Conference

Michael Tsapatsis

Bloomberg Distinguished Professor, Department of Chemical and Biomolecular Engineering, John Hopkins University

Metal Imidazolate Films for Lithography Applications

This talk is about a class of amorphous metal organic frameworks (amorphous zeolitic imidazolate frameworks: aZIFs) and their use as resists for electron-beam lithography (EBL), extreme ultraviolet lithography (EUVL: 13.5 nm), as well as for lithography using smaller wavelengths, beyond EUV (BEUV: 6.7 nm).
Michael Tsapatsis
Mona Jarrahi

Mona Jarrahi

Professor of Electrical & Computer Engineering, University of California Los Angeles
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Danilo De Simone

Danilo De Simone

Scientific Director at imec
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Anuja De Silva

Anuja De Silva

Technical Director at Lam Research 
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Steven Randolph

Steven Randolph

Group Leader for the Nanofabrication Research Laboratory, Center for Nanophase Materials Sciences, Oak Ridge National Laboratory
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