Conference

Topic	Poster Title	Author(s)
2D Materials	Design and Application of Titanium Dioxide Thin Films Guided Mode Resonance Filter	He Zhang, YiChen Ping and Yanli Li
2D Materials	First-Principles Study of Graphene/Blue Phosphorus/Graphitic-ZnO van der Waals Heterostructures: Optoelectronic Enhancement and Mn Doping Effects	Hao Zhang
3D nano & micro fabrication	Rapid and Scalable Fabrication of Si Microfunnel Arrays Using Nanosecond UV-Laser and Selective HNA Etching	Ashif Chowdhury, Donggeon Kim and Heayoung Yoon
3D nano & micro fabrication	Laser-Assisted Fabrication and Multimodal Characterization of Si Microfunnel Structures	Jaidan Malloy, Ashif Chowdhury, Taehoon Kim, Jason Smith and Heayoung Yoon
Advanced micro/nanolithography	Refining the Fabrication of Grayscale Lithography Annealed Resin Engineering	Gavin C. Gee
AI for nanofabrication & Nanofabrication for AI	A Machine Learning Process for Flexible Inline Critical Dimensions Measurement from Micrographs	Jiahua Fan, Ziyu Wang, Pawan Vedanti and Gyuseok Kim
Applications of Nanofabrication	An Electron Beam-Based Micro-LED Inspection Method	Yao Liu, Yanli Li, Huibin Zhao and Li Han
Applications of Nanofabrication	Tailoring HfOₓ ReRAM Switching Through Ti Interfacial Engineering	Zhijie Kong, Tsotne Gamsakhurdashvili, Daniel Sabrsula, Ana Cohen, David Barth, Goran Karapetrov and Lucas Barreto
Electron Beam Lithography	Quantitative Evaluation of Patterning Resolution Capability Using Partially Resolved Regions.	aki Mukai
Electron Beam Lithography	Accelerated Curvilinear Mask Process Correction via Direct Energy-based Modulation	Chun-Hung Liu, Yu-Lin Chung, Nian-Ting Wu, Sheng-Kai Wong, Ze-An Ding and Meng Gu Tsai
Electron Beam Lithography	A Hybrid Curvilinear Mask Process Correction Method Integrating Shape and Dose Modifications	Chun-Hung Liu, Nian-Ting Wu, Yu-Lin Chung, Sheng-Kai Wong, Ze-An Ding, Yen-Hua Tu, Huang Ting-Chun, Yu-Tang Sun, Meng Gu Tsai and Yu-Jun Zhong
Electron Beam Lithography	Energy-based Iterative Calibration of Parametric Point Spread Functions for Curvilinear Pattern Prediction	Chun-Hung Liu, Meng Gu Tsai, Yu-Lin Chung, Ze-An Ding, Sheng-Kai Wong and Nian-Ting Wu
Electron Beam Lithography	A Fragment-based Pattern Prediction Method for Accelerating Large-Scale Mask Simulation	Ze-An Ding, Chun-Hung Liu, Yen-Hua Tu, Yu-Lin Chung, Yu Hsi Liu, Meng Gu Tsai and Nian-Ting Wu
Electron Beam Lithography	Application-Specific Fast Multipole Methods for Enhancing Computational Efficiency in Curvilinear Mask Pattern Prediction	Chun-Hung Liu, HSUN-MAO KUO, Ze-An Ding, Yen-Hua Tu, Huang Ting-Chun and Meng Gu Tsai
Electron Beam Lithography	Fabrication of Near-UV Multilevel Diffractive Lenses Using Grayscale E-Beam Lithography and TASTE	Cecilia R. Fasano, Chi C. Cheung and Marc Christopherson
Electron Beam Lithography	Apparent Resist Sensitivity of a Pattern of Multiple Features in Electron Beam Lithography	Soo-Young Lee
Electron/Ion Sources and Optics	Ion Implantation into Semiconductors using Ionic Liquid Ion Sources	Shaun Boodram, Alex Storey, Aydin Sabouri and Carla Perez Martinez
Ion Beam Lithography	Characterizing Environmental Vibration Impacts on Electron-Beam Lithography Using Exposure-Induced Pattern Signatures	Huang Jingyu
Metamaterials, metasurfaces & flat optics	Enabling Rapid Nanofabrication of Large-Area Metasurfaces by Innovative Algorithmic EBL Patterning	Frank Nouvertne, Michael Kahl and Volker Boegli
Metrology, Microscopy	Aberration Measurement Using Imaging with Electron Beam Landing-Angle Sweeping	Zhaohui Cheng, Shunya Tanaka, Keiichiro HItomi, Hiroki Takayanagi, Takayasu Iwatsuka, Ryo Kadoi, Hideto Doi, Masanori Mita and Hirokatsu Tanabe
Metrology, Microscopy	Prediction of Critical Dimensions of 3D Structures in CD SEM Metrology Based on LSTM Neural Network	Zheng Luo, Sa Liu, Delong Chen and Zhuming Liu
Nanoelectronics	Optimization of Zirconium doped Hafnia-Based Ferroelectric Capacitive Memories via Thermal Annealing	Ziyi Wang
Nanofabrication for biology, nanomedicine & implantable devices	Cost-Effective Antimicrobial Surfaces Patterned by Interference and Nanoimprint Lithography	Samuel D. Triepke, Luke J. Suttey, Jessica Andriolo, Jack Skinner and Bruce Burckel
Nanofabrication for quantum	Nanofiber Gamma Ray Sensors via Lead-Based Perovskite Quantum Dots	Chase R. Benner
Nanoimprint Lithography	Infiltration behaviors of trimethoxysilane derivatives into spin-on-carbon thin films analyzed by TOF SIMS	Masaru Nakagawa, Kyoko Tsuchiya, Rie Shishido, Tomoko Hasegawa, Akiko Onuma, Shintaro Itoh, Kenichi Fukuzawa, Ryohei Suzuki and Jun-ichi Seki
Nanoimprint Lithography	Fluorescence-intensity histogram characterizing uniformity of imprint resist patterns with different pattern-density distributions	Daisuke Tojima, Narumi Ono, Akiko Onuma and Masaru Nakagawa
Nanoimprint Lithography	Silicon Mold Improvement by Hydrogen Annealing for Low-loss PIC Fabrication Utilizing Nanoimprint Lithography	Lianyi Chen, Hui Wang and Wen-Di Li
Nanophotonics, Micro-optics, plasmonics.	Challenges and optimization in using HSQ as etch mask for on-chip AlN waveguides fabrication for photonic devices	Bernadeta R. Srijanto, Bogdan Dryzhakov, Dayrl P. Briggs, Steven J. Randolph and Kyle P. Kelley

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