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Conference

David S. Bergsman

Assistant Professor, Department of Chemical Engineering, University of Washington

Use of High Throughput MLD to Screen Photoresist Chemistries for EUV Lithography

David S. Bergsman
Ricardo Ruiz

Ricardo Ruiz

Staff Scientist at Lawrence Berkeley National Laboratory
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Mona Jarrahi

Mona Jarrahi

Professor of Electrical & Computer Engineering, University of California Los Angeles
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Julia W. P. Hsu

Julia W.P. Hsu

Texas Instruments Distinguished Chair in Nanoelectronics, Department of Materials Science and Engineering, University of Texas at Dallas
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Gijsbert Rispens

Gijsbert Rispens

Senior System Engineer, ASML NV, Netherlands
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