Conference

David S. Bergsman

Assistant Professor, Department of Chemical Engineering, University of Washington

Use of High Throughput MLD to Screen Photoresist Chemistries for EUV Lithography

David S. Bergsman
Uros Jagodic

Uroš Jagodič

Research Scientist, Jožef Stefan Institute, Slovenia
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Danilo De Simone

Danilo De Simone

Scientific Director at imec
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Katja Höflich

Katja Höflich

Head of the Joint Lab for Photonic Quantum Technologies, Ferdinand-Braun-Institut (FBH) in Berlin, Germany
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Mona Jarrahi

Mona Jarrahi

Professor of Electrical & Computer Engineering, University of California Los Angeles
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