim |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Lee, Min-Hyun |
Nanostamp with High Density and High Aspect Ratio Over 1 Tera Bit/Inch2
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Lee, Sang-Hee |
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography
Experiment-based Estimation of Point Spread Function in Electron-beam Lithography |
| Lee, Seung-Hyun |
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Lee, Shifu |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Lee, Soo-Young |
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography
Experiment-based Estimation of Point Spread Function in Electron-beam Lithography
A Vision-Based Approach to Automated Analysis of Structure Boundaries in SEM Images |
| Lee, Soon-Won |
Fabrication of Si Nanotemplate using Nanosilver Colloids for Anti-Reflection Films. |
| Lee, Tao-Hua |
Hybrid Solar Cells Based on ZnO Nanoparticles and Nanorods |
| Lee, Y. C. |
The Dispersion of Localized Surface Plasmons in the Gold-Capped Silicon Nitride Rods Photonic Crystal Slab |
| Lee, Yen-Chun |
Si Single Electron Transistor Fabricated by Chemical Mechanical Polishing |
| Leeson, Michael |
High Transmission Pellicles for EUVL Reticle Protection |
| Lemmons, Tiffany |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Lentine, Anthony |
(Invited) Silicon Photonics in High Performance Computing |
| Letzkus, Florian |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Leu, Joshua |
Sub-30-nm Patterning of Au dots on GaAs for Templated Nanowire Growth |
| Leveque, Gatean |
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling |
| Levinson, Harry |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Levush, Baruch |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Lexholm, Monica |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Li, Huifeng |
Ordered Carbon Nanotube Deposition by Electrophoresis-Enhanced Self-Assembly |
| Li, Jianliang |
Reducing the Pattern Redundancy in OPC Modeling by Analyzing the Pattern Linearity |
| Li, Juntao |
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Li, Pengcheng |
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography |
| Li, Wen-Di |
Multiple Double-Nanoimprint Fabrication of Wafer-scale Nanopillar Array Mold with Varying Pillar Shape, Pillar density, and Pillar Spacing Without EBL
Nanoimprint Mold Fabrication by Quantum Lithography on Nanoimprinted Blanks |
| Li, Xu |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs
Copper–Plated 50 nm T–Gate Fabrication |
| Li, Xuema |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Li, Zhiyong |
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Liang, Ted |
A Study of Extreme Ultraviolet Lithography Defectivity
Extreme Ultraviolet Mask Surface Cleaning Effects on Lithography Process Performance |
| Liang, Xiaogan |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly
Nanoimprint Mold Fabrication by Quantum Lithography on Nanoimprinted Blanks
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Liberale, C. |
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Liddle, Alexander |
Measurement of Acid-Generated Latent Image in Polymer Matrix by Fluorescence Microscopy |
| Liddle, J. A. |
A Dry-on, Dry-off, Long Wavelength Photoresist for Nano-Plasmonic Field Metrologoy and Lithography |
| Liddle, J. Alexander |
Noise Measurements for Electron Beam Lithography |
| Lim, Kipil |
Nanostamp with High Density and High Aspect Ratio Over 1 Tera Bit/Inch2 |
| Lin, Chun-Hung |
Monte Carlo Study of Inelastic Scattering Models of Low Energy Electrons |
| Lin, Shy-Jay |
Monte Carlo Study of Inelastic Scattering Models of Low Energy Electrons |
| Lin, Yu-Sheng |
Rapid Ablation of Polymer Film and Self-Aligned Formation Gold Nanoparticles by Localized Joule Heating |
| Lindner, Paul |
High Accuracy UV-NIL Step and Repeat Master Stamp Fabrication for Wafer-Level Camera Application |
| Linsmeier, Cecilia |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Liou, Sy-Hwang |
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Litvinov, Dmitri |
Fabrication and Characterization of Giant Magnetoresistive Biosensors for Cancer Diagnostics
Terabit-Per-Square-Inch Magnetic Bit Patterned Media With a 26-nm Pitch and a 9-nm Square Bit
Self-Limiting Low-Energy Glow Discharge Process for Close-Packed Non-Circular Pattern Generation |
| Litvinov, Julia |
Fabrication and Characterization of Giant Magnetoresistive Biosensors for Cancer Diagnostics |
| Liu, Charlie |
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Liu, Chi-Chun |
The Integration of Block Copolymer Directed Assembly with 193 Immersion Lithography
Evolution of Line Edge and Line Width Roughness in a Frequency Doubling Directed Self Assembly Process
Creation of Chemical Pre-patterns from Graphoepitaxially Assembled Block Copolymer Films by Molecular Transfer Printing |
| Liu, Chun-Hung |
Impacts of Point Spread Function Calibration Methods on Model-Based Proximity Effect Correction for Electron-Beam-Direct-Write Lithography |
| Liu, Fu-Ken |
Silicon Nanobelt Field Effect Transistors Toward Hepatocellular Carcinoma Detection |
| Liu, Guoliang |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Liu, Kun |
Field Induced Shape Modification for the ZrO/W(100) Schottky Cathode |
| Liu, Ran |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control
Characterization of Nanoembossed PZT Ferroelectric Films |
| Liu, Yanwei |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Liu, Zhi |
Ambient Pressure Photoelectron Spectromicroscopy at Advanced Light Source |
| Livengood, Richard |
GFIS & LMIS Charged Particle Material Interaction Study for Semiconductor Nanomachining Applications
Stable Neon Emission from a Gas Field Ion Source |
| Liverale, C. |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution |
| Lo, Joanne |
Fabrication of Large Arrays of Ordered 3D Nanocups for Plasmonic Applications |
| Lobo, Charlene J. |
Gas-Mediated Electron and Ion Beam Induced Deposition using Ammonia as a Purification Medium |
| Lobo, Charlene |
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Loeschner, Hans |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Löffler, Ronny |
(Invited) Application Specific CVD Growth of Carbon Nanotubes
Structured Titanium Surfaces for Biomedical Applications |
| Lombard, Christian |
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Lora-Tamayo, Emilio |
Batch Wafer Fabrication of Passivated Carbon Nanotube Transistors for Electrochemical Sensing Applications |
| Lou, Gang |
(Invited) Molecularly Selective Nanopatterns using Nanoimprint Lithography: A Label-Free Sensor Architecture |
| Lovera, Pierre |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals |
| Low, Hong Yee |
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization |
| Loya, Mariana |
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering |
| Lu, Bing-Rui |
Surface Stiffness Modification by e-beam Irradiation for Stem Cell Growth Control
Characterization of Nanoembossed PZT Ferroelectric Films |
| Lu, Wei |
Application of Hydrogen Silsesquioxane (HSQ) as Etching Mask for Dense and Ultra-Sharp Silicon Tip Arrays |
| Lu, Wu |
Single Cell Poly e-caprolacton (PCL) Membrane Electroporation Device for Gene Delivery
Electrochemical Impedance Spectroscopy Study of Tethered Bilayer Lipid Membranes with Artificial Nanopores
Optical Activities of Nanoscale Planar Spiral Nanotrenches in Titanium Films
Fabrication and Characterization of Metal-Dielectric-Metal (MDM) Nanoantennas |
| Lu, Yuerui |
Mask Technology for Self-Powered Electron Lithography with sub-35nm Resolution |
| Luck, David |
(Invited) Silicon Photonics in High Performance Computing |
| Lugstein, Alois |
Nanowire Synthesis on Catalyst Arrays Produced with Electron Beam Induced Deposition |
| Lundquist, Ted |
Novel Pulsed Spot Milling Technique to Extend Gallium Ion Beam Technology for Circuit Edit |
| Luo, Kang |
(Invited) Defect Inspection for High Volume Patterned Media |
| Luo, Xiangang |
Surface Plasmon Enhanced Efficiency of Organic Solar Cells using Transparent Ag Nanowire Electrodes |
| Luo, Yi |
Parallel Fabrication of down to 3nm Gaps in Metallic Nano-Antennas |
| Luther, Bradley |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
M |
| Ma, Biwu |
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Ma, Yong |
Imprinted Quarter Wave Plate at Terahertz Frequency |
| Maas, Diederik |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| Mabon, James |
Cathodoluminescence Imaging of Plasmonic modes of Au Nanostructures |
| Macintyre, Douglas S. |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs |
| Macintyre, Douglas |
Linewidth Measurement for sub-10 nm Lithography |
| Maenhoudt, Mireille |
Mask Aligner Lithography Simulation |
| Maier, Stefan |
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization |
| Makarewicz, Joseph |
Carbon Nanotube Field Emission Electron Gun Array for Micro-Column Scanning Electron Microsocopy and Maskless Lithography |
| Makarova, Olga |
Nanoporous Ultrananocrystalline Diamond Membranes |
| Makino, H. |
A Novel Scanning Electron Microscopy with Charging Control |
| Malic, Lidija |
Ultrasmooth, 3D Nanostructured Gold Films for Enhanced SPR Detection by Nanoimprint Lithography and Template Stripping |
| Malik, Tahir |
Novel Pulsed Spot Milling Technique to Extend Gallium Ion Beam Technology for Circuit Edit |
| Mancini, Derrick |
Nanowire-Arrays via Block Copolymer Lithography
Ultrananocrystalline Diamond Nanowires Fabricated using Electron-Beam Lithography and Reactive Ion Etching
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming
Fabrication of PEG Hydrogel Particles for Pharmaceutics using Electron Beam and Optical Lithography
Chemical Changes during Exposure of ZEP 520A Electron Beam Resist |
| Manfrinato, Karl Vitor |
Electrochemical Development of Hydrogen Silsesquioxane |
| Manfrinato, Vitor |
Sub-5 keV Scanning-Electron-Beam Lithography
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography |
| Manners, Ian |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Manthena, R. V. |
Deep Subwavelength Patterning via Absorbance Modulation |
| Marconi, Mario |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Martin-Fernandez, Iñigo |
Batch Wafer Fabrication of Passivated Carbon Nanotube Transistors for Electrochemical Sensing Applications |
| Martin, Noel |
(Invited) High Brightness Plasma Ion Source Developments for Next Generation FIB and Surface Analysis |
| Martinez, Javier |
Large-Scale Nanopatterning of Single Proteins used as Carriers of Magnetic Nanoparticles |
| Martinez, Ramses |
Large-Scale Nanopatterning of Single Proteins used as Carriers of Magnetic Nanoparticles |
| Martz, Dale |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Masahiro, Shoji |
Writing Strategies for sub-10nm Pattering Node |
| Mastropaolo, Enrico |
MEMS Systems for Biomimetical Applications
Piezo-Electrically Driven Silicon Carbide Resonators |
| Mathur, Anurag |
(Invited) Biomolecular-Scale Engineering |
| Matison, Dmitri |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Matsue, Masahito |
Impact of Wafer Deformation on Demolding Force for Thermal Imprint Process |
| Matsui, Shinji |
(Invited) Research and Development on Process Science and CD Control in High-Throughput UV Nanoimprint
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System
Facile Wide-Scale Defect Detection of UV-Nanoimprinted Resist Patterns by Fluorescent Microscopy |
| Matusi, Shinji |
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition |
| Mayer, Andre |
(Invited) Convenience of T-NIL with Combined Processing
Positive Resists for a T-NIL / UVL Hybrid Lithography
Sputtering for an Etch-Free Lift-Off in T-NIL |
| Mayer, J. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| McClelland, J.J. |
A Focused Chromium Ion Beam |
| McClelland, Jabez. J |
Lithium Ion Source for Focused Ion Beam Microscopy |
| McComb, David |
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization |
| McCord, Mark |
(Invited) High-Current Electron Optical Design for REBL Direct Write Lithography
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| McIlwrath, Kevin |
Growth of Straight Crystal Silicon Nanowires on Nanopatterned Amorphous Substrate with Uniform Diameter and Length, Preferred Orientation, and Predetermined Location |
| McVey, Shawn |
GFIS & LMIS Charged Particle Material Interaction Study for Semiconductor Nanomachining Applications |
| Mecarini, F. |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Mekaru, Harutaka |
Rapid Patterning of Spin-On-Glass using Ultrasonic Nanoimprint |
| Meliorisz, Balint |
Mask Aligner Lithography Simulation |
| Melngailis, John |
(Invited) Focused Ion Beam Nanofabrication - New Possibilities |
| Melvin, Lawrence |
Reducing the Pattern Redundancy in OPC Modeling by Analyzing the Pattern Linearity
A Non-Delta-Chrome OPC Methodology for Nonlinear Process Models |
| Menon, Rajesh |
Sub-Wavelength Optical Patterning via Optical-Saturable Transformations
Imaging Beyond the Resolution Limit with Far-Field Optics via Absorbance Modulation
Deep Subwavelength Patterning via Absorbance Modulation |
| Menoni, Carmen |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Meyers, Stephen T. |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Mickiewicz, Rafal A. |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Mielczarek, Kamil |
Hole Mobility Enhancement by Chain Alignment in Imprinted P3HT Nanogratings for Organic Solar Cells
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings |
| Mikkelson, Andrew |
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck
Local and Global Response of EUV Reticles due to Entrapped Particles during Exposure Chucking |
| Militsin, Vladimir |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Miller, Andy |
Mask Aligner Lithography Simulation |
| Miller, Charles |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Miller, Christina |
Nanoporous Ultrananocrystalline Diamond Membranes |
| Miller, Marshal |
Application of Kernel Convolution for Complementing Source Mask Optimization |
| Miller, Ron |
High Accuracy UV-NIL Step and Repeat Master Stamp Fabrication for Wafer-Level Camera Application |
| Mino, Hiroyuki |
Nanostructure Fabrication by Self-Assembly of Block Copolymer on 3-D DLC Structure |
| Mittal, Surbhi |
Multiple Double XTEM Sample Preparation of Site Specific Sub-10 nm Si Nanowires |
| Miura, Toshinori |
Novel Ozone-based Contamination Cleaning for EUV Optics |
| Miyake, Hiroto |
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Miyamoto, Iwao |
Low Energy Ar+ ion Beam Machining of ULE® and CLEARCERAM® Substrates for TMT Primary Mirrors |
| Miyamoto, Yoshikazu |
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Miyazawa, Yosuke |
Direct Transformation of a Resist Pattern into a Graphene FET Through Interfacial Graphitization of Liquid Gallium |
| Mkrtchyan, Masis |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Mochi, Iacopo |
(Invited) Wavelength Specific Reflections--A Decade of EUV Mask Inspection Research
Actinic Imaging and Evaluation of Phase Structures on EUV Lithography Masks
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Mohammad, Mohammad Ali |
Nano-Machining of Silicon Carbon Nitride Resonators Using Low Voltage Electron Beam Lithography and Cold Development |
| Moldovan, Nicolaie |
Nanoporous Ultrananocrystalline Diamond Membranes |
| Möllenbeck, Saskia |
(Invited) Convenience of T-NIL with Combined Processing
Positive Resists for a T-NIL / UVL Hybrid Lithography
Sputtering for an Etch-Free Lift-Off in T-NIL |
| Montagne, Franck |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography |
| Montelius, Lars |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays
(Invited) Molecularly Selective Nanopatterns using Nanoimprint Lithography: A Label-Free Sensor Architecture
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Montes, Laurent |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Moon, J. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Moon, J.S. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Moritz, Manuel |
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications |
| Morton, Keith |
Ultrasmooth, 3D Nanostructured Gold Films for Enhanced SPR Detection by Nanoimprint Lithography and Template Stripping |
| Muehlberger, Michael |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Mueller, Michael |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Mueller, Sandra |
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck |
| Mühlberger, Michael |
UV Nanoimprint Lithography and Mold Replication for the Site-Controlled Self-Assembly of Si/Ge Islands |
| Mukaida, M. |
Fabrication of Nano SQUID in Multilayered Thin Film of Y123/P123 using Focused Ion Beam |
| Mukherjee, Pran |
Ultra-High Aspect Ratio Silicon Dry-Etch Process |
| Mulders, Johannes |
Electron Beam Induced Deposition of Gold using the Au(CO)Cl Precursor |
| Murali, Raghu |
Single-step, Complementary Doping of Graphene |
| Muray, Larry |
Blanking Characteristics of a Miniature Electron Beam Column |
| Murphy, Patrick |
Growth of Straight Crystal Silicon Nanowires on Nanopatterned Amorphous Substrate with Uniform Diameter and Length, Preferred Orientation, and Predetermined Location |
| Murray, Lynn |
Microfluidics-assisted Photo Nanoimprint Lithography for the Formation of Cellular Bioimprints |
| Myers-Ward, R. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Myers-Ward, R.L. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
N |
| Nafus, Kathleen |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Nagai, Tomoki |
Pitch Division by Selective Acid Quenching |
| Nagaoka, Yoshinori |
Process Simulator for UV-Nanoimprint Lithography |
| Nagase, Masao |
Vibration Characteristics of Monolayer Graphene Resonator |
| Nagato, Keisuke |
Rapid Thermal Imprint of High-Aspect-Ratio Nanostructures with Dynamic Heating of Mold Surface
Direct Synthesis of Vertical a-Fe2O3 Nanowires from Sputtered Fe Thin Film |
| Nagpal, Umang |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers |
| Nakagawa, Masaru |
(Invited) Research and Development on Process Science and CD Control in High-Throughput UV Nanoimprint |
| Nakagawa, Masaru |
Facile Wide-Scale Defect Detection of UV-Nanoimprinted Resist Patterns by Fluorescent Microscopy |
| Nakai, Yasuki |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition |
| Nakao, Masayuki |
Rapid Thermal Imprint of High-Aspect-Ratio Nanostructures with Dynamic Heating of Mold Surface
Direct Synthesis of Vertical a-Fe2O3 Nanowires from Sputtered Fe Thin Film |
| Nam, Sung-Wook |
In situ TEM Investigation of Electrically-Driven Phase Change Behavior in Ge2Sb2Te5 Nanowire Memory Devices
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Nasrullah, Azeem |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Naulleau, Patrick P. |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Naulleau, Patrick |
Extreme Ultraviolet Mask Surface Cleaning Effects on Lithography Process Performance |
| Nealey, Paul |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
Directed Assembly of Cylinder-Forming Ternary Blend of Block Copolymer and their Respective Homopolymers on Chemical Patterns with Density Multiplication of Features
The Integration of Block Copolymer Directed Assembly with 193 Immersion Lithography
(Invited) Multiscale Modeling of Block Copolymer Directed Assembly and its Application to Sub-Lithographic Patterning
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering
Evolution of Line Edge and Line Width Roughness in a Frequency Doubling Directed Self Assembly Process
Creation of Chemical Pre-patterns from Graphoepitaxially Assembled Block Copolymer Films by Molecular Transfer Printing
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Nemeth, William |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Neureuther, Andrew |
Compensation Methods for Buried Defects in Extreme Ultraviolet Lithography Masks
Application of Kernel Convolution for Complementing Source Mask Optimization |
| Nezich, Daniel |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Ng, Hoi-Tou |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography
Impacts of Point Spread Function Calibration Methods on Model-Based Proximity Effect Correction for Electron-Beam-Direct-Write Lithography |
| Ng, Philip C. W. |
A Non-Delta-Chrome OPC Methodology for Nonlinear Process Models |
| Ng, Philip |
Impacts of Point Spread Function Calibration Methods on Model-Based Proximity Effect Correction for Electron-Beam-Direct-Write Lithography |
| Nguyen, Cattien |
Carbon Nanotube Field Emission Electron Gun Array for Micro-Column Scanning Electron Microsocopy and Maskless Lithography
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Nicolas, Alice |
Fabrication of 3D Structures for the Assessment of Cell Mechanical Interactions within Cell Monolayers |
| Niekrewicz, Brian |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Nielson, Gregory |
(Invited) Silicon Photonics in High Performance Computing |
| Niemann, Darrell |
Carbon Nanotube Field Emission Electron Gun Array for Micro-Column Scanning Electron Microsocopy and Maskless Lithography
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Nill, Peter |
Gold Nanocone Probes for Near-Field Scanning Optical Microscopy
Structured Titanium Surfaces for Biomedical Applications |
| Nishi, Yoshio |
Nano-Bridge FET Array for DNA Hybridization Detection |
| Nishijima, Takahiro |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Nishiyama, Iwao |
Novel Ozone-based Contamination Cleaning for EUV Optics
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Nishiyama, Yasushi |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Nock, Volker |
Microfluidics-assisted Photo Nanoimprint Lithography for the Formation of Cellular Bioimprints |
| Noga, David |
Effect of Crosslinker Structure on a Novel Post-Development Strategy to Prevent Pattern Collapse in Photoresist Nanostructures
Comparison of Positive Tone vs. Negative Tone Resist Pattern Collapse Behavior |
| Noh, Kunbae |
Toward Successful Nanoimprint Mould Fabrication: Large Area Hexagonally Ordered Si Daughter Stamps by Guided Anodization
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering |
| Nojeh, Alireza |
Monte Carlo Modeling of Electron Backscattering from Carbon Nanotube Forests |
| Nottbohm, C.T. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Notte, John |
An Analysis of Sub-Surface Beam Spread and its Impact on the Image Resolution of the Helium Ion Microscope
GFIS & LMIS Charged Particle Material Interaction Study for Semiconductor Nanomachining Applications
Stable Neon Emission from a Gas Field Ion Source |
| Nygård, Kim |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
O |
| O’Reilly, Thomas |
Imaging Beyond the Resolution Limit with Far-Field Optics via Absorbance Modulation |
| Ocola, Leonidas |
3-D Microfluidics Devices using Ion Beam Lithography
Ultrananocrystalline Diamond Nanowires Fabricated using Electron-Beam Lithography and Reactive Ion Etching
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming
Chemical Changes during Exposure of ZEP 520A Electron Beam Resist |
| Ofuonye, Benedict |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Ogata, Toshiyuki |
Pitch Division by Selective Acid Quenching |
| Ogletree, Frank |
Manipulating the Local Symmetry and Geometry of Bowtie Optical Antennae for Controlling Spectral Properties while Maintaining the Near-Field Enhancement |
| Oh, Tae-Sik |
The Inspection of Open Defects in a TFT-LCD Panel by using Low Energy Electron Microcolumn |
| Oh, Young |
Long-Range Ordered Aluminum Oxide Nanotubes by Nanoimprint-Assisted Aluminum Film Surface Engineering
Enhanced Magnetic Properties of Bit Patterned Magnetic Recording Media by Improved Magnetic Island Geometry |
| Ohta, H. |
A Novel Scanning Electron Microscopy with Charging Control |
| Okada, Makoto |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist
Evaluating Mechanical Characteristics of Various Shape Nanosprings Fabricated by Focused-ion-beam Chemical Vapor Deposition
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Olynick, Deirdre |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly
Nanoimprint-Induced Molecular Stacking and Pattern Stabilization in Small-Molecular Organic Compounds for Photovoltaic Applications
Methylsilsesquioxane (MSQ) - A Novel Resist for Electron Beam Lithography |
| Omenetto, Fiorenzo |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays |
| Ominami, Y. |
A Novel Scanning Electron Microscopy with Charging Control |
| Omoto, Shinya |
Nanoimprint Replication of Three-Dimensional Structure Fabricated by FIB-CVD
New Method of EB Exposure Stability using HSQ High-Resolution Negative Resist |
| Ono, Susumu |
10 nm Lines with 14 nm Half Pitch Grating Written in HSQ by Electron Beam Direct Write at 5 keV |
| Orloff, Jon |
Lithium Ion Source for Focused Ion Beam Microscopy |
| Orlov, Alexei O. |
Fabrication of Platinum Single-Electron Transistors with Tunnel Barriers Made by Atomic Layer Deposition |
| Orlov, Alexei |
Experimental Demonstration of Hybrid SET-CMOS Circuits
Si Single Electron Transistor Fabricated by Chemical Mechanical Polishing |
| Oscar, Vazquez-Mena |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography |
| Ostrizinski, Ute |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Ou, Fung Suong |
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Overcash, Jerald |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Overzet, Lawrence |
Understanding the Regrowth Mechanism of Multi-Walled Carbon Nanotube Forests |
| Ovtchinnikov, Serguei |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Oxland, Richard K |
Copper–Plated 50 nm T–Gate Fabrication |
P |
| Pahlovy, S.A. |
Low Energy Ar+ ion Beam Machining of ULE® and CLEARCERAM® Substrates for TMT Primary Mirrors |
| Pain, Laurent |
5kV Multi Electron Beam Lithography: MAPPER Tool and Resist Process Characterization |
| Palacios, Edgar |
3-D Microfluidics Devices using Ion Beam Lithography |
| Palacios, Tomas |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Palma, Matteo |
(Invited) Biomolecular-Scale Engineering
Lithographically Driven Nanoscale Assembly of DNA Nanostructures |
| Papadimitrakopoulos, Fotios |
Novel Lateral Size Reduction Technique to Fabricate sub-12 nm Si Integrated Circuits |
| Papenheim, Marc |
Sputtering for an Etch-Free Lift-Off in T-NIL |
| Pareta, Rajesh |
Understanding Biology Through Nanostructured Interfaces |
| Pargon, Erwine |
Real Time Scatterometry for 193 nm Photoresist Trimming Monitoring: Influence of the Refractive Index Modification on CD Accuracy |
| Parizi, Kosar |
Nano-Bridge FET Array for DNA Hybridization Detection |
| Park, Byong Chon |
TEM Study of Interface Between Silicon Substrate and Platinum Films made by Electron or Ion Beam-Induced Deposition |
| Park, Hui Joon |
Surface Plasmon Enhanced Efficiency of Organic Solar Cells using Transparent Ag Nanowire Electrodes |
| Park, Jin-Hong |
Semiconductor Crystal Islands for 3-Dimensional Integration |
| Park, Moonkyu |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography |
| Park, Sang-Su |
Fabrication of Nanosphere Patterns by Using Micro-contact Transfer Printing |
| Park, Seong-Je |
Fabrication of Si Nanotemplate using Nanosilver Colloids for Anti-Reflection Films. |
| Park, Sunggook |
An Experimental Approach to Measurement and Reduction of Demolding Force in UV-Nanoimprint Lithography |
| Park, Yoon Chang |
TEM Study of Interface Between Silicon Substrate and Platinum Films made by Electron or Ion Beam-Induced Deposition |
| Patel, Kedar |
Evolution of Line Edge and Line Width Roughness in a Frequency Doubling Directed Self Assembly Process
Robust Estimation of Line Width Roughness (LWR) Parameters |
| Patil, Deepak |
Assessment of IP Error Compensation Techniques for EUVL |
| Patlolla, Anitha |
Carbon Nanotube Cellular Probes |
| Pauliac-Vaujour, Sebastien |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET)
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Pease, Fabian |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration
Algorithmic Reconstruction Methods in Diffraction Microscopy using a Priori Information
Semiconductor Crystal Islands for 3-Dimensional Integration |
| Pease, R. Fabian W. |
Coherent Diffractive Imaging for Extended Samples with a Pre-defined Illumination Pattern |
| Pease, R. Fabian |
Scaled-Up Optical Simulation of X-Ray Diffraction Microscopy |
| Peckerar, Martin |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Pei, Ting-Han |
Analysis of Fabrication Misalignment Effects in a MEMS-based Electron-Optical System Design for Direct-Write Lithography
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Penciu, Raluca |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Peng, Tz-Shiuan |
Fabrication of Binary Phase Grating on the Fiber End by using Two- Beam Interference Lithography |
| Penzo, Erika |
(Invited) Biomolecular-Scale Engineering
Lithographically Driven Nanoscale Assembly of DNA Nanostructures |
| Pépin-Donat, Brigitte |
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Perera, Ginusha |
Noise Measurements for Electron Beam Lithography |
| Perez-Murano, Francesc |
Batch Wafer Fabrication of Passivated Carbon Nanotube Transistors for Electrochemical Sensing Applications |
| Peroz, Christophe |
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Perozziello, Eric |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration |
| Pertsch, Thomas |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Petford-Long, Amanda K. |
Focused Ion Beam-based Fabrication of sub-200 nm Permalloy Islands for Lorentz TEM |
| Petillo, John |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Peto, Lloyd |
3-D Microfluidics Devices using Ion Beam Lithography |
| Petric, Paul |
(Invited) High-Current Electron Optical Design for REBL Direct Write Lithography
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Pettersson, Lina |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Peyrade, David |
Colloidal Optical Waveguides with Integrated Local Light Sources Built by Capillary Force Assembly
Rotation Speed Control of Janus Particles by Dielectrophoresis in a Microfluidic Channel
Fabrication of 3D Structures for the Assessment of Cell Mechanical Interactions within Cell Monolayers |
| Pfeiffer, Karl |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Phatak, Charudatta |
Focused Ion Beam-based Fabrication of sub-200 nm Permalloy Islands for Lorentz TEM |
| Phillips, Matthew |
Effect of Precursor Sticking Coefficient on Electron Beam Induced Deposition and Etching |
| Physics, Oregon |
(Invited) High Brightness Plasma Ion Source Developments for Next Generation FIB and Surface Analysis |
| Pianetta, Piero |
Algorithmic Reconstruction Methods in Diffraction Microscopy using a Priori Information
Coherent Diffractive Imaging for Extended Samples with a Pre-defined Illumination Pattern |
| Pickard, Dan |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration |
| Pickett, Matthew |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Pierre, Mathieu |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Pinedo-Rivera, Tatiana |
Colloidal Optical Waveguides with Integrated Local Light Sources Built by Capillary Force Assembly |
| Pipelka, Friedrich |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Platzgummer, Elmar |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Pollock, Clifford |
Tip-based Precise, Repeatable Etching of Highly Ordered Pyrolytic Graphite
Nanometrology Optical Ruler Imaging System for Wafer-Scale Precision Metrology for Tip-Based Microscopes |
| Polsky, Ronen |
Fabrication and Applications of Sub-Micron 2D/3D Periodic Carbon Structures |
| Popova, Vera |
Organosilicate Materials for High Resolution Patterning using NIL and Self-Assembly |
| Postma, Ferry |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Potyrailo, Radislav |
Fabrication and Characterization of Ultrahigh Aspect Ratio vias in Gold using the Helium Ion Microscope |
| Poulain, Christophe |
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Poutous, M. |
(Invited) Analog Lithography with Phase Masks in Projection Exposure Tools |
| Prager, Aaron |
Experimental Demonstration of Hybrid SET-CMOS Circuits |
| Premnath, Ramesh N. |
Fabrication of Nanoscale BiFeO3 Thin Film-Based Capacitors using Combined Electron-Beam and Focused Ion-Beam Lithography |
| Pret, Alessandro Vaglio |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Previtali, Bernard |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Prinz, Christelle N |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Prinz, Christelle |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Prodan, Camelia |
Carbon Nanotube Cellular Probes |
| Proietti, R. |
3D Adiabatic Compression of Plasmon Polariton for Nanomapping Below 10nm Resolution
(Invited) 3D Adiabatic Compression of Plasmon Polariton for Nanomapping at 10 nm Resolution |
| Pshenay-Severin, Ekaterina |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Pud, Alexander |
Structure and Electrical Properties of Polymer Core-Shell Latex Systems Revealed by Helium Ion Microscopy |
| Pugin, Raphael |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography |
Q |
| Qi, Minghao |
Fast Turn-Around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals
Fabrication of Silver Nano Slit Chain Waveguides for Surface Enhanced Raman Scattering
Smooth Suspended Silicon Nanowires for Light Emission Applications
Sub-10nm Lines using PMMA and HSQ Double Patterning
Dry Development of HSQ in Chlorine Plasma |
| Qu, Xin-Ping |
Characterization of Nanoembossed PZT Ferroelectric Films |
R |
| Racine, Georges-Andre |
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Rack, Philip |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition |
| Rad, Leili Baghaei |
Algorithmic Reconstruction Methods in Diffraction Microscopy using a Priori Information
Scaled-Up Optical Simulation of X-Ray Diffraction Microscopy |
| Rahman, Faridur |
Stable Neon Emission from a Gas Field Ion Source |
| Raith, |
3-D Microfluidics Devices using Ion Beam Lithography |
| Raman, Mahmud |
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Ramanathan, Muruganathan |
Nanowire-Arrays via Block Copolymer Lithography |
| Ramaswamy, Vasu |
Local and Global Response of EUV Reticles due to Entrapped Particles during Exposure Chucking |
| Randolph, Steven J. |
Gas-Mediated Electron and Ion Beam Induced Deposition using Ammonia as a Purification Medium |
| Rangelow, Ivo W. |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Rathsack, Benjamen |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Raub, Alex |
The Integration of Block Copolymer Directed Assembly with 193 Immersion Lithography
Large Area 3D Photonic Crystals with Embedded Waveguides |
| Reboud, Vincent |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Redmond, Gareth |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals |
| Regonda, Suresh |
Reliable Si Nanowire FETs Defined by Lithography for pH Sensing and Ultrasensitive Detection of Protein |
| Ren, Liping |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Resnick, Douglas |
(Invited) Defect Inspection for High Volume Patterned Media |
| Retterer, Scott T. |
Nanostructured Silicon Membranes for Control of Molecular Transport |
| Retterer, Scott |
Understanding Biology Through Nanostructured Interfaces |
| Reyntjens, Steve |
Towards Automated Fabrication of 3D Photonic Devices by Focused Ion Beam |
| Ribaya, Bryan |
Carbon Nanotube Field Emission Electron Gun Array for Micro-Column Scanning Electron Microsocopy and Maskless Lithography
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Ribeiro, Gilberto |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Richter, Curt A. |
Flip Chip Lamination Approach to Fabricate Ultrasmooth Metal Contacts for Organic-Based Electronic Devices |
| Rio, David |
5kV Multi Electron Beam Lithography: MAPPER Tool and Resist Process Characterization |
| Risse, Stefan |
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck |
| Ritala, Mikko |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Ritter, Daniel |
Mask Aligner Lithography Simulation |
| Ritz, Yvonne |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Ro, Hyun Wook |
Organosilicate Materials for High Resolution Patterning using NIL and Self-Assembly |
| Roberts, Jeanette |
Pitch Division by Selective Acid Quenching |
| Robinson, J.A. |
Materials Issues Impacting GHz Devices from Epitaxial Graphene on SiC |
| Rocca, Jorge |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Roche, Benoit |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Rödiger, Peter |
Experimental Evaluation of Gas-Flux Distribution with Gas Injection Systems for Focused Beam Induced Deposition
Thermally Assisted Focused Electron Beam Induced Deposition
Electron Beam Induced Etching of Silicon using Chlorine Gas
Nanowire Synthesis on Catalyst Arrays Produced with Electron Beam Induced Deposition |
| Romero-Vivas, Javier |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals |
| Rooks, Michael |
Analysis of Electron-Beam Deflection Noise with Open-Source Software |
| Roper, Christopher |
Microfluidic Dynamics in Micro-Scale Truss Structures Formed From Self-Propagating Photopolymer Waveguides for Heat Transfer Applications |
| Rosenmann, Daniel |
Nanoporous Ultrananocrystalline Diamond Membranes |
| Ross, Caroline A. |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Rossnagel, Stephen M. |
Sub-10 nm Nanochannel Fabrications by Self-Sealing and Self-Limiting Atomic Layer Deposition |
| Roth, Z. |
(Invited) Analog Lithography with Phase Masks in Projection Exposure Tools |
| Roussel, Laurent |
Towards Automated Fabrication of 3D Photonic Devices by Focused Ion Beam |
| Ruan, Xiaodong |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Ruchhoeft, Paul |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions
Self-Limiting Low-Energy Glow Discharge Process for Close-Packed Non-Circular Pattern Generation |
| Ryu, Geunmin |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
S |
| Saha, Shimul C. |
Imprinted Quarter Wave Plate at Terahertz Frequency |
| Saini, S. |
Fabrication of Nano SQUID in Multilayered Thin Film of Y123/P123 using Focused Ion Beam |
| Saito, Takeshi |
Direct Transformation of a Resist Pattern into a Graphene FET Through Interfacial Graphitization of Liquid Gallium |
| Sakai, Nobuji |
Adhesion Force Evaluation of UV-Curable Nanoimprint Resins by Scanning Probe Microscopy with UV Irradiation System |
| Sakdinawat, Anne |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Salamasi, Farhad |
High Transmission Pellicles for EUVL Reticle Protection |
| Salem, Bassem |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Salemink, H.W.M. |
Cl2-based ICP Etching of Photonic Crystals for the Visible Spectrum in GaN and SiC |
| Salemink, Huub W.M. |
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| Salemink, Huub |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition |
| Salhi, Billel |
Diblock Copolymers Technology for Silicon Nanowires/Nanodots Elaboration |
| Salmassi, Farhad |
Extreme Ultraviolet Mask Substrate Surface Roughness Effects on Lithographic Patterning |
| Samantaray, Chandan. B. |
Photopatterning 3-Amino-Propyl-Triethoxy-Silane (APTES) Self-Assembled Molecular Layers on Alumina |
| Samsuri, Fahmi |
Microfluidics-assisted Photo Nanoimprint Lithography for the Formation of Cellular Bioimprints |
| Samuelson, Lars |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Sanford, Colin A. |
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| Sanford, Colin |
An Analysis of Sub-Surface Beam Spread and its Impact on the Image Resolution of the Helium Ion Microscope |
| Sannomiya, Takumi |
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Sanquer, Marc |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Santillan, Julius Joseph |
TBAH-based Developer Solutions in Extreme Ultra Violet Lithography |
| Sarov, Yanko |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Sasaki, Mio |
Direct Transformation of a Resist Pattern into a Graphene FET Through Interfacial Graphitization of Liquid Gallium |
| Satapathy, D. |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Sathyapalan, Amarachand |
Sub-Wavelength Optical Patterning via Optical-Saturable Transformations |
| Sato, Hidetoshi |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Savu, Veronica |
Nanoporous SiN Membranes Patterned by Wafer-Scale Nanosphere Lithography
Flexible Membranes Improve Resolution in Stencil Lithography
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Schäfer, Christian |
Gold Nanocone Probes for Near-Field Scanning Optical Microscopy |
| Schardein, Gregory |
Focused Electron-Beam-Induced Deposition of Platinum and Gold Nanostructures from Aqueous Solutions |
| Schattenburg, Mark L. |
Ultra-High Aspect Ratio Silicon Dry-Etch Process |
| Scheer, Hella-Christin |
(Invited) Convenience of T-NIL with Combined Processing
Positive Resists for a T-NIL / UVL Hybrid Lithography
Sputtering for an Etch-Free Lift-Off in T-NIL |
| Scheer, Steven |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Scherer, Axel |
Silicon Nanowires Fabricated using FIB Implanted Gallium Etch Masks for Plasma Etching |
| Schiavone, Patrick |
Real Time Scatterometry for 193 nm Photoresist Trimming Monitoring: Influence of the Refractive Index Modification on CD Accuracy |
| Schift, Helmut |
Fabrication of Ordered Nanospheres using a Combination of Nanoimprint Lithography and Controlled Dewetting
Fabrication of Mesas with Micro- and Nanopatterned Surface Relief used as Working Stamps for Step & Stamp Imprint Lithography |
| Schleunitz, Arne |
Fabrication of Ordered Nanospheres using a Combination of Nanoimprint Lithography and Controlled Dewetting
Fabrication of Mesas with Micro- and Nanopatterned Surface Relief used as Working Stamps for Step & Stamp Imprint Lithography |
| Schmid, Gerard |
(Invited) Defect Inspection for High Volume Patterned Media |
| Schmidt, Holger |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Schneider, Kerstin |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Schnurbusch, Daniel |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Schoeftner, Rainer |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Schouenborg, Jens |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Schrempel, Frank |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Schuck, Jim |
Manipulating the Local Symmetry and Geometry of Bowtie Optical Antennae for Controlling Spectral Properties while Maintaining the Near-Field Enhancement |
| Schvartzman, Mark |
(Invited) Biomolecular-Scale Engineering |
| Schwind, Greg |
Field Induced Shape Modification for the ZrO/W(100) Schottky Cathode
Accurate Calculation of the Field Factor for the Schottky Cathode |
| Science, 4Wind |
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Scipioni, Larry |
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition
Structure and Electrical Properties of Polymer Core-Shell Latex Systems Revealed by Helium Ion Microscopy
Fabrication and Characterization of Ultrahigh Aspect Ratio vias in Gold using the Helium Ion Microscope |
| Scott, Dane |
Novel Pulsed Spot Milling Technique to Extend Gallium Ion Beam Technology for Circuit Edit |
| Seagate |
Improvement of Accuracy of SEM Based Dimensional Metrology |
| Seo, Sungkyu |
Characterization of Less-Diffractive Nano-Scale Beam from a Ring Aperture Type Plasmonic Lens |
| Shao, Feng |
(Invited) Mask topography Induced Phase Effects and Wave Aberrations in Optical and EUV Lithography |
| Shearn, Michael |
Silicon Nanowires Fabricated using FIB Implanted Gallium Etch Masks for Plasma Etching |
| Sheetz, Michael |
(Invited) Biomolecular-Scale Engineering |
| Shekhar, Shashank |
Directed Assembly of Solution Processed Single Walled Carbon Nanotubes via Dielectrophoresis: from Aligned Array to Individual Nanotube Devices |
| Shen, Yu-Tian |
Impacts of Point Spread Function Calibration Methods on Model-Based Proximity Effect Correction for Electron-Beam-Direct-Write Lithography |
| Shen, Zhen-Kui |
Characterization of Nanoembossed PZT Ferroelectric Films |
| Sherlock, Tim |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Sheu, Jeng-Tzong |
Rapid Ablation of Polymer Film and Self-Aligned Formation Gold Nanoparticles by Localized Joule Heating |
| Shi, Chuan |
Pitch Division by Selective Acid Quenching |
| Shibata, Mayuko |
Process Simulator for UV-Nanoimprint Lithography |
| Shima, Darryl |
GFIS & LMIS Charged Particle Material Interaction Study for Semiconductor Nanomachining Applications |
| Shimotani, Hidekazu |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Shinada, H. |
A Novel Scanning Electron Microscopy with Charging Control |
| Shite, Hideo |
(Invited) RLS Performance Tradeoffs for a Polymer Bound PAG EUV Resist |
| Shroff, Yashesh |
High Transmission Pellicles for EUVL Reticle Protection |
| Shtokhamer, Roman |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Shyu, J. H. |
The Dispersion of Localized Surface Plasmons in the Gold-Capped Silicon Nitride Rods Photonic Crystal Slab |
| Sidler, Katrin |
Flexible Membranes Improve Resolution in Stencil Lithography
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Sidorkin, Vadim A. |
Monte Carlo Simulations to Study FEBID and EBL Resolution Limits |
| Sijbrandij, Sybren |
An Analysis of Sub-Surface Beam Spread and its Impact on the Image Resolution of the Helium Ion Microscope |
| Silan, Jeremy |
An Empirical Study of Field Emission Properties of a Single Toroid Carbon Nanotube Pillar Electron Source |
| Silver, Charlie |
Blanking Characteristics of a Miniature Electron Beam Column |
| Simpson, Michael |
Understanding Biology Through Nanostructured Interfaces |
| Sinclair, M. B. |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Sinclair, Michael |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Sinha, Preetish |
Local and Global Response of EUV Reticles due to Entrapped Particles during Exposure Chucking |
| Sixt, Pierre |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET) |
| Skinner, Jack |
Fabrication of Large Arrays of Ordered 3D Nanocups for Plasmonic Applications
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Slabbekoorn, John |
Mask Aligner Lithography Simulation |
| Sleight, Jefftey |
Multiple Double XTEM Sample Preparation of Site Specific Sub-10 nm Si Nanowires |
| Smayling, Michael |
(Invited) A 1D Gridded Design Style for Hybrid Optical and e-Beam Patterning |
| Smentkowski, Vincent |
Fabrication and Characterization of Ultrahigh Aspect Ratio vias in Gold using the Helium Ion Microscope |
| Smith, Bruce |
Photopatternable Inorganic Hardmask
Projection Lithography Below Lambda/7 through DUB Evanescent Optical Imaging |
| Smith, Daryl |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition |
| Smith, Henry |
Sub-5 keV Scanning-Electron-Beam Lithography
Imaging Beyond the Resolution Limit with Far-Field Optics via Absorbance Modulation
Equivalent Phase-Shift Bragg Gratings on SOI using Optical Lithography |
| Smith, Leslie |
MEMS Systems for Biomimetical Applications |
| Smith, Noel |
(Invited) High Brightness Plasma Ion Source Developments for Next Generation FIB and Surface Analysis |
| Smolev, Svyatoslav |
Experimental Demonstration of Resonant Coupling to a Dipole Absorber Inside a Metamaterial: Hybridization of the Negative Index Response |
| Smyrnakis, Athanasios |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Snider, Gregory L. |
Fabrication of Platinum Single-Electron Transistors with Tunnel Barriers Made by Atomic Layer Deposition |
| Snider, Gregory |
Experimental Demonstration of Hybrid SET-CMOS Circuits
Si Single Electron Transistor Fabricated by Chemical Mechanical Polishing |
| Solak, Harun |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Solano, Raymond |
(Invited) Biomolecular-Scale Engineering |
| Soles, Christopher |
Organosilicate Materials for High Resolution Patterning using NIL and Self-Assembly |
| Son, Il-Seok |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Son, Jeong Gon |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Sotomayor-Torres, Clivia |
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Soukoulis, C.M. |
3D Metamaterials made of Gold Fabricated by Nanoimprint Lithography |
| Spallas, James |
Blanking Characteristics of a Miniature Electron Beam Column |
| Spanos, Costas |
Robust Estimation of Line Width Roughness (LWR) Parameters |
| Spreu, Christian |
Fabrication of Ordered Nanospheres using a Combination of Nanoimprint Lithography and Controlled Dewetting
Fabrication of Mesas with Micro- and Nanopatterned Surface Relief used as Working Stamps for Step & Stamp Imprint Lithography |
| Sreenivasan, S. V. |
(Invited) Defect Inspection for High Volume Patterned Media |
| Srijanto, Bernadeta R. |
Nanostructured Silicon Membranes for Control of Molecular Transport |
| Srinivasan, P. |
(Invited) Analog Lithography with Phase Masks in Projection Exposure Tools |
| Stamm, Boris |
(Invited) Application Specific CVD Growth of Carbon Nanotubes |
| Steele, A.V. |
A Focused Chromium Ion Beam |
| Steele, Adam V. |
Lithium Ion Source for Focused Ion Beam Microscopy |
| Stein, Gila |
Noise Measurements for Electron Beam Lithography
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions |
| Steinhaus, Charles |
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Stepanova, M. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Stepanova, Maria |
Nano-Machining of Silicon Carbon Nitride Resonators Using Low Voltage Electron Beam Lithography and Cold Development |
| Stevens, Jeff |
Bi-Level Micro- and Nano-Patterning of Functional Electronic Oxides |
| Stokes, Paul |
Directed Assembly of Solution Processed Single Walled Carbon Nanotubes via Dielectrophoresis: from Aligned Array to Individual Nanotube Devices |
| Stosch, R. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Stowers, Jason |
Photopatternable Inorganic Hardmask |
| Strahan, J. R. |
A Dry-on, Dry-off, Long Wavelength Photoresist for Nano-Plasmonic Field Metrologoy and Lithography |
| Straw, Marcus |
Employing Reactive Gas-phase Etch Precursors to Mitigate Redeposition During Ultrashort Pulsed Laser Ablation |
| Strobel, Sebastian |
Controlled Surface Nanostructures for Performance-Analysis on Solid Support Fuel Cells
Electrochemical Development of Hydrogen Silsesquioxane |
| Stroup, Charles |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Structures, Periodic |
(Invited) A 1D Gridded Design Style for Hybrid Optical and e-Beam Patterning |
| Studies, Advanced |
Optimized Reactive Ion Etching for Fabrication of PhoXonic Crystals |
| Stuen, Karl |
Directed Assembly of Cylinder-Forming Ternary Blend of Block Copolymer and their Respective Homopolymers on Chemical Patterns with Density Multiplication of Features
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| Su, Hsin-Hung |
10 nm Lines with 14 nm Half Pitch Grating Written in HSQ by Electron Beam Direct Write at 5 keV |
| Su, Zhenpeng |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Sue, Hung-Jue |
Hybrid Solar Cells Based on ZnO Nanoparticles and Nanorods
Ordered Carbon Nanotube Deposition by Electrophoresis-Enhanced Self-Assembly |
| Suga, Osamu |
Novel Ozone-based Contamination Cleaning for EUV Optics
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Sumant, Anirudha |
Nanowire-Arrays via Block Copolymer Lithography
Ultrananocrystalline Diamond Nanowires Fabricated using Electron-Beam Lithography and Reactive Ion Etching
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming |
| Sun, Jie |
Equivalent Phase-Shift Bragg Gratings on SOI using Optical Lithography |
| Sun, Kai |
Optical Activities of Nanoscale Planar Spiral Nanotrenches in Titanium Films
Fabrication and Characterization of Metal-Dielectric-Metal (MDM) Nanoantennas |
| Suthar, Kamlesh |
Fabrication of PEG Hydrogel Particles for Pharmaceutics using Electron Beam and Optical Lithography |
| Suyatin, Dmitry B |
Fifteen-picoNewton Force Detection from Neural Growth Cones using Nanowire Arrays |
| Suzuki, Makoto |
Simulation of SEM Images Taking into Account Local and Global Electromagnetic Fields |
| Swanson, Lyn |
Accurate Calculation of the Field Factor for the Schottky Cathode |
| Swanson, Lynwood |
Field Induced Shape Modification for the ZrO/W(100) Schottky Cathode |
| Szabo, Zs. |
Simulator for Electron Beam Lithography (EBL) of Nanostructures |
| Szmigiel, D. |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
T |
| Tada, Yasuhiko |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Taga, Akihiro |
Impact of Molecular Size on Resist Filling Process in Nanoimprint Lithography : Molecular Dynamics Study |
| Takagi, Noriaki |
Novel Ozone-based Contamination Cleaning for EUV Optics |
| Takahashi, Junki |
Assessment of Release Properties on UV-NIL using Nano-Scale High Aspect Ratio Mold |
| Takahashi, Masaharu |
Rapid Patterning of Spin-On-Glass using Ultrasonic Nanoimprint |
| Takamura, M. |
Fabrication of Nano SQUID in Multilayered Thin Film of Y123/P123 using Focused Ion Beam |
| Takenaka, Mikihito |
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends |
| Tan, Shida |
GFIS & LMIS Charged Particle Material Interaction Study for Semiconductor Nanomachining Applications
Stable Neon Emission from a Gas Field Ion Source |
| Tanaka, Toshihiko |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Tanaka, Yusuke |
Observation and Modeling of Asymmetric Carbon Contamination Growth on SFET-Exposed Mask |
| Tang, Cha-Mei |
Nanoporous Ultrananocrystalline Diamond Membranes |
| Taniguchi, Jun |
Fabrication of Seamless Three-Dimensional Roll Mold using Electron Beam Direct Writing to Rotating Cylindrical Substrate
Electrical Properties of Transferred Nano Metal Pattern using Metal Oxide Release Layer Method
Assessment of Release Properties on UV-NIL using Nano-Scale High Aspect Ratio Mold |
| Tansarawiput, Chookiat |
Smooth Suspended Silicon Nanowires for Light Emission Applications |
| Thayne, Iain G. |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs |
| Thayne, Iain G |
Copper–Plated 50 nm T–Gate Fabrication |
| Thiel, Brad |
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Thoms, Stephen |
Linewidth Measurement for sub-10 nm Lithography
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs |
| Tian, Ruhai |
Reliable Si Nanowire FETs Defined by Lithography for pH Sensing and Ultrasensitive Detection of Protein |
| Tiberio, Richard |
Analysis of Electron-Beam Deflection Noise with Open-Source Software |
| Tileli, Vasiliki |
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Tirado, Jose Maria |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Tolbert, Laren |
Effect of Crosslinker Structure on a Novel Post-Development Strategy to Prevent Pattern Collapse in Photoresist Nanostructures
Novel Designs for Non-Chemically Amplified Molecular Resists
Comparison of Positive Tone vs. Negative Tone Resist Pattern Collapse Behavior |
| Tone, Katsuhiko |
Durability Evaluation of Antisticking Layer by Step and Repeat UV Nanoimprinting |
| Torres, Clivia M. Sotomayor |
Surface Emitting Lasers with Two-Dimensional Nanoimprinted Photonic Crystals
Exciton-Plasmon Coupling in Nanoimprinted Plasmonic Crystals for Light Extraction Coupling |
| Toth, Milos |
Gas-Mediated Electron and Ion Beam Induced Deposition using Ammonia as a Purification Medium
Condensed Phase Electron Beam-Induced-Deposition: 3D Lithography and Growth Rate Enhancement using Cryogenic Cooling
Employing Reactive Gas-phase Etch Precursors to Mitigate Redeposition During Ultrashort Pulsed Laser Ablation
Structure of Nanocomposites Grown By Electron Beam Induced Deposition |
| Treiblmayr, Dominik |
Nanoimprint Lithography from CHARPAN Tool exposed Master Stamps with 12.5 nm hp
High Accuracy UV-NIL Step and Repeat Master Stamp Fabrication for Wafer-Level Camera Application |
| Trivedi, Krutarth |
(Invited) High Performance Lithographically Defined Back-Gated Si-nanowire MOSFETs with sub-5 nm Channel Width |
| Trompenaars, Piet |
Electron Beam Induced Deposition of Gold using the Au(CO)Cl Precursor |
| Trotter, Douglas |
(Invited) Silicon Photonics in High Performance Computing |
| Trumper, Dave |
(Invited) Positioning and Measuring at the Nanometric Level Over Macroscopic Distances |
| Tsai, Hsin-Yu |
Imaging Beyond the Resolution Limit with Far-Field Optics via Absorbance Modulation |
| Tsai, Jui-Chen |
Fabrication of Binary Phase Grating on the Fiber End by using Two- Beam Interference Lithography |
| Tsai, Kuen-Yu |
Analysis of Fabrication Misalignment Effects in a MEMS-based Electron-Optical System Design for Direct-Write Lithography
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography
Impacts of Point Spread Function Calibration Methods on Model-Based Proximity Effect Correction for Electron-Beam-Direct-Write Lithography
10 nm Lines with 14 nm Half Pitch Grating Written in HSQ by Electron Beam Direct Write at 5 keV
A Non-Delta-Chrome OPC Methodology for Nonlinear Process Models |
| Tseng, Ching-Tung |
Fabrication of Binary Phase Grating on the Fiber End by using Two- Beam Interference Lithography |
| Tsuno, N. |
A Novel Scanning Electron Microscopy with Charging Control |
| Tsunoda, Dai |
Writing Strategies for sub-10nm Pattering Node |
| Tsunoe, Hiroyuki |
Writing Strategies for sub-10nm Pattering Node |
| Tuchfeld, Eduard |
PEEM Studies of Coupled-Nanomagnet Systems |
| Tünnermann, Andreas |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Turchanin, A. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
U |
| Ueki, Ryuichi |
Direct Transformation of a Resist Pattern into a Graphene FET Through Interfacial Graphitization of Liquid Gallium |
| Ueno, Kazunori |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Ummethala, Upendra |
(Invited) REBL: A Maskless ebeam Direct Write Lithography Approach using the Reflective Electron Beam Lithography Concept |
| Unal, Nezih |
Mask Aligner Lithography Simulation |
v |
| van de Laar, Robert |
Full-field Substrate Conformal Imprint Lithography (SCIL) on Mask Aligners |
| van de Peut, Ton |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Van de Veerdonk, Rene |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media |
| van der Drift, E. |
Cl2-based ICP Etching of Photonic Crystals for the Visible Spectrum in GaN and SiC |
| van der Drift, Emile W.J.M. |
Monte Carlo Simulations to Study FEBID and EBL Resolution Limits |
| van der Drift, Emile |
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| van der Krogt, M.C. |
Cl2-based ICP Etching of Photonic Crystals for the Visible Spectrum in GaN and SiC |
| van der Veen, J.F. |
In-Situ Characterization of Block Copolymer Density Multiplication on Chemically Patterned Surfaces by Coherent Small Angle X-ray Scattering |
| van Dommelen, Youri |
A Study of Extreme Ultraviolet Lithography Defectivity |
| van Dorp, Wilem F. |
Monte Carlo Simulations to Study FEBID and EBL Resolution Limits |
| van Nieuwstadt, Joris |
5kV Multi Electron Beam Lithography: MAPPER Tool and Resist Process Characterization |
| van Veen, Alexander |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| van Veldhoven, Emile |
Platinum Nano-Pillar Growth by Helium Ion Beam Induced Deposition
Fine and Dense Nanofabrication with Helium Ion Beam Induced Deposition |
| VanMil, B. |
(Invited) Self-aligned Epitaxial Graphene MOSFETs with a Record Field-Effect Mobility of 6000 cm2/Vs on 50 mm Wafers |
| Varghese, Leo T. |
Fast Turn-Around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals
Smooth Suspended Silicon Nanowires for Light Emission Applications
Sub-10nm Lines using PMMA and HSQ Double Patterning
Dry Development of HSQ in Chlorine Plasma |
| Vazquez-Mena, Oscar |
Flexible Membranes Improve Resolution in Stencil Lithography
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Velampati, Ravi |
Novel Lateral Size Reduction Technique to Fabricate sub-12 nm Si Integrated Circuits |
| Venugopal, Gunasekaran |
Nano-scale Stack Fabrication on Thin Graphite Flake using Focused Ion Beam 3-D Etching Technique |
| Verduin, Thomas |
Statistical Coulomb Forces In Electron Guns |
| Veres, Teodor |
Fabrication of Nanostar Array by Nanoimprint Lithography
Ultrasmooth, 3D Nanostructured Gold Films for Enhanced SPR Detection by Nanoimprint Lithography and Template Stripping |
| Verschuuren, Marc A. |
Full-field Substrate Conformal Imprint Lithography (SCIL) on Mask Aligners |
| Vijverberg, Joep |
5kV Multi Electron Beam Lithography: MAPPER Tool and Resist Process Characterization |
| Vila-Comamala, Joan |
High Aspect Ratio HSQ Structures for X-ray Optics |
| Villanueva, Guillermo |
Flexible Membranes Improve Resolution in Stencil Lithography |
| Villanueva, Luis Guillermo |
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Vinet, Maud |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Vizioz, Christian |
Very High Aspect Ratio Fabrication Process for Stacked Nanowire Transistors with Gate-All-Around (GAA) or Double-Gate (ΦFET)
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Vlasov, Alexander |
High Accuracy Electron Beam Model Development in MICHELLE: eBEAM |
| Voelkel, Reinhard |
Customised Illumination for Process Window Optimisation and Yield Improvement in Mask Aligner Lithography Systems |
| Vogel, Konstantin |
In-vivo Assessment of Nanowire Biocompatibility in the Rat Brain |
| Vogler, Uwe |
Customised Illumination for Process Window Optimisation and Yield Improvement in Mask Aligner Lithography Systems |
| Voigt, Anja |
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness
Direct Write Laser at Visible Wavelength for Patterning of High Aspect Ratio Epoxy Materials |
| Volger, Marko |
Step and Repeat UV Nanoimprint Lithography with sub-15 nm Resolution and sub-5 nm Residual Layer Thickness |
| Voros, Janos |
Metallic Nanodot Arrays Fabricated by Stencil Lithography on SiO2 and Polymer Substrates |
| Vukkadala, Pradeep |
Assessment of IP Error Compensation Techniques for EUVL |
W |
| Wacquez, Romain |
Hybrid Lithography (E-beam/DUV) and Dedicated Etching Process for CMOS-compatible Monoelectronic Studies with Gates down to 12 nm |
| Waid, Simon |
Particle Beam Induced Fabrication of Nanoimprint Lithography Templates |
| Wallow, Thomas |
Evolution of Line Edge and Line Width Roughness in a Frequency Doubling Directed Self Assembly Process |
| Wang, Chao |
Growth of Straight Crystal Silicon Nanowires on Nanopatterned Amorphous Substrate with Uniform Diameter and Length, Preferred Orientation, and Predetermined Location |
| Wang, Feng |
Optical Activities of Nanoscale Planar Spiral Nanotrenches in Titanium Films |
| Wang, Fu-Min |
10 nm Lines with 14 nm Half Pitch Grating Written in HSQ by Electron Beam Direct Write at 5 keV |
| Wang, Hongying |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Wang, Lon |
A Novel Method to Fabricate Microlens Array with Normal Subwavelength Structures
Fabrication of Binary Phase Grating on the Fiber End by using Two- Beam Interference Lithography |
| Wang, Qing |
Residual Layer Uniformity using Complementary Patterns to Compensate Pattern Density Variation in UV Nanoimprint Lithography
45 nm hp Line/Space Patterning into a Thin Spin Coat Film by UV Nanoimprint Based on Condensation |
| Wang, Risheng |
(Invited) Biomolecular-Scale Engineering |
| Wang, Shao-Wei |
Application of Hydrogen Silsesquioxane (HSQ) as Etching Mask for Dense and Ultra-Sharp Silicon Tip Arrays |
| Wang, Xinpeng |
Ultrananocrystalline Diamond Nanowires Fabricated using Electron-Beam Lithography and Reactive Ion Etching |
| Wang, Yi-Ju |
Fabrication and Characterization of Giant Magnetoresistive Biosensors for Cancer Diagnostics |
| Wang, Yong |
Table-top Microscope for the Actinic Aerial Imaging Inspection of Extreme Ultraviolet Lithography Masks |
| Wanzenböck, Heinz D. |
Experimental Evaluation of Gas-Flux Distribution with Gas Injection Systems for Focused Beam Induced Deposition
Thermally Assisted Focused Electron Beam Induced Deposition
Nanowire Synthesis on Catalyst Arrays Produced with Electron Beam Induced Deposition |
| Wanzenboeck, Heinz D. |
Electron Beam Induced Etching of Silicon using Chlorine Gas
Particle Beam Induced Fabrication of Nanoimprint Lithography Templates |
| Warisawa, Shin-ichi |
Nanostructure Fabrication by Self-Assembly of Block Copolymer on 3-D DLC Structure |
| Warisawa, Shin'ichi |
The Piezoresistive Effect in the 3-D Diamond-Like Carbon Nanostructure Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
Vibration Characteristics of Monolayer Graphene Resonator |
| Washburn, Cody |
Fabrication and Applications of Sub-Micron 2D/3D Periodic Carbon Structures |
| Watso, Robert |
Wafer Level Critical Dimension Control in Spacer Defined Double Patterning for sub-72 nm Pitch Logic Technology |
| Watts, Michael |
(Invited) Silicon Photonics in High Performance Computing |
| Weaver, John |
(Invited) Batch Fabrication of Cantilever Array Apertured Probes for Scanning Near-Field Optical Microscopy |
| Weber-Bargioni, Alexander |
Manipulating the Local Symmetry and Geometry of Bowtie Optical Antennae for Controlling Spectral Properties while Maintaining the Near-Field Enhancement |
| Wei, Qi-Huo |
Fabrication and Characterization of Metal-Dielectric-Metal (MDM) Nanoantennas |
| Wei, Qihuo |
Optical Activities of Nanoscale Planar Spiral Nanotrenches in Titanium Films |
| Weimann, T. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Weisheit, Martin |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Weiss, Dirk N. |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Wellenzohn, Max |
Argon Ion Multi-Beam Nanopatterning of Ni-Cu Inserts for Injection Molding |
| Wen, Xuejin |
Electrochemical Impedance Spectroscopy Study of Tethered Bilayer Lipid Membranes with Artificial Nanopores
Optical Activities of Nanoscale Planar Spiral Nanotrenches in Titanium Films
Fabrication and Characterization of Metal-Dielectric-Metal (MDM) Nanoantennas |
| Wendt, J. R. |
Fabrication Techniques for 3D Metamaterials in the Mid-infrared |
| Wesch, Werner |
Freestanding Photonic Crystal Membranes in Lithium Niobate fabricated by Ion-Beam Enhanced Etching |
| Whitehead, Brian |
3-D Microfluidics Devices using Ion Beam Lithography |
| Wieland, Marco |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Wielgoszewski, Grzegorz |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
| Wilhelmi, Oliver |
Towards Automated Fabrication of 3D Photonic Devices by Focused Ion Beam |
| Williams, Keith |
Tuning Transport and Two-State Noise in Carbon Nanotubes using Precisely Controlled Electron Beam |
| Williams, R. Stanley |
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Williams, Stan |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Willson, Grant |
Pitch Division by Selective Acid Quenching |
| Willson, Richard |
Patterning of Antibody-Coated Surfaces using Energetic Helium Ions
Fabrication and Characterization of Giant Magnetoresistive Biosensors for Cancer Diagnostics |
| Wilson, C. G. |
A Dry-on, Dry-off, Long Wavelength Photoresist for Nano-Plasmonic Field Metrologoy and Lithography |
| Wind, Shalom |
(Invited) Biomolecular-Scale Engineering
Magnetically Actuated Elastomeric Pillars for Cellular Force Measurement
Lithographically Driven Nanoscale Assembly of DNA Nanostructures
Supported Lipid Membranes Corralled by Nanoscale HSQ and PDMS Barriers
Biocompatible Surfaces with Locally Variable Rigidity |
| Winston, Donald |
Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist
Simulated Secondary-Electron Trajectories in Helium-Ion-Beam Lithography
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography |
| Witte, Daniel |
Rapid Laser Crystallization of Semiconductors for Three-Dimensional Integration |
| Wojcik, Michael |
Nanofabrication of X-Ray Zone Plates using Ultrananocrystalline Diamond Molds and Electroforming |
| Wong, Simon |
Semiconductor Crystal Islands for 3-Dimensional Integration |
| Wood, Graham |
Piezo-Electrically Driven Silicon Carbide Resonators |
| Woszczyna, Mirosław |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Wu, Cheng-Ju |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Wu, Chi-Chang |
Silicon Nanobelt Field Effect Transistors Toward Hepatocellular Carcinoma Detection |
| Wu, J. C. |
The Dispersion of Localized Surface Plasmons in the Gold-Capped Silicon Nitride Rods Photonic Crystal Slab |
| Wu, Ji |
Electro-Osmotic Flow Through Carbon Nanotube Membranes for Programmed Transdermal Drug Delivery |
| Wu, Jing-Tang |
A Two-Step Hot Embossing Process for Fabrication of Nano/Micro Hybrid Lens |
| Wu, Shiwei |
Graphene Nanomeshes with Sub-10 nm Ribbon Width Fabricated via Nanoimprint Lithography in Combination with Block Copolymer Self-Assembly |
| Wu, Wei |
Nanoscale 2- and 3-Terminal Resistive Switching Devices
Highly Sensitive Surface-enhanced Raman Spectroscopy Sensors by 3-D Nanoimprint Lithography |
| Wu, Yi-Kuei |
Transmissive Color Filters Fabricated Using Pattern Transfer Lithography
Plasmonic Color Filter Based on Metal-Insulator-Metal Resonators |
X |
| Xia, Qiangfei |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Xiao, Shuaigang |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media |
| Xie, Peng |
Photopatternable Inorganic Hardmask
Projection Lithography Below Lambda/7 through DUB Evanescent Optical Imaging |
| Xu, Ting |
Surface Plasmon Enhanced Efficiency of Organic Solar Cells using Transparent Ag Nanowire Electrodes
Transmissive Color Filters Fabricated Using Pattern Transfer Lithography
Plasmonic Color Filter Based on Metal-Insulator-Metal Resonators |
| Xu, Yuan |
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Xuan, Yi |
Fast Turn-Around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals |
Y |
| Yamazoe, Kenji |
Application of Kernel Convolution for Complementing Source Mask Optimization |
| Yan, Minjun |
Surface Roughness and Resist Thickness Issues in Patterning of Ultra-Dense Lines in Hydrogen Silsesquioxane |
| Yan, Pei-Yang |
High Transmission Pellicles for EUVL Reticle Protection |
| Yan, Qiliang |
Reducing the Pattern Redundancy in OPC Modeling by Analyzing the Pattern Linearity |
| Yang, Chu Yeu |
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Yang, Elaine |
Nanofabrication of SERS Device by an Integrated Block-Copolymer and Nanoimprint Lithography Method |
| Yang, Henry |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Yang, Huayong |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Yang, Joel K. W. |
Templated Self-Assembly of Block Copolymers for Linear and Square Arrays |
| Yang, Joel |
Sub-10-nm Half-Pitch Electron-Beam Lithography by Using PMMA as a Negative Resist
Metrology and Analysis of Sub-10-nm-Electron-Beam Lithography
Patterning of sub-10-nm Metal Structures for Plasmonic Characterization
Electrochemical Development of Hydrogen Silsesquioxane |
| Yang, Joshua |
Nanoscale 2- and 3-Terminal Resistive Switching Devices |
| Yang, Sen-Yeu |
A Two-Step Hot Embossing Process for Fabrication of Nano/Micro Hybrid Lens |
| Yang, XiaoMin |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media |
| Yang, Yi |
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings |
| Yanik, Ali |
Zeptomol Level Vibrational Spectroscopy of Proteins in Lithographically Engineered Plasmonic Nano-antenna Arrays
Lift-off Free Nanofabrication of Suspended Plasmonic Nanohole Arrays To Overcome Mass Transport Limitations in Bio-Sensors |
| Yankov, Vladimir |
Fabrication of High Resolution Optical Spectrometer-on-Chip |
| Yao, Nan |
Growth of Straight Crystal Silicon Nanowires on Nanopatterned Amorphous Substrate with Uniform Diameter and Length, Preferred Orientation, and Predetermined Location |
| Yasuda, Masaaki |
Process Simulator for UV-Nanoimprint Lithography
Impact of Wafer Deformation on Demolding Force for Thermal Imprint Process
Impact of Molecular Size on Resist Filling Process in Nanoimprint Lithography : Molecular Dynamics Study |
| Yavuz, Mustafa |
Nanofluidic Channels Fabricated by e-beam Lithography and Polymer Reflow Sealing |
| Ye, Jianting |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Ye, Lei |
(Invited) Molecularly Selective Nanopatterns using Nanoimprint Lithography: A Label-Free Sensor Architecture |
| Yeh, Wei-Ming |
Effect of Crosslinker Structure on a Novel Post-Development Strategy to Prevent Pattern Collapse in Photoresist Nanostructures
Comparison of Positive Tone vs. Negative Tone Resist Pattern Collapse Behavior |
| Yen, Jia-Yush |
Beam Drift Detection using a Two-Dimensional Electron Beam Position Monitor System for Multiple-Electron-Beam–Direct-Write Lithography |
| Yesilkoy, Filiz |
Surface Plasmon and Geometry Enhanced Asymmetric Rectifying Tunneling Diodes |
| Yoshida, Hiroshi |
Cross-Sectional Analysis of Resist Structures Derived from the Directed Assembly of Block Copolymers
Density Multiplication by Directed Self-Assembly of Block Copolymer Binary Blends
POSS-Containing Block Copolymer With High Etch Contrast For Directed Self-Assembly |
| Yoshimizu, Norimasa |
Tip-based Precise, Repeatable Etching of Highly Ordered Pyrolytic Graphite
Nanometrology Optical Ruler Imaging System for Wafer-Scale Precision Metrology for Tip-Based Microscopes |
| Youn, Sung-Won |
Residual Layer Uniformity using Complementary Patterns to Compensate Pattern Density Variation in UV Nanoimprint Lithography
45 nm hp Line/Space Patterning into a Thin Spin Coat Film by UV Nanoimprint Based on Condensation |
| Young, Ralph |
(Invited) Silicon Photonics in High Performance Computing |
| Yu, Zhaoning |
Progress and Challenges in Fabrication of 1 Terabit/inch2 Bit Patterned Magnetic Media
Spectroscopic Ellipsometry Optical Critical Dimension Measurements of Template and Imprint Resist for Patterned Magnetic Media Applications |
| Yuan, Hao-Chih |
Nanoimprint Method for All-Inorganic Resist for Photovoltaic Light-Trapping |
| Yuan, Hongtao |
Electric-Field-Induced Superconductivity in Electric Double Layer Transistors |
| Yuk, Hyungsang |
(Invited) High Performance Lithographically Defined Back-Gated Si-nanowire MOSFETs with sub-5 nm Channel Width |
| Yusa, Kouki |
The Piezoresistive Effect in the 3-D Diamond-Like Carbon Nanostructure Fabricated by Focused-Ion-Beam Chemical Vapor Deposition |
Z |
| Zakhidov, Anvar |
Hole Mobility Enhancement by Chain Alignment in Imprinted P3HT Nanogratings for Organic Solar Cells
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings |
| Zawierucha, Paweł |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Zech, Martin |
In situ characterization of Exposed e-beam Resist using Novel AFM Technique |
| Zeeb, Bastian |
Gold Nanocone Probes for Near-Field Scanning Optical Microscopy |
| Zelsmann, Marc |
Organized Porous Alumina Membranes for High Density Silicon Nanowires Growth
Impact of the Resist Properties on the Antisticking Layer Degradation in UV Nanoimprint Lithography |
| Zeniou, Aggelos |
Plasma Directed Assembly and Organization: Effect of Plasma Processing Conditions on Order and Nanodot Dimensions |
| Zeuske, Jacob |
Assessing the Mask Clamping Ability of a Low Thermal Expansion Material Chuck |
| Zhang, Lin |
Reducing the Pattern Redundancy in OPC Modeling by Analyzing the Pattern Linearity |
| Zhang, X. |
Fabrication of Graphene and Graphenoid Two-dimensional Materials from Self-Assembled Monolayers |
| Zhang, Yanxia |
Throughput Enhancement Technique for Mapper Maskless Lithography |
| Zhang, Yuan |
(Invited) Batch Fabrication of Cantilever Array Apertured Probes for Scanning Near-Field Optical Microscopy |
| Zhao, Lin |
Fast Turn-Around Time, Layer-by-Layer Fabrication of 3D Photonic Crystals
Fabrication of Silver Nano Slit Chain Waveguides for Surface Enhanced Raman Scattering
Smooth Suspended Silicon Nanowires for Light Emission Applications
Dry Development of HSQ in Chlorine Plasma |
| Zhao, Xu |
Study of Transport Properties in Graphene Monolayer Flakes on SiO2 Substrates |
| Zheng, Zhen |
Self-Limiting Low-Energy Glow Discharge Process for Close-Packed Non-Circular Pattern Generation |
| Zhou, Chenggang |
Optimizing Photon Sieves to Approach Fresnel Diffraction Limit via Pixel-based Inverse Lithography |
| Zhou, Haiping |
A Low Damage Fully Self-Aligned Gate-Last Process for Fabricating sub-100 nm Gate Length Enhancement Mode GaAs MOSFETs |
| Zhou, Min |
Hole Mobility Enhancement by Chain Alignment in Imprinted P3HT Nanogratings for Organic Solar Cells
Nanostructured P3HT/C60 Solar Cells using Oblique Angle Thermal Deposition of C60 into Nanoimprinted P3HT Gratings |
| Zhu, Diling |
Coherent Diffractive Imaging for Extended Samples with a Pre-defined Illumination Pattern |
| Zimmerman, John |
A Study of Extreme Ultraviolet Lithography Defectivity |
| Zimmerman, Paul |
Pitch Division by Selective Acid Quenching |
| Zöllner, Jens-Peter |
Micromachined Scanning Proximal Probes with Integrated Piezoresistive Readout and Bimetal Actuator for High Eigenmode Operation |
| Zortman, William |
(Invited) Silicon Photonics in High Performance Computing |
| Zou, Jun |
Modelling and Experimental Investigation on Liquid Confinement in Immersion Lithography |
| Zschech, Ehrenfried |
Microfabricated Resistive High Sensitivity Nanoprobe for Scanning Thermal Microscopy |
