A |
| Abdelgawad, Amr | Fabrication pH micro-biosensor for implantable medical devices |
| Abe, M. | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Abedzadeh, N. | Diffractive Electron Mirror in SEM
Aberration-Corrected Quantum Electron Microscopy |
| Adesnik, H. | High density, multifunctional neural probes for massively parallel read out and control |
| Agyeman-Budu, David N. | Time Multiplexed Deep Reactive Ion Etching of Germanium and Silicon-A Comparison of Mechanisms and Application to X-ray Optics |
| Ahmad, Ahmad | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Ahmed, S. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis
Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Aksyuk, V. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Aksyuk, Vladimir | Nonlinear Interactions of Coupled MEMS Cantilevers
A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Al-Hussainawi, N. | Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening |
| Al-mashaal, A. | Electrostatically Driven Microbeams for Low Frequency Applications |
| Alam, Hasibul | Intriguing Prospects of 2D Atomic Sheets for Innovative Nanoelectronics |
| Alayo, M. I. | ICP-RIE Etching of Sputtered Deposited SiO2 Thin Films for Fabrication of Oxide-Cladding AlN Photonic Crystals |
| Alexander-Katz, Alfredo | Directed Self-Assembly in Lithography: Challenges and Opportunities |
| Alkemade, Paul | Helium-Ion-Beam Etched Encapsulated Graphene Nanoribbons |
| Allen, Frances I | Photonics On a Fiber For Wavefront Manipulation |
| Altoe, M.V.P. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating |
| Andriolo, Jessica M. | Iron-doped apatite nanoparticle adjuvants for enhanced phage therapy delivered through electrospun fibers |
| Andriolo', J. | Coaxial Hybrid Perovskite Fibers: Synthesis and Encapsulation in Situ via electrospinning |
| Ang, W.K. | Graphene-Based Cathode Cold-Field Electron Emission Sources
Ring cathode electron beam projection lithography |
| Anz, S. J. | Low-thermal-budget surface preparation for STM Lithography |
| Apigo, D. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Arat, K.T. | Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Arat, K.T | Monte Carlo Simulation Models for SEM Imaging: Fast versus Accurate |
| Araujo, L.Evangelio | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| Arkanimas, K. | Investigation of TiO2/graphene Nanocomposite for Cancer Photothermal Therapy
A Novel Fabrication of Isolated Titanium Dioxide Nanotubes |
| Arrieta, J. L. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Aslam, A. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Aydinoglu, F. | Etching very large features by metal-assisted chemical etching
Grafted PMMA mono-layer brush as negative tone e-beam resist
Chromium oxide as a hard mask material better than metallic chromium |
| Azadi, M. | The Impact of Isofocal Dose-Based Proximity Effect Correction on Effective Process Blur Tolerance |
| Azibi, A. | High aspect ratio polystyrene structure fabrication using electron beam lithography |
| Azibi, Azizah | Fabrication of nano-gap using high and low energy electron-beam lithography |
B |
| B.Holst | Atom sieve for nanometer resolution netrual helium microscopy |
| Babin, Sergey | Photonics on a Fiber |
| Bagal, A. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions |
| Balachandran, Balasubramaniam | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Baldo, P. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Ballard, J. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires
Low-thermal-budget surface preparation for STM Lithography |
| Ballard, Joshua B. | Digital Atomic-Scale Tip Based Nano Fabrication |
| Balle, F. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Balram, K. C. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Bang, O. | Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows |
| Barnard, E. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies |
| Barner, L. | Direct-write Method for Machining Fluidic Structures with Helium Ions |
| Barnola, S. | Ion Beam Etching : a solution for microsystem device processing |
| Barth, S. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Bartynski, Robert | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Basu, S. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Bauerdick, S. | FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Bayat, Parisa | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Beck, T. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Beggren, K.K | Atom sieve for nanometer resolution netrual helium microscopy |
| Behzadirad, M. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires |
| Belianinov, A. | Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy |
| Belic, N. | The Impact of Isofocal Dose-Based Proximity Effect Correction on Effective Process Blur Tolerance
Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Belisle, B.S. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening |
| Belle, Anna M. | Nanoscale roughened thin film electrodes for neural probe and bio-sensing applications |
| Berggren, K. K. | Ising model based simulation of block copolymer self-assembly in two-dimensional post lattice
Aberration-Corrected Quantum Electron Microscopy |
| Berggren, K.K. | Diffractive Electron Mirror in SEM |
| Berggren, K.K | Large area scanning-helium-ion-beam lithography |
| Berling, Dominique | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Béron, F. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis |
| Bertagnolli, E. | Direct-writing of nanomagnets for logic circuitry
Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance?
Direct-write deposition of pure gold nanostructures - new possibilities and new challenges
Neurite growth into artificial microchannels |
| Bertani, P. | AlGaN/GaN BioFET Sensors for Detection of Microcystin-LR and Other Toxins |
| Bertrand, N. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Best, J. P. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition |
| Bhingardive, Viraj | Soft Thermal Nanoimprint Lithography |
| Bi, K. | FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Bielejec, Edward | Fabrication of Single Atom Devices by Direct Write Nanofabrication |
| Bilenberg, Brian | Design of hierarchical surfaces for tuning wetting characteristics |
| Bischoff, L. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Bischoff, Lothar | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| Bishop, David J. | Using MEMS Devices to Build a “Fab on a Chip” |
| Biswas, D. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Biswas, M. | Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Black, C. T. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Blenskens, D. | Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Blick, Robert H. | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Boeckx, Carolien | Process Optimization And Improvement Of Contact Hole Cdu And Pattern Placement Using Grapho-Epitaxy Dsa With Euv Patterned Templates |
| Boerboom, P. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| Bojko, Richard J. | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Borys, N. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies |
| Boutami, S. | Novel registration error metrology for multiple electron beam lithography |
| Bowen, Shane | Nanotechnology for a Genomic Revolution |
| Bozchalooi, Iman S. | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Brainard, Robert L. | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Braun, P. V. | Stable Field Emitters Using Inverse Opal Structures |
| Braunschweig, A.B | 4D Chemical Nanolithography |
| Breaux, C.L. | Synthesis and Characterization of Low Block Copolymers for Large Periodicity Patterning using Directed Self Assembly and Legacy Exposure Tools |
| Breslin, C. | Fabricating Nanostructures On Bulk Silicon Substrates Using Helium Ion Microscope |
| Briggs, D.P. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Brinkmann, K. | Thermal nanoimprint to improve the material properties of MAPbI3 |
| Bruchhaus, Lars | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| Brueck, S. R. J | CD Limits of Scatterometry |
| Brueck, S.R.J. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires |
| Bryce, Brian A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Bull, Matthew Storm | A Simple and Inexpensive Permanent Magnet Electron Lens |
| Buonsanti, R. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies |
| Burch, M.J. | Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy |
| Burghartz, J. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
| Bürkle, F. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Busani, T. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires |
| Butschke, J. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
C |
| Cabrini, S. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies
High density, multifunctional neural probes for massively parallel read out and control
Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide
Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Cabrini, S | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Cabrini, Stefano | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Cabrini2, Stefano | Photonics On a Fiber For Wavefront Manipulation |
| Cai, J.X. | Flexible large-area plasmonic gold nanocheckerboard fabricated by cost-effective solution process for highly sensitive refractive index sensing in visible range |
| Cai, Jingxuan | Flexible Transparent Conductive Film with Embedded Nanoscale Metal Mesh Fabricated through Electrospinning and Template-based Electrodeposition
Metallic Nanowire Transparent Conductive Electrode Fabricated by Template-guided Assembly |
| Caillau, M. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Çakıroğlu, Dilek | Investigation of Proximity and Development Process Effects for Large Area Dense Nano-Pattern Applications |
C |
| Calafiore, Giuseppe | Photonics On a Fiber For Wavefront Manipulation |
| Carbonell, C. | 4D Chemical Nanolithography |
| Carden, W. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Carreño, M. N. P. | ICP-RIE Etching of Sputtered Deposited SiO2 Thin Films for Fabrication of Oxide-Cladding AlN Photonic Crystals |
| Chan, Boon Teik | Process Optimization And Improvement Of Contact Hole Cdu And Pattern Placement Using Grapho-Epitaxy Dsa With Euv Patterned Templates |
| Chanda, Debashis | Strong Light-Matter Interactions for Skin-like Flexible Full-Color Displays
Skin like Plasmonic Full Color Displays |
| Chandonait, J. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Chang, C.-H. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions
Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Chang, Chih-Hao | Continuous Patterning of Three-Dimensional Periodic Nanostructures using Roll-to-Roll System
High-aspect-ratio Magnetic Tunable Nanopillar Array
Design of Interfacial Antireflection Nanostructures in Multilayers |
| Chang, Po-Yi | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Chang, R. | Transition Metal Dichalcogenides as Cell Culture Platforms |
| Chang, W. T. | Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| Chang, W.-T. | Low-Voltage Coherent Electron Imaging Based on a Single-Atom Electron Source |
| Chao, Weilun | Ruthenium Patterning via Reactive Ion Etching for EUV optics |
| Chaudhary, N. | Datapath Architecture for Aperture Array Based Multibeam Mask Writer Systems |
| Chen, I-Te | Continuous Patterning of Three-Dimensional Periodic Nanostructures using Roll-to-Roll System |
| Chen, J. | Sensors made from infiltrated ZnO nanostructures |
| Chen, M. | Fabrication of Multi-Bit Memory Devices Based on Layered Semiconductors via Interlayer Deformation
Fabrication of Arrays of Electrically-Isolated Nanoscale Organic Thin-Film Transistors |
| Chen, R.F. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Chen, Rifei | Stretchable and conductive substrate with undulating surface by imprint lithography for Flexible Electronics |
| Chen, W.Y. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Chen, Xi | Printed Flat Optical Component: Metasurface for Cylindrical Vector Beam Generation |
| Chen, Y. | Enhancing the conversion efficiency of spin-to-orbit angular momentum by nanoscale metasurface reconstruction
24-bit/16 million structural true colors through extraordinary optical transmission of subwavelength Ag holes
FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Chen, Yi-An | Design of Interfacial Antireflection Nanostructures in Multilayers |
| Chen, Yifang | Nanofabrication of 4 nm Si nanowires by high resolution e-beam lithography for high sensitive gas sensors
A novel approach for the fabrication of Kinoform lens for x-ray focusing by grayscale e-beam lithography
Optimization of Fresnel zone plate layout for high diffraction efficiency by e-beam lithography
Evaluation of RE-800 as a negative tone chemically amplified resist for electron beam lithography |
| Chen, Yong | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Chen, Yulu | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Cheng, Samantha | Bio-inspired Nanostructures for Enhanced Light Management |
| Cheng, X. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells
UV-Curable Nanoimprint Resist with Liquid Volume-Expanding Monomers |
| Cheng, Xing | Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer
Stretchable and conductive substrate with undulating surface by imprint lithography for Flexible Electronics
Polycarbonate as a dual-tone resist for electron-beam lithography |
| Cheung, R. | Electrostatically Driven Microbeams for Low Frequency Applications
Thinning and doping of two-dimensional WSe2 by vapour XeF2 |
| Chevalier, C. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Chevolot, Y. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| China, P.R. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Cho, E. | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Cho, Ethan Y. | Focused Helium Beam Fabricated Superconducting Devices
High Temperature Superconducting Electronics for Biomedical Imaging and Advanced Communications
Focused Helium Ion Beam Irradiated Josephson Junctions and Arrays |
| Choi, J. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER
Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Choi, J | Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography |
| Chou, Stephen Y. | Present and Future of Nanoimprint in Large-area Nanomanufacturing |
| Chrostowski, Lukas | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Chu, M. ZH. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Colless, J. | Design, Fabrication, and Initial Characterization of a Multi-Qubit Chip for Quantum Simulation |
| Comparat, D. | COLDFIB – The new FIB source from laser cooled atoms |
| Cooke, M. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Corp., Asahi Kasei | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Crémillieu, P. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Cronin, S. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Cross, K. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening |
| Cui, B. | Etching very large features by metal-assisted chemical etching
High aspect ratio polystyrene structure fabrication using electron beam lithography
Chromium oxide as a hard mask material better than metallic chromium
Oxidation sharpening of silicon tips in 'air' environment |
| Cui, B | Grafted PMMA mono-layer brush as negative tone e-beam resist |
| Cui, Bo | Batch fabrication of AFM probes with direct positioning capability
Fabrication of nano-gap using high and low energy electron-beam lithography
Fabrication pH micro-biosensor for implantable medical devices |
| Cui, Dehu | Fabrication of copper nanowire using NIL for electroreduction of carbon dioxide
Fabricating Nano-scale Gratings with Multiple Imprinting |
| Cui, Qingyu | High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Cybart, Shan A. | Focused Helium Beam Fabricated Superconducting Devices |
| Cybart, Shane A. | Focused Helium Ion Beam Irradiated Josephson Junctions and Arrays |
| Cybart, Shane | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Czaplewski, D. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
D |
| D.Hensley | PECVD Synthesis of a Carbon-Based Nanotechnology Catalyst entitled Carbon Nano Spikes (CNS) |
| D.P.Pappas | Fabrication of Josephson Junction without shadow evaporation |
| da Silva Junior, S. M. | THz sensor in microfluidic devices for on line determination and control of ethanol concentration
Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Dal Negro, L. | Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Dallorto, S. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Daniels-Race, T. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Das, R. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Das, S. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Davanco, M. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Day, A. | Bridging the Gap for High-Coherence Superconducting Qubits |
| de Barros, A. D. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| De Gendt, Stefan | Process Optimization And Improvement Of Contact Hole Cdu And Pattern Placement Using Grapho-Epitaxy Dsa With Euv Patterned Templates |
| de Graaf, F. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| de Tandt, C. | THz sensor in microfluidic devices for on line determination and control of ethanol concentration |
| DeAlba, R. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| DeAlba, Roberto | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Dean, C. | Fabricating Nanostructures On Bulk Silicon Substrates Using Helium Ion Microscope |
| Delair, T. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Delft, P. Brandt | From dose statistics to line edge roughness |
| Delgadillo, Paulina Rincon | Process Optimization And Improvement Of Contact Hole Cdu And Pattern Placement Using Grapho-Epitaxy Dsa With Euv Patterned Templates |
| Delobbe, A. | COLDFIB – The new FIB source from laser cooled atoms |
| Denbeaux, G. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Denbeaux, Greg | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Denes, P. | High density, multifunctional neural probes for massively parallel read out and control |
| Deng, J. | Enhancing the conversion efficiency of spin-to-orbit angular momentum by nanoscale metasurface reconstruction
24-bit/16 million structural true colors through extraordinary optical transmission of subwavelength Ag holes |
| Deng, Jianan | Nanofabrication of 4 nm Si nanowires by high resolution e-beam lithography for high sensitive gas sensors
Evaluation of RE-800 as a negative tone chemically amplified resist for electron beam lithography |
| Deutschinger, A. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Dey, R. K. | High aspect ratio polystyrene structure fabrication using electron beam lithography |
| Dey, RK | Grafted PMMA mono-layer brush as negative tone e-beam resist |
| Dhuey, S. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma
High density, multifunctional neural probes for massively parallel read out and control
Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Dhuey, S.D. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating |
| Dhuey, Scott | Photonics On a Fiber For Wavefront Manipulation |
| Dietrich, S. | Fabricating Nanostructures On Bulk Silicon Substrates Using Helium Ion Microscope |
| Dill, K. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Ding, Junjun | Facile and High-Throughput Fabrication of Carbon Nanotube Carpet-PDMS Structures toward Flexible Supercapacitors |
| Diniz, J. A. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis
Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Dittrich, Lars | Low-cost fabrication of large area periodic nanopatterns with tunable feature sizes using soft UV-Nanoimprint at ambient atmosphere |
| Divan, Ralu | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching
Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Do, H. | Ising model based simulation of block copolymer self-assembly in two-dimensional post lattice |
| Doi, I. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Doise, Jan | Process Optimization And Improvement Of Contact Hole Cdu And Pattern Placement Using Grapho-Epitaxy Dsa With Euv Patterned Templates |
| Dolejsi, M. | Combining Block Copolymer Lithography with Self-Aligned Double Patterning to Achieve 10 nm Full-Pitch Line/Space Patterns |
| Domingos, R. D. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis |
| Dong, Zhaogang | Metal Patterning and Grain Boundary Engineering by Template Assisted Dewetting |
| Drezner, Y. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Drndic, Marija | 2D Materials Nanosculpting in the Transmission Electron Microscope and Bioelectrons Applications |
| Du, George | Bio-inspired Nanostructures for Enhanced Light Management |
| Duan, H. | FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Duerig, Urs | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Durrani, Zahid A. K. | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
E |
| Edwards, G. | High sensitive visualization of localized electric field using low energy electron beam deflection |
| Eibinger, M. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Eichfeld, C.M. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Eidemüller, W. | The impact of preparation conditions on the properties of replica stamps |
| Eifler, D. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Ekinci, Y. | Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Ekinci, Yasin | Towards the ultimate resolution in photolithography |
| Engstrom, James R. | Atomic and molecular layer processing: Prospects and strategies for selective area atomic layer deposition |
| Esmek, Franziska | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
F |
| Facsko, S. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Fairbrother, H. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Fallica, R. | Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Falthansl, P. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Fan, Z.J. | UV-Curable Nanoimprint Resist with Liquid Volume-Expanding Monomers |
| Fanourakis, S. | Graphene Oxide Thickness Effects in Graphene-based Supercapacitors |
| Fantner, E.G. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition |
| Fantner, G.E. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Faria, Juan | CD Limits of Scatterometry |
| Farrow, R. C. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Feezell, D. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires |
| Feldman, M. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Feng, Bo | Nanofabrication of 4 nm Si nanowires by high resolution e-beam lithography for high sensitive gas sensors
Evaluation of RE-800 as a negative tone chemically amplified resist for electron beam lithography |
| Feng, Liaoyuan | FOLED with enhanced external efficiency using corrugated Ag anode
FOLED with enhanced external efficiency using a corrugated Ag anode |
| Feng, S.P | Flexible Transparent Electrode with Embedded Metal Mesh Fabricated via Template-based Electrodeposition for Full-Plastic Bifacial Dye-sensitized Solar Cells |
| Fernandez-Cuesta, Irene | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Fernández1, Ariadna | Design of hierarchical surfaces for tuning wetting characteristics
Amphiphobic mushroom-like structures fabricated by direct nanoimprint lithography |
| Fitch, G. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Fitschen, J. H. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Flacker, A. | Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Flatabø, R. | Large area scanning-helium-ion-beam lithography
Atom sieve for nanometer resolution netrual helium microscopy
An experimental study of light absorbance of gold metal nanoparticles in the size range 45 to 200 nm |
| Fowlkes, J.D. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
| Fowlkes, Jason D. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Francone1, Achille | Design of hierarchical surfaces for tuning wetting characteristics
Amphiphobic mushroom-like structures fabricated by direct nanoimprint lithography |
| Frimat, J.-P. | Loading single neurons on a microsieve electrode array by passive pumping |
| Fröch, J. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Froech, J.E. | Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition |
| Fruett, F. | Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Fuchs, Udi | Digital Atomic-Scale Tip Based Nano Fabrication |
| Fujita, J. | High sensitive visualization of localized electric field using low energy electron beam deflection |
G |
| G.Claveau | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| Gadelrab, Karim R. | Directed Self-Assembly in Lithography: Challenges and Opportunities |
| Gaillard, S. | Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Ganner, T. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Gao, Weimin | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Genome, Edico | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Genova, Vincent J. | Time Multiplexed Deep Reactive Ion Etching of Germanium and Silicon-A Comparison of Mechanisms and Application to X-ray Optics |
| Giannelis, E. P. | Metal oxide cluster compound photoresists for EUV lithography |
| Giannuzzi, L.A. | Site Specific Manipulation Techniques for FIB |
| Gierak, Jacques | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| Gilbert, I. J. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Göktaş, N. Işık | Investigation of Proximity and Development Process Effects for Large Area Dense Nano-Pattern Applications |
| Göktaş, O. | Investigation of Proximity and Development Process Effects for Large Area Dense Nano-Pattern Applications |
| Gölzhäuser, Armin | Imaging, Modification, and Analysis of Nanostructures with the Helium Ion Microscope |
| Gong, L.-J. | 24-bit/16 million structural true colors through extraordinary optical transmission of subwavelength Ag holes |
| Goodwin, Francis | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Goodyear, A. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Goswami, Srijit | Helium-Ion-Beam Etched Encapsulated Graphene Nanoribbons |
| Greenzweig, Y. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Greenzweig, Yuval | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Greve, M.M. | An experimental study of light absorbance of gold metal nanoparticles in the size range 45 to 200 nm |
| Greve, M.M | Large area scanning-helium-ion-beam lithography
Atom sieve for nanometer resolution netrual helium microscopy |
| Groenewald, R. E. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Groves, Timothy R. | Efficient computation of electromagnetic fields for round lenses in charged particle optics |
| Grundhoff, Adam | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Grutter, K. E. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Grutzik, Scott | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Grzeskowiak, S. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Gu, Qing | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Guenther, Thomas | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Guerra-Nuñez, C. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition |
| Guerrero, J. | Ion Beam Etching : a solution for microsystem device processing |
| Guo, L. Jay | Printed Flat Optical Component: Metasurface for Cylindrical Vector Beam Generation
High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Guo, L. | Fabrication of Multi-Bit Memory Devices Based on Layered Semiconductors via Interlayer Deformation |
| Guo, R. | Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Guttmann, M. | Design of hierarchical surfaces for tuning wetting characteristics |
| Guttmann2, Markus | Amphiphobic mushroom-like structures fabricated by direct nanoimprint lithography |
| Guzenko, V. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
H |
| Haas, S. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Hagen, C.W. | 3D-nanoprinting using Electron Beam Induced Deposition
Monte Carlo Simulation Models for SEM Imaging: Fast versus Accurate
Simple add-on to change a single-beam SEM into a multi-beam SEM
From dose statistics to line edge roughness
Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Hagmann, J. | Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Hailer, M. Katie | Iron-doped apatite nanoparticle adjuvants for enhanced phage therapy delivered through electrospun fibers |
| Hallstein, R. M. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Halsted, M.C. | Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials
Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy |
| Han, K. | High Q-factor micro-ring resonator fabrication by charge dissipation in electron beam lithography |
| Han, L. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Hansen, R.R. | Chemical Co-Patterning Strategies Using Azlactone-Functionalized Polymers |
| Haroldson, Ross | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Haselmann, U. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Hashemi, Azadeh T. | Cross-linked, bioimprinted casein microdevices as biodegradable cell-culture substrates |
| Heerkens, C.T.H. | Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Heerkens, C.Th.H. | Simple add-on to change a single-beam SEM into a multi-beam SEM |
| Heinig, K.H. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Helwa, Youssef | Fabrication pH micro-biosensor for implantable medical devices |
| Henderson, C.L. | Novel Crosslinked Molecular Resists Based on Acid-Catalyzed Depolymerization
Block Copolymer Directed Self-Assembly Using Chemoepitaxial Guiding Underlayers with Topography
Synthesis and Characterization of Low Block Copolymers for Large Periodicity Patterning using Directed Self Assembly and Legacy Exposure Tools |
| Henderson, Clifford | Crosslinkable Photoacid Generators for Ultrahigh Loading in Epoxide Functionalized Molecular Resists |
| Hensley, D.K. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam
Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials |
| Heo, J.S. | Fast resist-activation dosimetry for extreme ultra-violet lithography |
| Hermans, M.D. | From dose statistics to line edge roughness |
| Herrmann, Christoph | Transmission Helium Ion Microscopy |
| Hirai, Y. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask
Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm
Novel UV-NIL for opaque mold and substrate by use of UV triggered command cure resin |
| Hlawacek, G. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Hlawacek, Gregor | Helium-Ion-Beam Etched Encapsulated Graphene Nanoribbons |
| Ho, Jin Fa | Metal Patterning and Grain Boundary Engineering by Template Assisted Dewetting |
| Hobbs, R. G. | Aberration-Corrected Quantum Electron Microscopy |
| Hobbs, R. | Diffractive Electron Mirror in SEM |
| Hoffmann, Martin | Low-cost fabrication of large area periodic nanopatterns with tunable feature sizes using soft UV-Nanoimprint at ambient atmosphere |
| Hofmann, U. | The Impact of Isofocal Dose-Based Proximity Effect Correction on Effective Process Blur Tolerance
Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Holihan, E. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Holland, Glenn | A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Holst, B. | Large area scanning-helium-ion-beam lithography
An optimized, grid-based binary holography mask for high resolution lithography with light or matter waves
An experimental study of light absorbance of gold metal nanoparticles in the size range 45 to 200 nm |
| Holz, Mathias | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Hong, J. H. | Fabrication of glass sealed x-ray tube with high resolution carbon nanotube cold cathode |
| Hou, H.-C. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Houel, A. | COLDFIB – The new FIB source from laser cooled atoms |
| Hover, D. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Hsu, W.-H. | Low-Voltage Coherent Electron Imaging Based on a Single-Atom Electron Source |
| Hu, H. | Fabricating Nanostructures On Bulk Silicon Substrates Using Helium Ion Microscope |
| Hu, Pan | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Hu, Ting | Thermal nanoimprint to improve the material properties of MAPbI3 |
| Hu, Walter | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor
Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence
Bio-inspired Nanostructures for Enhanced Light Management |
| Huang, Qingyu | High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Huang, X.L. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Huang, Y.T. | Flexible Transparent Electrode with Embedded Metal Mesh Fabricated via Template-based Electrodeposition for Full-Plastic Bifacial Dye-sensitized Solar Cells |
| Hübner, R. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Hui, J. N. | Real-time Cell Migration Force Monitored by Micropost Sensor Arrays on Top and Bottom Surfaces in Confined Channels |
| Humayun, Md Tanim | Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Huth, M. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Huynh, Chuong | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Hwang, I. S. | Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| Hwang, I.-S. | Low-Voltage Coherent Electron Imaging Based on a Single-Atom Electron Source |
I |
| Iijima, T. | Nanoscale pattering and blistering phenomenon of gold films on silicon dioxide layer using focused helium ion beam |
| Ilic, B. R. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Ilic, B. Robert | Chromia – A Novel and Versatile Material for Nanofabrication
Nonlinear Interactions of Coupled MEMS Cantilevers
A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Ingolfsson, O. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| International, Zeiss | Transmission Helium Ion Microscopy |
| Irmscher, M. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
| Ishito, Y. | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Isoyan, Artak | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Ito, S. | Reproducible surface forces between VUV-exposed silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid |
| Ivanov, Tzvetan | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Ivanovskaya, Anna N. | Nanoscale roughened thin film electrodes for neural probe and bio-sensing applications |
J |
| Jacobsen, Chris | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Jakobsen, M. H. | Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows |
| Jefimovs, K. | Fabrication of high aspect ratio metal gratings for X-ray phase contrast interferometry |
| Jeon, C.-U. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER
Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography
Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Jeong, S. | High sensitive visualization of localized electric field using low energy electron beam deflection |
| Jesse, Stephen | Atom by Atom Sculpting of Materials using Scanning Transmission Electron Microscopy |
| Ji, Chengang | High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Ji, H. | Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography |
| Jiang, H. | 3D CMOL Memristor Circuit for Analog/Neuromorphic Computing
Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Jiang, L. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis
Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Jiang, N. | Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials |
| Jiang, Y.W. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Jiang, Yang | Fabrication of copper nanowire using NIL for electroreduction of carbon dioxide |
| Jiang, Youwei | Stretchable and conductive substrate with undulating surface by imprint lithography for Flexible Electronics |
| Jiao, L. | Graphene Oxide Thickness Effects in Graphene-based Supercapacitors |
| Jin, Lei | Printed Flat Optical Component: Metasurface for Cylindrical Vector Beam Generation |
| Johansson3, Alicia | Design of hierarchical surfaces for tuning wetting characteristics |
| Johnson, K. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Jones, Mervyn | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Jones, W. Max | Lateral Field Emission Transistors For Extreme Temperature Operation |
| Joshi, S.S. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening |
| Juffmann, T. | Multi-pass transmission electron microscopy |
| Jugessur, A. S. | Large area nanofabrication of dense sub-50 nm structures using ALD-enabled nanoimprint lithography |
K |
| Kaestner, Marcus | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Kahl, M. | FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Kamerbeek, M.J. | Simple add-on to change a single-beam SEM into a multi-beam SEM |
| Kandel, Y. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Kandel, Yudhishthir | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Kang J. S. | Fabrication of glass sealed x-ray tube with high resolution carbon nanotube cold cathode |
| Kang, J. S. | Fabrication of high resolution electron beam with one carbon nanotube cold cathode |
| Kanwal, A. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Karg, Siegfried | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Kasahara, K. | Metal oxide cluster compound photoresists for EUV lithography |
| Kasica, R. J. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Kaspar, C. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
| Kasuya, M. | Reproducible surface forces between VUV-exposed silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid |
| Kavanagh, Karen L. | Transmission Helium Ion Microscopy |
| Kawata, H. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask
Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm
Novel UV-NIL for opaque mold and substrate by use of UV triggered command cure resin |
| Kazazis, D. | Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Kehagias, Nikolaos | Design of hierarchical surfaces for tuning wetting characteristics
Amphiphobic mushroom-like structures fabricated by direct nanoimprint lithography |
| Ketelaars, W.S.M.M. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography
Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
| Khan, A. | Flexible Transparent Electrode with Embedded Metal Mesh Fabricated via Template-based Electrodeposition for Full-Plastic Bifacial Dye-sensitized Solar Cells |
| Khan, Arshad | Flexible Transparent Conductive Film with Embedded Nanoscale Metal Mesh Fabricated through Electrospinning and Template-based Electrodeposition |
| Khursheed, A. | Graphene-Based Cathode Cold-Field Electron Emission Sources
A modularized miniature electron beam column array for parallel lithography
Ring cathode electron beam projection lithography |
| Kievit, O. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| Kihara, N. | Sub 100 nm Pattern Transfer from Self-Assembled Silica Nanoparticles Grafted with Polymer Brush on Patterned Substrate |
| Kikuchi, E. | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Kikuta, H. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask |
| Kim, C-S. | Diffractive Electron Mirror in SEM
Aberration-Corrected Quantum Electron Microscopy |
| Kim, D. K. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Kim, S.-B. | Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography
Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Kim, S.-H. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER |
| Kim, S. | Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy |
| Kim, T. G. | Fabrication of glass sealed x-ray tube with high resolution carbon nanotube cold cathode
Fabrication of high resolution electron beam with one carbon nanotube cold cathode |
| Kirchner, R. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison
Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Kisc, Andras | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Klein, K.L. | Direct-write Method for Machining Fluidic Structures with Helium Ions |
| Klings, Thomas | Nanofluidics and Plasmonics for In-Line DNA Optical Mapping |
| Knoll, Armin W. | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Knuffman, B. | Focused Ion Beam System Employing a Low Temperature Ion Source |
| Kobler, Aaron | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Kocis, A. | Neurite growth into artificial microchannels |
| Kometani, R. | Local nanopatterning using PS-b-PMMA block copolymer self-assembly/electron beam combined lithography
Nanoscale pattering and blistering phenomenon of gold films on silicon dioxide layer using focused helium ion beam |
| Korivi, N.S. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis
Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Koshelev, A. | High density, multifunctional neural probes for massively parallel read out and control |
| Koshelev, Alexander | Photonics on a Fiber |
| Koshelev1, Alexander | Photonics On a Fiber For Wavefront Manipulation |
| Kosma, V. | Metal oxide cluster compound photoresists for EUV lithography |
| Koster, N. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| Koutsos, V. | Thinning and doping of two-dimensional WSe2 by vapour XeF2
Zinc oxide nanowires for drug delivery systems |
| Koyama, M. | Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm |
| Kreikebaum, J. M. | Design, Fabrication, and Initial Characterization of a Multi-Qubit Chip for Quantum Simulation |
| Kreindl, Gerald | Nanotechnology for a Genomic Revolution |
| Krielaart, M.A.R. | Diffractive Electron Mirror in SEM |
| Kroo, Laurel Ann | A Simple and Inexpensive Permanent Magnet Electron Lens |
| Kruit, P. | Diffractive Electron Mirror in SEM
Simple add-on to change a single-beam SEM into a multi-beam SEM
From dose statistics to line edge roughness
Aberration-Corrected Quantum Electron Microscopy |
| Krylov, S. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Krylov, Slava | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Kumagai, M. | Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method |
| Kumar, R. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science
Surface Modification of Graphene-Metal Oxides by Microwave Irradiation for Applications in Supercapacitors |
| Kurabayashi, K. | Fabrication of Pre-Bended Layered Semiconductor Biosensors on Flexible Substrates |
| Kurihara, K. | Reproducible surface forces between VUV-exposed silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid |
L |
| L.Zhang | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Lab, Adesnik | High density, multifunctional neural probes for massively parallel read out and control |
| Labella, M., III | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Laegel, B. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Lai, W. C. | Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| Lake, Joseph | Digital Atomic-Scale Tip Based Nano Fabrication |
| Lamprou, D.A. | Zinc oxide nanowires for drug delivery systems |
| Lan, Yangchun | Fabrication of copper nanowire using NIL for electroreduction of carbon dioxide |
| Lanzio, V. | High density, multifunctional neural probes for massively parallel read out and control |
| Laurenceau, E. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Le Saux, G. | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Leclercq, J.-L. | 50 nm lines patterned into silicon using water developable chitosan bioresist and electron beam lithography |
| Lee, D. T. | Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Lee, H. R. | Fabrication of high resolution electron beam with one carbon nanotube cold cathode |
| Lee, J. | AlGaN/GaN BioFET Sensors for Detection of Microcystin-LR and Other Toxins |
| Lee, S.-Y. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER
Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography
Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Lee, S. | AlGaN/GaN BioFET Sensors for Detection of Microcystin-LR and Other Toxins |
| Lee, Y. | High Q-factor micro-ring resonator fabrication by charge dissipation in electron beam lithography |
| Lemaire, P. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions |
| Lester, K. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Leung, Yuen-Shan | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Lewis, B.B. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
| Lewis, Brett B. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Li, Andrew | Bio-inspired Nanostructures for Enhanced Light Management |
| Li, Benjamin | Bio-inspired Nanostructures for Enhanced Light Management |
| Li, C. | Fabrication of self-rectifying 3D all-silicon memristor crossbar arrays by stacking fluid supported single-crystalline membranes
3D CMOL Memristor Circuit for Analog/Neuromorphic Computing |
| Li, Can | Fabrication of 2 x 2 nm2 Cross-Point Memristor Array of 3.82 Tbit/inch2 Packing Density |
| Li, D. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER
Fabrication of Arrays of Electrically-Isolated Nanoscale Organic Thin-Film Transistors |
| Li, Dongyuan | Metallic Nanowire Transparent Conductive Electrode Fabricated by Template-guided Assembly |
| Li, H. | Three Layer Plasmonic Biosensor with High Sensitivity |
| Li, Haibo | Synthesis and Characterization of Low Block Copolymers for Large Periodicity Patterning using Directed Self Assembly and Legacy Exposure Tools |
| Li, J. | Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography |
| Li, K. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Li, Kenan | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Li, P. C. | Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| Li, Q. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Li, Qiaochu | Printed Flat Optical Component: Metasurface for Cylindrical Vector Beam Generation |
| Li, Shijie | Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer |
| Li, W. P. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Li, W.D. | Flexible large-area plasmonic gold nanocheckerboard fabricated by cost-effective solution process for highly sensitive refractive index sensing in visible range
Flexible Transparent Electrode with Embedded Metal Mesh Fabricated via Template-based Electrodeposition for Full-Plastic Bifacial Dye-sensitized Solar Cells |
| Li, Wen-Di | Flexible Transparent Conductive Film with Embedded Nanoscale Metal Mesh Fabricated through Electrospinning and Template-based Electrodeposition
Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer
Metallic Nanowire Transparent Conductive Electrode Fabricated by Template-guided Assembly |
| Li, Y. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Li, Y | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Li, Yuanrui | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography
Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Liang, C.W. | Flexible large-area plasmonic gold nanocheckerboard fabricated by cost-effective solution process for highly sensitive refractive index sensing in visible range |
| Liang, Chuwei | Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer
Metallic Nanowire Transparent Conductive Electrode Fabricated by Template-guided Assembly |
| Liang, X. | Fabrication of Multi-Bit Memory Devices Based on Layered Semiconductors via Interlayer Deformation
Fabrication of Pre-Bended Layered Semiconductor Biosensors on Flexible Substrates
Fabrication of Arrays of Electrically-Isolated Nanoscale Organic Thin-Film Transistors |
| Liang, Yuchen | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor
Bio-inspired Nanostructures for Enhanced Light Management |
| Liao, K.-T. | Fabrication and Replication of Nanofluidic Devices for the Analytical Separation of Biological Nanoparticles |
| Liddle, J. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Liddle, J. Alexander | Chromia – A Novel and Versatile Material for Nanofabrication
Self-Assembled DNA-Protein Nanostructures with Molecular Precision
A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Lim, H | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Lim, Haneol | The Design and Analysis of Switchable and Stackable Reflective Color Filters
Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Lim, Kevin T. P. | Direct laser writing of color transmission holograms |
| Lin, C. Y. | Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| Lin, C.-Y. | Low-Voltage Coherent Electron Imaging Based on a Single-Atom Electron Source |
| Lin, P. | 3D CMOL Memristor Circuit for Analog/Neuromorphic Computing
Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Ling, Xinsheng Sean | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Lithography, MAPPER | From dose statistics to line edge roughness |
| Liu, H. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Liu, H | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Liu, He | The Design and Analysis of Switchable and Stackable Reflective Color Filters
Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Liu, J. B. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Liu, Jianpeng | Optimization of Fresnel zone plate layout for high diffraction efficiency by e-beam lithography |
| Liu, Shihchia | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Liu, Wei | FOLED with enhanced external efficiency using corrugated Ag anode
FOLED with enhanced external efficiency using a corrugated Ag anode |
| Liu, Y. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Liu, Z. Y. | Nasopharyngeal Carcinoma Cell Migration in Three-Dimensional Platform |
| Livengood, R. H. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Livengood, Richard | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Lobontiu, N. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Loeber, T. H. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Loeffler, F. | Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials |
| Loiudice, A. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies |
| Lokhorst, S.R. | From dose statistics to line edge roughness |
| Lokitz, B.S. | Chemical Co-Patterning Strategies Using Azlactone-Functionalized Polymers |
| Lopez, G. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices
The Impact of Isofocal Dose-Based Proximity Effect Correction on Effective Process Blur Tolerance |
| Lopez, M. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Lotz, M. R. | Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows |
| Lovell, J. | Emission stability and end-form changes in high brightness HfC electron sources |
| Lozano, Paulo | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| Lu, B.-R. | Enhancing the conversion efficiency of spin-to-orbit angular momentum by nanoscale metasurface reconstruction
24-bit/16 million structural true colors through extraordinary optical transmission of subwavelength Ag holes |
| Lu, Wu | AlGaN/GaN BioFET Sensors for Detection of Microcystin-LR and Other Toxins |
| Luan, Enxiao | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Luca, A. De | Ion Beam Etching : a solution for microsystem device processing |
| Luck, C. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Ludovice, P.J. | Block Copolymer Directed Self-Assembly Using Chemoepitaxial Guiding Underlayers with Topography |
| Luhar, Mitual | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Lum, Paul | Photonics On a Fiber For Wavefront Manipulation |
| Luo, T. | A modularized miniature electron beam column array for parallel lithography |
| Luo, Y. | Reduction of Metrology Error for Line-Edge Roughness Measurement from Low-Dose SEM Images |
| Luo, Yu | FOLED with enhanced external efficiency using corrugated Ag anode
FOLED with enhanced external efficiency using a corrugated Ag anode |
| Luo, Zhiren | High-aspect-ratio Magnetic Tunable Nanopillar Array
Design of Interfacial Antireflection Nanostructures in Multilayers |
| Luttge, R. | Loading single neurons on a microsieve electrode array by passive pumping |
M |
| M.Argoud | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| M.Reveillard | COLDFIB – The new FIB source from laser cooled atoms |
| Ma, B. | Fabrication of Arrays of Electrically-Isolated Nanoscale Organic Thin-Film Transistors |
| Ma, Xiaohao. | Fabricating Nano-scale Gratings with Multiple Imprinting |
| Ma, Y. T. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Maas, D.J. | Fast resist-activation dosimetry for extreme ultra-violet lithography
The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| Mack, Chris A. | Subtracting SEM errors during the measurement of stochastic-induced feature roughness |
| Mackie, W. | Emission stability and end-form changes in high brightness HfC electron sources |
| Maeda, E. | Local nanopatterning using PS-b-PMMA block copolymer self-assembly/electron beam combined lithography
Nanoscale pattering and blistering phenomenon of gold films on silicon dioxide layer using focused helium ion beam |
| Maeder, X. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition |
| Magera, G. | Emission stability and end-form changes in high brightness HfC electron sources |
| Mahady, Kyle | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Makarov, Sergei | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Mallek, J. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Manera, L. T. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Manfrinato, V. R. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Manohara, H. | Stable Field Emitters Using Inverse Opal Structures |
| Manzeli, Sajedeh | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Mao, Huachao | Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Marcovici, A. | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Marokkey, Sajan | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Martens, S. | Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison |
| Masigol, Mohammadali | Chemical Co-Patterning Strategies Using Azlactone-Functionalized Polymers |
| Mastropaolo, E. | Zinc oxide nanowires for drug delivery systems |
| Mathis, M. | A Single Fiber Surface Enhanced Raman Scattering (SERS) Probe |
| Matschuk, M. | Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening |
| Matsubara, S. | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Matthew, Itty | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Matvejev, V. | THz sensor in microfluidic devices for on line determination and control of ethanol concentration |
| Mayer, A. | The impact of preparation conditions on the properties of replica stamps
Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening
Thermal nanoimprint to improve the material properties of MAPbI3
Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Mazarov, Paul | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| McClelland, J.J. | Focused Ion Beam System Employing a Low Temperature Ion Source |
| McVey, Shawn | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Melo, E. G. | ICP-RIE Etching of Sputtered Deposited SiO2 Thin Films for Fabrication of Oxide-Cladding AlN Photonic Crystals |
| Melville, A. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Melvin, L. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Melvin, Lawrence S., III | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Meng, Deming | Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Metzler, M. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices
The Impact of Isofocal Dose-Based Proximity Effect Correction on Effective Process Blur Tolerance |
| Michels, T. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Midoh, Y. | Repair of discontinuous interference fringes in electron hologram by using the relaxation method |
| Migita, S. | Nanoscale pattering and blistering phenomenon of gold films on silicon dioxide layer using focused helium ion beam |
| Min, H.D. | UV-Curable Nanoimprint Resist with Liquid Volume-Expanding Monomers |
| Min, J.-H. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions
Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Min, Joong-Hee | Continuous Patterning of Three-Dimensional Periodic Nanostructures using Roll-to-Roll System |
| Min, Siyi | Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer |
| Minamisawa, R. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Miura, K. | Repair of discontinuous interference fringes in electron hologram by using the relaxation method |
| Mocella, V. | Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Mochi, I. | Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Mokari, T. | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Möller, W. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Montemayor, L. | Stable Field Emitters Using Inverse Opal Structures |
| Moon, Jiyoung | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Morrell-Falvey, J.L. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening |
| Moshkalev , S. A. | Surface Modification of Graphene-Metal Oxides by Microwave Irradiation for Applications in Supercapacitors |
| Moshkalev, S. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
THz sensor in microfluidic devices for on line determination and control of ethanol concentration
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis
Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Mound, Brittnee A. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Muehlberger, M. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| Muilwijk, P. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| Mundy, J. Z. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions |
| Munechika, Keiko | Photonics On a Fiber For Wavefront Manipulation
Photonics on a Fiber |
| Murakami, Y. | Repair of discontinuous interference fringes in electron hologram by using the relaxation method |
| Murphy, John P. | Iron-doped apatite nanoparticle adjuvants for enhanced phage therapy delivered through electrospun fibers |
| Murphy~, J. | Coaxial Hybrid Perovskite Fibers: Synthesis and Encapsulation in Situ via electrospinning |
| Murray, R. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Murty, E. | Stable Field Emitters Using Inverse Opal Structures |
| Mutunga, E. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
N |
| Nadzeyka, A. | FIB Nanofabrication with Sketch & Peel Method: Employing non-Ga Ion Species for Plasmonic Arrays |
| Nagarajayya, Nagendra | Skin like Plasmonic Full Color Displays |
| Nagase, K. | Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method |
| Nagato, K. | Heat Conduction and Polymer Flow in Microstructured Mold for Laser-Assisted Imprinting |
| Naidu, Sharan V. | Design of Interfacial Antireflection Nanostructures in Multilayers |
| Nakagawa, M. | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method
Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method
Reproducible surface forces between VUV-exposed silica surfaces in a moisture-sensitive oleophilic diacrylate monomer liquid |
| Nakamae, K. | Repair of discontinuous interference fringes in electron hologram by using the relaxation method |
| Nakamura, T. | Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method |
| Nakano, T. | Analytical and Numerical Calculation of Multipole Fields of a Wire Lens for an Aberration Corrector |
| Nakao, M. | Heat Conduction and Polymer Flow in Microstructured Mold for Laser-Assisted Imprinting |
| Nam, C-Y. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Namboodiri, P. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Nanda, Gaurav | Helium-Ion-Beam Etched Encapsulated Graphene Nanoribbons |
| NanoTech, zeroK | Focused Ion Beam System Employing a Low Temperature Ion Source |
| Narasimhan, Amrit | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Narayanan, S.R. | Field-Driven Splitting of Pure Water based on Deep-sub-Debye-length Nanogap Cells |
| Narcross, H.L. | Novel Crosslinked Molecular Resists Based on Acid-Catalyzed Depolymerization |
| Narcross, Hannah | Crosslinkable Photoacid Generators for Ultrahigh Loading in Epoxide Functionalized Molecular Resists |
| Nation, B.D. | Block Copolymer Directed Self-Assembly Using Chemoepitaxial Guiding Underlayers with Topography |
| Naulleau, Patrick | Ruthenium Patterning via Reactive Ion Etching for EUV optics |
| Nealey, P. | Combining Block Copolymer Lithography with Self-Aligned Double Patterning to Achieve 10 nm Full-Pitch Line/Space Patterns |
| Neisser, M. | Synthesis and Characterization of Low Block Copolymers for Large Periodicity Patterning using Directed Self Assembly and Legacy Exposure Tools |
| Nesse, T. | An optimized, grid-based binary holography mask for high resolution lithography with light or matter waves |
| Neuzil, P. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Ng, V. | A Study of Pattern Density on Magnetic Coupling for Bit Patterned Media
Ring cathode electron beam projection lithography |
| Nidetzky, B. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Nielsen3, Theodor | Design of hierarchical surfaces for tuning wetting characteristics |
| Nishikawa, K. | Local nanopatterning using PS-b-PMMA block copolymer self-assembly/electron beam combined lithography |
| Niu, G. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Noordzij, N. | 3D-nanoprinting using Electron Beam Induced Deposition
Simple add-on to change a single-beam SEM into a multi-beam SEM |
| Nordwestschweiz, Fachhochschule | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Notte, John | Transmission Helium Ion Microscopy |
| Nujhat, N. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis |
O |
| O'Brien, K. P. | Design, Fabrication, and Initial Characterization of a Multi-Qubit Chip for Quantum Simulation |
| O'Connor, B. | Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Ober, C. K. | Metal oxide cluster compound photoresists for EUV lithography |
| Ocola, L. E. | Sensors made from infiltrated ZnO nanostructures |
| Ocola, L. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Ocola, Leonidas E. | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Ocola, Leonidas | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Odent, J. | Metal oxide cluster compound photoresists for EUV lithography |
| Ogawa, S. | Nanoscale pattering and blistering phenomenon of gold films on silicon dioxide layer using focused helium ion beam |
| Ogletree, D. Frank | Xrays, Electrons and Lithography: Fundamental Processes in Molecular Radiation Chemistry |
| Oh, Sharon | Ruthenium Patterning via Reactive Ion Etching for EUV optics |
| Ohno, K. | Sub 100 nm Pattern Transfer from Self-Assembled Silica Nanoparticles Grafted with Polymer Brush on Patterned Substrate |
| Okada, Y. | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Okasha, Mohammad | Fabrication pH micro-biosensor for implantable medical devices |
| Oldham, C. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions |
| Oliver, W. D. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Olynick, D. L. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Olynick, D.L. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating |
| Ovchinnikova, Olga | Building with Ions in Liquid and Gas on the Helium Ion Microscope |
| Owen, J. H. G. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires
Low-thermal-budget surface preparation for STM Lithography |
| Owen, James H.G. | Digital Atomic-Scale Tip Based Nano Fabrication |
P |
| P.Pimenta-Barros | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| P.Quéméré | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| Palaga, T. | Investigation of TiO2/graphene Nanocomposite for Cancer Photothermal Therapy
A Novel Fabrication of Isolated Titanium Dioxide Nanotubes |
| Palmer, R. E. | Performance of a high-resolution negative tone resist
Performance of a high-resolution negative tone resist |
| Palmieri, J. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Palumbo, A. | Transition Metal Dichalcogenides as Cell Culture Platforms |
| Pang, S. W. | Three Layer Plasmonic Biosensor with High Sensitivity
Nasopharyngeal Carcinoma Cell Migration in Three-Dimensional Platform
Topographical Effect on Natural Killer Cell Locomotion in Confined Microenvironment
Real-time Cell Migration Force Monitored by Micropost Sensor Arrays on Top and Bottom Surfaces in Confined Channels |
| Papenheim, M. | The impact of preparation conditions on the properties of replica stamps
Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening
Thermal nanoimprint to improve the material properties of MAPbI3
Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Paprotny1, Igor | Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Park, J. Y. | Fabrication of glass sealed x-ray tube with high resolution carbon nanotube cold cathode |
| Park, K. C. | Fabrication of glass sealed x-ray tube with high resolution carbon nanotube cold cathode
Fabrication of high resolution electron beam with one carbon nanotube cold cathode |
| Park, Saungeun | Intriguing Prospects of 2D Atomic Sheets for Innovative Nanoelectronics |
| Parsons, G. | Fabrication and Characterization of Transparent, Flexible Metallic Nano-Accordions
Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Patrick, N. Shane | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Paulson, D. | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Pease, R. Fabian | A Simple and Inexpensive Permanent Magnet Electron Lens |
| Pedulla, Marisa L. | Iron-doped apatite nanoparticle adjuvants for enhanced phage therapy delivered through electrospun fibers |
| Peeris, C. | Ring cathode electron beam projection lithography |
| Penzo, E. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies
Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Petersen, C.R. | Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows |
| Pharr, George M. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Pi, S. | 3D CMOL Memristor Circuit for Analog/Neuromorphic Computing |
| Pi, Shuang | Fabrication of 2 x 2 nm2 Cross-Point Memristor Array of 3.82 Tbit/inch2 Packing Density |
| Pimpin, A. | Investigation of TiO2/graphene Nanocomposite for Cancer Photothermal Therapy
A Novel Fabrication of Isolated Titanium Dioxide Nanotubes |
| Pina-Hernandez, Carlos | Photonics On a Fiber For Wavefront Manipulation
Photonics on a Fiber |
| Pirota, K. R. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis |
| Plachecki, Vince | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Plank, H. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion
Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
| Plank, Harald | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Platzgummer, Elmar | Advances in Multi-Beam Mask Writing |
| Plum, M.A. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Popescu, C. | Performance of a high-resolution negative tone resist |
| Poteet, Austen | High-aspect-ratio Magnetic Tunable Nanopillar Array |
| Pourdavoud, N. | Thermal nanoimprint to improve the material properties of MAPbI3 |
| Pradelles, J. | Novel registration error metrology for multiple electron beam lithography |
| Prakash, Manu | A Simple and Inexpensive Permanent Magnet Electron Lens |
| Pranov, H. | Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening |
| Pratt, K. | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Prinz, A. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| Prodan, C. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Prodan, E. | Microtubules: A Potential Biological Model for Topological Phonon Edge Mode Phenomena |
| Prüfer, T. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Pudasaini, Pushpa R. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Puydinger dos Santos, M. V. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis |
Q |
| Qi, M. | High Q-factor micro-ring resonator fabrication by charge dissipation in electron beam lithography |
| Qi, Zhengqing John | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
R |
| Rack, P.D. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
| Rack, Philip D. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Rack, Philip | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Rademaker, G. | Novel registration error metrology for multiple electron beam lithography |
| Radeschnig, U. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Rahman, SM Saydur | Fabrication of nano-gap using high and low energy electron-beam lithography |
| Ramasesh, V. | Design, Fabrication, and Initial Characterization of a Multi-Qubit Chip for Quantum Simulation |
| Rand, Richard H. | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Randall, J. N. | Low-thermal-budget surface preparation for STM Lithography |
| Randall, John N. | Digital Atomic-Scale Tip Based Nano Fabrication |
| Rangan, Sylvie | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Rangari, V. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis
Biomimetic micromolding: Micro- and Nano-structuring of Polydimethylsiloxane (PDMS) using Bio- and Nature Inspired Templates |
| Rangelow, I. W. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Rangelow, I.W. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating |
| Rangelow, Ivo W. | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Raveh, A. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Raveh, Amir | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Rawlings, Colin | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Ray, C. H. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Ray, Christopher H. | Chromia – A Novel and Versatile Material for Nanofabrication
A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Regulez-Fernandez, M. | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| Reichenpfader, M. | Direct-writing of nanomagnets for logic circuitry |
| Reishofer, D. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Ren, J. | Combining Block Copolymer Lithography with Self-Aligned Double Patterning to Achieve 10 nm Full-Pitch Line/Space Patterns |
| Research, Joanneum | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| Retterer, S.T. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening
Chemical Co-Patterning Strategies Using Azlactone-Functionalized Polymers
Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam
Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials
Biofilm Structure of Geobacter sulfurreducens by Helium Ion Microscopy |
| Ribeiro, L. E. Bento | Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Richter, C. | Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Riedl, T. | Thermal nanoimprint to improve the material properties of MAPbI3 |
| Rishinaramangalam, A. | Tip based nanometrology and nanolithography using high aspect ratio GaN nanowires |
| Riverside, UC | Superconducting Quantum Interference Device Micro Arrays for Biomagnetic Imaging |
| Robinson, A. P. G. | Performance of a high-resolution negative tone resist |
| Romano, L. | Fabrication of high aspect ratio metal gratings for X-ray phase contrast interferometry |
| Romano, S. | Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Rond, J. | Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Rondinone, A. | PECVD Synthesis of a Carbon-Based Nanotechnology Catalyst entitled Carbon Nano Spikes (CNS) |
| Rosenberg, D. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Rosenmann, Daniel | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Roth, J. | Performance of a high-resolution negative tone resist
Performance of a high-resolution negative tone resist |
| Rukenstein, P. | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Rumpf, B. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Ruttloff, S. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| Ryu, B. | Fabrication of Pre-Bended Layered Semiconductor Biosensors on Flexible Substrates
Fabrication of Arrays of Electrically-Isolated Nanoscale Organic Thin-Film Transistors |
| Ryu, Yu Kyoung | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
S |
| Sachser, R. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Saffih, F. | Chromium oxide as a hard mask material better than metallic chromium |
| Sahagun1, Alvaro | Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Sainato, Michela | Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Salmassi, Farhad | Ruthenium Patterning via Reactive Ion Etching for EUV optics |
| Samach, G. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Sando, S. | Low-thermal-budget surface preparation for STM Lithography |
| Sang, Xiahan | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Santini, R. | Low-thermal-budget surface preparation for STM Lithography |
| Sasago, M. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask |
| Sassolini, S. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating
Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma
High density, multifunctional neural probes for massively parallel read out and control
Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide |
| Sassolini, Simone | Photonics On a Fiber For Wavefront Manipulation |
| Sato, S. | Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method |
| Sattelkow, J. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion
Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition |
| Savari, S. A. | Reduction of Metrology Error for Line-Edge Roughness Measurement from Low-Dose SEM Images |
| Savari, S.A. | Datapath Architecture for Aperture Array Based Multibeam Mask Writer Systems |
| Sawabe, T. | Sub 100 nm Pattern Transfer from Self-Assembled Silica Nanoparticles Grafted with Polymer Brush on Patterned Substrate |
| Schaller, Vanessa | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Scheer, H.-C. | The impact of preparation conditions on the properties of replica stamps
Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening
Thermal nanoimprint to improve the material properties of MAPbI3
Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Scherer, Axel | Lateral Field Emission Transistors For Extreme Temperature Operation |
| Schiffels, Daniel | Self-Assembled DNA-Protein Nanostructures with Molecular Precision |
| Schift, H. | Fabrication of high aspect ratio metal gratings for X-ray phase contrast interferometry
Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison
Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| Schinnerl, M. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| Schmid, R.M. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Schmid, S. | Direct-write deposition of pure gold nanostructures - new possibilities and new challenges |
| Schmidt, F. P. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Schmied, I. | Neurite growth into artificial microchannels |
| Scholze, P. | Neurite growth into artificial microchannels |
| Schuff, S. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Schuller, P. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance?
Neurite growth into artificial microchannels |
| Schulman, D.S. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography |
| Schurink, B. | Loading single neurons on a microsieve electrode array by passive pumping |
| Schvartzman, M. | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Schvartzman, Mark | Soft Thermal Nanoimprint Lithography |
| Schwalb, C. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition |
| Schwartzberg, A. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma
Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies
Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Schwarzkopf, A. | Focused Ion Beam System Employing a Low Temperature Ion Source |
| Scotuzzi, M. | Simple add-on to change a single-beam SEM into a multi-beam SEM |
| Seib, P.F. | Zinc oxide nanowires for drug delivery systems |
| Seibein, Kerry | Chromia – A Novel and Versatile Material for Nanofabrication |
| Seki, K. | Fabrication of Polyimide Screen Masks with Through Holes by Laser Drilling for Print and Imprint Method |
| Shankles, P.G. | Microwell Plate Integrated Microfluidics for Cell-Cell Interaction Screening |
| Shao, Jinhai | A novel approach for the fabrication of Kinoform lens for x-ray focusing by grayscale e-beam lithography
Evaluation of RE-800 as a negative tone chemically amplified resist for electron beam lithography |
| Shao, X. | Graphene-Based Cathode Cold-Field Electron Emission Sources |
| Sharma, Renu | A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Sharp, B.L. | Novel Crosslinked Molecular Resists Based on Acid-Catalyzed Depolymerization |
| Sharp, Brandon | Crosslinkable Photoacid Generators for Ultrahigh Loading in Epoxide Functionalized Molecular Resists |
| Shaw, R.W. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Shawrav, M.M. | Direct-write deposition of pure gold nanostructures - new possibilities and new challenges |
| Shen, J. | High aspect ratio polystyrene structure fabrication using electron beam lithography
Oxidation sharpening of silicon tips in 'air' environment |
| Shen, Jiashi | Fabrication of nano-gap using high and low energy electron-beam lithography |
| Sheva, Be’er | Directed Assembly of Nanodumbbells via Nano-Lithographic Docking |
| Shi, Bing | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Shin, I.-K. | An Approach to 3-D Modeling of Electron-beam Lithographic Process from SEM Images for Minimization of CD Error and LER
Effects of Stochastic Exposure on Critical Dimension in Electron-beam Lithography
Analytic Minimization of Line Edge Roughness for Large-Scale Uniform Patterns in Electron-beam Lithography |
| Shirai, M. | Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm |
| Si, Shuhao | Low-cost fabrication of large area periodic nanopatterns with tunable feature sizes using soft UV-Nanoimprint at ambient atmosphere |
| Siddiqi, I. | Design, Fabrication, and Initial Characterization of a Multi-Qubit Chip for Quantum Simulation |
| Silver, R. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Simelgor, G. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Simonsen, I. | An optimized, grid-based binary holography mask for high resolution lithography with light or matter waves |
| Singh, R. K. | Surface Modification of Graphene-Metal Oxides by Microwave Irradiation for Applications in Supercapacitors |
| Sinica, Academia | Low-Voltage Coherent Electron Imaging Based on a Single-Atom Electron Source
Xeon Gas Field Ion Source Emitted from a Single-Atom Tip |
| SKinner, J. | Coaxial Hybrid Perovskite Fibers: Synthesis and Encapsulation in Situ via electrospinning |
| Skinner, Jack L. | Iron-doped apatite nanoparticle adjuvants for enhanced phage therapy delivered through electrospun fibers |
| Smith, J. | Fabricating Nanostructures On Bulk Silicon Substrates Using Helium Ion Microscope |
| Song, B. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Song, Y. | PECVD Synthesis of a Carbon-Based Nanotechnology Catalyst entitled Carbon Nano Spikes (CNS) |
| Soppera, Olivier | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Spejo, L. B. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Spencer, J. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Spieser, Martin | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Spirk, S. | Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion |
| Srajer, Johannes | Advances in Multi-Beam Mask Writing |
| Sreenivasan, S.V. | Roll-to-Roll Nanofabrication Processes for Flexible Electronics and Biomedical Applications |
| Srinivasan, A. | Graphene-Based Cathode Cold-Field Electron Emission Sources |
| Srinivasan1, K. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Srituravanich, W. | Investigation of TiO2/graphene Nanocomposite for Cancer Photothermal Therapy
A Novel Fabrication of Isolated Titanium Dioxide Nanotubes |
| Staabs, J. | Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Stach, E. A. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Stammberger, Stefan J.H. | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Stampanoni, M. | Fabrication of high aspect ratio metal gratings for X-ray phase contrast interferometry |
| Stan, Liliana | Metal-oxide Nanocrystals/Carbon Nanotubes Heterostructure Sensors for Selective Sensing of Hydrocarbons (VOCs + CH4) |
| Stanford, M.G. | Three-Dimensional Focused Electron Beam Induced Deposition: Design |
| Stanford, Michael G. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Stavis, S. M. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices
Fabrication and Replication of Nanofluidic Devices for the Analytical Separation of Biological Nanoparticles |
| Stavis, Samuel M. | A Liquid Cell for In Situ TEM: Design and Fabrication Challenges, and Solutions |
| Stavrov, V. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Steele, A.V. | Focused Ion Beam System Employing a Low Temperature Ion Source |
| Steidl, G. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Stein, A. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Steinberg, C. | The impact of preparation conditions on the properties of replica stamps
Low reflection Fresnel lenses via double imprint combined with vacuum-UV surface hardening
Thermal nanoimprint to improve the material properties of MAPbI3
Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Stern, Lewis A. | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Stewart, M. D., Jr. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Stewart, M., Jr. | Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Stiens, J. | THz sensor in microfluidic devices for on line determination and control of ethanol concentration
Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Strunz, T. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever |
| Sugihara, D. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask |
| Sugimura, S. | Sub 100 nm Pattern Transfer from Self-Assembled Silica Nanoparticles Grafted with Polymer Brush on Patterned Substrate |
| Sun, Lei | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Sun, T. | Conformal Coating of Gold on Nanostructured Surface using Thermal Evaporation |
| Sun, Yousong | Evaluation of RE-800 as a negative tone chemically amplified resist for electron beam lithography |
| Sunayama, R. | Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy |
| Svatos, V. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Swart, J. W. | THz sensor in microfluidic devices for on line determination and control of ethanol concentration
Fabrication and Evaluation of an Active Electromagnetic Mixer for Lab-on-a-Chip Applications |
| Syed, A. | Zinc oxide nanowires for drug delivery systems |
| Szalai, Veronika | Self-Assembled DNA-Protein Nanostructures with Molecular Precision |
T |
| T.Nakamura | In-liquid alignment detection by fluorescence moiré fringes for print and imprint method |
| Taboryski, R. J. | Thermal nanoimprinting of mid-IR antireflective moth-eye nanostructures on chalcogenide glass windows |
| Tan, S. | Cesium ion beam interaction with common microelectronic materials and VLSI devices |
| Tan, Shida | Ion Beam Milling and Secondary Electron Emissions: A Monte Carlo Simulation Study |
| Tanaka, T. | Novel 3-Dimensional Photo Lithography using Built-in Lens Mask |
| Tao, Jun | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor |
| Tao, Li | Intriguing Prospects of 2D Atomic Sheets for Innovative Nanoelectronics
Electrochemically Exfoliated Large-area Phosphorene Enables Promising Flexible Nanoelectronics |
| Taus, P. | Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance? |
| technologies, Abeam | High density, multifunctional neural probes for massively parallel read out and control
Photonics on a Fiber |
| Telian, G. | High density, multifunctional neural probes for massively parallel read out and control |
| Texas, Richardson | Digital Atomic-Scale Tip Based Nano Fabrication |
| Textor, Andrew | Large area nanofabrication of dense sub-50 nm structures using ALD-enabled nanoimprint lithography |
| Thamdrup, Lasse H. | Design of hierarchical surfaces for tuning wetting characteristics |
| Thomson, M.D. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Thumrongthanyaluk, B. | A Novel Fabrication of Isolated Titanium Dioxide Nanotubes |
| Tiimob, B. | Smart Nanostructured Films for Sensitive Chemical Detection and Analysis |
| Tiron, R. | Improved versatility of DSA topographic patterns through the use of UV-exposed grafted layers. |
| Tolbert, L.M. | Novel Crosslinked Molecular Resists Based on Acid-Catalyzed Depolymerization |
| Topolancik, J. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Torres, Clivia M. Sotomayor | Design of hierarchical surfaces for tuning wetting characteristics
Amphiphobic mushroom-like structures fabricated by direct nanoimprint lithography |
| Tourlomousis, F. | Transition Metal Dichalcogenides as Cell Culture Platforms |
| Toyoda, M. | Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy |
| Trisno, Jonathan | Metal Patterning and Grain Boundary Engineering by Template Assisted Dewetting |
| Tsai, Jaw-Shen | Coherent quantum phase slip in superconducting nanowire |
| Turchetti, M. | Diffractive Electron Mirror in SEM
Aberration-Corrected Quantum Electron Microscopy |
| Tutui, J. | Novel UV-NIL for opaque mold and substrate by use of UV triggered command cure resin |
U |
| Uchida, K. | Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy |
| Ünal, Nezih | Investigation of Proximity and Development Process Effects for Large Area Dense Nano-Pattern Applications |
U |
| Unlu, I. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Unoci, Raymond R. | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Utke, I. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition |
v |
| van Putten, M. | The Mass-filtered Ion Gauge (MFIG), a vacuum-contamination sensor for yield enhancement |
| van Tol, R.F.C. | Simple add-on to change a single-beam SEM into a multi-beam SEM |
| Vancouver | Improvement of Silicon Waveguide Transmission by Advanced E-Beam Data Fracturing Strategies |
| Vaultier, Michel | ElectroHydroDynamic emitters developments for improving Focused Ion Beam machines |
| Vaz, A. R. | Surface Modification of Graphene-Metal Oxides by Microwave Irradiation for Applications in Supercapacitors
ICP-RIE Etching of Sputtered Deposited SiO2 Thin Films for Fabrication of Oxide-Cladding AlN Photonic Crystals |
| Vaz, A.R. | Structural Breakdown of Suspended Strained Silicon NanoWires by Exposure during Scanning Electron Microscopy Analysis |
| Velo, M. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
Magnetic and electric transport characterization of a single nickel nanowire isolated by dielectrophoresis |
| Verduin, T. | From dose statistics to line edge roughness |
| Vijayamohanan, H. | A Spirothiopyran based photoresist for large area sub-diffraction nanopatterning |
| Vila-Comamala, J. | Fabrication of high aspect ratio metal gratings for X-ray phase contrast interferometry |
| Viteau, M. | COLDFIB – The new FIB source from laser cooled atoms |
| Vladár, A.E. | Direct-write Method for Machining Fluidic Structures with Helium Ions |
| Voigt, A. | Evaluation and comparison of ZEP520A and mrPosEBR resists by electron beam and extreme ultraviolet lithography |
| von Borany, J. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Von Ehr, J. R. | Low-thermal-budget surface preparation for STM Lithography |
W |
| Walla, F. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Wallin, C. B. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Wallin, Christopher B. | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Wang, Honglei | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor
Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence
Bio-inspired Nanostructures for Enhanced Light Management |
| Wang, Li | FOLED with enhanced external efficiency using corrugated Ag anode
FOLED with enhanced external efficiency using a corrugated Ag anode |
| Wang, Si | Thermal nanoimprint to improve the material properties of MAPbI3 |
| Wang, X. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
| Wang, Y. | Fabrication of Multi-Bit Memory Devices Based on Layered Semiconductors via Interlayer Deformation
Sensors made from infiltrated ZnO nanostructures
Patterning of electrically tunable, light-emitting photonic structures made of erbium doped zinc oxide
Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Wang, Y.F. | Field-Driven Splitting of Pure Water based on Deep-sub-Debye-length Nanogap Cells |
| Wang, Yifei | Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Wang, Z.R. | Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Wanzenboeck, H.D. | Direct-writing of nanomagnets for logic circuitry
Nanoimprinting of 3-dimensional, undercut structures - an unsolvable challenge or a methofd of industrial relevance?
Direct-write deposition of pure gold nanostructures - new possibilities and new challenges
Neurite growth into artificial microchannels |
| Ward, C. | Selective Fluorocarbon-based Atomic Layer Etching in a conventional parallel-plate, capacitively coupled plasma |
| Warzecha, M. | Zinc oxide nanowires for drug delivery systems |
| Weber-Bargioni, A. | Exciton diffusion in cesium lead halide perovskite nanocrystals organized in ordered nanoscale assemblies |
| Weber, S. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Wei, D. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| West, M. | High density, multifunctional neural probes for massively parallel read out and control |
| Westly, D. A. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Westly, Daron A. | Nonlinear Interactions of Coupled MEMS Cantilevers |
| White, L. McElwee | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Wiecha, M. | FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures |
| Wilmoth, J.L. | Geobacter sulfurreducens Attachment and Biofilm Growth on Electrode Materials |
| Wilson, L.L. | Fabrication of Suspended Nano-crystalline Diamond Foils for Stripping Electrons from a High Power Hydride Beam |
| Winhold, M. | Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition |
| Winkler, R. | Three-Dimensional Focused Electron Beam Induced Deposition: Design
FEBID Based Direct-Write Nano-Printing of 2D and 3D Plasmonic Gold Structures
Fabrication of Cellulose Nano-Structures via Focused Electron Beam Induced Conversion
Direct-Write Fabrication of Electric and Thermal High-Resolution Nano-Probes on Self-Sensing AFM Cantilever
Mechanical Properties of 3D Nanostructures Fabricated via Focused Electron Beam Induced Deposition
Secondary Electron Emission during 3D Nanoscale Focused Electron Beam Induced Deposition |
| Winkler, Robert | In Situ Purification and Characterization of Direct-Write Nanostructures Fabricated using Electron Beam Induced Deposition |
| Wisehart, Liam | Incorporation of EELS Data for Monte Carlo Simulation of Secondary Electrons in EUV and Electron-Beam Lithography |
| Wojcik, Michael | Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching |
| Wolf, D. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Wolf, Heiko | High resolution thermal scanning probe lithography for the fabrication of sub-20 nm nanodevices |
| Wolff, S. | Reducing curtaining effects in FIB/SEM applications by a goniometer stage and an image processing method |
| Woll, Arthur R. | Time Multiplexed Deep Reactive Ion Etching of Germanium and Silicon-A Comparison of Mechanisms and Application to X-ray Optics |
| Wong, Edward | Photonics On a Fiber For Wavefront Manipulation |
| Wood, G. S. | Electrostatically Driven Microbeams for Low Frequency Applications |
| Wu, Chunhui | Stretchable and conductive substrate with undulating surface by imprint lithography for Flexible Electronics |
| Wu, W. | Field-Driven Splitting of Pure Water based on Deep-sub-Debye-length Nanogap Cells
Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Wu, W | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Wu, Wei | The Design and Analysis of Switchable and Stackable Reflective Color Filters
Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography
Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Wu, Xian | Fabrication of Josephson Junction without shadow evaporation |
| Wu, Y-C. | Focused Electron Beam Induced Deposition of Nanostructures: Insights from Surface Science |
| Wyrick, J. | Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit
Quantifying Dopant Movement in Si:P Atomic Device Encapsulation |
X |
| Xia, Deying | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
| Xia, Q. F. | Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Xia, Q. | Fabrication of self-rectifying 3D all-silicon memristor crossbar arrays by stacking fluid supported single-crystalline membranes
3D CMOL Memristor Circuit for Analog/Neuromorphic Computing |
| Xia, Qiangfei | Fabrication of 2 x 2 nm2 Cross-Point Memristor Array of 3.82 Tbit/inch2 Packing Density |
| Xiao, Tiqiao | A novel approach for the fabrication of Kinoform lens for x-ray focusing by grayscale e-beam lithography |
| Xie, Shanshan | Optimization of Fresnel zone plate layout for high diffraction efficiency by e-beam lithography |
| Xiong, S. | Combining Block Copolymer Lithography with Self-Aligned Double Patterning to Achieve 10 nm Full-Pitch Line/Space Patterns |
| Xu, C.Q. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Xu, Chen | A novel approach for the fabrication of Kinoform lens for x-ray focusing by grayscale e-beam lithography |
| Xu, H. | Metal oxide cluster compound photoresists for EUV lithography |
| Xu, M. | Fast resist-activation dosimetry for extreme ultra-violet lithography |
| Xu, X. | Process Simulation of Si Dot Fabrication for SETs by Ion Beam Mixing and Phase Separation in Nanopillars
Spatially controlled fabrication of individual silicon nano clusters using ion beam mixing and thermal treatment |
| Xu, Y. H. | Topographical Effect on Natural Killer Cell Locomotion in Confined Microenvironment |
Y |
| Yager, K. G. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Yajima, Y. | Heat Conduction and Polymer Flow in Microstructured Mold for Laser-Assisted Imprinting |
| Yamada, H. | Grafted PMMA mono-layer brush as negative tone e-beam resist |
| Yamazawa, Y. | Analytical and Numerical Calculation of Multipole Fields of a Wire Lens for an Aberration Corrector |
| Yan, Q. | Direct testing of primary photo-electron energy generated by extreme ultraviolet (EUV) at 13.5 nm |
| Yan, Qiliang | Impact of Multilayer Imperfections on EUV OPC and Patterning |
| Yanagihara, M. | Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy |
| Yang, E. H. | Transition Metal Dichalcogenides as Cell Culture Platforms
Facile and High-Throughput Fabrication of Carbon Nanotube Carpet-PDMS Structures toward Flexible Supercapacitors |
| Yang, E. | Fabrication of Pre-Bended Layered Semiconductor Biosensors on Flexible Substrates |
| Yang, H. | AlGaN/GaN BioFET Sensors for Detection of Microcystin-LR and Other Toxins |
| Yang, H | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Yang, Hao | The Design and Analysis of Switchable and Stackable Reflective Color Filters
Electrically switchable structural color using electrowetting on superhydrophobic surface |
| Yang, J. J. | Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Yang, Joel K. W. | Direct laser writing of color transmission holograms |
| Yang, Joel K.W. | Metal Patterning and Grain Boundary Engineering by Template Assisted Dewetting |
| Yang, M. | Three Layer Plasmonic Biosensor with High Sensitivity |
| Yanık, Cenk | Investigation of Proximity and Development Process Effects for Large Area Dense Nano-Pattern Applications |
| Yao, Y. | Investigation of Quantum Tunneling Effects in Gap Plasmon using Collapsible Nano-fingers |
| Yasuda, M. | Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm
Novel UV-NIL for opaque mold and substrate by use of UV triggered command cure resin |
| Yeh, Chun-Cheng | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Yin, B. H. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Yoder, Jonilyn L. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Yoon, J | Switchable and Stackable Color Filters for a Full-color Reflective Display |
| Yoon, Jongseung | The Design and Analysis of Switchable and Stackable Reflective Color Filters
Bio-Inspired Multi-Scale Structure for Fluid Drag Reduction Enabled by Variable Voxel Stereolithography |
| Yost, D. R. W. | Bridging the Gap for High-Coherence Superconducting Qubits |
| Youcef-Toumi, Kamal | Active scanning probes: versatile toolkit for fast imaging and emerging nanofabrication |
| Yu, Bo | Stretchable and conductive substrate with undulating surface by imprint lithography for Flexible Electronics |
| Yu, L. | The Nanolithography Toolbox: Design Solutions for Nanoscale Devices |
| Yu, Shang-Yu | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Yu, Z. | High contrast scanning electron microscopy for high resolution cross sections using conductive polymer-metal coating |
| Yu, Z.M. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Yuan, Zhishan | Rapid nanopore fabrication over wafer size using helium ion beam and automation for biomolecule detection |
Z |
| Zajadacz, J. | Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Zakhidov, Anvar | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Zan, Hsiao-Wen | Micro and nanopatterning of Metal Oxo-Cluster photoresists |
| Zang, Pengyuan | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor |
| Zeng, Xuan | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor |
| Zeng, Y.F. | Recirculating Microfluidic Device for Efficient Filtration and Enrichment of Circulating Tumor Cells |
| Zenhnder, Alan T. | Nonlinear Interactions of Coupled MEMS Cantilevers |
| Zhang, Cheng | Printed Flat Optical Component: Metasurface for Cylindrical Vector Beam Generation
High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Zhang, Cuiping | Flexible Transparent Conductive Film with Embedded Nanoscale Metal Mesh Fabricated through Electrospinning and Template-based Electrodeposition
Metallic Nanowire Transparent Conductive Electrode Fabricated by Template-guided Assembly |
| Zhang, D. H. | Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Zhang, L. | Patterning Materials at the One Nanometer Length Scale with an Electron Beam |
| Zhang, R. | Thinning and doping of two-dimensional WSe2 by vapour XeF2
Stable Field Emitters Using Inverse Opal Structures
Physically Unclonable Anti-Counterfeit Labels Using Nanoscale Diffusive Memristor Crossbar Arrays |
| Zhang, Runzhi | Facile and High-Throughput Fabrication of Carbon Nanotube Carpet-PDMS Structures toward Flexible Supercapacitors |
| Zhang, S. | Enhancing the conversion efficiency of spin-to-orbit angular momentum by nanoscale metasurface reconstruction |
| Zhang, Sichao | A novel approach for the fabrication of Kinoform lens for x-ray focusing by grayscale e-beam lithography
Optimization of Fresnel zone plate layout for high diffraction efficiency by e-beam lithography |
| Zhang, W. G. | Nasopharyngeal Carcinoma Cell Migration in Three-Dimensional Platform |
| Zhang, Xu A. | Continuous Patterning of Three-Dimensional Periodic Nanostructures using Roll-to-Roll System
High-aspect-ratio Magnetic Tunable Nanopillar Array |
| Zhang, Y. | Annealing-Based Electrical Tuning of Cobalt−Carbon Deposits Grown by Focused-Electron-Beam-Induced Deposition
THz sensor in microfluidic devices for on line determination and control of ethanol concentration |
| Zhang, Zhong | High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Zhao, Deyin | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Zhao, Shuo | EUV Tip-to-Tip Variation Mitigation for Beyond 7nm BEOL Layers and Design Rule Analysis |
| Zhao, Suling | High-efficiency, Large-area and Color-stable Flexible Organic Light-emitting Diodes using an Ultra-thin Metal Electrode |
| Zhao, W. X. | Three-dimension tracing on the electron beam in micro-focus and nano-focus X-ray sources |
| Zheng, N. | UV-Curable Nanoimprint Resist with Liquid Volume-Expanding Monomers |
| Zheng, Nan | Polycarbonate as a dual-tone resist for electron-beam lithography |
| Zheng, Shuo | Batch fabrication of AFM probes with direct positioning capability |
| Zhong, K.L. | A Study of Pattern Density on Magnetic Coupling for Bit Patterned Media
Ring cathode electron beam projection lithography |
| Zhou, C. | Combining Block Copolymer Lithography with Self-Aligned Double Patterning to Achieve 10 nm Full-Pitch Line/Space Patterns |
| Zhou, Dian | Digital Biosensing of Influenza Virus with Single Serpentine Si Nanowire Field Effect Transistor |
| Zhou, Weidong | Nanoimprinted Perovskite Metasurface for Enhanced Photoluminescence |
| Zhou, Yuchao W. | Focused Helium Ion Beam Irradiated Josephson Junctions and Arrays |
| Zhu, Ruichao | CD Limits of Scatterometry |
| Zhu, S. | Three Layer Plasmonic Biosensor with High Sensitivity |
| Zhu, Weinan | Intriguing Prospects of 2D Atomic Sheets for Innovative Nanoelectronics
Electrochemically Exfoliated Large-area Phosphorene Enables Promising Flexible Nanoelectronics |
| Zhu, X. | Stable Field Emitters Using Inverse Opal Structures |
| Zhu, Zhouyang | Facile Fabrication of Concentric Gradient Nanostructures Using Interference Lithography and UV-cured Stamp Transfer |
| Ziegler, Dominik | Innovative Probes for Reliable Underwater Nanoscience |
| Zimmer, K. | Relevance of stamp material for vertical phase separation of block copolymers in nanoimprint |
| Zonnevylle, A.C. | Patterning of Non-Planar Diamond Anvils for High Pressure Materials Characterization via Electron Beam Lithography
Simulation of Asymmetric Energy Deposition Profiles in E-Beam Lithography on Curved Substrates |
