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Women in Nanofabrication Award
In recognition of their long term contributions to EIPBN:
Shida Tan
2025 Honoree / 2018 Program Chair
Dr. Shida Tan is a Principal Engineer at Intel’s physical debug technology development group, where she is leading cross-industry R&D projects to develop advanced technologies for on-die circuit analysis for advanced semiconductor process nodes. She is broadly recognized across the industry for spearheading advanced ion beam research and applications in the field of semiconductor circuit edit, failure analysis, fault isolation, and low yield analysis. Dr. Tan authored over 130 technical publications including a book chapter, 16 issued and pending patents, and 3 Intel trade secrets. She holds leadership positions in various professional organizations, including serving as 2018 EIPBN Program Chair.
Rebecca Cheung
2024 Honoree / 2013 Program Chair
Professor Rebecca Cheung currently holds a Chair in Nanoelectronics and is Head of the Research Institute for Integrated Micro and Nano Systems in the School of Engineering at the University of Edinburgh in Scotland, United Kingdom. In 2012, she was elected a fellow of the Royal Society of Edinburgh. Her major research interests to date span: micro- nano- fabrication technology; process-related defects; microwave electronics; low dimensional transport, optical spectroscopy, microelectromechanical systems (MEMS) and two-dimensional materials and devices.Â
Stella W. Pang
2023 Honoree / 1996 Program Chair
Stella W. Pang is a Chair Professor of the Department of Electrical Engineering and the Director of the Center for Biosystems, Neuroscience, and Nanotechnology at the City University of Hong Kong, China. Previously, she served as Professor and Associate Dean at the University of Michigan and as Technical Staff at MIT Lincoln Laboratory. She has over 400 technical articles, book chapters, and invited presentations. Prof. Pang has eleven patents granted in nanotechnology and microsystems and three pending. Her research interests include nanofabrication technology for biomedical, microelectromechanical, THz and metadevices. Prof. Pang is a Fellow of IEEE, ECS, AVS, and HKIE.
Elizabeth Dobisz
2022 Honoree / 2009 Program Chair
Liz has been attending 3-Beams since 1989 and she has made over 30 presentations at EIPBN. Her research interests included e-beam lithography, STM lithography, resists and resist processes that affect resolution, self-assembled monolayer patterning, compositional mixing of superlattices, fabrication of X-ray and Nanoimprint Lithography Masks, bit patterned magnetic media, and patterning MRAM storage devices. Liz has served EIPBN as section head on the program committee for 15 years, on the Steering Committee for 5 years, and the Advisory Committee for 11 years. In 2009 She served as Program Chair.