EIPBN 2019 Authors Index

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Name	Abstract
A
Abedzadeh, Navid	Nanosecond Pulse Electronics for Gated Electron Mirrors
Achal, Roshan	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Adam, Gina	Progress, challenges and outlook of three-dimensional hybrid CMOS/ReRAM systems
Adolf, Andreas	Extending Multibeam SEM Technology to 331 Beams
Agarwal, Akshay	The potential of negative-tone PMMA e-beam lithography to enhance superconducting nanowire applications
Agrawal, Amit	Spatiotemporal Manipulation of Optical Fields enabled by Metasurfaces
Ahmad, Ahmad	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Ahmed, Zeeshan	Nanoscale photonic dosimetry and calorimetry
Ahn, Byoung-Sup	A multi-row writing method for massively-parallel electron-beam systems
Ahn, Byoungsup	Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Ahn, Seung Joon	Improvement of Electrical Characteristics of Neural Electrode by Electroplating Process
Aigbogun, Ehisuoria	Micro-textured electrolyte-electrode interfaces in solid-state supercapacitors
Akinwande, Deji	Photoelectric Effects of Bismuthene for Innovative Sensing and Energy Devices
Aksyuk, Vladimir	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Alaca, B. Erdem	Investigation of Line Edge Roughness in Field-Emission Scanning Probe Lithography
Alava, Thomas	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Alexander, Reum	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Alidoust, Nasser	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Alipour, Afshin	A High-Speed Z-Axis MEMS STM Nanopositioner
Alkemade, Paul	Removing halos around IBID deposits with a broad ion beam
Allen, Frances I.	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
AL-MASHA'AL, Asaad	Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Aloni, Shaul	Quantum information at the Molecular Foundry - an overview of new toolsets for QIS research
Amano, Hiroshi	The annealing effect for the air-exposed surface on the GaN photocathode
Ambrogio, Stefano	Novel Technologies for Artificial Intelligence: prospects and challenges
Amisova, Olga	Motion of dsDNA in a coupled nanochannel/nanopore system under an electric field
Amosova, Olga	Preparation and behavior of ssDNA in porous roof nanochannels
Amrollahi, Pouya	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Anderson, Evan	Assessing the Other Dimension in Atomically Precise Fabrication
Andrei, Ariana	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Andriolo, Jessica	Combined Electrostatic and Air Driven Electrospinning for Biomedical Applications Enhanced Plasmonic Activity of Polymer Fibers Through Nanoparticle Doping
Arat, Kerim	Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography
Atly, Hayden	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Awale, Apeksha	A high brightness source of energetic helium atoms for neutral particle lithography A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Awan, Kashif	Process Window Enhancement through Shape Proximity Effect Correction of an Electron Beam Lithography Process
Aydinoglu, Ferhat	Effect of oxygen plasma cleaning on non-switching pseudo-Bosch etching of high aspect ratio silicon pillars
B
Baek, Dong Hyun	Improvement of Electrical Characteristics of Neural Electrode by Electroplating Process
Baghdadi, Reza	Fabrication and Characterization of Multilayer Heater-Cryotrons
Bai, Jing	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Baldi, Tomas	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Bank, Seth	Photoelectric Effects of Bismuthene for Innovative Sensing and Energy Devices
Bao, Jiming	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Basiri, Ali	DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Basitan, Philipp	Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Bastiaens, Alex	Neuronal cell network activity enhanced by nanogrooved substrates
Basu, Prithvi	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Bateman, Fred	Nanoscale photonic dosimetry and calorimetry
Behzadirad, Mahmoud	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Belic, Nikola	On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Berggren, Karl	Nanosecond Pulse Electronics for Gated Electron Mirrors The potential of negative-tone PMMA e-beam lithography to enhance superconducting nanowire applications Superconducting Nanowires for Single-Photon Detection, Electronics, and Microwave Plasmonics Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays Low-contrast electron beam lithography process for fabrication of sloped sidewall HSQ spacers Investigation of ma-N 2400 Series Photoresist as an Electron Beam Resist for Superconducting Nanoscale Devices Measuring thickness in thin NbN films for superconducting devices Fabrication and Characterization of Multilayer Heater-Cryotrons
Berling, Dominique	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Bestwick, Andrew	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Bezik, Cody	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Bhaskaran, Harish	Nano-Calligraphy: Precisely tuning the feature spacing in scanning-probe lithography
Bian, Xinya	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments
Bianconi, Simone	Giant Conductivity Modulation of Aluminum Oxide using Focused Ion Beam
Bible, Amber	Bio-printed hydrogel micro-droplets for culturing and analysis of microbial communities Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Bilenberg, Brian	High volume manufacturing of advanced diffractive optical elements by injection molding
Bin Che Mahzan, Muhammad Ammar	A simplified patterning process for the selective 1D ZnO nanorods growth
Bin Che Mahzan, Ammar	Zinc oxide nanowires-based flexible force sensor
Bischoff, Lothar	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Bisig, Samuel	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Blaikie, Richard	Reflective Metamaterial Polarizer Enabled by Solid Immersion Lloyd’s Mirror Interference Lithography
Blankenburg, Erick	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Blondeel, Eric	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Bo, Fang	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Bojko, Richard	Process Correction for E-Beam Exposure of HSQ
Bol, Ageeth	Plasma-enhanced atomic layer deposition of transition metal dichalcogenides: from 2D monolayers to 3D vertical nanofins
Bouchiat, Vincent	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Bouret, Jean-Claude	Opening the road to custom astronomical UV gratings
Bowman, Adam	Design for a 10keV Multi-Pass Transmission Electron Microscope A programmable phase patterning device for electron beams
Brand, Oliver	Nanoscale metallic resistors in soft polymers
Bräuer, Annika	Nanoscale engineering of 3D plasmonic nanostructures using focused helium ion beam milling
Brockway, Molly	Hollow Mn2O3 Nanoparticles for Supercapacitor Electrodes via Solvothermal and High-Temperature Processing
Brown, Devin	Nanoscale metallic resistors in soft polymers
Bruccoleri, Alexander	Characterizing Profile Tilt of Nanoscale Deep-Etched Gratings via X-ray Diffraction
Brueck, Steven	Motion of dsDNA in a coupled nanochannel/nanopore system under an electric field
Brueck, Steve	Optical Scatterometry for In-line Nano-Manufacturing Nanoscale Details of Liquid Drops on 1D Patterned Surfaces Revealed by Etching
Brueck, Steven	Preparation and behavior of ssDNA in porous roof nanochannels
Bui, Cat-Vu	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Burr, Geoffrey W.	Novel Technologies for Artificial Intelligence: prospects and challenges
Busani, Tito	Nanoscale Details of Liquid Drops on 1D Patterned Surfaces Revealed by Etching
Bussmann, Ezra	Assessing the Other Dimension in Atomically Precise Fabrication
Butera, Robert	STM lithography and surface stability investigation of halogen-terminated Si(100)-(2x1)
Butters, Brenden A.	Fabrication and Characterization of Multilayer Heater-Cryotrons
C
Cabrini, Stefano	Quantum information at the Molecular Foundry - an overview of new toolsets for QIS research Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma Ultra-Narrow Gap Al/Al2O3 Bowtie Nanoantennas by Focused He Ion Milling Lithography Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Cai, Jingxuan	Step-and-repeat Nanopatterning Using Compact Two-beam Fibre-optic Interference Lithography Metallic Nanostructures on Arbitrary Surfaces Fabricated by Solution-processed Nanopatterning and Nanotransfer Printing Nanoimprint-induced strain engineering of two-dimensional materials
Caillat, Amandine	Opening the road to custom astronomical UV gratings
Calafiore, Giuseppe	Ultra-Narrow Gap Al/Al2O3 Bowtie Nanoantennas by Focused He Ion Milling Lithography
Calusine, Gregory	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Campbell, DeAnna	Assessing the Other Dimension in Atomically Precise Fabrication
Carpenter, Joe	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Cen, Michelle	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Chamele, Ninad	Photochemical Synthesis of Dendritic Silver Nano-particles (AgNPs) for Anti-counterfeiting
Chang, Chih-Hao	Modeling and Fabrication of Randomly Close Packed Nanostructures using Non-Monodispersed Colloidal Particles
Chang, Chi-Hao	Multilayer Stacking of 3D Periodic Nanostructures Assisted by Atomic Layer Deposition
Chang, Po-Yi	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Chang, Chih-Hao	Three-Beam Lloyd’s Mirror Interference Lithography with Liquid Immersion
Chang, Tongxin	Optimization of Swelling Process in Solvent Vapor Annealed Block Copolymer Thin Films
Chang, Chih-Hao	Assembly of Aligned Silver Nanowires using Roll-to-Roll System Tunable nanoparticle self-assembly on magnetic template with dynamic optical properties Double replication for characterizing cracks in surface-hardened PDMS
Chang, Mike	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Changqing, Xie	Resonant Lattice Kerker Effect in Metasurfaces of Titanium Dioxide Nanodisks
Charaev, Ilya	The potential of negative-tone PMMA e-beam lithography to enhance superconducting nanowire applications Measuring thickness in thin NbN films for superconducting devices
Charlson, E.J.	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Chaudhary, Rimjhim	Sidewall Channel Fabrication Using Membrane Projection Lithography and Metal Assisted Chemical Etching
Chauhan, Vishnu	Influence of high energy ion beam irradiation on nanocrystalline hafnium dioxide high-gate dielectric thin films grown by atomic layer deposition
Chen, Xiahui	DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter
Chen, Rifei	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics
Chen, Pai-Yen	High-Performance Infrared Nano-Rectennas Using New Photonic Nanostructures and 2D Materials
Chen, Buyun	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Chen, Xiahui	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Chen, Timothy	Modeling and Fabrication of Randomly Close Packed Nanostructures using Non-Monodispersed Colloidal Particles
Chen, I-Te	Modeling and Fabrication of Randomly Close Packed Nanostructures using Non-Monodispersed Colloidal Particles
Chen, Rifei	An all-purpose programmable and scalable fluid central processing unit for large-scale parallel droplet manipulations
Chen, Buyun	Hardware Acceleration Implementation of Kalman filter with Memristor
Chen, An	Novel Technologies for Artificial Intelligence: prospects and challenges
Chen, I-Te	Multilayer Stacking of 3D Periodic Nanostructures Assisted by Atomic Layer Deposition
Chen, Xinye	Efficient Bacteria Trapping and Retrieving via Low Aspect Ratio Nano-Sieve Device
Chen, I-Te	Assembly of Aligned Silver Nanowires using Roll-to-Roll System
Chen, Yi-An	Double replication for characterizing cracks in surface-hardened PDMS
Chen, Xinye	Fabrication of Extremely Shallow “Nano-Sieve” Device with Positive Photoresist Sacrificial Layer
Chen, Yan	Rapid fabrication of thermoplastic nanoforest substrates for high efficient capture of cancer cells
Chen, Xinye	Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Chen, Shengqiong	Super Resonance from Gain-Assisted Silicon Nanowires
Chen, Buyun	All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Cheng, Xing	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics Nanoimprint mold fabrication by nanosphere self-assembly for QLED light extraction
Cheng, Junao	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Cheng, Xing	An all-purpose programmable and scalable fluid central processing unit for large-scale parallel droplet manipulations
Cheng, Khor Wui	Optical property constant calculation for Advanced absorbers application
Cheung, Rebecca	A simplified patterning process for the selective 1D ZnO nanorods growth Parametric Study of 2D Pulsed Laser Deposited (PLD) WSe2 Transistors for enhancing an Infrared (IR) Detector Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Choi, Jin	A multi-row writing method for massively-parallel electron-beam systems Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Chollet, Matthieu	X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser
Chou, Stephen	A microfluidics-integrated photonic nanosensor for rapid and sensitive detection Ebola virus antigens
Chowdhury, Mokter	Ultrafast response time as a clue to study heat transfer in nanostructured materials
Chu, Yong	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Churchill, David	Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Cloutier, Martin	Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Colangelo, Marco	The potential of negative-tone PMMA e-beam lithography to enhance superconducting nanowire applications Low-contrast electron beam lithography process for fabrication of sloped sidewall HSQ spacers Investigation of ma-N 2400 Series Photoresist as an Electron Beam Resist for Superconducting Nanoscale Devices Measuring thickness in thin NbN films for superconducting devices
Colominas, Carles	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Combs, Nick	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Cooke, Mike	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma
Copeland, Craig	A Multifunctional Microstructure for Microscope Calibration and Nanoparticle Characterization
Cordova, Isvar	Design Requirements for X-Ray Compatible Liquid Cell
Coskun, M. Bulut	A High-Speed Z-Axis MEMS STM Nanopositioner
Craver, Barry	A high brightness source of energetic helium atoms for neutral particle lithography
Cronin, Stephen	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Croshaw, Jeremiah	Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication Atomic Scale Fabrication and Application of Silicon Dangling Bonds
cui, dehu	Step-and-repeat Nanopatterning Using Compact Two-beam Fibre-optic Interference Lithography
Cui, Bo	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks Nanofabrication of high aspect ratio and 25 nm wide Au nanostructures using low-temperature development of PMMA and pulse electrochemical deposition Fabrication of Ultrahigh Aspect Ratio Trenches by Two-Step KOH Anisotropic Wet Etching Effect of oxygen plasma cleaning on non-switching pseudo-Bosch etching of high aspect ratio silicon pillars Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar etching
Cumberland, Lonnie T.	Nanoscale photonic dosimetry and calorimetry
Cuscuna', Massimo	Ultra-Narrow Gap Al/Al2O3 Bowtie Nanoantennas by Focused He Ion Milling Lithography
Czaplewski, David	There is plenty of room … in more dimensions
Czolkos, Ilja	High volume manufacturing of advanced diffractive optical elements by injection molding
D
Dallorto, Stefano	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma
Dallorto, Stephano	Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography
Dane, Andrew	The potential of negative-tone PMMA e-beam lithography to enhance superconducting nanowire applications Fabrication and Characterization of Multilayer Heater-Cryotrons
Dang, Zhaoying	Photoelectric Effects of Bismuthene for Innovative Sensing and Energy Devices
Dani, John A.	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Das, Rabindra	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Das, Saptarshi	Nanofabrication and Characterization of Novel Devices Based on Two Dimensional (2D) Materials
Day, Alexandra	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
De Alba, Roberto	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies Absolute deflection measurements in a MEMS/NEMS interferometry system
De Andrade, Vincent	Sub-Micron High Aspect Ratio Direct E-beam Patterning of SU-8 Epoxy Resist
De Malsche, Wim	Active control of shear and mass transport in microfluidic devices
de Marco, Alex	Hybrid refractive-diffractive microlenses in glass and lithium niobate by focused Xe ion beam milling Self-aligned structures by a single-step through-membrane 100-keV electron beam lithography
de Pablo, Juan	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
de Villafranca, Glen	On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Deep, Akash	Development of graphene-based immunosensor for highly sensitive biosensing of waterborne pathogens
Delaveaud, Christophe	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
DeLongchamp, Dean	Design Requirements for X-Ray Compatible Liquid Cell
Delony, Jakin	Block Copolymer Directed Self-Assembly Defect Modes Induced by Localized Errors in Chemoepitaxial Guiding Underlayers: A Molecular Simulation Study
DeMell, Jennifer	STM lithography and surface stability investigation of halogen-terminated Si(100)-(2x1)
Deng, Jiangdong	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
DeRose, Guy	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Dey, Ripon	Fabrication of Ultrahigh Aspect Ratio Trenches by Two-Step KOH Anisotropic Wet Etching Effects of mask material conductivity on lateral undercut etching in silicon nano-pillar etching
Dhuey, Scott	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma
Dick, Nir	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Dienel, Thomas	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges
Dilbaghi, Neeraj	Controlled Synthesis of Nanowires/Nanorods via Electrodeposition in Anodisc Alumina Templates
Dohi, H.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Doktycz, Mitchel	Bio-printed hydrogel micro-droplets for culturing and analysis of microbial communities Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Dolejsi, Moshe	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Dong, Zengya	Design of small low energy electron gun
Dong, Siyan	Interferometric investigation of suspended monolayer TMDCs enabled by e-beam lithography
Donnelly, Vincent	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Dory, Constantin	Diamond and 4H-Silicon Carbide Quantum Photonics
Dragoi, Valentin	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Dreser, Christoph	Nanoscale engineering of 3D plasmonic nanostructures using focused helium ion beam milling
Dreyer, Michael	STM lithography and surface stability investigation of halogen-terminated Si(100)-(2x1)
Drezner, Yariv	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Du, Ke	Efficient Bacteria Trapping and Retrieving via Low Aspect Ratio Nano-Sieve Device Fabrication of Extremely Shallow “Nano-Sieve” Device with Positive Photoresist Sacrificial Layer Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Duerig, Urs	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Duscher, Gerd	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Dwyer, Kevin	STM lithography and surface stability investigation of halogen-terminated Si(100)-(2x1)
Dyck, Ondrej	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments Giving a microscope the intelligence to see and manipulate: automated information extraction for single atom control
E
Economou, Demetre	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Edwards, Jeremy	Preparation and behavior of ssDNA in porous roof nanochannels
Ehrhardt, Martin	Multiple replication of hierarchical structures from polymer masters with anisotropy
Eichfeld, Chad	Blazed gratings for X-ray astronomy fabricated by grayscale e-beam and nanoimprint
Ekinci, Huseyin	Fabrication of Ultrahigh Aspect Ratio Trenches by Two-Step KOH Anisotropic Wet Etching
Eldeeb, Mohammed	Detection of Filopodia and Cancer Cell Concentration by Hybrid Plasmonic and Impedance Biosensor
Engelhardt, Victor	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Eriksson, Axel	There is plenty of room … in more dimensions
Espinosa, Horacio	Interferometric investigation of suspended monolayer TMDCs enabled by e-beam lithography
Evans, Benjamin	Tunable nanoparticle self-assembly on magnetic template with dynamic optical properties
F
Falzon, Luke	Efficient Bacteria Trapping and Retrieving via Low Aspect Ratio Nano-Sieve Device Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Fan, Harrison	Ultrafast response time as a clue to study heat transfer in nanostructured materials
Faria Briceno, Juan	Optical Scatterometry for In-line Nano-Manufacturing Nanoscale Details of Liquid Drops on 1D Patterned Surfaces Revealed by Etching
Farmakidis, Nikolaos	Nano-Calligraphy: Precisely tuning the feature spacing in scanning-probe lithography
Farrow, Reginald	Trends in Nanosensor Arrays for Nanobiology & Nanomedicine
Favata, Joseph	Acuity of Electron-Beam Induced Deposition of Pt/C Composite Material
Feeney, Stanley	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Feezell, Daniel	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Feng, Yiping	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Feng, Hongtao	Rapid fabrication of thermoplastic nanoforest substrates for high efficient capture of cancer cells
Ferreira de Lima, Thomas	Neuromorphic Computing Hardware with Silicon Photonics
Fitzgerald, Ryan	Nanoscale photonic dosimetry and calorimetry
Fleischer, Monika	Nanoscale engineering of 3D plasmonic nanostructures using focused helium ion beam milling
Fleming, Brian	Opening the road to custom astronomical UV gratings
Fowlkes, Jason	3D Nano-Printing via Focused Electron Beams: A Perspective
France, Kevin	Opening the road to custom astronomical UV gratings
Frimat, Jean-Philippe	Neuronal cell network activity enhanced by nanogrooved substrates
Fritz, Hans	Extending Multibeam SEM Technology to 331 Beams
Fritz, David	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Fuchs, Ehud	Striving for Atomic Precision for large dopant arrays The Next Generation of Extreme-Resolution E-beam Lithography
G
Gädda, Thomas M.	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
GAN, Zhuofei	Step-and-repeat Nanopatterning Using Compact Two-beam Fibre-optic Interference Lithography Metallic Nanostructures on Arbitrary Surfaces Fabricated by Solution-processed Nanopatterning and Nanotransfer Printing
Gann, Eliot	Design Requirements for X-Ray Compatible Liquid Cell
Gao, Yuan	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Garcia-Granada, Andres	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Gardner, Donald	UltraHigh Aspect Ratio Silicon Structures for Energy Storage Applications
Gardner, Jamie	Cold Atom Ion Sources
Garfinkel, David	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Geddes, Joseph	Nanostructure manufacturing via holographic photolithography
Gelin, Pierre	Active control of shear and mass transport in microfluidic devices
Geng, Yulin	A simplified patterning process for the selective 1D ZnO nanorods growth
Gerngroß, Maik	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ
Getega, Daniel	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Gheewala, Mufaddal	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Giannelis, Emmanuel	Metal organic cluster photoresists: etch behavior of metal oxide systems
Gleason, Karen	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Gölzhäuser, Armin	Imaging and Modification of 2D Materials: How Helium Ion Microscopy helps to fabricate novel filters and capacitors
Goodyear, Andy	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma
Gorelick, Sergey	Hybrid refractive-diffractive microlenses in glass and lithium niobate by focused Xe ion beam milling Self-aligned structures by a single-step through-membrane 100-keV electron beam lithography
Görrn, Patrick	Characteristics of thermal imprint with perovskite layers
Greenzweig, Yuval	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Griep, Mark	Enhanced Plasmonic Activity of Polymer Fibers Through Nanoparticle Doping
Grise, Fabien	Opening the road to custom astronomical UV gratings
Grutzik, Scott	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Gujrati, Abhijeet	Greyscale E-Beam Lithography Revisited: Dynamic Range and Roughness of Patterns on Silicon
Guo, Hongjie	A high brightness source of energetic helium atoms for neutral particle lithography
Guo, Yubing	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Gupta, Arushi	Development of graphene-based immunosensor for highly sensitive biosensing of waterborne pathogens
H
Hagen, Cornelis (Kees)	Cleanroom in SEM Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography
Hagen, Cornelis W.	Cleanroom in an SEM: in-situ area selective ALD
Hahn, Lothar	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ
Hallstein, Roy	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Han, Li	Effect of electron beam annealing duration on the optical-electrical properties of ZnO thin films Design of small low energy electron gun
Han, Zheng	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Han, Li	A True-Color SEM-CT
Hansson, Niklas	High volume manufacturing of advanced diffractive optical elements by injection molding
Hasan, Md Nabid	Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Heerkens, C.T.H.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Heiderhoff, Ralf	Characteristics of thermal imprint with perovskite layers
Heilmann, Ralf	Characterizing Profile Tilt of Nanoscale Deep-Etched Gratings via X-ray Diffraction
Henderson, Cliff	Block Copolymer Directed Self-Assembly Defect Modes Induced by Localized Errors in Chemoepitaxial Guiding Underlayers: A Molecular Simulation Study
Herring, George	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Hesselink, Lambertus	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Heyroth, Frank	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ
Hirai, Yoshihiko	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint Computational study on micro 3-dimensional imaging using novel photolithography
Hirjibehedin, Cyrus	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Hlawacek, Gregor	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation Spatially resolved materials modification using Helium Ion Microscopy
Hofmann, Martin	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Hofmann, Ulrich	Process Correction for E-Beam Exposure of HSQ On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Hofmann, Martin	Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Holland, Glenn	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies Absolute deflection measurements in a MEMS/NEMS interferometry system
Holman, Zachary	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Holz, Mathias	Investigation of Line Edge Roughness in Field-Emission Scanning Probe Lithography Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Holzner, Felix	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Honda, Yoshio	The annealing effect for the air-exposed surface on the GaN photocathode
Hong, Fan	Reflective Metamaterial Polarizer Enabled by Solid Immersion Lloyd’s Mirror Interference Lithography
Hosseinzadeh, Hedieh	Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication
Hu, Wenhan	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Hu, Pan	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Hu, Grace	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Hu, Pan	Optical Probing of Acoustic Vibration through Coupled Plasmon Resonance All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Huang, Haiying	Optimization of Swelling Process in Solvent Vapor Annealed Block Copolymer Thin Films
Huang, Yuqing	Rapid fabrication of thermoplastic nanoforest substrates for high efficient capture of cancer cells
Hudak, Bethany	Towards Single Atom Doping and Control in Silicon
Huff, Taleana	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Hugo, Adrien	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Hundekar, Prateek	Influence of high energy ion beam irradiation on nanocrystalline hafnium dioxide high-gate dielectric thin films grown by atomic layer deposition
Hunt, Matthew	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Huston, Lane	Combined Electrostatic and Air Driven Electrospinning for Biomedical Applications
Hwang, Hae-Chul	Evaluation of EUV transmittance and mechanical strength of Si-based EUV pellicle film by nitrogen ion implantation
I
Iijima, Hokuto	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Ilic, Rob	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Ilic, Bojan	Design Requirements for X-Ray Compatible Liquid Cell
Ilic, Rob	Absolute deflection measurements in a MEMS/NEMS interferometry system
Iqbal, Saleem	Fabrication and Characterization of Multilayer Heater-Cryotrons
Israel, Yonatan	Design for a 10keV Multi-Pass Transmission Electron Microscope A programmable phase patterning device for electron beams
Ivanov, Tzvetan	Investigation of Line Edge Roughness in Field-Emission Scanning Probe Lithography Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
J
Jacobs, Tevis	Greyscale E-Beam Lithography Revisited: Dynamic Range and Roughness of Patterns on Silicon
Jaiswal, Supriya	Wanted: More Photons for EUV Lithography
Jeevanandam, Gaudhaman	Cleanroom in SEM Cleanroom in an SEM: in-situ area selective ALD
Jelena Vučković, Jelena	Diamond and 4H-Silicon Carbide Quantum Photonics
Jeon, Chan-Uk	A multi-row writing method for massively-parallel electron-beam systems
Jeon, Chanuk	Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Jeronimo, Karina	A simplified patterning process for the selective 1D ZnO nanorods growth
Jeronimo Martinez, Karina	Zinc oxide nanowires-based flexible force sensor
Jesse, Stephen	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments Towards Single Atom Doping and Control in Silicon Giving a microscope the intelligence to see and manipulate: automated information extraction for single atom control
Jessen, Karl	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Ji, Shengxiang	Design of High-X Block Copolymers for Sub-10 nm Patterning
Jiang, Miao	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Jiang, Youwei	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics
Jiang, Li	Micro-textured electrolyte-electrode interfaces in solid-state supercapacitors
Jin, Xin	Motion of dsDNA in a coupled nanochannel/nanopore system under an electric field Preparation and behavior of ssDNA in porous roof nanochannels
Jindal, Vibhu	Optical property constant calculation for Advanced absorbers application
Jing, Wei	Rapid fabrication of thermoplastic nanoforest substrates for high efficient capture of cancer cells
Johansson, Alicia	High volume manufacturing of advanced diffractive optical elements by injection molding
Jones, David	Empirical Modeling of Lithographic Error in Direct Write Laser (DWL) Lithography
Jones, David J.	Ultrafast response time as a clue to study heat transfer in nanostructured materials
Jonnalagadda, Venu Sushir	A high brightness source of energetic helium atoms for neutral particle lithography A streamlined process for fabricating multi-channel neural probes on optical fiber substrates A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
Joseph, McKenzie	Enhanced Plasmonic Activity of Polymer Fibers Through Nanoparticle Doping
Jouvaud, Camille	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Juffmann, Thomas	Design for a 10keV Multi-Pass Transmission Electron Microscope
Jung, Seok Heon	Metal organic cluster photoresists: etch behavior of metal oxide systems
K
Kaddoura, Moufeed	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Kagan, Cherie	Marrying Top-Down Fabrication and Bottom-Up Assembly of Colloidal Nanocrystals to Construct Devices
Kaiser, Christian	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Kalinin, Sergei	Towards Single Atom Doping and Control in Silicon Giving a microscope the intelligence to see and manipulate: automated information extraction for single atom control
Kämmer, Nico	Extending Multibeam SEM Technology to 331 Beams
Kanwal, Alokik	Design Requirements for X-Ray Compatible Liquid Cell
Kaplan, Gerardo	A microfluidics-integrated photonic nanosensor for rapid and sensitive detection Ebola virus antigens
Karaste, Kimmo	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Kärtner, Franz	Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Kasevich, Mark	Design for a 10keV Multi-Pass Transmission Electron Microscope A programmable phase patterning device for electron beams Nanosecond Pulse Electronics for Gated Electron Mirrors
Kashid, Ranjit	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Katzenmeyer, Aaron	Assessing the Other Dimension in Atomically Precise Fabrication
Kaufmann, Nicolas	Extending Multibeam SEM Technology to 331 Beams
Kawamata, Tomoaki	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Kawata, Hiroaki	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint Computational study on micro 3-dimensional imaging using novel photolithography
Keathley, Phillip	Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Kedia, Deepak	Controlled Synthesis of Nanowires/Nanorods via Electrodeposition in Anodisc Alumina Templates
Keijzer, P.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Kern, Dieter	Nanoscale engineering of 3D plasmonic nanostructures using focused helium ion beam milling
Ketelaars, W.S.M.M.	Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography
Khan, Md Ashiqur Rahaman	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Khanom, Fouzia	SIMS Analysis of a Commercial Lithium Ion Battery Using a Highly Focused Neon Ion Beam
ki, Hyun Kim	Development of graphene-based immunosensor for highly sensitive biosensing of waterborne pathogens
Kim, David	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Kim, Seom-Beom	A multi-row writing method for massively-parallel electron-beam systems Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Kim, Ki-Nam	Evaluation of EUV transmittance and mechanical strength of Si-based EUV pellicle film by nitrogen ion implantation
Kim, Mingu	Nanoscale metallic resistors in soft polymers
Kim, Ki-Hyun	Controlled Synthesis of Nanowires/Nanorods via Electrodeposition in Anodisc Alumina Templates
Kim, Dae Wook	Improvement of Electrical Characteristics of Neural Electrode by Electroplating Process
Kim, Ho Seob	Improvement of Electrical Characteristics of Neural Electrode by Electroplating Process
Kimura, Hayato	Multi-beam mask writer MBM-1000
Kishimoto, T.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Kiss, Andrew	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Kisslinger, Kim	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography
Klimov, Nikolai	Nanoscale photonic dosimetry and calorimetry
Klimpel, T.	Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography
Klingner, Nico	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Klopfer, Brannon	Design for a 10keV Multi-Pass Transmission Electron Microscope Nanosecond Pulse Electronics for Gated Electron Mirrors
Knuffman, Brenton	Cold Atom Ion Sources The Cesium Low Temperature Ion Source Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications Startup Award: zeroK NanoTech
Koizumi, Atsushi	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Kommera, Swaroop	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Kong, Xiangdong	Effect of electron beam annealing duration on the optical-electrical properties of ZnO thin films
Kooistra-Manning, Emily	Combined Electrostatic and Air Driven Electrospinning for Biomedical Applications
Koppell, Stewart	Design for a 10keV Multi-Pass Transmission Electron Microscope A programmable phase patterning device for electron beams Nanosecond Pulse Electronics for Gated Electron Mirrors
Koratkar, Nikhil	Influence of high energy ion beam irradiation on nanocrystalline hafnium dioxide high-gate dielectric thin films grown by atomic layer deposition
Korivi, Naga	Micro-textured electrolyte-electrode interfaces in solid-state supercapacitors
Kotula, Paul	Assessing the Other Dimension in Atomically Precise Fabrication
Kozak, Darby	A Multifunctional Microstructure for Microscope Calibration and Nanoparticle Characterization
Kozicki, Michael	Photochemical Synthesis of Dendritic Silver Nano-particles (AgNPs) for Anti-counterfeiting
Kravchenko, Ivan	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments Greyscale E-Beam Lithography Revisited: Dynamic Range and Roughness of Patterns on Silicon
Krielaart, M.A.R.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Kruczek, Nicolas	Opening the road to custom astronomical UV gratings
Kruit, P.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
Kruit, Pieter	Cleanroom in SEM Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography Cleanroom in an SEM: in-situ area selective ALD
Krylov, Slava	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies Absolute deflection measurements in a MEMS/NEMS interferometry system
Kulmala, Tero S.	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Kumar, Sandeep	Controlled Synthesis of Nanowires/Nanorods via Electrodeposition in Anodisc Alumina Templates
KUMAR, RAJESH	Influence of high energy ion beam irradiation on nanocrystalline hafnium dioxide high-gate dielectric thin films grown by atomic layer deposition
Kumar, Madhav	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Kumke, Michael U.	Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Kurabayashi, Katsuo	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows
Kusko, Rebecca	A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
Kuznetsova, Yuliya	Motion of dsDNA in a coupled nanochannel/nanopore system under an electric field Preparation and behavior of ssDNA in porous roof nanochannels
Kuzyk, Casimir	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
L
Laird, Jamie	A high-resolution source of single ions using correlated feedback
Lake, Joseph	Striving for Atomic Precision for large dopant arrays The Next Generation of Extreme-Resolution E-beam Lithography
Lam, Wilbur	Nanoscale metallic resistors in soft polymers
Lavely, Eugene	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Lavrentovich, Oleg D.	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Lavrik, Nickolay	Greyscale E-Beam Lithography Revisited: Dynamic Range and Roughness of Patterns on Silicon
Lee, Dennis T.	Multilayer Stacking of 3D Periodic Nanostructures Assisted by Atomic Layer Deposition
Lee, Nathan	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Lee, Soo-Young	A multi-row writing method for massively-parallel electron-beam systems Effects of Abnormal Beams on Writing Qualities in Massively-parallel E-beam Systems
Lee, Gisung	Evaluation of EUV transmittance and mechanical strength of Si-based EUV pellicle film by nitrogen ion implantation
Lee, Dong-Wook	Evaluation of EUV transmittance and mechanical strength of Si-based EUV pellicle film by nitrogen ion implantation
Leifels, Miriam	Multiple replication of hierarchical structures from polymer masters with anisotropy Characteristics of thermal imprint with perovskite layers Double replication for characterizing cracks in surface-hardened PDMS
Lewis, Scott	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Li, Wen-Di	Step-and-repeat Nanopatterning Using Compact Two-beam Fibre-optic Interference Lithography
Li, Kenan	UltraHigh Aspect Ratio Silicon Structures for Energy Storage Applications
Li, Yan	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Li, Yunzi	Bio-printed hydrogel micro-droplets for culturing and analysis of microbial communities
Li, Weihao	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics Nanoimprint mold fabrication by nanosphere self-assembly for QLED light extraction
Li, Yuanrui	Inverse design of angle-sensing metasurface by particle swarm optimization
Li, Kenan	X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser
Li, Yuanrui	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Li, Da	Plasma Process for Generating Movable Sulfur Vacancies in MoS2 Layers and Fabricating Analogue Ionically-Coupled Multi-Terminal Memristors Large Area Chemical Vapor Deposition of High-Quality Few-Layer MoS2 through Modulation of Precursor Source Temperature Profiles
Li, Wen-Di	Metallic Nanostructures on Arbitrary Surfaces Fabricated by Solution-processed Nanopatterning and Nanotransfer Printing
Li, Weimin	Optical property constant calculation for Advanced absorbers application
Li, Hongquan	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Li, Yanli	Effect of electron beam annealing duration on the optical-electrical properties of ZnO thin films
Li, Wen-Di	Nanoimprint-induced strain engineering of two-dimensional materials
Li, Junjie	Large size and high productive growth of SnS2 nanoflakes for good performance photodetecting application
Li, Kenan	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Li, Yuanrui	Optical Probing of Acoustic Vibration through Coupled Plasmon Resonance All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Li, Yunzi	Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Liang, Chuwei	Step-and-repeat Nanopatterning Using Compact Two-beam Fibre-optic Interference Lithography
Liang, Xiaogan	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows Plasma Process for Generating Movable Sulfur Vacancies in MoS2 Layers and Fabricating Analogue Ionically-Coupled Multi-Terminal Memristors Large Area Chemical Vapor Deposition of High-Quality Few-Layer MoS2 through Modulation of Precursor Source Temperature Profiles
Liang, Zhixiu	3D contact stencil masks for lift-off process on extremely uneven surface
Liao, Kuo-Tang	A Multifunctional Microstructure for Microscope Calibration and Nanoparticle Characterization Optimal nanofabrication of complex nanofluidics for interfacial characterization of colloidal nanoparticles
Liddle, James	Nanofabrication by self-assembly: pathways and defects Design Requirements for X-Ray Compatible Liquid Cell
Lilach, Yigal	Why So Negative? Ways to make PMMA useful as a negative-tone resist in EBL.
Lin, Yuan	One-step assembly of multi-layered structures with orthogonally oriented stripe-like patterns on the surface of a capillary tube
Lina, Shi	Resonant Lattice Kerker Effect in Metasurfaces of Titanium Dioxide Nanodisks
Lister, Kevin	On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Liu, Yan	Soft Robotics Programmed with Double Crosslinking DNA Hydrogels DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter
Liu, P. Q.	Assessing the Other Dimension in Atomically Precise Fabrication
Liu, Lintao	Nanofabrication of high aspect ratio and 25 nm wide Au nanostructures using low-temperature development of PMMA and pulse electrochemical deposition
Liu, Yu	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics
Liu, Peter Qiang	Terahertz Photonic Devices Employing Functional Nanostructures
Liu, Yanwei	X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser
Liu, Zerui	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Liu, Xianming	An all-purpose programmable and scalable fluid central processing unit for large-scale parallel droplet manipulations
Liu, Yu	An all-purpose programmable and scalable fluid central processing unit for large-scale parallel droplet manipulations
Liu, Ying	Soft x-ray varied-line-spacing gratings by near field holography with an electron beam lithography-written mask
Liu, Shuwei	Optical property constant calculation for Advanced absorbers application
Liu, Ying	Energy dependence of self-organized nanostructures on photoresist surfaces by ion bombardment at normal incidence
Liu, Junbiao	Design of small low energy electron gun
Liu, Yanwei	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Liu, Junbiao	A True-Color SEM-CT
Liu, He	All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Liu, Zerui	All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Livengood, Richard	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Lomax, Peter	A simplified patterning process for the selective 1D ZnO nanorods growth
Loncar, Marko	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Longjie, Li	Resonant Lattice Kerker Effect in Metasurfaces of Titanium Dioxide Nanodisks
Lopez, Daniel	There is plenty of room … in more dimensions
Lopez, Gerald	Empirical Modeling of Lithographic Error in Direct Write Laser (DWL) Lithography On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography Process Window Enhancement through Shape Proximity Effect Correction of an Electron Beam Lithography Process
Lorenz, Pierre	Multiple replication of hierarchical structures from polymer masters with anisotropy
Lorusso, Gian	Determining the Ultimate Resolution of SEM-based Unbiased Roughness Measurements
Lu, Wu	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Lu, Ming	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography
Lu, Wu	Graphene-based Microsupercapacitors for On-Chip Micro Power Sources
Lu, Tzu-Ming	Assessing the Other Dimension in Atomically Precise Fabrication
Lu, Ping	Assessing the Other Dimension in Atomically Precise Fabrication
Lu, Wu	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Lu, Ming	3D contact stencil masks for lift-off process on extremely uneven surface
Ludovice, Peter	Block Copolymer Directed Self-Assembly Defect Modes Induced by Localized Errors in Chemoepitaxial Guiding Underlayers: A Molecular Simulation Study
Ludvigsen, Emil	Hemiwicking effect on nanoscale; wetting of surfaces derived from in-situ nano-lithography by self-assembly of block-copolymer structures
Luk, T. S.	Assessing the Other Dimension in Atomically Precise Fabrication
Luo, Zhiren	Three-Beam Lloyd’s Mirror Interference Lithography with Liquid Immersion Tunable nanoparticle self-assembly on magnetic template with dynamic optical properties
Lupini, Andrew	Towards Single Atom Doping and Control in Silicon
Luttge, Regina	Neuronal cell network activity enhanced by nanogrooved substrates
Ly, Minh	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
M
Ma, Yu-tian	The quality analysis for brazing joint of copper/ diamond window using micro-computed tomography
Ma, Yutian	A True-Color SEM-CT
Mack, Chris	Determining the Ultimate Resolution of SEM-based Unbiased Roughness Measurements
Mackin, Charles	Novel Technologies for Artificial Intelligence: prospects and challenges
Madison, Andrew	Optimal nanofabrication of complex nanofluidics for interfacial characterization of colloidal nanoparticles
Maes, Dominique	Active control of shear and mass transport in microfluidic devices
Magel, Gregory A.	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Mai, Tobias	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Mailley, Pascal	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Majikes, Jacob	Nanofabrication by self-assembly: pathways and defects
Mallek, Justin	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Mandsberg, Nikolaj	Hemiwicking effect on nanoscale; wetting of surfaces derived from in-situ nano-lithography by self-assembly of block-copolymer structures
Manenti, Riccardo	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Mankos, Marian	Design for a 10keV Multi-Pass Transmission Electron Microscope
Manske, Eberhard	Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography
Mao, Wenbo	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Marshall, Michael	Assessing the Other Dimension in Atomically Precise Fabrication
Mastel, Kieran	Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication
Mastropaolo, Enrico	A simplified patterning process for the selective 1D ZnO nanorods growth Zinc oxide nanowires-based flexible force sensor Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Masurkar, Amrita	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Matsumoto, Hiroshi	Multi-beam mask writer MBM-1000
Mauger, Philip	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Mayer, Andre	Multiple replication of hierarchical structures from polymer masters with anisotropy Characteristics of thermal imprint with perovskite layers Double replication for characterizing cracks in surface-hardened PDMS
Mazarov, Paul	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Mbisike, Stephen	Parametric Study of 2D Pulsed Laser Deposited (PLD) WSe2 Transistors for enhancing an Infrared (IR) Detector
McCaughan, Adam N.	Fabrication and Characterization of Multilayer Heater-Cryotrons
McClelland, Jabez	Cold Atom Ion Sources The Cesium Low Temperature Ion Source
McCoy, Jake	Blazed gratings for X-ray astronomy fabricated by grayscale e-beam and nanoimprint
McCulloch, Andrew	A high-resolution source of single ions using correlated feedback
Mccurdy, Ross	Optimizing 100 kV electron beam lithography for X-ray grating fabrication
McEntaffer, Randall	Opening the road to custom astronomical UV gratings Blazed gratings for X-ray astronomy fabricated by grayscale e-beam and nanoimprint
McGehee, William	Cold Atom Ion Sources
Mechold, Stephan	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Mecholdt, Stephan	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography
Medeiros, Owen	Measuring thickness in thin NbN films for superconducting devices
Melville, Alexander	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Meng, Deming	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Michels, Thomas	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Miljkovic, Vladimir	High volume manufacturing of advanced diffractive optical elements by injection molding
Mills, Arthur K.	Ultrafast response time as a clue to study heat transfer in nanostructured materials
Ming, Ya	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Misaka, Akio	Computational study on micro 3-dimensional imaging using novel photolithography
Misra, Shashank	Assessing the Other Dimension in Atomically Precise Fabrication
Mohan, Yuvraj	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Mohanty, Saurav	Assembly of Aligned Silver Nanowires using Roll-to-Roll System
Moheimani, S.O. Reza	A High-Speed Z-Axis MEMS STM Nanopositioner
Mohseni, Hooman	Giant Conductivity Modulation of Aluminum Oxide using Focused Ion Beam
Mol, Jan A.	Nano-Calligraphy: Precisely tuning the feature spacing in scanning-probe lithography
Mol, Jan	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments
Moni, Priya	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Moore, Thomas M.	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Mori, Takahiro	aquaSAVE™ Antistatic Agent for Electron Beam Lithography
Morrell-Falvey, Jennifer	Bio-printed hydrogel micro-droplets for culturing and analysis of microbial communities Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Motwani, Prateek	A high brightness source of energetic helium atoms for neutral particle lithography A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Mukherjee, Subhrangsu	Design Requirements for X-Ray Compatible Liquid Cell
Müller, Ingo	Extending Multibeam SEM Technology to 331 Beams
Muntada, Olga	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Murthy, Swathi	R2R fabrication of plasmonic color surfaces
Muslimov, Eduard	Opening the road to custom astronomical UV gratings
Myers, David	Nanoscale metallic resistors in soft polymers
Myung, Ja Hye	A Multifunctional Microstructure for Microscope Calibration and Nanoparticle Characterization
N
Nadzeyka, Achim	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Nahmias, Mitchell	Neuromorphic Computing Hardware with Silicon Photonics
Nakayamada, Noriaki	Multi-beam mask writer MBM-1000
Nam, Chang-Yong	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography
Namboodiri, Pradeep	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Narasimhan, Vijay	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Narayanan, Pritish	Novel Technologies for Artificial Intelligence: prospects and challenges
Nathamgari, Samba Shiva Prasad	Interferometric investigation of suspended monolayer TMDCs enabled by e-beam lithography
Ndoni, Sokol	Hemiwicking effect on nanoscale; wetting of surfaces derived from in-situ nano-lithography by self-assembly of block-copolymer structures
Nealey, Paul	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Nehra, Monika	Controlled Synthesis of Nanowires/Nanorods via Electrodeposition in Anodisc Alumina Templates
Nersisyan, Ani	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Neumann, Alexander	Motion of dsDNA in a coupled nanochannel/nanopore system under an electric field Preparation and behavior of ssDNA in porous roof nanochannels
Neustock, Lars Thorben	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
NEWTON, Michael	Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Niedzielski Huffman, Bethany	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Nielsen, Theodor	High volume manufacturing of advanced diffractive optical elements by injection molding
Nishitani, Tomohiro	The annealing effect for the air-exposed surface on the GaN photocathode Wavefront Metrology for X-Ray Free Electron Laser Instruments
Niu, Jiebin	Nanofabrication of high aspect ratio and 25 nm wide Au nanostructures using low-temperature development of PMMA and pulse electrochemical deposition
Niu, Geng	A True-Color SEM-CT
Niu, Jiebin	Super Resonance from Gain-Assisted Silicon Nanowires
Nojeh, Alireza	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM Ultrafast response time as a clue to study heat transfer in nanostructured materials
Nounu, Hatem	A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
O
Ober, Christopher	Metal organic cluster photoresists: etch behavior of metal oxide systems
Ocola, Leonidas	Sub-Micron High Aspect Ratio Direct E-beam Patterning of SU-8 Epoxy Resist
Ogletree, Frank	Quantum information at the Molecular Foundry - an overview of new toolsets for QIS research
Oh, Bo-Ram	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows
Ohkubo, Hiroyuki	Fabrication of sub-10 nanometer half-pitch dense line and space structure by using electron beam lithography
Ohlhausen, James	Assessing the Other Dimension in Atomically Precise Fabrication
Ohyi, Hideyuki	Fabrication of sub-10 nanometer half-pitch dense line and space structure by using electron beam lithography
Oliver, William	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Omoregie, Osaiyekemwen	Micro-textured electrolyte-electrode interfaces in solid-state supercapacitors
Oni, Ben	Micro-textured electrolyte-electrode interfaces in solid-state supercapacitors
Onishi, Yuuki	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint
Ostrumov, Evgeny	Ultrafast response time as a clue to study heat transfer in nanostructured materials
othmen, Riad	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Ou, Tse-Hsien	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Owen, James	Striving for Atomic Precision for large dopant arrays The Next Generation of Extreme-Resolution E-beam Lithography
P
Palermo, Edmund	Super-resolution Interference Lithography using Spirothiopyran molecular switches
Pan, Wenyang	Metal organic cluster photoresists: etch behavior of metal oxide systems
Pan, Aixi	Effect of oxygen plasma cleaning on non-switching pseudo-Bosch etching of high aspect ratio silicon pillars
Pang, Stella	Detection of Filopodia and Cancer Cell Concentration by Hybrid Plasmonic and Impedance Biosensor
Park, Younggeun	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows
Parker, Sara	Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Parsons, Gregory	Multilayer Stacking of 3D Periodic Nanostructures Assisted by Atomic Layer Deposition
Patankar, Shreyas	Ultrafast response time as a clue to study heat transfer in nanostructured materials
Patrick, N. Shane	Process Correction for E-Beam Exposure of HSQ
Paudel, Pravin	Scalable fabrication of triangular nanopore membranes on sapphire substrate for low-noise DNA detection
Pazos, Ileana M.	Nanoscale photonic dosimetry and calorimetry
Pease, Fabian	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Peng, Huiren	Nanoimprint mold fabrication by nanosphere self-assembly for QLED light extraction
Peng, Hsuan-Tung	Neuromorphic Computing Hardware with Silicon Photonics
Perez-Murano, Francesc	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Phair, John	Parametric Study of 2D Pulsed Laser Deposited (PLD) WSe2 Transistors for enhancing an Infrared (IR) Detector
Pilz, Wolfgang	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Pitters, Jason	Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Plank, Harald	3D Nano-Printing via Focused Electron Beams: A Perspective
Poletto, Stefano	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Popratiloff, Anastas	Why So Negative? Ways to make PMMA useful as a negative-tone resist in EBL.
Pourdavoud, Neda	Characteristics of thermal imprint with perovskite layers
Prucnal, Paul	Neuromorphic Computing Hardware with Silicon Photonics
Purushothaman, Gopathy	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Putnam, William	Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Pyka, Nicolas	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ
R
Rack, Philip D.	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Raghuram, Usha	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Rajan, Siddharth	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Rand, Richard	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Randall, John	Striving for Atomic Precision for large dopant arrays The Next Generation of Extreme-Resolution E-beam Lithography
Randhawa, Navjot	A high brightness source of energetic helium atoms for neutral particle lithography Self-folding shape memory bilayer structures formed by irradiating anisotropically stressed polycarbonate films A streamlined process for fabricating multi-channel neural probes on optical fiber substrates A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
Rangelow, Ivo W.	Investigation of Line Edge Roughness in Field-Emission Scanning Probe Lithography
Rangelow, Ivo	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Rangelow, Ivo W.	Nanoscale Lift-Off Process Using Field-Emission Scanning Probe Lithography
Rangelow, Ivo	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Rantala, Juha T.	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Rao, Madhuri	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Rashidi, Mohammad	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Ratnayake, Dilan	Why So Negative? Ways to make PMMA useful as a negative-tone resist in EBL.
Raveh, Amir	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Ray, Vishva	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Ray, Valery	Acuity of Electron-Beam Induced Deposition of Pt/C Composite Material
Reagor, Matthew	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Renard, Julien	Fabrication and integration of graphene interdigitated resistors on printed circuit boards for RF interrogation of biological sensors.
Renzas, Russ	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Retterer, Scott	Bio-printed hydrogel micro-droplets for culturing and analysis of microbial communities Nanochannel-based microfluidic device for quantitative measurement of bacterial chemotaxis
Reum, Alexander	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Reuter, christofer	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Reuter, Christoph	Tip-based electron beam induced deposition (TB-EBID) with active cantilevers
Richter, Torsten	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Riedesel, Christof	Extending Multibeam SEM Technology to 331 Beams
Riedl, Thomas	Characteristics of thermal imprint with perovskite layers
Rishinaramangalam, Ashwin	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
Rius, Gemma	Novel approach for precise and flexible micro-nano patterning of surfaces towards enabling controlled textures on arbitrary objects
Robinson-Leith, Gabriel	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Rond, Johannes	Multiple replication of hierarchical structures from polymer masters with anisotropy Characteristics of thermal imprint with perovskite layers
Roodenburg, Koos	Removing halos around IBID deposits with a broad ion beam
Rosenberg, Danna	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Ruchhoeft, Paul	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Ryu, Byunghoon	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows Plasma Process for Generating Movable Sulfur Vacancies in MoS2 Layers and Fabricating Analogue Ionically-Coupled Multi-Terminal Memristors Large Area Chemical Vapor Deposition of High-Quality Few-Layer MoS2 through Modulation of Precursor Source Temperature Profiles
S
Saha, Shubhro	Three-Beam Lloyd’s Mirror Interference Lithography with Liquid Immersion
Sajedi, Hasti	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Sakai, Kazunori	Metal organic cluster photoresists: etch behavior of metal oxide systems
Sakdinawat, Anne	UltraHigh Aspect Ratio Silicon Structures for Energy Storage Applications X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser Wavefront Metrology for X-Ray Free Electron Laser Instruments
Sanabia, Jason	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Sandhir, Rajat	Development of siRNA Functionalized Graphene Oxide Based Therapeutic Nanoformulation to Ameliorate Type-2 Diabetes Mellitus (T2DM)
Sasago, Masaru	Computational study on micro 3-dimensional imaging using novel photolithography
Sato, Kousuke	Computational study on micro 3-dimensional imaging using novel photolithography
Sato, Daiki	The annealing effect for the air-exposed surface on the GaN photocathode Wavefront Metrology for X-Ray Free Electron Laser Instruments
Sattelkow, Juergen	3D Nano-Printing via Focused Electron Beams: A Perspective
Sawadichai, Ryan	Development of Free-standing Membrane-based Electrostatic Lenses for Nanopantography
Schattenburg, Mark	Characterizing Profile Tilt of Nanoscale Deep-Etched Gratings via X-ray Diffraction
Scheer, Hella-Christin	Multiple replication of hierarchical structures from polymer masters with anisotropy Characteristics of thermal imprint with perovskite layers Double replication for characterizing cracks in surface-hardened PDMS
Scherer, Axel	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Schirmer, Matthias	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Schmidt, Georg	New high etch resistant high resolution silsesquioxane based resist for DUV/EUV and e-beam lithography as long shelf-life and more sensitive alternative for HSQ
Schmucker, Scott	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Schnabel, Bernd	How Variable is Variable Shaped Beam?
Scholten, Robert	A high-resolution source of single ions using correlated feedback
Schvartzman, Mark	Direct Nanoimprint of Chalcogenide Glasses for Optical Applications Nanoscale Mechanosensing of Natural Killer Cells is Revealed by Antigen-Functionalized Nanowires
Schwalb, Christian	3D Nano-Printing via Focused Electron Beams: A Perspective
Schwartz, Mollie	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Schwartzberg, Adam	Quantum information at the Molecular Foundry - an overview of new toolsets for QIS research Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Schwarzkopf, Andrew	Cold Atom Ion Sources The Cesium Low Temperature Ion Source Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Seaberg, Matthew	X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser Wavefront Metrology for X-Ray Free Electron Laser Instruments
Seo, Sehun	Parametric Study of 2D Pulsed Laser Deposited (PLD) WSe2 Transistors for enhancing an Infrared (IR) Detector
Sete, Eyob A.	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Shadman, Khashayar	Design for a 10keV Multi-Pass Transmission Electron Microscope
Shahbazmohamadi, Sina	Acuity of Electron-Beam Induced Deposition of Pt/C Composite Material
Shao, Grant	On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Sharma, Amit	Development of graphene-based immunosensor for highly sensitive biosensing of waterborne pathogens
Shastri, Bhavin	Neuromorphic Computing Hardware with Silicon Photonics
Shaw, Steven	There is plenty of room … in more dimensions
Shelby, Robert M.	Novel Technologies for Artificial Intelligence: prospects and challenges
Shi, Lina	Super Resonance from Gain-Assisted Silicon Nanowires
Shibata, Masahiro	Fabrication of sub-10 nanometer half-pitch dense line and space structure by using electron beam lithography
Shih, Wei-chuan	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
Shikano, Haruka	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Shirai, Masamitsu	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint Computational study on micro 3-dimensional imaging using novel photolithography
Shoron, Omor	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Shoshani, Oriel	There is plenty of room … in more dimensions
Silver, Rick	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
simeone, daniela	Ultra-Narrow Gap Al/Al2O3 Bowtie Nanoantennas by Focused He Ion Milling Lithography
Simonaitis, John	Nanosecond Pulse Electronics for Gated Electron Mirrors
Singh, Vishal	Development of siRNA Functionalized Graphene Oxide Based Therapeutic Nanoformulation to Ameliorate Type-2 Diabetes Mellitus (T2DM)
Singhal, Nitin	Development of siRNA Functionalized Graphene Oxide Based Therapeutic Nanoformulation to Ameliorate Type-2 Diabetes Mellitus (T2DM)
Skinner, Jack	Combined Electrostatic and Air Driven Electrospinning for Biomedical Applications Hollow Mn2O3 Nanoparticles for Supercapacitor Electrodes via Solvothermal and High-Temperature Processing Enhanced Plasmonic Activity of Polymer Fibers Through Nanoparticle Doping
Slodowski, Matthias	How Variable is Variable Shaped Beam?
Smith, Randy	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Snijders, Paul	Towards Single Atom Doping and Control in Silicon
Soleymaniha, Mohammadreza	Design and Nanofabrication of New Heated Atomic Force Microscope (AFM) Cantilever for Nanolithography Applications
Song, Jiaming	Towards Single Atom Doping and Control in Silicon
Song, Yujing	Fabrication of Optoelectronic Cytokine Biosensors through Integration of Low-Noise MoS2 Photodetectors and Biotunable Nanoplasmonic Windows
Song, Boxiang	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Song, Jungki	Characterizing Profile Tilt of Nanoscale Deep-Etched Gratings via X-ray Diffraction
Song, Boxiang	Hardware Acceleration Implementation of Kalman filter with Memristor Optical Probing of Acoustic Vibration through Coupled Plasmon Resonance All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Soppera, Olivier	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Spieser, Martin	High-performance spin-coatable hardmasks for transferring high-resolution t-SPL patterns
Staabs, Johannes	Multiple replication of hierarchical structures from polymer masters with anisotropy Characteristics of thermal imprint with perovskite layers
Stanwyck, Sam	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Stark, Thomas	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Stavis, Samuel	A Multifunctional Microstructure for Microscope Calibration and Nanoparticle Characterization Optimal nanofabrication of complex nanofluidics for interfacial characterization of colloidal nanoparticles
Steele, Adam	Cold Atom Ion Sources The Cesium Low Temperature Ion Source Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications Startup Award: zeroK NanoTech
Steffen, Marita	Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Steglich, Thomas	Brilliant Fluorescent Resists for E-beam and Photolithographic Applications
Stein, Aaron	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Stemmer, Susanne	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Stewart, Michael	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Stolberg, Ines	How Variable is Variable Shaped Beam?
Stroes, Jan	Removing halos around IBID deposits with a broad ion beam
Stroobants, Sander	Active control of shear and mass transport in microfluidic devices
Su, Zhijuan	A microfluidics-integrated photonic nanosensor for rapid and sensitive detection Ebola virus antigens
Subramanian, Ashwanth	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography
Sugihara, Daiki	Computational study on micro 3-dimensional imaging using novel photolithography
Sun, Yingjuan	One-step assembly of multi-layered structures with orthogonally oriented stripe-like patterns on the surface of a capillary tube
Sun, Chuying	Nanoimprint-induced strain engineering of two-dimensional materials
Sunagawa, Hiroki	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint
Suryanarayana, Anu	Preparation and behavior of ssDNA in porous roof nanochannels
Swett, Jacob L.	Nano-Calligraphy: Precisely tuning the feature spacing in scanning-probe lithography
Swett, Jacob	A Versatile Common Platform for Quantum Transport Measurements in Fluidic, Cryogenic, and In Situ Electron Microscopy Environments
Szornel, Julia E.	Fluorocarbon assisted atomic layer etching of SiO2 using low temperature cyclic Ar/CHF3 plasma
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Taboryski, Rafael	Hemiwicking effect on nanoscale; wetting of surfaces derived from in-situ nano-lithography by self-assembly of block-copolymer structures R2R fabrication of plasmonic color surfaces
Tait, Alexander	Neuromorphic Computing Hardware with Silicon Photonics
Tamura, Marcus	Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication
Tan, Shida	Cs Ion Coldbeam Suitability for Circuit Edit and Additional Nanomachining Applications
Tao, Li	Photoelectric Effects of Bismuthene for Innovative Sensing and Energy Devices
Taucer, Marco	Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Tazrin, Fahima	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Telecka, Agnieszka	Hemiwicking effect on nanoscale; wetting of surfaces derived from in-situ nano-lithography by self-assembly of block-copolymer structures
Tisa, Tamana Afrin	A streamlined process for fabricating multi-channel neural probes on optical fiber substrates
Tiwale, Nikhil	Vapor-phase infiltration synthesis of hybrid nanocomposite resist for next generation lithography
Toomey, Emily	Investigation of ma-N 2400 Series Photoresist as an Electron Beam Resist for Superconducting Nanoscale Devices
Toomey, Emily A.	Fabrication and Characterization of Multilayer Heater-Cryotrons
Tosh, Ronald E.	Nanoscale photonic dosimetry and calorimetry
Tsai, Hsinyu	Novel Technologies for Artificial Intelligence: prospects and challenges
Turchetti, Marco	Nanosecond Pulse Electronics for Gated Electron Mirrors Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Turiv, Taras	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Tzvetan, Ivanov	Field Emission Scanning Probe Lithography with GaN nanowires on active cantilevers
U
Ueba, Ryosuke	Multi-beam mask writer MBM-1000
Ullal, Chaitanya	Super-resolution Interference Lithography using Spirothiopyran molecular switches
Ute, Golla-Schindler	SIMS Analysis of a Commercial Lithium Ion Battery Using a Highly Focused Neon Ion Beam
V
Van Campen, Douglas	UltraHigh Aspect Ratio Silicon Structures for Energy Storage Applications
van de Burgt, Yoeri	Organic Electronics for Neuromorphic Computing
van der Linden, J.H.M.	Micro-deflectors with two axes for a double micro-mirror aberration corrector
van Goozen, Youp	Cleanroom in an SEM: in-situ area selective ALD
van Nunen, Teun	Neuronal cell network activity enhanced by nanogrooved substrates
van Tol, R.F.C.	Micro-deflectors with two axes for a double micro-mirror aberration corrector Cleanroom in SEM
van Tol, Ruud	Cleanroom in an SEM: in-situ area selective ALD
Vasireddy, Praful	Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Vasudevan, Rama	Giving a microscope the intelligence to see and manipulate: automated information extraction for single atom control
Verdoorn, Boyd	Removing halos around IBID deposits with a broad ion beam
Verschuuren, Marc	Substrate Conformal Imprint Lithography. High volume NIL production with functional resists Blazed gratings for X-ray astronomy fabricated by grayscale e-beam and nanoimprint
Vijayamohanan, Harikrishnan	Super-resolution Interference Lithography using Spirothiopyran molecular switches
Vine, Wyatt	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges
Von Ehr, James	Striving for Atomic Precision for large dopant arrays
Vu, Kim	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
W
Walker, Emily	Photoelectric Effects of Bismuthene for Innovative Sensing and Energy Devices
Wallin, Christopher	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies Absolute deflection measurements in a MEMS/NEMS interferometry system
Walter, Peter	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Wan, Chunxu	Micro-pump actuated dynamic color-morphing skin for octopus-like camouflage in soft robotics Nanoimprint mold fabrication by nanosphere self-assembly for QLED light extraction
Wang, Jun	Fabrication of nanostructures for enhanced resolution in X-ray tomographic imaging
Wang, Chao	Photochemical Synthesis of Dendritic Silver Nano-particles (AgNPs) for Anti-counterfeiting Soft Robotics Programmed with Double Crosslinking DNA Hydrogels DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter
Wang, Yunxiang	Inverse design of angle-sensing metasurface by particle swarm optimization
Wang, Xiqiao	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Wang, Yunxiang	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Wang, Chao	Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Wang, Caiyu	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Wang, Xuemei	Nanoscale Details of Liquid Drops on 1D Patterned Surfaces Revealed by Etching
Wang, Chao	Scalable fabrication of triangular nanopore membranes on sapphire substrate for low-noise DNA detection
Wang, Cheng	Design Requirements for X-Ray Compatible Liquid Cell
Wang, Ruo-Qian	Efficient Bacteria Trapping and Retrieving via Low Aspect Ratio Nano-Sieve Device
Wang, Yan	Design of small low energy electron gun
Wang, Ruo-Qian	Fabrication of Extremely Shallow “Nano-Sieve” Device with Positive Photoresist Sacrificial Layer
Wang, Yan	A True-Color SEM-CT
Wang, Ruo-Qian	Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Wang, Yunxiang	Optical Probing of Acoustic Vibration through Coupled Plasmon Resonance All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Ward, Daniel	Assessing the Other Dimension in Atomically Precise Fabrication
Watanabe, Kenta	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint
Watson, Pat	Sidewall Channel Fabrication Using Membrane Projection Lithography and Metal Assisted Chemical Etching
Weber, Steven	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Weber-Bargioni, Alex	Quantum information at the Molecular Foundry - an overview of new toolsets for QIS research
Wei, Qi-Huo	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Weidenmueller, Ulf	How Variable is Variable Shaped Beam?
Weiss, Thomas	X-ray Shaping Using Gratings and Zone Plates and Wavefront Measurements on the Free-electron Laser
Weitzer, Anna	3D Nano-Printing via Focused Electron Beams: A Perspective
Wertheim, Alex	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Westly, Daron	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Whyland, Tyler	Investigating Nanofabrication Techniques for Low Dissipation Superconducting Qubits
Winkler, Robert	3D Nano-Printing via Focused Electron Beams: A Perspective
Winpenny, Richard	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Wojcik, Michael	Sub-Micron High Aspect Ratio Direct E-beam Patterning of SU-8 Epoxy Resist
Wolf, Ben	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Wolfe, John	A high brightness source of energetic helium atoms for neutral particle lithography Self-folding shape memory bilayer structures formed by irradiating anisotropically stressed polycarbonate films A streamlined process for fabricating multi-channel neural probes on optical fiber substrates A radiation-resistant stencil mask coating for neutral particle nanolithography with reduced stabilization implant
Wolkow, Robert	Moveable Quantum Dot Probe for Detecting Near-Surface Fixed Charges Incorporation of Machine Learning in the Automation of Atom-Scale Device Fabrication Atomic Scale Fabrication and Application of Silicon Dangling Bonds
Wood, Graham	Zinc oxide nanowires-based flexible force sensor Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Wu, Wei	Inverse design of angle-sensing metasurface by particle swarm optimization Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers
Wu, Yueying	In Situ Laser Heating and Excitation in the (Scanning) Transmission Electron Microscope for Real time imaging and excited state spectroscopy
Wu, Wangzhou	Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications
Wu, Wei	Hardware Acceleration Implementation of Kalman filter with Memristor Optical Probing of Acoustic Vibration through Coupled Plasmon Resonance All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Wyrick, Jon	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
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Xia, Deying	Neon Ion Beam Etching on Photoresist Patterns
Xia, Pengkun	Scalable fabrication of triangular nanopore membranes on sapphire substrate for low-noise DNA detection
Xie, Ningzhi	Empirical Modeling of Lithographic Error in Direct Write Laser (DWL) Lithography
Xie, Changqing	Nanofabrication of high aspect ratio and 25 nm wide Au nanostructures using low-temperature development of PMMA and pulse electrochemical deposition Super Resonance from Gain-Assisted Silicon Nanowires
Xin, Huolin	3D contact stencil masks for lift-off process on extremely uneven surface
Xing, Yaru	An all-purpose programmable and scalable fluid central processing unit for large-scale parallel droplet manipulations
Xu, Jing	Closed cavity resonator formed by suspended large monolayer graphene-based membrane
Y
Yamamoto, Hiromichi	Sidewall Channel Fabrication Using Membrane Projection Lithography and Metal Assisted Chemical Etching
Yamashita, Ryunosuke	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint
Yamazaki, Akira	aquaSAVE™ Antistatic Agent for Electron Beam Lithography
Yan, Hao	Soft Robotics Programmed with Double Crosslinking DNA Hydrogels DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter
Yang, Ruifeng	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Yang, Hao	Graphene-based Microsupercapacitors for On-Chip Micro Power Sources Inverse design of angle-sensing metasurface by particle swarm optimization
Yang, Yujia	Enhanced Carrier-Envelope Phase Detection with Photoelectron Emission in Plasmonic Nanoantenna Arrays
Yang, Hao	Controlled Reduction of Photobleaching in Plasmon Enhanced Fluorescence Using Collapsible Nano-Fingers Dry Etching of Perovskite Oxides for High Performance Electronic Device Applications Hardware Acceleration Implementation of Kalman filter with Memristor All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Yao, Yu	Photochemical Synthesis of Dendritic Silver Nano-particles (AgNPs) for Anti-counterfeiting DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter Nature-Inspired Chiral Metasurfaces for Circular Polarization Detection and Full-Stokes Polarimetric Measurement
Yao, Yuhan	All-Dielectric Hybrid Metasurface for Visible or Near-IR Applications
Yasuda, Masaaki	Computational Study on 3-D Mold Profile Correction for Resist Shrinkage in Nanoimprint Computational study on micro 3-dimensional imaging using novel photolithography
Yasui, Kenichi	Multi-beam mask writer MBM-1000
Yazgi, Sertac Guneri	Investigation of Line Edge Roughness in Field-Emission Scanning Probe Lithography
Ye, Brion	AweSEM: Removing Barriers to Innovation with a Tabletop, Low-Cost SEM
Yeates, Stephen	Sub-10 nm Helium Ion Beam Lithography with Metal–Organic Resists
Yeh, Chun-Cheng	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Yoder, Jonilyn	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Yoon, Jeongseop	Plasma Process for Generating Movable Sulfur Vacancies in MoS2 Layers and Fabricating Analogue Ionically-Coupled Multi-Terminal Memristors
Yoon, Jeong Seop	Large Area Chemical Vapor Deposition of High-Quality Few-Layer MoS2 through Modulation of Precursor Source Temperature Profiles
Yost, Donna-Ruth	Fabrication Capabilities for Superconducting Quits at MIT Lincoln Laboratory
Youngblood, Nathan	Nano-Calligraphy: Precisely tuning the feature spacing in scanning-probe lithography
Yu, Hao	Photopatterning of Molecular Orientations for Fabrication of Liquid Crystal Flat Optical Devices
Yu, Yang	Li-containing liquid metal alloy ion sources for focused-ion beam instrumentation
Yu, Shang-Yu	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Yusuf, Maha	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Z
Zajadacz, Joachim	Multiple replication of hierarchical structures from polymer masters with anisotropy
Zaman, Mohammad Asif	Black Silicon for high-contrast alignment marks fabricated using maskless photolithography and optimized Bosch Reactive-Ion Etching
Zan, Hsiaowen	Micro and nanopatterning of Metal Oxo-Cluster photoresists
Zang, Faheng	A microfluidics-integrated photonic nanosensor for rapid and sensitive detection Ebola virus antigens
Zehnder, Alan	Nondegenerate Parametric Resonance in Large Ensembles of Coupled Micromechanical Cantilevers with Varying Natural Frequencies
Zeidler, Dirk	Extending Multibeam SEM Technology to 331 Beams
Zhang, Hang	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Zhang, Cuiping	Metallic Nanostructures on Arbitrary Surfaces Fabricated by Solution-processed Nanopatterning and Nanotransfer Printing
Zhang, Meiyue	On the Trends and Application of Isofocality for Negative Resists in Electron Beam Lithography
Zhang, Jie	Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Zhang, Xiaohui	Hydrodynamic Induced Deformation of Nano-Sieve Fluidic Device for Efficient Microparticle Trapping and Deposition
Zhang, Xu	Interferometric investigation of suspended monolayer TMDCs enabled by e-beam lithography
Zhao, Zhi	Photochemical Synthesis of Dendritic Silver Nano-particles (AgNPs) for Anti-counterfeiting Soft Robotics Programmed with Double Crosslinking DNA Hydrogels DNA Origami-Templated Assembly of Heterogeneous Nanocavity for Quantum Emitter
Zhao, Kaiyue	Nanoimprint-induced strain engineering of two-dimensional materials
Zhao, weixia	Design of small low energy electron gun
Zhao, Qingyuan	Fabrication and Characterization of Multilayer Heater-Cryotrons
Zhao, Weixia	A True-Color SEM-CT
Zhong, Guixiong	The Integration of High-efficiency Vortex Light Emitters by 3D Photolithography
Zhou, Chun	Ultrathin iCVD films to Control Interfacial Energy for DSA Hole Shrink Applications
Zhu, Chenxu	Fabrication and Sharpening of Silicon In-plane Microneedles with Open Capillary Networks
Zhu, Xiaoli	Nanofabrication of high aspect ratio and 25 nm wide Au nanostructures using low-temperature development of PMMA and pulse electrochemical deposition
Zhu, Liang	High-Performance Infrared Nano-Rectennas Using New Photonic Nanostructures and 2D Materials
zhu, ruichao	Optical Scatterometry for In-line Nano-Manufacturing
Zhu, Shuyan	Detection of Filopodia and Cancer Cell Concentration by Hybrid Plasmonic and Impedance Biosensor
Zhu, Di	Low-contrast electron beam lithography process for fabrication of sloped sidewall HSQ spacers
Zhu, Diling	Wavefront Metrology for X-Ray Free Electron Laser Instruments
Ziatdinov, Maxim	Giving a microscope the intelligence to see and manipulate: automated information extraction for single atom control
Zimmer, Klaus	Multiple replication of hierarchical structures from polymer masters with anisotropy
Zimmerman, Neil	Atom by Atom Fabrication of Single Dopant and Single Electron Transistors for Quantum Technologies
Zonnevylle, A.C.	Monte-Carlo Simulation of Charge-Induced Pattern Displacement in E-Beam Lithography
Zuo, Jiawei	Scalable fabrication of triangular nanopore membranes on sapphire substrate for low-noise DNA detection
Zwolak, Michael	Nanofabrication by self-assembly: pathways and defects

EIPBN Abstracts