Dear Colleagues:
Welcome to the 62nd International Conference on Electron, Ion, Photon Beam Technologies and Nanofabrication (EIPBN) on the beautiful island of Puerto Rico! Your continued support and dedication to “3-Beams” makes this the premier conference for open exchange of leading-edge nanoscale lithography and nanofabrication research. We have three outstanding plenary speakers, a range of exceptional invited presentations, and an exciting array of contributed papers. Without a doubt, the EIPBN community keeps nanofabrication research vibrant worldwide and remains at the forefront of a wide array of novel applications.
A truly heartfelt thank you goes out to the staff of the Wyndham hotel and other men and women of the Puerto Rican hospitality industry who demonstrated unyielding courage and perseverance in the greatest of hardships. Hurricane Maria, the strongest storm in 89 years, struck a devastating blow to the island on September 20, 2017. Homes were flooded, power was down for months and water became scarce. Yet now, 8 months later, through the strength and determination of the Puerto Rican people, amazing progress is being made restoring the rich and vibrant communities. Without the generosity of the Wyndham hotel, housing the first responders in this time of crisis, and the dedicated staff that showed up to work the morning after the hurricane, EIPBN 2018 would have been a very different conference. It has been a real pleasure working with this devoted team over the course of the year.
I wish to thank Shida Tan, this year’s Program Chair, for organizing another truly outstanding program. Shida not only set the theme for this year’s conference, “Bridging the Innovation Gaps between the Academia, Industry and Government Research”, but worked tirelessly throughout the year to carry out her vision. Her enthusiasm for nanofabrication and nanotechnology in all research disciples and her commitment to technical excellence has laid the foundation for what will be a valuable, informative and memorable conference week. I would like to thank Stefano Cabrini, Aaron Stein and Erika Penzo for the tremendous effort organizing the short courses as well as the instructors, who put in their valuable time to educate us in the latest technology. Special thanks go to Daron Westly and Yajaira Sierra-Sastre for creating a new and exciting session highlighting the technology and rebuilding efforts in Puerto Rico, as well as, serving as local eyes and ears during the critical planning phases.
A big thank you goes to Ulrich Hoffman, Gerald Lopez and James Spallas for leading the effort in organizing the commercial sessions and the recruiting student breakfast. For the first time, we have expanded the commercial program to bring our sponsors closer to the attendees by featuring a product showcase where companies can present their exciting new technologies directly to the EIPBN audience. I wish to thank Regina Luttge for her creative session on Women in Nanotechnology (WIN) and organization of the poster contest, Stefano Cabrini for his handling of the startup contest, Aaron Stein for bring together students and mentors, and, as every year, John Randall for hosting the “not-to-be-missed” annual micrograph contest. Todd Hastings gets a special thank you for organizing a new event, the EIPBN Retrospective, where the early EIBPN “movers and shakers” reflect and discuss the events that shaped our industry. I wish to also give special thanks to Shelly Muray for demonstrating the scientific community has a social conscience by bringing together sponsors and scientists for the first EIPBN community outreach event and Marty Feldman for gathering student resumes. Many others have contributed to the success of EIPBN 2018, including the EIPBN Organizing Committee, the EIPBN Advisory Committee and our past and present Financial Trustees, Don Tennant and John Randall. A big thank you to all! I would also like to personally thank former conference chairs Ted Fedynyshyn, John Harley, Todd Hastings, and Cliff Henderson for their guidance and mentorship over the years and, especially, Don Tennant for level-headed navigation through sometimes murky waters.
Many thanks to Nicki Davis who has spent countless hours updating and maintaining our conference website and creating the new mobile app on Guidebook and Shelly Muray for creating the EIPBN logo and other marketing materials. Of course, a great thank you to Melissa Widerkehr and others at Widerkehr and Associates who have helped us to plan and execute almost every aspect of this EIPBN conference. They have been part of the 3-Beams team for many years and are essential to its success.
Finally, I cannot thank our sponsors and exhibitors enough for their kind and generous support. We rely heavily on their products for our research and without their continued dedication we could not hold these events. In particular, I whole-heartedly thank our Platinum Sponsor, STS-Elionix, our Silver Sponsors, NuFlare Technology, Raith America, GenISys and KLA-Tencor, and our other sponsors, JEOL USA, Heidelberg Instruments, Vistec Electron Beam, TEL, Intel, Zeiss, Cornell University, Nanoscribe, Nanonex, Amuneal, Crested, Zyvex Labs, AllResist and Nanotronics. I encourage everyone to engage closely and often with these valued members of our community! We are once again endorsed by the American Vacuum Society (AVS) and we thank them for their continuing commitment to the meeting.
I hope you enjoy the wonders of Puerto Rico and explore the rich history, culture and natural beauty throughout the island. Safe travels, have a great meeting and please join us again next year for EIPBN 2019!
Sincerely,
Lawrence P Muray, Ph.D.,
KLA-Tencor, Inc.
EIPBN 2018 Conference Chair
Dear Colleagues,
Welcome to the 62nd Electron, Ion, Photon Beam and Nanofabrication Conference (EIPBN)! In the past six decades, EIPBN has witnessed remarkable advancements in the fields of lithography and nanofabrication. It evolved from a small gathering of electron beam welding enthusiasts to the present day international conference. This premier conference is not only a place to present our most recent results, it is a community where ideas are openly shared, passionate discussions take place, and new collaborations are built. This could not be possible without your support! I am so glad that you are here!
The 2018 EIPBN conference theme is “Bridging the Innovation Gaps between the Academia, Industry and government Research”. We hope the program we put together will spark dialogues, create opportunities amongst the audience, and build bridges between fundamental science, applied research, technical development, and final products.
The conference kicks off with three phenomenal speakers representing academia, industry, and strategic research. In both the oral and poster sessions, a broad range of topics on lithography, correlated disciplines, and applications will be presented. A brand new focus topic on nanofabrication of neuromorphic hardware is introduced this year. To promote innovations and entrepreneurship, we will continue the special “Start-up Showcase” session this year, which allows scientists and engineers to showcase their product ideas, prototypes, and proposals in a poster format. A “Best EIPBN 2018 Start-up Award” will be judged by the experts and awarded at the banquet along with the other poster awards. Thanks to Dr. Stefano Cabrini for continuing to lead this effort. Many thanks to Dr. Aaron Stein, Dr. Stefano Cabrini, and Dr. Erika Penzo for planning another great short course session this year; to Dr. Daron Westly and Dr. Yajaira Sierra-Sastre for inviting local experts to share the Puerto Rico technology landscape and rebuilding effort with a Puerto Rico Technology Highlight session; to Dr. Regina Luttge for planning an interactive session on Women in Nanotechnology (WIN); to Dr. Todd Hasting for organizing the EIPBN Retrospective event, and to Dr. John Randall for continuing the annual tradition of hosting the micrograph contest. We hope you enjoy the program!
I want to express my gratitude to our conference chair Larry Muray, who steered the entire committee with strong conviction, great leadership, and steady approach through all the uncertainties we encountered in the past year. I truly appreciate the mentorship from the past Program Chairs Dr. Stefano Cabrini, Dr. Michael Guillorn, and Dr. Pat Watson and the support from the future Program Chairs Dr. Regina Luttge and Dr. Rob Illic. The Steering Committee members, Program Advisory Committee members, Program Topic Advisors, and Program Committee members are listed in the program guide and I cannot thank them enough for their help.
Sincere thanks to Shelly Muray for creating and distributing the EIPBN promotional materials. Conference planning and execution could not be possible without Melissa Widerkehr and her associates working tirelessly behind the scenes. Nicki Davis not only created a wonderful conference website, she also introduced a brand new mobile app this year, please use it for a more interactive experience at the conference.
I thoroughly enjoyed the journey as the Program Chair for EIPBN in the past year! I am grateful to have the opportunity to be part of this incredible program that was made possible by excellent contributions from you.
Thank you!
Sincerely,
Shida Tan, Ph.D.
Intel Corporation
EIPBN 2018 Program Chair