About EIPBN / More About EIPBN / Organizing Committee / Advisory Committee / Advisor Emeritus / Past Conference Websites / EIPBN History / Related Conferences
About EIPBN
The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication techniques. The conference brings together engineers and scientists from industries and universities from all over the world to discuss recent progress and future trends.
More About EIPBN
Meeting Format
The conference opens on Tuesday afternoon with a special commercial session, which features vendors of materials and equipment relevant to this conference. The plenary session is on Wednesday morning. The rest of the conference has three parallel sessions. The length of presentation is 40 minutes for invited papers and 20 minutes for contributed papers, discussion time included. A special feature of the technical program is the poster session that includes invited and contributed papers. There is only one formal poster session, but posters will be displayed for informal viewing throughout the entire conference. No distinction is made between the importance of poster and oral presentations. Click here for more on the conference program.
Technical Program
The Technical Program is organized by the Program Chair and assisted by volunteers that compromise the Technical Section Head panel. Over a 140 experts in the different fields of nanofabrication lend their time and expertise to suggest invited speakers, review abstracts and review manuscripts. Any researcher can be part of the Technical Section Head panel. Contact the Program Chair for information. By renewing the members of this panel the EIPBN Community is kept vibrant and up-to-date with all the recent advances in nanofabrication technology.
History of EIPBN
We are pleased to feature the following paper on the history of the EIPBN conference:
History of the “Three Beams” Conference, the Birth of the Information Age and the Era of Lithography Wars
by
by Mark L. Schattenburg, Space Nanotechnology Laboratory, Massachusetts Institute of Technology.
Click here to download the paper in PDF Format.
Another item of historical interest is Richard Feynman’s 1959 lecture,
“There’s Plenty of Room at the Bottom.”
Click here to read a transcript.
Student Support
Limited funds are available to support student travel. The Conference Chair must receive a request for support from the student’s advisor by May 1. Decisions about student support will be returned by about May 15.
Organizing Committee
The EIPBN Conference is incorporated as a non-profit organization in the State of New Jersey. The Organizing Committee serve as the corporate Board of Directors, with the Conference Chair having the Responsibilities of CEO for the year in which he/she serves. The Organizing Committee has 8 members. Each year, 2 Organizing Committee members are elected for a 5 year term. Initially, they participate in the organization of the conference for 2 years. In the 3rd year of their term, they run the conference as Conference and Program Chairs. For the remaining 2 years of their term, they assist the successor chairs in their duties.Once the 5 year term is completed, Organizing Committee members become permanent members of the Advisory Committee.
| EIPBN 2016 Organizing Committee | |
| 2016 Conference Chair: Prof. John G. Hartley R&D Fellow NuFlare Technology America, Inc. 10 Corporate Park Drive, Suite C Hopewell Junction, NY 12533 |
2016 Program Chair: George Patrick Watson, PhD Director, Micro/Nano Fabrication Lab Princeton University J301A Engineering Quad Princeton, New Jersey 08540 |
| Theodore H. Fedynyshyn, Ph.D. MIT Lincoln Laboratory 244 Wood Street Lexington, MA 02420 Tel: +1.781.981.7811 Email: eipbn2014@gmail.com |
Prof. Karl Berggren Department of Electrical Engineering Massachusetts Institute of Technology Cambridge, MA 02139 |
| Shida Tan, PhD Intel Corporation 2200 Mission College Blvd Tel: +1.408.765.8806 |
Clifford L. Henderson Professor, Georgia Tech School of Chemical and Biomolecular Engineering ES&T 1226 |
| Michael A. Guillorn, PhD Thomas J. Watson Research Center Yorktown Heights, NY Tel: +1.914.924.9557 Email: maguillorn@us.ibm.com |
Prof. Todd Hastings College of Engineering University of Kentucky Lexington, KY |
| Lawrence Muray, Ph.D. Agilent Technologies M/S 54U-SU 5301 Stevens Creek Blvd. Santa Clara, CA 95051 |
Stefano Cabrini, Ph.D. Lawrence Berkeley National Laboratory 1 Cyclotron Road Mailstop 67R2206 Berkeley, CA 94720 |
The corporate Chief Financial Officer is:
Don Tennant, Ph.D.
Cornell NanoScale Science & Technology Facility (CNF)
262 Duffield Hall
Cornell University
Ithaca, NY 14853-2700
Advisory Committee
The advisory committee consists of individuals who have served on the EIPBN Steering Committee and those that have dedicated valuable service to the organization over the years.
| I. Adesida | E. Anderson | R. Blaikie | A. D. Brodie | S. Brueck |
| J. H. Brunning | S. Chou | H. Craighead | K. Cummings | E. Dobizs |
| N. Economou | R. L. Engelstad | M. Feldman | M. . Gesley | T. R. Groves |
| C. Hanson | L. R. Harriot | M. Hatzakis | E. L. Hu | D. P Kern |
| R. L. Kubena | J. A. Liddle | J. Maldonado | C. R. K. Marrian | S. Matsui |
| M. McCord | J. Melngailis | W. D. Meisburger | A. Neureuther | A. Novembre |
| S. Palmer | S. Pang | R. F. Pease | M. Peckerar | H. C. Pfeiffer |
| M. L. Schattenburg | F. Schellenberg | H. I. Smith | D. Tennant* | L. F. Thompson |
| J. N. Randall | D. Resnick | M. L. Schattenburg | F. Schellenberg | H. I. Smith |
| D. Tennant* | L. F. Thompson | G. Wallraff | J. C. Wiesner | C. D. W. Wilkinson |
| S. Wind | R. Farrow | M. Fritze | R. Cheung | L. Ocola |
*Financial Trustee
Advisor Emeritus
Advisor Emeritus is a special designation given by the EIPBN Board of Directors to recognize lifelong service to the EIPBN community. Beginning in 2016, members of the steering committee who feel that they reached a point in their life where it is time to move on from active service to the EIPBN community, please notify the conference chair to begin the transfer to Advisor Emeritus status.
Thank you,
The EIPBN Steering Committee
Letter for Inaugural Member to Advisor Emeritus
| # | Year | Date | Location | Conference Chair | Program Chair | Symposium Name | Archived Proceedings |
| 1 | 1959 | March 20 | Boston, MA | James S. Hetherington | James S. Hetherington | First SEBM | PDF of Proceedings |
| 2 | 1960 | March 24-25 | Boston, MA | Robert A. Bakish | Robert A. Bakish | Second SEBP | PDF of Proceedings |
| 3 | 1961 | March 23-24 | Boston, MA | Robert A. Bakish | Robert A. Bakish | Third SEBP | PDF of Proceedings |
| 4 | 1962 | March 29-30 | Boston, MA | Robert A. Bakish | Robert A. Bakish | Fourth SEBT | PDF of Proceedings |
| 5 | 1963 | March 28-29 | Boston, MA | John R. Morley | John R. Morley | Fifth Annual MEBS | PDF of Proceedings |
| 6 | 1964 | April 27-28 | Boston, MA | John R. Morley | John R. Morley | Sixth Annual MEBS | PDF of Proceedings |
| 7 | 1964 | May 3-7 | Toronto, Canada | Robert A. Bakish | Robert A. Bakish | First ICEIBST | PDF of Proceedings |
| 8 | 1965 | Mar 31-April 2 | University Park, PA | Auguste B. El-Kareh | Auguste B. El-Kareh | ELBS | PDF of Proceedings |
| 9 | 1966 | April 6-8 | Ann Arbor, MI | Joseph E. Rowe,Auguste B. El-Kareh | George I. Haddad | Eighth Annual ELBS | PDF of Proceedings |
| 10 | 1966 | April 17-20 | New York, NY | Robert A. Bakish | Robert A. Bakish | 2nd ICEIBST | PDF of Proceedings, Vol. 1 PDF of Proceedings, Vol. 2 |
| 11 | 1967 | May 9-11 | Berkeley, CA | Charles Susskind | R. Fabian W. Pease | IEEE 9th Annual SEILBT | PDF of Proceedings |
| 12 | 1968 | May 6-9 | Boston, MA | Robert A. Bakish | Robert A. Bakish | 3rd ICEIBST | PDF of Proceedings |
| 13 | 1969 | May 21-23 | Gaithersburg, MD | Louis L. Marton | Louis L. Marton | 10th SEILBT | PDF of Proceedings |
| 14 | 1970 | May 10-15 | Los Angeles, CA | Robert A. Bakish | Robert A. Bakish | 4th ICEIBST | PDF of Proceedings |
| 15 | 1971 | May 12-14 | Boulder, CO | Frank S. Barnes | Richard F.M. Thornley | 11th SEILBT | PDF of Proceedings |
| 16 | 1972 | May 7-12 | Houston, TX | Robert A. Bakish | Robert A. Bakish | 5th ICEIBST | PDF of Proceedings |
| 17 | 1973 | May 21-23 | Cambridge, MA | Alec N. Broers | Edward D. Wolf | 12th SEILBT | |
| 18 | 1974 | May 12-17 | San Francisco,CA | Robert A. Bakish | Robert A. Bakish | 6th ICEIBST | PDF of Proceedings |
| 19 | 1975 | May 21-23 | Colorado Spr.,CO | George R. Brewer | R. Fabian W. Pease | 13th SEIPBT | |
| 20 | 1976 | May 4-7 | Washington, DC | Robert A. Bakish | Robert A. Bakish | 7th ICEIBST | PDF of Proceedings |
| 21 | 1977 | May 25-27 | Palo Alto, CA | Thomas E.Everhart | Gilbert L. Varnell | 14th SEIPBT | |
| 22 | 1978 | May 22-26 | Seattle, WA | Robert A. Bakish | Robert A. Bakish | 8th ICEIBST | PDF of Proceedings |
| 23 | 1979 | May 29- June 1 | Boston, MA | Henry I. Smith | T.H. Philip Chang | 15th SEIPBT | |
| 24 | 1980 | May 12-16 | St. Louis, MO | Robert A. Bakish | Robert A. Bakish | 9th ICEIBST | PDF of Proceedings |
| 25 | 1981 | May 26-29 | Dallas, TX | Gilbert L. Varnell | Don R. Harriott,John H. Bruning | 16th SEIPBT | |
| 26 | 1982 | May 10-14 | Montreal,Canada | Robert A. Bakish | Robert A. Bakish | 10th ICEIBST | PDF of Proceedings |
| 27 | 1983 | May 31-June 3 | Los Angeles, CA | Robert L. Seliger | Mike Hatzakis | 1983 ISEIPB | |
| 28 | 1984 | May 29-June 1 | Tarrytown, NY | Michael Hatzakis | John Kelly | 1984 ISEIPB | |
| 29 | 1985 | May 28-31 | Portland, OR | Lynwood W. Swanson | John H. Bruning | 29th ISEIPB | |
| 30 | 1986 | May 27-30 | Boston, MA | Nicholas P. Economou | Andrew R. Neureuther | 30th ISEIPB | |
| 31 | 1987 | May 26-29 | Woodland Hills, CA | John L. Bartelt | Richard E. Howard | 31st ISEIPB | |
| 32 | 1988 | May 31-June 3 | Ft. Lauderdale, FL | Hans C. Pfeiffer | Evelyn L. Hu | 32nd ISEIPB | |
| 33 | 1989 | May 30-June 2 | Monterey, CA | John C. Wiesner | Alan D. Wilson | 33rd ISEIPB | |
| 34 | 1990 | May 29-June 1 | San Antonio, TX | Noel MacDonald | Jon Orloff | 34th ISEIPB | |
| 35 | 1991 | May 28-31 | Seattle, WA | Daniel J. Ehrlich | Jane M. Shaw | 35th ISEIPB | |
| 36 | 1992 | May 26-29 | Orlando, FL | Larry F. Thomson | Randall L. Kubena | 36th ISEIPB | |
| 37 | 1993 | June 1-4 | San Diego, CA | Fritz Hohn | Franco Cerrina | 37th ISEIPB | |
| 38 | 1994 | May 31-June 3 | New Orleans, LA | Harold Craighead | Ilesanmi Adesida | 38th ISEIPB | |
| 39 | 1995 | May 30-June 2 | Scottsdale, AZ | John N. Randall | Dieter P. Kern | 39th ICEIPBTN | |
| 40 | 1996 | May 28-31 | Atlanta, GA | Donald M. Tennant | Stella W. Pang | 40th ICEIPBTN | |
| 41 | 1997 | May 27-30 | Dana Point, CA | Anthony Novembre | Geraint Owen | 41st ICEIPBTN | |
| 42 | 1998 | May 26-29 | Chicago, IL | Alfred Wagner | Christie R.K. Marrian | 42nd ICEIPBTN | |
| 43 | 1999 | June 1-4 | Marco Island, FL | Mark Gesley | John C. Wolfe | 43rd ICEIPBTN | |
| 44 | 2000 | May 30-June 2 | Rancho Mirage, CA | Lloyd R. Harriott | John Melngailis | 44th ICEIPBTN | |
| 45 | 2001 | May 29-June 1 | Washington, DC | Douglas J. Resnick | Mark McCord | 45th ICEIPBTN | |
| 46 | 2002 | May 28-31 | Anaheim, CA | Raman G. Viswanathan | Roderick R. Kunz | 46th ICEIPBTN | |
| 47 | 2003 | May 27-30 | Tampa, FL | Timothy R. Groves | Mark L. Schattenburg | 47th ICEIPBTN | |
| 48 | 2004 | June 1-4 | San Diego, CA | W. Dan Meisburger | Roxann L. Engelstad | 48th ICEIPBTN | |
| 49 | 2005 | May 31-June 3 | Orlando, FL | Kevin Cummings | Martin Peckerar | 49th ICEIPBTN | |
| 50 | 2006 | May 30-June 2 | Baltimore, MD | Shane R. Palmer | Shalom J. Wind | 50th ICEIPBTN | |
| 51 | 2007 | May 29-June 1 | Denver, CO | J Alexander Liddle | Greg Wallraff | 51st ICEIPBTN | |
| 52 | 2008 | May 27 – 30 | Portland, OR | Steven Brueck | Cindy Hanson | 52nd ICEIPBTN | |
| 53 | 2009 | May 26 – 29 | Marco Island, FL | Steven Chou | Elizabeth Dobisz | 53rd ICEIPBTN | |
| 54 | 2010 | June 1-4 | Anchorage, AK | Frank Schellenberg | Marty Feldman | 54th ICEIPBTN | |
| 55 | 2011 | May 31 – June 3 | Las Vegas, NV | Alan Brodie | Richard Blaikie | 55th ICEIPBTN | |
| 56 | 2012 | May 29 – June 1 | Waikaloa, HI | Reginald C. Farrow | Michael Fritze | 56th ICEIPBTN | |
| 57 | 2013 | May 28 – 31 | Nashville, TN | Leonidas E. Ocola | Rebecca Cheung | 57th ICEIPBTN | |
| 58 | 2014 | May 27 – 30 | Washington, DC | Theodore H. Fedynyshyn | Karl K. Berggren | 58th ICEIPBTN | |
| 59 | 2015 | May 26 – 39 | San Diego, CA | Todd Hastings | Michael A. Guillorn | 59th ICEIPBTN |
Related Conferences
EIPBN is the foremost conference on Nanofabrication in the US. EIPBN also has “sister” conferences to be a forum for presentations of similar topics in nanofabrication in Europe and Asia.The Premier Nanofabrication Conference in Europe is the Micro-and Nano-Enginering conference. For more information, visit http://www.mne2014.org/The premier Nanofabrication Conference in Asia is the Microprocess and Nanotechnology Conference conference. For more information on MNC, visit http://imnc.jp/
Other Conferences
In addition to these affiliated conferences, there are related conferences on certain topics that may be of special interest to researchers in our nanofabrication community. These are:
Gordon Research Conferences, covering multiple topics in advanced scientific and technology research.
http://www.grc.org/
The Lithography Workshop, specializing in advanced lithography
http://www.lithoworkshop.org/
The Nanoimprint and Nanoprint Technology (NNT) Conference, specializing in nanoimprint technology
http://www.nntconf.org/
