Julia W. P. Hsu
Department of Materials Science and Engineering, University of Texas at Dallas
Indium-based Sol-gel Films as Potential EUV Resist
Indium-based sol-gel precursors, predominantly indium nitrate hydrate films, are investigated as potential EUV resists. The sensitivity and contrast of these materials under 100 eV electron beam exposure are comparable to the state-of-the-art SnOxo resist. We also measure high sensitivity under EUV exposure and demonstrate line/space patterns using e-beam lithography.
About Julia W. P. Hsu
Julia W. P. Hsu is a Professor of Materials Science and Engineering at the Erik Jonsson School of Engineering and Computer Science of the University of Texas at Dallas (UTD) and holds the Texas Instruments Distinguished Chair in Nanoelectronics. She received her B. S. E. degree in Chemical Engineering from Princeton University, her Ph.D. degree in Physics from Stanford University, and did her postdoctoral training at Bell Labs. Prior to UTD, she was a Member of Technical Staff at Sandia National Laboratories and Bell Labs, and an Assistant and tenured Associate Professor of Physics at the University of Virginia.
Prof. Hsu’s research encompasses a wide range of materials, from organic materials to metal oxides to semiconductors. She has been at the forefront of developing new techniques for electronic and photonic materials and devices, and her work has paved the way for new applications and technologies. Her recent work focuses on the physics and applications of organic and perovskite solar cells, novel processing of flexible electronics, new resist materials for extreme UV lithography, and machine learning approaches to accelerate the processes of materials synthesis and processing.
Prof. Hsu is a Fellow of the American Physical Society (APS), the American Association for the Advancement of Science, the Materials Research Society (MRS), and the Institute of Physics (IoP). She is an Honorary International Chair Professor at Taipei Tech and was selected as a member of the inaugural class of Simons Foundation Pivot Fellows in 2022. She was awarded a Hertz Foundation Fellowship, APS Apker Award, a National Science Foundation Young Investigator Award, and a Sloan Foundation Research Fellowship. Her professional society services include MRS (Meeting Chair, Board of Directors, Treasurer, Operational Committee Chairs), APS (Division of Materials Physics Executive Committee, Award Committee), and Electronic Materials Conference (Organizers). She also served on DOE Basic Energy Sciences Advisory Committee, National Academies Review Panels, numerous review panels for funding agencies and external advisory committees for research centers. Prof. Hsu has published over 260 journal papers, has been granted 5 patents, and has given over 200 invited talks. (https://personal.utdallas.edu/~jxh101000/)
