Thomas Stempel Pereira
Business Development, Lab14
The Lithography Research Cluster Tool: An Automated Platform for AI-enabled Process Development
In this work, we present a conceptual architecture for a lithography research cluster that transfers principles from automated fabrication into a platform that can be adapted for scientific needs. The design focuses on a robotic handling system with flexible recipe execution, allowing serial and parallel process routes under controlled conditions.
Thomas Stempel studied physics at TU Berlin and completed a PhD at Helmholtz-Zentrum Berlin, with research focused on experimental semiconductor physics and photovoltaics. Since 2010, he has been with SPECS Surface Nano Analysis GmbH, serving as Head of Sales for several years, where he was involved in the conception and realization of complex UHV systems for surface science in close collaboration with leading research institutes and synchrotrons worldwide.
Since 2024, Thomas has been part of the LAB14 Business Development Team, with a primary focus on laboratory process automation and the development of Self-Driving Labs, particularly emphasizing on integrated data management.
Julia W.P. Hsu
Texas Instruments Distinguished Chair in Nanoelectronics, Department of Materials Science and Engineering, University of Texas at Dallas
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