Conference

David S. Bergsman

Assistant Professor, Department of Chemical Engineering, University of Washington

Use of High Throughput MLD to Screen Photoresist Chemistries for EUV Lithography

David S. Bergsman
Robert Mcleod

Robert McLeod

Richard & Joy Dorf Endowed Professor, College of Engineering and Applied Science, University of Colorado Boulder
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Lisa McElwee-White

Lisa McElwee-White

Colonel Allen R. and Margaret G. Crow Professor of Chemistry, University of Florida
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Julia W. P. Hsu

Julia W.P. Hsu

Texas Instruments Distinguished Chair in Nanoelectronics, Department of Materials Science and Engineering, University of Texas at Dallas
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Elena Pinilla Cienfuegos

Elena Pinilla Cienfuegos

Researcher, Nanophotonics Technology Center, Universitat Politècnica de València
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