A |
| Abbott, J. |
A CMOS based nano-electrode array for high-throughput electrophysiology |
| Abraham, J. B. S. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Accardo, A. |
Lotus-Leaves-Like tailored surfaces tune the structural configuration of bio-soft matter compounds |
| Agarwal, A. |
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction |
| Aguirre, B. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Ahmad, A. |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Ahmed, S. |
MWCNT-PET Films Prepared by Solution Casting for Electronics Applications |
| Aitkenhead, W. F. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Akemeier, D. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Aksyuk, Vladimir |
Optomechanical transducer for investigation of frequency fluctuations
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Al Mutairi, Abdul Aziz |
Neutral surface modification by e-beam exposure for PS-b-PMMA self assembly |
| Alaverdyan, Y. |
Direct Write Electron Beam Lithography for Top-down Fabrication of sol-gel based ZnO micro-nano FETs |
| Alexander-Katz, A. |
Fabrication of Multilayer Complex Nanomesh Patterns |
| Alfredo-Katz, A. |
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear |
| Alkemade, P. |
Study of Ion-Induced Defect Migration in Boron-Nitride Encapsulated Graphene |
| Allen, F.I. |
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Almeida, C. R. |
III-V NanoWires for Junctionless Transistors Fabricated by Focused Ion Beam (FIB) System |
| Altana, M. |
Surface confined equilibration for super-smooth surfaces
High fidelity 3D thermal nanoimprint with UV curable PDMS stamps |
| Amsden, J.J. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Andriolo, J.M. |
Melt Electrospinning: Method for Producing Photo-converting Nanocomposite Materials |
| Angelov, T. |
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Angelov, Tihomir |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes |
| Arceo, A. |
Study of Alternate Hardmasks for EUV Patterning |
| Arnold, J |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Atanasov, I. |
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Atanasov, Ivaylo |
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes |
| Atikian, H. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Aufrecht, J. |
Replicating Natural Environments: Soil-inspired Microfluidic Architectures |
| Austin, R. H. |
Puzzles and Promises in Nanoscale Biology |
| Awale, A. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Ayari-Kanoun, Asma |
Silicon nanostructures with negatively tapered profile by ICP-RIE |
| Aydinoglu, F. |
Electron beam lithography using grafted polystyrene monolayer brush
Down to 7 nm pores in Si by photo-assisted electrochemical etching
Mixture of ZEP and PMMA with tunable sensitivity as a liftoff layer with controllable undercut |
| Aydinoglu, Ferhat |
Silicon nanostructures with negatively tapered profile by ICP-RIE |
| Azhar, S. S. |
Initial Design and Nanofabrication of Energetically Efficient Biologically Motivated Contact |
B |
| Babin, S. |
Near field campanile probe fabricated by nanoimprint lithography |
| Babocky, J. |
Patterning large area plasmonic nanostructures on non-conductive substrates using variable pressure electron beam lithography |
| Bagal, A. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Design and Fabrication of an In-Plane Nano structured Solar Concentrator
Fabrication of Metallic Microstructured Nano-Accordions for Transparent Electrodes |
| Bagal, Abhijeet |
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Balachandran, Bala |
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Balachandran, Balasubramaniam |
High-Performance Nanoimprinted Perovskite Nanograting Photodetector |
| Ballard, J. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices |
| Ballard, J.B. |
Fiducial Registration and Field Stitching for Multi-Scale Scanning Tunneling Microscope Lithography |
| Bastiaens, A.J. |
Brain on Chip |
| Bauerdick, S. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Bedewy, M. |
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment |
| Beisel, J.D. |
Lithography via Aligned Electrospun Fibers |
| Belianinov, Alex |
Focused helium-ion induced direct write engineering of 2D materials |
| Belyansky, M. |
Study of Alternate Hardmasks for EUV Patterning |
| Benkouider, A. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Berger, Luisa |
Focused Electron Beam Induced Processing in ultra-high vacuum: new routes for the fabrication of clean metallic nanostructures and the reduction of proximity effects |
| Berggren, K. K. |
Fabrication of Multilayer Complex Nanomesh Patterns
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear
Rule-based patterning of a multi-state system by block copolymer self-assembly
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Berry, L. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective |
| Bertani, Paul |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Bertino, J.R. |
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Besson, T. |
The next generation of Maskless Lithography |
| Beyer, A. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Biafore, John J. |
Evaluating the Optical and Resist Contributions to Line-Edge Roughness in EUV Lithography Using Stochastic Simulation |
| Bielejec, E. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Bigelow, Nicholas W. |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| Bingrui, Lu |
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating |
| Bischoff, L. |
Ion Beam Injector based on High Current LMIS |
| Black, C. |
Aberration-Corrected Electron-Beam Lithography |
| Black, C.T. |
Sub-5 nm electron-beam lithography and metrology of poly (methyl methacrylate) using an aberration-corrected scanning transmission electron microscope
Selective Directed Self Assembly of Coexisting Morphologies Using Block Copolymer Blends |
| Bobko, Christopher |
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Bock, D. |
Ion Beam Injector based on High Current LMIS |
| Boese, O. |
Lithography via Aligned Electrospun Fibers |
| Bok, J. |
Patterning large area plasmonic nanostructures on non-conductive substrates using variable pressure electron beam lithography |
| Bol, A.A. |
Area-selective atomic layer deposition using e-beam and photosensitive masking layers |
| Bonam, R.K. |
Large Area Three Dimensional Structure Fabrication using Multi-layer Electron Beam Lithography |
| Bonam, Ravi K. |
Materials characterization for Multi-Layer Electron Beam Lithography |
| Borys, N. J. |
Near field campanile probe fabricated by nanoimprint lithography |
| Borys, N. |
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Brady, D.W. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Breaux, Caleb L. |
Free Energy and Frequency of Defects in Chemoepitaxial Block Copolymer Directed Self-Assembly: Effect of Pattern Density Multiplication Factor, Defect Size, and Defect Position |
| Briggs, Dayrl P. |
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities |
| Briggs, Paige |
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities |
| Brodoceanu, D. |
Silicon nanowire and hole arrays by a combination of self-assembly, laser ablation, and wet chemical etching |
| Bruccoleri, A. R. |
Fabrication Process for 200 nm-Pitch Polished Freestanding Ultra-High Aspect Ratio Gratings |
| Brueck, S.R.J. |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| Bunting, A. |
Suspended two-dimensional MoS2 transistor |
| Burns, S |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Busani, Tito |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
C |
| Cabrini, S. |
Near field campanile probe fabricated by nanoimprint lithography
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Cai, H. |
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces |
| Cai, Jingxuan |
Thermal Nanoimprint of Soda-Lime Glass Using Induction Heating and Sapphire Molds |
| Calafiore, G. |
Near field campanile probe fabricated by nanoimprint lithography
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Calusine, G. |
Fabrication of High-Coherence Superconducting Qubits |
| Camacho, R. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Camden, Jon P. |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| Cao, X. |
Mulitiplexed Molecular Assays Using Nanoelectronically Barcoded Beads |
| Carrasco, Esther |
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Carroll, M. S. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Carroll, M. |
Donor quantum-dot coupled qubits |
| Celiker, O. T. |
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Chalvin, Florian |
Impact of template stiffness during peeling release in nanoimprint lithography |
| Chan, Julia Y. |
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Chang, C. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Fabrication of Magnetically Tunable Periodic Nanostructures
Design and Fabrication of an In-Plane Nano structured Solar Concentrator |
| Chang, Chih-Hao |
Three-Dimensional Colloidal Interference Lithography
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Chang, E. H. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Chang, E. |
Reconstructing Focused Ion Beam Profile by Iterative Simulation Methodology |
| Chang, J. |
Rule-based patterning of a multi-state system by block copolymer self-assembly |
| Chang, L. |
Application of Gettering Layers for Low Temperature Conversion of Magnetic Oxides into Ferromagnetic Metals in Thin Films, Multilayers, and Nanostructured Arrays, W. Qiu |
| Chang, Lingqian |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Chaudhary, N. |
The Impact of Parallelism on Data Volumes for a Multibeam Mask Writer |
| Chen, E.X. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Chen, H. |
Significant Light Extraction Enhancement of Organic Light-Emitting Diodes Using Embedded High-index Deep-Groove Dielectric Nanomesh Fabricated by Large-area Nanoimprint |
| Chen, M. |
A New Opportunity to Fabricate Multi-Bit Transistor Memories Using Mechanically Exfoliated Multilayer WSe2 Flakes
Repetitive Nanoprinting Technique for Producing Vertically Stacked Transition Metal Dichalcogenide Heterostructure Arrays and Photo-Response Devices |
| Chen, P. |
Fabrication of Ambipolar Nanoelectronic/Microfluidic-Integrated Biosensors for Cycle-Wise Real-time Biomolecule Quantification |
| Chen, S. |
Polymer Molecular Weight Governs Feature Size During Tip-Based Fabrication of Polymer Nanostructures |
| Chen, Shuo |
The effect of the grating profile on the illumination uniformity of the X-ray condenser |
| Chen, Y. |
Sketch and Peel Lithography
Dense metasurface with high efficiency dense metasurface for broadband optical vortex by high resolution electron beam lithography |
| Chen, Yifang |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating
The Optimization of T-shape Gate Geometry in GaN HEMTs by Monte Carlo Simulation
The effect of the grating profile on the illumination uniformity of the X-ray condenser
A novel approach for the reduction and inspection of sidewall roughness of patterned resist
Nanofabrication of arch metal structures as gas/biosensors by grayscale electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Chen, Yong |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Chen, Yulong |
Nanoimprint technology for patterning functional ZrO2 ceramic materials |
| Cheng, EY.T. |
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Cheng, Kwang-Ting |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Cheng, Xing |
An Optimized Dual-Axis Electrolytic Tilt Sensor
Nanoimprint technology for patterning functional ZrO2 ceramic materials
A New UV-curable Resist with Liquid Volume-Expanding Monomers
Optical Waveguiding in UV-Curable Nanoimprint |
| Cheng, Y.T. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer |
| Cherqui, Charles |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| Cheung, R. |
Suspended two-dimensional MoS2 transistor |
| Chiang, Chiling |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Chidambaram, N. |
Surface confined equilibration for super-smooth surfaces
High fidelity 3D thermal nanoimprint with UV curable PDMS stamps |
| Cho, E. Y. |
Focused Helium Ion Beam Josephson Junctions and Nanowires |
| Cho, J. H. |
Growth of high quality graphene on sub-300 nm thick copper thin films |
| Cho, K. |
Thermal stresses and cracks in a solution-processed ITO nanoparticle-thin film heater
Electrical characteristics of a-Si:H TFTs under bending stresses |
| Cho, Y.T. |
Etching Characteristics of Fe3O4 Thin Film for Absorptive WGP with 45 nm Line and Space Pattern Fabricated by Nano Imprint Lithography |
| Cho, Young Tae |
Fabrication of large area super hydro-phobic film by R2R nano imprint system |
| Choi, H. K. |
Rule-based patterning of a multi-state system by block copolymer self-assembly |
| Choi, J. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Choi, K.B. |
Single photon direct laser writing using high power laser diode to fabricate diffractive optical elements |
| Chou, S. Y. |
Significant Light Extraction Enhancement of Organic Light-Emitting Diodes Using Embedded High-index Deep-Groove Dielectric Nanomesh Fabricated by Large-area Nanoimprint
20 Years of Nanoimprint
Large-area Freestanding Si Nanowire Arrays in Organic Matrices |
| Chunder, Anindarupa |
Evaluating the Optical and Resist Contributions to Line-Edge Roughness in EUV Lithography Using Stochastic Simulation |
| Chung, C.H. |
Sub-10 nm Electron Beam Lithography by Using Rapid and Cold Development of ZEP-520A |
| Cioldin, F. H. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping |
| Colburn, M |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Colon, A. |
Atomic Layer Deposition of Ternary Dielectrics for Gate Insulation and Passivation of GaN-based Metal-Insulator-Semiconductor Heterojunction Field Effect Transistors |
| Con, Celal |
High aspect ratio and high resolution nanofabrication using self-assembly of salt-polymer nanocomposite film
Enhanced etching resistance of e-beam resist Na-PSS by adding metal compound into resist or developer |
| Coste, Antione |
Measurement error in metal nanostructures on insulating substrates induced by electron beam irradiation |
| Cotta, M. A. |
III-V NanoWires for Junctionless Transistors Fabricated by Focused Ion Beam (FIB) System |
| Cross, Nick |
Focused helium-ion induced direct write engineering of 2D materials |
| Cui, B. |
Electron beam lithography using grafted polystyrene monolayer brush
Down to 7 nm pores in Si by photo-assisted electrochemical etching
Silicon nanostructures with negatively tapered profile by ICP-RIE
High aspect ratio and high resolution nanofabrication using self-assembly of salt-polymer nanocomposite film
Enhanced etching resistance of e-beam resist Na-PSS by adding metal compound into resist or developer
Mixture of ZEP and PMMA with tunable sensitivity as a liftoff layer with controllable undercut
Neutral surface modification by e-beam exposure for PS-b-PMMA self assembly |
| Cui, Dehu |
A significant vaporized degradable film assisting demoulding technics in nanoimprinting lithography |
| Cullinan, M. |
Growth of high quality graphene on sub-300 nm thick copper thin films |
| Cybart, S. A. |
Focused Helium Ion Beam Josephson Junctions and Nanowires |
D |
| Dai, S. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Dallorto, Stefano |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process
Pattern-generation and pattern-transfer for sub-10nm devices |
| Dandley, E. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials |
| Dandley, Erinn C. |
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Danell, R.M. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Dani, J. A. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Das, R. |
Fabrication of High-Coherence Superconducting Qubits |
| Dawson, Noel |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| de Coulomb, C.A |
Block Copolymer Nanolithography |
| De Silva, A. |
Study of Alternate Hardmasks for EUV Patterning |
| Delgado, C. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices |
| den Toonder, J.M.J. |
Brain on Chip
Microfluidic devices: merging technology and biology |
| Deng, Jianan |
The Optimization of T-shape Gate Geometry in GaN HEMTs by Monte Carlo Simulation
Nanofabrication of arch metal structures as gas/biosensors by grayscale electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Deng, Xiao |
Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Deng, Yang |
An Optimized Dual-Axis Electrolytic Tilt Sensor |
| Depoil, D. |
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces |
| Dey, R. K. |
Electron beam lithography using grafted polystyrene monolayer brush
Mixture of ZEP and PMMA with tunable sensitivity as a liftoff layer with controllable undercut |
| Dhuey, S. |
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| DiDona, S.T. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Diez, S. |
The next generation of Maskless Lithography |
| Ding, W. |
Significant Light Extraction Enhancement of Organic Light-Emitting Diodes Using Embedded High-index Deep-Groove Dielectric Nanomesh Fabricated by Large-area Nanoimprint |
| Diniz, J. A. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping
III-V NanoWires for Junctionless Transistors Fabricated by Focused Ion Beam (FIB) System |
| Divan, R. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching
Atomic Layer Deposition of Ternary Dielectrics for Gate Insulation and Passivation of GaN-based Metal-Insulator-Semiconductor Heterojunction Field Effect Transistors
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Do, H.-W. |
Rule-based patterning of a multi-state system by block copolymer self-assembly
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment |
| Doise, J. |
Design Strategy for Layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs) |
| Doktycz, M. |
Replicating Natural Environments: Soil-inspired Microfluidic Architectures |
| dos Santos, M. V. P. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping |
| Dragoi, V. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Dreser, C. |
Tilted lithography and pattern transfer for the fabrication of asymmetric 3D plasmonic nanostructures |
| Drezner, Y. |
Focused ion beam nano-trench shape dependence on target material |
| Drost, Martin |
Focused Electron Beam Induced Processing in ultra-high vacuum: new routes for the fabrication of clean metallic nanostructures and the reduction of proximity effects
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Du, George |
Nanoscale interdigital electrode arrays for smart water sensing |
| Duan, H. |
Sketch and Peel Lithography |
| Durrani, Zahid |
Pattern-generation and pattern-transfer for sub-10nm devices |
| Duscher, Gerd |
Focused helium-ion induced direct write engineering of 2D materials |
| Dustin, M. |
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces |
| Dynes, R. C. |
Focused Helium Ion Beam Josephson Junctions and Nanowires |
E |
| Eder, Sabrina Daniela |
Atom Eyes: „The Neutral helium Microscope NEMI |
| Edgington, R. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Eichfeld, C.M. |
Patterning of non-planar surfaces via electron beam lithography and its challenges |
| Ekinci, Y. |
A comparative study of resists and lithographic tools using Lumped Parameter Model |
| Elliott, C. |
Metal Free Adhesion of Au onto Si Native Oxide
Shape Positional Accuracy Optimization via Writing Order Correction |
| Elnathan, R. |
Silicon nanowire and hole arrays by a combination of self-assembly, laser ablation, and wet chemical etching |
| Emmrich, D. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Emon, Daud Hasan |
Injection of 2D Electron Gas into a Quantum-Dot Organic Light-Emitting Diode Structure on Silicon Substrate |
| Englund, D. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Enyama, M. |
Aberration Calculation of Chicane Type Magnetic Sector using Differential Algebraic Method |
| Esfandiarpour, S. |
Plasmonic Nanostructures using Cell-less Liquid-Phase Electron Beam Induced Deposition |
| Evangelio, Laura |
Integration of scanning probe lithography with directed self-assembly of PS/PMMA based block-copolymers
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Evans-Lutterodt, Kenneth |
Study of Reactive Ion Etching for Kinoform Lenses |
| Evans, R. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Eyhusen, S. |
3D Nano Tomography, TEM Lamella Preparation, and Automated Nanofabrication with ORION NanoFab |
F |
| Fallica, R. |
A comparative study of resists and lithographic tools using Lumped Parameter Model |
| Fan, Zengju |
A New UV-curable Resist with Liquid Volume-Expanding Monomers |
| Farhat, I. A. H. |
Initial Design and Nanofabrication of Energetically Efficient Biologically Motivated Contact |
| Farrell, R |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Felix, N. |
Directed Self-Assembly patterning options for FinFET formation at 7nm node
Study of Alternate Hardmasks for EUV Patterning |
| Felts, Jonathan R. |
Nanolithographic Chemical Patterning on Graphene Using Local Stress and Heat |
| Fernández, Ariadna |
Hierarchical micro/nano structures for enhanced self-cleaning applications |
| Fiala, J. |
Patterning large area plasmonic nanostructures on non-conductive substrates using variable pressure electron beam lithography |
| Fink, Rainer |
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Flagello, D |
Forecasting Optical Lithography - A Fool’s Errand ! |
| Flatabø, Ranveig |
Measurement error in metal nanostructures on insulating substrates induced by electron beam irradiation |
| Fleischer, M. |
Tilted lithography and pattern transfer for the fabrication of asymmetric 3D plasmonic nanostructures |
| Fleming, J. |
Lithography via Aligned Electrospun Fibers |
| Fluerasu, Andrei |
Study of Reactive Ion Etching for Kinoform Lenses |
| Fowlkes, J. D. |
Laser Assisted Focused Ion Beam Processing |
| Fowlkes, Jason D. |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| France, Arkema |
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Francone, Achille |
Hierarchical micro/nano structures for enhanced self-cleaning applications |
| Franke, E |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Frimat, J.P. |
Brain on Chip |
| Fuchs, U. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices
Fiducial Registration and Field Stitching for Multi-Scale Scanning Tunneling Microscope Lithography |
| Fujii, K. |
Fabrication of Patterned Multilayer Structure by using Novel Reversal Imprinting |
| Fukuhara, K. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Fukuyama, R. |
Micropiercing of titanium foil by combination of a roll press method and dry etching |
G |
| Gadelrab, K. |
Fabrication of Multilayer Complex Nanomesh Patterns
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear |
| Galambos, L. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Garbowski, T. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Gardeniers, J.G.E. |
Brain on Chip |
| Garreis, R. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Ge, H. |
Thermal Nanoimprint of Soda-Lime Glass Using Induction Heating and Sapphire Molds
Large-area Fabrication of Chirped Gratings |
| Gehm, M.E. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Gheewala, M. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Ghofrani, Amirali |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Gholizadeh, Azam |
Ultra-Compact Microfluidic Valves Using Magnetorheological Fluid Patterned on an Elastomeric Membrane |
| Gierak, J. |
Laser-Micromachined Carbon Xerogel Ionic Liquid Ion Sources for Focused Ion Beams |
| Gifford, S. M. |
Bio-inspired Silicon Nanospikes Fabricated by Metal-Assisted Chemical Etching for Antibacterial Applications |
| Glass, J.T. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Goetze, B. |
3D Nano Tomography, TEM Lamella Preparation, and Automated Nanofabrication with ORION NanoFab |
| Gölzhäuser, A. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Goodyear, A. |
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Gorman, J. |
Growth of high quality graphene on sub-300 nm thick copper thin films |
| Goto, M. |
Fabrication of an optomechanical resonator with a two-interface surface plasmonic structure for the wavelength detection |
| Gotszola, D. |
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Greenzweig, Y. |
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds
Focused ion beam nano-trench shape dependence on target material |
| Greve, M. M. |
Measurement error in metal nanostructures on insulating substrates induced by electron beam irradiation
Investigating the color change in annealed gold nano particle arrays |
| Gu, C.Z. |
Fabrication of Nanojunction with Sub-10 nm Nanogap for Surface Enhanced Raman Scattering by Tensile Stress Mechanically Breaking
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System
3D Nanostructures fabricated by ion beam technology |
| Guillorn, M |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Gulyiev , Elshad |
Pattern-generation and pattern-transfer for sub-10nm devices |
| Gulyiev, E. |
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Gundel, L. |
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Guo, R. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Guo, Xu |
Thermal Nanoimprint of Soda-Lime Glass Using Induction Heating and Sapphire Molds |
| Guo, Yubing |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Gustavsson, S. |
Fabrication of High-Coherence Superconducting Qubits |
| Guzman, A. |
Probing Breast Cancer Cell Response to Heterogeneous Rigidity at the Nanoscale |
H |
| Hagen, C. W. |
Design of a simple add-on to change a single-beam SEM into a multi-beam SEM
High Throughput Imaging in the Delft Multi Beam SEM |
| Haglund, A. V. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Halder, S. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Halle, S. |
Study of Alternate Hardmasks for EUV Patterning |
| Halsted, Michelle |
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities |
| Ham, D. |
A CMOS based nano-electrode array for high-throughput electrophysiology |
| Hamilton, R. |
Ultra-Small Hysteresis of Submicrometer Shape Memory Alloys Prepared by Biased Target Ion Beam Deposition for Actuation Applications |
| Han, L. L. |
Metal Cation Motion Induced Resistance Switching in Highly Reliable Hafnium Oxide based Memristive Devices |
| Han, Maeum |
Carbon nanotube yarn based thermal sensor for measuring acceleration and tilting |
| Han, S.J. |
Toward high-performance nanoelectronics based on carbon nanotubes |
| Hansen, Ryan R. |
Micro- and Nano-structured, Biofunctional Block Co-Polymer Interfaces for High-Avidity Bacteria Capture
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities |
| Harbor, Ann |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Haroldson, Ross |
High-Performance Nanoimprinted Perovskite Nanograting Photodetector
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Harris, H. Rusty |
Mask registration and array efficiency for nitride FinFET prototyping |
| Haruyama, Yuichi |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy |
| Hastings, J. T. |
Plasmonic Nanostructures using Cell-less Liquid-Phase Electron Beam Induced Deposition
Electron-Beam Induced Deposition of Highly Conductive Copper Nanowires from Bulk Liquids |
| Hatano, M. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Hayashi, T. |
Characteristics of residual layer thickness on liquid transfer imprint lithography and roll press method |
| Hazard, T. M. |
High density overlapping gate architecture for Si/SiGe quantum dots |
| Heilmann, R. K. |
Fabrication Process for 200 nm-Pitch Polished Freestanding Ultra-High Aspect Ratio Gratings |
| Henderson, Clifford L. |
High Resolution Organic Resist Materials for EUV and E-beam Lithography Based on Molecular Glasses: A Comparison of Negative Tone and Positive Tone Approaches to Form Robust Cross-linked Polymer Nanopatterns
Free Energy and Frequency of Defects in Chemoepitaxial Block Copolymer Directed Self-Assembly: Effect of Pattern Density Multiplication Factor, Defect Size, and Defect Position |
| Heo, Jinseok |
Study on the Dose Performance of EUV Lithography Scanner Using Novel In-wafer Dose Measurement |
| Hesselink, L. |
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Hetzer, D |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Hildreth, Owen |
Catalyst motion in Metal-assisted Chemical Etching |
| Hirai, Y. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force
Impact of template stiffness during peeling release in nanoimprint lithography
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM)
Fabrication of Patterned Multilayer Structure by using Novel Reversal Imprinting |
| Hiroshiba, N. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Hobbs, R. G. |
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Holland, Glenn |
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Holm, V. R. A. |
Investigating the color change in annealed gold nano particle arrays |
| Holst, B. |
Measurement error in metal nanostructures on insulating substrates induced by electron beam irradiation
Investigating the color change in annealed gold nano particle arrays |
| Holz, M. |
Pattern-generation and pattern-transfer for sub-10nm devices
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Holzner, Felix |
Progress and future of NanoFrazor lithography |
| Hone, J. |
Micro-fabricated elastomeric pillar arrays for studies of cellular sensing of extracellular matrix rigidity |
| Horn, M. |
Ultra-Small Hysteresis of Submicrometer Shape Memory Alloys Prepared by Biased Target Ion Beam Deposition for Actuation Applications |
| Hou, H. |
Ultra-Small Hysteresis of Submicrometer Shape Memory Alloys Prepared by Biased Target Ion Beam Deposition for Actuation Applications |
| Hover, D. |
Fabrication of High-Coherence Superconducting Qubits |
| Hrnčíř, T. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Hu, H. |
Bio-inspired Silicon Nanospikes Fabricated by Metal-Assisted Chemical Etching for Antibacterial Applications |
| Hu, Walter |
High-Performance Nanoimprinted Perovskite Nanograting Photodetector
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics
Nanoscale interdigital electrode arrays for smart water sensing |
| Huang, Jensheng |
Source Imperfection Impacts on Optical Proximity Correction |
| Huang, Xiaqi |
Nanofabrication of arch metal structures as gas/biosensors by grayscale electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Hudson, E. A. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective |
| Humayun, Md |
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
I |
| Iacopi, A. |
RF Sputtering of ZnO (002) Thin Films on top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices |
| Ikedo, H. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Ilic, B. Robert |
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Im, K. |
Thermal stresses and cracks in a solution-processed ITO nanoparticle-thin film heater |
| Iqbal, A. |
RF Sputtering of ZnO (002) Thin Films on top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices |
| Isakovic, A. F. |
Initial Design and Nanofabrication of Energetically Efficient Biologically Motivated Contact |
| Ishchuk, V. |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Ishibashi, K. |
Artificial Two-dimensional Lattice Structures Assembled by Atom Manipulation Technique |
| Isoyan, Artak |
Source Imperfection Impacts on Optical Proximity Correction |
| Ivanov, T. |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Izuoka, H. |
Nanofluidic Flow-Assisted Assembly (NFAA) of Well-Dispersed Plasmonic Nanostructures into Nanoslit Sensors |
J |
| Jacobsen, C. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Javanmard, M. |
Mulitiplexed Molecular Assays Using Nanoelectronically Barcoded Beads
Ultra-Compact Microfluidic Valves Using Magnetorheological Fluid Patterned on an Elastomeric Membrane
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Jeon, C.-U. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Jeon, J. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy
Double-Gate Organic Micro-Electro-Mechanical Relay for Ultralow-Power Flexible Large-Area Electronics |
| Jeong, Y. H. |
Etching Characteristics of Fe3O4 Thin Film for Absorptive WGP with 45 nm Line and Space Pattern Fabricated by Nano Imprint Lithography |
| Ji, M. |
Large-area Fabrication of Chirped Gratings |
| Jiang, H. |
Metal Cation Motion Induced Resistance Switching in Highly Reliable Hafnium Oxide based Memristive Devices
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Jiang, L. |
MWCNT-PET Films Prepared by Solution Casting for Electronics Applications |
| Jiang, Miao |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Jiao, Y. |
Area-selective atomic layer deposition using e-beam and photosensitive masking layers |
| Jiruše, J. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Jones, Mervyn |
Pattern-generation and pattern-transfer for sub-10nm devices |
| Joseph, Praveen |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| Jugessur, A. S. |
Nanometer dimension control on silicon imprint mold using atomic layer deposition for large-area nanofabrication |
| Jung, D. |
The effect of acid treatments on the conductivity of spin-capable carbon nanotube
Carbon nanotube yarn based thermal sensor for measuring acceleration and tilting |
| Jung, W. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Jung, Y. S. |
Subwavelength Focusing of Light with a Slanted-Nanoaperture-Array Metal Lens |
| Jung, Y.G. |
Fabrication of large area super hydro-phobic film by R2R nano imprint system
Etching Characteristics of Fe3O4 Thin Film for Absorptive WGP with 45 nm Line and Space Pattern Fabricated by Nano Imprint Lithography |
| Junior, Salomão M. S. |
FIB Deposition of Platinum Micropillars in Microchannels for Diffusion Control in Microfluidic devices |
K |
| Kaestner, Marcus |
Pattern-generation and pattern-transfer for sub-10nm devices |
| Kanarik, K. J. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective |
| Kanjanachuchai, Songphol |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Karbasian, G. |
Charged defects mitigation in metal single-electron transistors with tunnel barriers prepared by atomic layer deposition |
| Kästner, M. |
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Kaufman, L. |
Probing Breast Cancer Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Kawata, H. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force
Impact of template stiffness during peeling release in nanoimprint lithography
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM)
Fabrication of Patterned Multilayer Structure by using Novel Reversal Imprinting |
| Kawatsuki, Nobuhiro |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy |
| Keating, A. E. |
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment |
| Kehagias, Nikolaos |
Hierarchical micro/nano structures for enhanced self-cleaning applications |
| Kern, D. P. |
Tilted lithography and pattern transfer for the fabrication of asymmetric 3D plasmonic nanostructures |
| Kessels, W.M.M. |
Area-selective atomic layer deposition using e-beam and photosensitive masking layers |
| Ketelaars, W.S.M.M. |
Patterning of non-planar surfaces via electron beam lithography and its challenges |
| Khan, A. |
Stretchable Metal-mesh Transparent Electrodes Fabricated through a Solution-processed Approach |
| Khan, N. Z. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy |
| Khan, Sahar |
Patterned Fabrication of ZnO Nanowire Arrays for Nanoplasmonic Waveguide Applications |
| Kibelka, G. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Kihara, N. |
Hexagonal Dot Pattern Fabrication by Self-assembled Colloidal Silica Grafted with a Concentrated Polymer Brush |
| Kikuta, Hisao |
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM) |
| Kim, C-S. |
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Kim, D. K. |
Fabrication of High-Coherence Superconducting Qubits |
| Kim, G. |
Metal Free Adhesion of Au onto Si Native Oxide
Shape Positional Accuracy Optimization via Writing Order Correction |
| Kim, G.H. |
Single photon direct laser writing using high power laser diode to fabricate diffractive optical elements |
| Kim, H. K. |
Subwavelength Focusing of Light with a Slanted-Nanoaperture-Array Metal Lens
Injection of 2D Electron Gas into a Quantum-Dot Organic Light-Emitting Diode Structure on Silicon Substrate
Atomic Emission Spectroscopy of Electrically-Triggered Exploding Nanoparticle Analytes on Graphene/SiO2/Si Substrate |
| Kim, H. |
The effect of acid treatments on the conductivity of spin-capable carbon nanotube
DNA Nanostructures Mediated Molecular Imprinting Lithography |
| Kim, Insung |
Study on the Dose Performance of EUV Lithography Scanner Using Novel In-wafer Dose Measurement |
| Kim, J.-S. |
Electron Spin Resonance Characterization of Damage and Recovery of Si/SiO2 Interfaces from Electron Beam Lithography |
| Kim, J.H. |
Etching Characteristics of Fe3O4 Thin Film for Absorptive WGP with 45 nm Line and Space Pattern Fabricated by Nano Imprint Lithography |
| Kim, Ji Hoon |
Fabrication of large area super hydro-phobic film by R2R nano imprint system |
| Kim, M. |
Injection of 2D Electron Gas into a Quantum-Dot Organic Light-Emitting Diode Structure on Silicon Substrate
Subwavelength Focusing of Light with a Slanted-Nanoaperture-Array Metal Lens
Atomic Emission Spectroscopy of Electrically-Triggered Exploding Nanoparticle Analytes on Graphene/SiO2/Si Substrate |
| Kim, S. Y. |
Block Copolymer Nanolithography |
| Kim, S. |
Thermal stresses and cracks in a solution-processed ITO nanoparticle-thin film heater
Electrical characteristics of a-Si:H TFTs under bending stresses |
| Kim, Sungsue |
Study on the Dose Performance of EUV Lithography Scanner Using Novel In-wafer Dose Measurement |
| Kim, Y.J. |
Etching Characteristics of Fe3O4 Thin Film for Absorptive WGP with 45 nm Line and Space Pattern Fabricated by Nano Imprint Lithography |
| King, W. |
Polymer Molecular Weight Governs Feature Size During Tip-Based Fabrication of Polymer Nanostructures |
| Kiravittaya, Suwit |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Kirchner, R. |
High resolution, hybrid 3D topography fabrication using grayscale electron beam lithography
Surface confined equilibration for super-smooth surfaces
High fidelity 3D thermal nanoimprint with UV curable PDMS stamps |
| Knoll, Armin |
Integration of scanning probe lithography with directed self-assembly of PS/PMMA based block-copolymers |
| Knuffman, B. |
Low Temperature Ion Source for Focused Ion Beam Nanomachining Applications |
| Ko, A |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Kocsis, M. |
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Koehler, Michael |
Focused helium-ion induced direct write engineering of 2D materials |
| Koemtani, R. |
Fabrication of an optomechanical resonator with a two-interface surface plasmonic structure for the wavelength detection |
| Kofron, Nathan |
Nanometer dimension control on silicon imprint mold using atomic layer deposition for large-area nanofabrication |
| Kolarik, V. |
Design and Testing of a Novel Electron Monochromator for High Resolution Imaging and Spectroscopy |
| Kometani, R. |
In-Plane Optical Power Flow Control with Nano-Fabricated Plasmonic Structures for Micro Total Analysis Systems |
| Komukai, T. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Kono, T. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Kooistra-Manning, E.A. |
Lithography via Aligned Electrospun Fibers |
| Korivi, N. |
MWCNT-PET Films Prepared by Solution Casting for Electronics Applications |
| Koshelev, A. |
Near field campanile probe fabricated by nanoimprint lithography
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Kotakoski, J. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Koutsos, V. |
Fabrication and characterization of zinc oxide nanowires-based flexible biosensors
Suspended two-dimensional MoS2 transistor |
| Kraus, T. |
Silicon nanowire and hole arrays by a combination of self-assembly, laser ablation, and wet chemical etching |
| Kristiansen, M. |
Surface confined equilibration for super-smooth surfaces |
| Krivoshapkina, Y. |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Kruit, P. |
Multi-electron-beam technology with applications in microscopy, inspection and lithography
Design of a simple add-on to change a single-beam SEM into a multi-beam SEM
High Throughput Imaging in the Delft Multi Beam SEM
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Kuan, C. H. |
Sub-10 nm Electron Beam Lithography by Using Rapid and Cold Development of ZEP-520A |
| Kurabayashi, K. |
Fabrication of Ambipolar Nanoelectronic/Microfluidic-Integrated Biosensors for Cycle-Wise Real-time Biomolecule Quantification |
| Kusko, R. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Kwon, S.G. |
Single photon direct laser writing using high power laser diode to fabricate diffractive optical elements |
| Kwon, Sin |
Fabrication of large area super hydro-phobic film by R2R nano imprint system |
L |
| Lai, K |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Lamson, Thomas |
Patterned Fabrication of ZnO Nanowire Arrays for Nanoplasmonic Waveguide Applications |
| Lastras-Montaño, Miguel Angel |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Latypov, Azat |
Evaluating the Optical and Resist Contributions to Line-Edge Roughness in EUV Lithography Using Stochastic Simulation |
| Laufer, P. |
Ion Beam Injector based on High Current LMIS |
| Lavrentovich, Oleg D. |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Lee, Gil S. |
Carbon nanotube yarn based thermal sensor for measuring acceleration and tilting |
| Lee, J.J. |
Single photon direct laser writing using high power laser diode to fabricate diffractive optical elements |
| Lee, Kim Y |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Lee, Ly James |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Lee, S.-Y. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Lee, T. Randall |
Fabrication of Hollow-Core Nanoparticles for Drug Delivery and Imaging |
| Lenk, C. |
Pattern-generation and pattern-transfer for sub-10nm devices
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Lenk, S. |
Pattern-generation and pattern-transfer for sub-10nm devices
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Leonhardt, A. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping |
| Leray, P. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Letterer, Scott T. |
Micro- and Nano-structured, Biofunctional Block Co-Polymer Interfaces for High-Avidity Bacteria Capture |
| Levinson, Harry J. |
Evaluating the Optical and Resist Contributions to Line-Edge Roughness in EUV Lithography Using Stochastic Simulation |
| Lezec, H. J. |
Focused ion beam milling of optical films with complex surfaces at the subnanometer scale |
| Li, D. |
Repetitive Nanoprinting Technique for Producing Vertically Stacked Transition Metal Dichalcogenide Heterostructure Arrays and Photo-Response Devices
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images
Low-Workfunction Metal Doping for Making WSe2 Photovoltaic Devices |
| Li, Dandan |
Nanoimprint technology for patterning functional ZrO2 ceramic materials |
| Li, Guoliang |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| Li, J.J. |
Fabrication of Nanojunction with Sub-10 nm Nanogap for Surface Enhanced Raman Scattering by Tensile Stress Mechanically Breaking
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System |
| Li, John |
Nanoscale interdigital electrode arrays for smart water sensing |
| Li, Junjie |
3D Nanostructures fabricated by ion beam technology |
| Li, K. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Li, Kai |
Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Li, S. |
Refractive Index and Temperature Sensing Using a Plasmonic Optical Fiber Probe Fabricated by Double-Transfer Nanoimprint Lithography |
| Li, W. |
Stretchable Metal-mesh Transparent Electrodes Fabricated through a Solution-processed Approach
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction
Refractive Index and Temperature Sensing Using a Plasmonic Optical Fiber Probe Fabricated by Double-Transfer Nanoimprint Lithography
Large-area Fabrication of Chirped Gratings |
| Li, W.P. |
Design and Numerical Analysis of a Coherent Electron Resonator for the Quantum Electron Microscope |
| Li, WD. |
Lab-on-a-fiber Sensors with Nanoimprinted Nanostructures on Fiber Sidewall |
| Li, Weihao |
Optical Waveguiding in UV-Curable Nanoimprint |
| Li, Wen-Di |
Thermal Nanoimprint of Soda-Lime Glass Using Induction Heating and Sapphire Molds |
| Li, Winfred |
Nanoscale interdigital electrode arrays for smart water sensing |
| Li, Wuxia |
3D Nanostructures fabricated by ion beam technology |
| Li, Xin |
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating
The effect of the grating profile on the illumination uniformity of the X-ray condenser |
| Li, Y. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Full color reflective display based on high contrast gratings |
| Li, Yuanrui |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Li, Z. |
Sketch and Peel Lithography |
| Liang, X. |
Fabrication of Ambipolar Nanoelectronic/Microfluidic-Integrated Biosensors for Cycle-Wise Real-time Biomolecule Quantification
A New Opportunity to Fabricate Multi-Bit Transistor Memories Using Mechanically Exfoliated Multilayer WSe2 Flakes
Repetitive Nanoprinting Technique for Producing Vertically Stacked Transition Metal Dichalcogenide Heterostructure Arrays and Photo-Response Devices
Low-Workfunction Metal Doping for Making WSe2 Photovoltaic Devices
Nanofluidic Flow-Assisted Assembly (NFAA) of Well-Dispersed Plasmonic Nanostructures into Nanoslit Sensors |
| Liang, Yuchen |
Nanoscale interdigital electrode arrays for smart water sensing |
| Liao, J. |
Probing Breast Cancer Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Liao,, K.-T. |
Focused ion beam milling of optical films with complex surfaces at the subnanometer scale |
| Liddle, J. Alexander |
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Lie, F |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Lill, T. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective |
| Lilly, M. P. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Lim, H.J. |
Single photon direct laser writing using high power laser diode to fabricate diffractive optical elements |
| Lim, Y. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Lima, L. P. B. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping |
| Lin, A.-L. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy |
| Lin, D.F. |
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System |
| Lin, Peng |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Lin, S. |
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Lin, Z. |
Mulitiplexed Molecular Assays Using Nanoelectronically Barcoded Beads
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Litvinov, D. |
Application of Gettering Layers for Low Temperature Conversion of Magnetic Oxides into Ferromagnetic Metals in Thin Films, Multilayers, and Nanostructured Arrays, W. Qiu |
| Liu, C |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Liu, H. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Full color reflective display based on high contrast gratings
DNA Nanostructures Mediated Molecular Imprinting Lithography |
| Liu, He |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Liu, J. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy |
| Liu, Jianpeng |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating
The effect of the grating profile on the illumination uniformity of the X-ray condenser |
| Liu, M. |
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Liu, S. |
Micro-fabricated elastomeric pillar arrays for studies of cellular sensing of extracellular matrix rigidity
Atomic Emission Spectroscopy of Electrically-Triggered Exploding Nanoparticle Analytes on Graphene/SiO2/Si Substrate |
| Livengood, R. |
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds |
| Llobet, J. |
Role and characterization of the built-in stress in double clamped beam silicon nanowires |
| Lokitz, Brad S. |
Micro- and Nano-structured, Biofunctional Block Co-Polymer Interfaces for High-Avidity Bacteria Capture |
| Loncar, M. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Lopez, G. |
Metal Free Adhesion of Au onto Si Native Oxide
Shape Positional Accuracy Optimization via Writing Order Correction |
| Lorenzoni, M. |
Integration of scanning probe lithography with directed self-assembly of PS/PMMA based block-copolymers
Role and characterization of the built-in stress in double clamped beam silicon nanowires
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Lovell, J. |
End-form changes in high brightness HfC electron sources |
| Lozano, P.C. |
Laser-Micromachined Carbon Xerogel Ionic Liquid Ion Sources for Focused Ion Beams |
| Lu, B.-R. |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
Dense metasurface with high efficiency dense metasurface for broadband optical vortex by high resolution electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Lu, Ming |
Study of Reactive Ion Etching for Kinoform Lenses |
| Lu, W. |
A New Opportunity to Fabricate Multi-Bit Transistor Memories Using Mechanically Exfoliated Multilayer WSe2 Flakes |
| Lu, Wu |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Ludovice, Peter J. |
Free Energy and Frequency of Defects in Chemoepitaxial Block Copolymer Directed Self-Assembly: Effect of Pattern Density Multiplication Factor, Defect Size, and Defect Position |
| Luhman, D. R. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Lukin, M. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Lum, P. |
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Luo, Y. |
The Impact of Parallelism on Data Volumes for a Multibeam Mask Writer |
| Luo, Z. |
Fabrication of Magnetically Tunable Periodic Nanostructures |
| Luttge, R. |
Brain on Chip
Microfluidic-Integrated Capillary Electrophoresis for Metabolite Detection in a Miniaturized Bioreactor |
| Lyon, S.A. |
Electron Spin Resonance Characterization of Damage and Recovery of Si/SiO2 Interfaces from Electron Beam Lithography |
| Lyu, Yiman |
Nanometer dimension control on silicon imprint mold using atomic layer deposition for large-area nanofabrication |
M |
| Ma, Lijun |
Effects of Contact States on Polymer Pattern Deformation during Demolding Process in Nanoimprint Lithography |
| Mack, Chris A. |
Biases in the use of height-to-height correlation to characterize roughness |
| Mackie, W. |
End-form changes in high brightness HfC electron sources |
| Maeda, E. |
In-Plane Optical Power Flow Control with Nano-Fabricated Plasmonic Structures for Micro Total Analysis Systems |
| Magera, G. |
End-form changes in high brightness HfC electron sources |
| Mahady, K. |
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds |
| Malamud, Z. |
Focused ion beam nano-trench shape dependence on target material |
| Mandrus, D. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation
Focused helium-ion induced direct write engineering of 2D materials |
| Manera, L. T. |
Ga+ Focused Ion Beam Lithography as a Viable Alternative for Multiple Fin FinFET Prototyping |
| Manfrinato, V. |
Sub-5 nm electron-beam lithography and metrology of poly (methyl methacrylate) using an aberration-corrected scanning transmission electron microscope
Aberration-Corrected Electron-Beam Lithography |
| Mankos, M. |
Design and Testing of a Novel Electron Monochromator for High Resolution Imaging and Spectroscopy
High-Resolution Compact FESEM with a Magnetic Immersion Objective Lens |
| Mao, Bingrui Lu Chengwen |
The effect of the grating profile on the illumination uniformity of the X-ray condenser |
| Mao, Huachao |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Marbach, Hubertus |
Focused Electron Beam Induced Processing in ultra-high vacuum: new routes for the fabrication of clean metallic nanostructures and the reduction of proximity effects
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Marchioro, Alessandro |
Imaging the Dust of Elementary Particles, Sensors and Detectors for the nano-nano-world |
| Masiello, David J. |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
| Masigoul, Mohammadali |
Micro- and Nano-structured, Biofunctional Block Co-Polymer Interfaces for High-Avidity Bacteria Capture |
| Mastropaolo, Enrico |
Fabrication and characterization of zinc oxide nanowires-based flexible biosensors |
| Matruglio, A. |
Contamination-free suspended graphene structures by a Ti-based transfer method |
| Matsui, Shinji |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy
Thin PDMS antisticking layer formed by using PDMS-disilanol for nanoimprinting |
| Mayer, A. |
Flat and highly flexible composite stamps for nanoimprint, their preparation and limits
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| McCay, R. |
Shape Positional Accuracy Optimization via Writing Order Correction |
| McClelland, J. J. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry
Low Temperature Ion Source for Focused Ion Beam Nanomachining Applications |
| McGehee, W. R. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Melli, M. |
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Melville, A. |
Fabrication of High-Coherence Superconducting Qubits |
| Melvin, Lawrence S., III |
Source Imperfection Impacts on Optical Proximity Correction |
| Menachem, Liran |
Soft-Substrate-Rigid-Feature (SSRF) Nanoimprint Lithography |
| Meng, Q.B. |
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System |
| Metzler, M. |
Metal Free Adhesion of Au onto Si Native Oxide
Shape Positional Accuracy Optimization via Writing Order Correction |
| Meyer, P. |
Bio-inspired Silicon Nanospikes Fabricated by Metal-Assisted Chemical Etching for Antibacterial Applications |
| Mi, X. |
High density overlapping gate architecture for Si/SiGe quantum dots |
| Michels, Thomas |
Optomechanical transducer for investigation of frequency fluctuations |
| Millet, L. |
Feature Based Design Software for 3D Printed Microfluidics |
| Mills, E. |
Large-area Freestanding Si Nanowire Arrays in Organic Matrices |
| Min, Haodi |
A New UV-curable Resist with Liquid Volume-Expanding Monomers |
| Min, J.-H. |
Fabrication of Metallic Microstructured Nano-Accordions for Transparent Electrodes |
| Minor, A. |
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Mitra, S. |
From Nanodevices to Nanosystems: The Carbon Nanotube Case Study |
| Mitsuyasu, M. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Moghaddam, M. |
Microwave Characterization of Nanocomposite based on Lithographically Defined Nanoparticles |
| Mohd-Yasin, F. |
RF Sputtering of ZnO (002) Thin Films on top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices |
| Moshkalev, Stanislav |
FIB Deposition of Platinum Micropillars in Microchannels for Diffusion Control in Microfluidic devices |
| Motwani, P. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Muller, J. |
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces |
| Mundy |
Fabrication of Metallic Microstructured Nano-Accordions for Transparent Electrodes |
| Munechika, K. |
Near field campanile probe fabricated by nanoimprint lithography
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Muray, L. P. |
High-Resolution Compact FESEM with a Magnetic Immersion Objective Lens
Ultra-Low-Voltage Imaging Using a Miniature Electron Beam Column |
| Murphy, J.P. |
Lithography via Aligned Electrospun Fibers
Melt Electrospinning: Method for Producing Photo-converting Nanocomposite Materials |
| Murthy, S. |
Systematic study of high throughput fabrication of nano holes and nano pillars in polymer foils by roll-to-roll-extrusion coating. |
| Mustafa, D.A.M. |
Brain on Chip |
| Myint, Ba |
Nanoscale Patterning using Oblique Angled Deposition Technique in Fabricating Nanostructures with Nanosphere Lithography |
N |
| Nadzeyka, A. |
Nanopores in Silicon Nitride Membranes, Graphene and CNM: Milling and Imaging Techniques at the Helium Ion Microscope |
| Nagai, Hironori |
Three-Dimensional Colloidal Interference Lithography |
| Nagase, K. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Nagato, K. |
Replication of Nanostructures on Polyethylene Terephthalate with Laser-Assisted Roller Nanoimprinting |
| Nakagawa, M. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Nakagawa, W. |
Lithography via Aligned Electrospun Fibers |
| Nakamura, Naoto |
Impact of template stiffness during peeling release in nanoimprint lithography |
| Nakamura, T. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Nakao, M. |
Replication of Nanostructures on Polyethylene Terephthalate with Laser-Assisted Roller Nanoimprinting |
| Nakasugi, T. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Nam, H. |
Fabrication of Ambipolar Nanoelectronic/Microfluidic-Integrated Biosensors for Cycle-Wise Real-time Biomolecule Quantification
Nanofluidic Flow-Assisted Assembly (NFAA) of Well-Dispersed Plasmonic Nanostructures into Nanoslit Sensors |
| Namboodiri, Pradeep |
Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Nanda, G. |
Study of Ion-Induced Defect Migration in Boron-Nitride Encapsulated Graphene |
| Nantoh, Masashi |
Artificial Two-dimensional Lattice Structures Assembled by Atom Manipulation Technique |
| Narcross, Hannah |
High Resolution Organic Resist Materials for EUV and E-beam Lithography Based on Molecular Glasses: A Comparison of Negative Tone and Positive Tone Approaches to Form Robust Cross-linked Polymer Nanopatterns |
| Nation, Benjamin D. |
Free Energy and Frequency of Defects in Chemoepitaxial Block Copolymer Directed Self-Assembly: Effect of Pattern Density Multiplication Factor, Defect Size, and Defect Position |
| Navarro, Christophe |
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Neuhaus, S. |
Surface confined equilibration for super-smooth surfaces |
| Neumann, J. T. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Ng, Ray J. H. |
Design and Fabrication of Plasmonic Notch Color Filters |
| Ng, Vivian |
Nanoscale Patterning using Oblique Angled Deposition Technique in Fabricating Nanostructures with Nanosphere Lithography |
| Nicaise, S. M. |
Fabrication of Multilayer Complex Nanomesh Patterns
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear |
| Nicolaysen, S. |
Lithography via Aligned Electrospun Fibers |
| Nicolet, Célia |
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Nien, C. |
Sub-10 nm Electron Beam Lithography by Using Rapid and Cold Development of ZEP-520A |
| Nikolov, Nikolay |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes |
| Noh, J. H. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Nujhat, N. |
MWCNT-PET Films Prepared by Solution Casting for Electronics Applications |
O |
| Obata, H. T. |
III-V NanoWires for Junctionless Transistors Fabricated by Focused Ion Beam (FIB) System |
| Oboňa, J. V. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Ocola, L. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Oh, B. |
Fabrication of Ambipolar Nanoelectronic/Microfluidic-Integrated Biosensors for Cycle-Wise Real-time Biomolecule Quantification |
| Oh, H. |
Electrical characteristics of a-Si:H TFTs under bending stresses |
| Oh, Nicholas Z. W. |
Design and Fabrication of Plasmonic Notch Color Filters |
| Ohno, K. |
Hexagonal Dot Pattern Fabrication by Self-assembled Colloidal Silica Grafted with a Concentrated Polymer Brush |
| Okada, Makoto |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy
Thin PDMS antisticking layer formed by using PDMS-disilanol for nanoimprinting |
| Okuno, M. |
In-Plane Optical Power Flow Control with Nano-Fabricated Plasmonic Structures for Micro Total Analysis Systems |
| Oldham, C. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation
Fabrication of Metallic Microstructured Nano-Accordions for Transparent Electrodes |
| Oleshko, V. P. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Oliver, W. D. |
Fabrication of High-Coherence Superconducting Qubits |
| Olynick, D. |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process
Pattern-generation and pattern-transfer for sub-10nm devices
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Ono, Hiroshi |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy |
| Onuma, A. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Orlov, A. O. |
Charged defects mitigation in metal single-electron transistors with tunnel barriers prepared by atomic layer deposition |
| Ovchinnikova, O. S. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Owen, J.H.G. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices
Fiducial Registration and Field Stitching for Multi-Scale Scanning Tunneling Microscope Lithography
|
P |
| Pacheco, J. L. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Pan, Y. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy
Double-Gate Organic Micro-Electro-Mechanical Relay for Ultralow-Power Flexible Large-Area Electronics |
| Panyakeow, Somsak |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Papenheim, M. |
Flat and highly flexible composite stamps for nanoimprint, their preparation and limits
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| Paprotny, I. |
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Park, C. |
Fabrication of Hollow-Core Nanoparticles for Drug Delivery and Imaging |
| Park, S.-H. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Park, W. M. |
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment |
| Park, H. |
A CMOS based nano-electrode array for high-throughput electrophysiology |
| Parker, C.B. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Parsons, G. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation
Fabrication of Metallic Microstructured Nano-Accordions for Transparent Electrodes |
| Payvand, Melika |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Pedersen, H. |
Systematic study of high throughput fabrication of nano holes and nano pillars in polymer foils by roll-to-roll-extrusion coating. |
| Peng, Chenhui |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Perez-Martinez, C. |
Laser-Micromachined Carbon Xerogel Ionic Liquid Ion Sources for Focused Ion Beams |
| Perez-Murano, F. |
Integration of scanning probe lithography with directed self-assembly of PS/PMMA based block-copolymers
Role and characterization of the built-in stress in double clamped beam silicon nanowires
Assessing the local nanomechanical properties of self-assembled block co-polymers thin films by Peak Force tapping |
| Peroz, C. |
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Petta, J. R. |
High density overlapping gate architecture for Si/SiGe quantum dots |
| Piazzeta, Maria H. O. |
FIB Deposition of Platinum Micropillars in Microchannels for Diffusion Control in Microfluidic devices |
| Pilz, W. |
Ion Beam Injector based on High Current LMIS |
| Pina-Hernandez, C. |
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications |
| Poempool, Thanavorn |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Poteet, A. |
Fabrication of Magnetically Tunable Periodic Nanostructures |
| Pranov, H. |
Systematic study of high throughput fabrication of nano holes and nano pillars in polymer foils by roll-to-roll-extrusion coating. |
| Principe, E. L. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Mask registration and array efficiency for nitride FinFET prototyping
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Pudasaini, P. R. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation
Focused helium-ion induced direct write engineering of 2D materials |
| Purushothaman, G. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
Q |
| Qi, J. |
Significant Light Extraction Enhancement of Organic Light-Emitting Diodes Using Embedded High-index Deep-Groove Dielectric Nanomesh Fabricated by Large-area Nanoimprint |
| Quan, B.G. |
Fabrication of Nanojunction with Sub-10 nm Nanogap for Surface Enhanced Raman Scattering by Tensile Stress Mechanically Breaking
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System |
| Quetz, Abdiel |
Study of Reactive Ion Etching for Kinoform Lenses |
R |
| R.Taboryski |
Systematic study of high throughput fabrication of nano holes and nano pillars in polymer foils by roll-to-roll-extrusion coating. |
| Rack, P. D. |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation
Laser Assisted Focused Ion Beam Processing
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds
Focused helium-ion induced direct write engineering of 2D materials |
| Racz, L. |
Fabrication of High-Coherence Superconducting Qubits |
| Raghuraman, Shivaranjan |
Nanolithographic Chemical Patterning on Graphene Using Local Stress and Heat |
| Randall, J. N. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices
Fiducial Registration and Field Stitching for Multi-Scale Scanning Tunneling Microscope Lithography |
| Rangelow, I. |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process
Pattern-generation and pattern-transfer for sub-10nm devices
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Rangnekar, S. |
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Ratanathammaphan, Somchai |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Raveh, A. |
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds
Focused ion beam nano-trench shape dependence on target material |
| Rawlings , Colin |
Integration of scanning probe lithography with directed self-assembly of PS/PMMA based block-copolymers |
| Ray, Christopher H. |
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Ray, V. |
Reconstructing Focused Ion Beam Profile by Iterative Simulation Methodology |
| Ren, Y. |
High Throughput Imaging in the Delft Multi Beam SEM |
| Ren, Yixin |
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Retterer, S. |
Replicating Natural Environments: Soil-inspired Microfluidic Architectures
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities
Feature Based Design Software for 3D Printed Microfluidics |
| Reum, A. |
Pattern-generation and pattern-transfer for sub-10nm devices
High Speed AFM Imaging and Nanolithography with Parallel Scanning Probes
Six - axes AFM in SEM with self-sensing and self-transduced cantilever for high speed analysis and nano-lithography |
| Rokni, H. |
A New Opportunity to Fabricate Multi-Bit Transistor Memories Using Mechanically Exfoliated Multilayer WSe2 Flakes |
| Rondinone, Adam J. |
Focused helium-ion induced direct write engineering of 2D materials |
| Rosenberg, D. |
Fabrication of High-Coherence Superconducting Qubits |
| Rosenmann, D. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Ross, C. A. |
Fabrication of Multilayer Complex Nanomesh Patterns
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear
Rule-based patterning of a multi-state system by block copolymer self-assembly |
| Ruchhoeft, P. |
PMMA Stencil Masks for Atom Beam Lithography
Fabrication of Hollow-Core Nanoparticles for Drug Delivery and Imaging |
| Runkel, M. |
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| Russell, Z.E. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures
Development of a Nanocrystalline Diamond (NCD) Membrane for Vacuum Pressure Separation and Patterned Electron Beam Image Transfer
Development of Patterned Electron Beam Image Transfer though a Nanocrystalline Diamond Thin Film Membrane/Window |
| Ryckaert, J. |
Design Strategy for Layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs) |
| Ryu, B. |
Repetitive Nanoprinting Technique for Producing Vertically Stacked Transition Metal Dichalcogenide Heterostructure Arrays and Photo-Response Devices |
S |
| Saarbrücken |
Silicon nanowire and hole arrays by a combination of self-assembly, laser ablation, and wet chemical etching |
| Saffih, Faycal |
Silicon nanostructures with negatively tapered profile by ICP-RIE |
| Sainato, M. |
Printed Active Photonic Crystals in High Refractive Index Functional Materials for Visible Light Applications |
| Sanders, D |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Sasago, Masaru |
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM) |
| Sasi, V. |
RF Sputtering of ZnO (002) Thin Films on top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices |
| Sassolini, Simone |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Saulnier, Nicole |
EUV Lithography for Advanced Nodes |
| Savari, S. A. |
The Impact of Parallelism on Data Volumes for a Multibeam Mask Writer |
| Sawabe, T. |
Hexagonal Dot Pattern Fabrication by Self-assembled Colloidal Silica Grafted with a Concentrated Polymer Brush |
| Sawada, Y. |
Fabrication of Patterned Multilayer Structure by using Novel Reversal Imprinting |
| Schaefer, J. L. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Schattenburg, M. L. |
History of the Three Beams Meeting
Fabrication Process for 200 nm-Pitch Polished Freestanding Ultra-High Aspect Ratio Gratings |
| Scheer, H.-C. |
Flat and highly flexible composite stamps for nanoimprint, their preparation and limits
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| Schift, H. |
High resolution, hybrid 3D topography fabrication using grayscale electron beam lithography
Surface confined equilibration for super-smooth surfaces
High fidelity 3D thermal nanoimprint with UV curable PDMS stamps |
| Schmid, R.M. |
Patterning of non-planar surfaces via electron beam lithography and its challenges |
| Schmucker, S.W. |
Fiducial Registration and Field Stitching for Multi-Scale Scanning Tunneling Microscope Lithography |
| Schroder, T. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Schuck, J. |
Near field campanile probe fabricated by nanoimprint lithography
Sub-10-nm Three-Dimensional Plasmonic Probes fabricated using a Helium Ion Microscope |
| Schuck, P.J. |
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Schumacher, J. |
Focused ion beam milling of optical films with complex surfaces at the subnanometer scale |
| Schurink, B. |
Brain on Chip |
| Schvartzman, Mark |
Soft-Substrate-Rigid-Feature (SSRF) Nanoimprint Lithography |
| Schwartzberg, Adam |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Schwarzkopf, A. |
Low Temperature Ion Source for Focused Ion Beam Nanomachining Applications |
| Scotuzzi, M. |
Design of a simple add-on to change a single-beam SEM into a multi-beam SEM |
| Sears, A. P. |
Fabrication of High-Coherence Superconducting Qubits |
| Seshadri, I. |
Study of Alternate Hardmasks for EUV Patterning |
| Shadman, K. |
Design and Testing of a Novel Electron Monochromator for High Resolution Imaging and Spectroscopy |
| Shahrin, Rahnuma |
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Shakarisaz, D. |
PMMA Stencil Masks for Atom Beam Lithography
Fabrication of Hollow-Core Nanoparticles for Drug Delivery and Imaging |
| Shankles*, P. |
Feature Based Design Software for 3D Printed Microfluidics |
| Shao, Jinhai |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating
The Optimization of T-shape Gate Geometry in GaN HEMTs by Monte Carlo Simulation
The effect of the grating profile on the illumination uniformity of the X-ray condenser
A novel approach for the reduction and inspection of sidewall roughness of patterned resist
Nanofabrication of arch metal structures as gas/biosensors by grayscale electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Sharang, S. |
Ultra-fast nano-fabrication using Xe-plasma FIB-SEM and its Cu milling applications using the Rocking-stage
Ultrafast nanofabrication with Xe plasma FIB-SEM and its planar milling applications with novel Rocking stage Technology |
| Sharbati, Mohammad T. |
Injection of 2D Electron Gas into a Quantum-Dot Organic Light-Emitting Diode Structure on Silicon Substrate |
| Sharma, A. |
Area-selective atomic layer deposition using e-beam and photosensitive masking layers |
| Sharma, Renu |
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Sharp, Brandon |
High Resolution Organic Resist Materials for EUV and E-beam Lithography Based on Molecular Glasses: A Comparison of Negative Tone and Positive Tone Approaches to Form Robust Cross-linked Polymer Nanopatterns |
| Sheetz, M. P. |
Micro-fabricated elastomeric pillar arrays for studies of cellular sensing of extracellular matrix rigidity
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces |
| Shen, M. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective |
| Shen, W. |
Large-area Fabrication of Chirped Gratings |
| Shepherd, N. |
A New Opportunity to Fabricate Multi-Bit Transistor Memories Using Mechanically Exfoliated Multilayer WSe2 Flakes |
| Shi, B. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Shi, J. |
Atomic Layer Deposition of Ternary Dielectrics for Gate Insulation and Passivation of GaN-based Metal-Insulator-Semiconductor Heterojunction Field Effect Transistors |
| Shi, Y. |
Subwavelength Focusing of Light with a Slanted-Nanoaperture-Array Metal Lens |
| Shih, W.-C. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Shimomukai, K. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force |
| Shin, I-K. |
Analytic Estimation of LER for Large-Scale Uniform Patterns in Electron-beam Lithography
Noise Filtering for Accurate Measurement of Line Edge Roughness and Critical Dimension from SEM Images |
| Shirai, M. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force |
| Shirasaki, Y. |
Aberration Calculation of Chicane Type Magnetic Sector using Differential Algebraic Method |
| Shokouhi, Babak |
Neutral surface modification by e-beam exposure for PS-b-PMMA self assembly |
| Shulaker, M. M. |
From Nanodevices to Nanosystems: The Carbon Nanotube Case Study |
| Shuo, Chen |
Ultra high aspect ratio X-ray photon sieves by deep reactive ion etch on silicon and electroplating |
| Sieg, S |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Silver, Richard |
Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Singh, M. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Singhal, Shrawan |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| Sipahigil, A. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Skinner, J.L. |
Lithography via Aligned Electrospun Fibers
Melt Electrospinning: Method for Producing Photo-converting Nanocomposite Materials |
| Sleeboom, J.J.F. |
Brain on Chip |
| Snider, G. L. |
Charged defects mitigation in metal single-electron transistors with tunnel barriers prepared by atomic layer deposition |
| Soles, C. L. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Solomon, P. A. |
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Somervell, M |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Song, B. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Song, Fengquan |
Nanoscale interdigital electrode arrays for smart water sensing |
| Sopitpan, Suwat |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Spallas, J. P. |
High-Resolution Compact FESEM with a Magnetic Immersion Objective Lens
Ultra-Low-Voltage Imaging Using a Miniature Electron Beam Column |
| Späth, Andreas |
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Sreenivasan, S.V. |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| Staaks, Daniel |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures
Pattern-generation and pattern-transfer for sub-10nm devices |
| Stach, E. |
Sub-5 nm electron-beam lithography and metrology of poly (methyl methacrylate) using an aberration-corrected scanning transmission electron microscope
Aberration-Corrected Electron-Beam Lithography |
| Stammberger, S. |
Shape Positional Accuracy Optimization via Writing Order Correction |
| Stan, L. |
Atomic Layer Deposition of Ternary Dielectrics for Gate Insulation and Passivation of GaN-based Metal-Insulator-Semiconductor Heterojunction Field Effect Transistors
UV-Accelerated Detection and Recovery of CH4 in ZnO Functionalized Multi-walled Carbon Nanotube Sensors |
| Stanford, Michael G. |
Focused helium-ion induced direct write engineering of 2D materials |
| Stang, J. |
Microwave Characterization of Nanocomposite based on Lithographically Defined Nanoparticles |
| Stavis, S. M. |
Focused ion beam milling of optical films with complex surfaces at the subnanometer scale
Nanofluidic Liquid Cell with Integrated Electrokinetic Pump for In Situ TEM |
| Steele, A.V. |
Low Temperature Ion Source for Focused Ion Beam Nanomachining Applications |
| Stein, A. |
Sub-5 nm electron-beam lithography and metrology of poly (methyl methacrylate) using an aberration-corrected scanning transmission electron microscope
Selective Directed Self Assembly of Coexisting Morphologies Using Block Copolymer Blends
Study of Reactive Ion Etching for Kinoform Lenses
Aberration-Corrected Electron-Beam Lithography
Initial Design and Nanofabrication of Energetically Efficient Biologically Motivated Contact |
| Steinberg, C. |
Flat and highly flexible composite stamps for nanoimprint, their preparation and limits
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| Stolovitzky, G. A. |
Bio-inspired Silicon Nanospikes Fabricated by Metal-Assisted Chemical Etching for Antibacterial Applications |
| Stoner, B.R. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Su, V.C. |
Sub-10 nm Electron Beam Lithography by Using Rapid and Cold Development of ZEP-520A |
| Su, Y.Q. |
Microwave Characterization of Nanocomposite based on Lithographically Defined Nanoparticles |
| Suh, Jae Woo |
Mask registration and array efficiency for nitride FinFET prototyping |
| Sukachev, D. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Sun, Dazhi |
Nanoimprint technology for patterning functional ZrO2 ceramic materials |
| Sun, Kai |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Sun, L. |
Self-cleaning Properties of Nanostructured Polypropylene Foils Fabricated by Roll-to-Roll Extrusion Coating |
| Sun, W. |
DNA Nanostructures Mediated Molecular Imprinting Lithography |
| Suzuki, M. |
Overlay improvement in nanoimprint lithography for 1x-nm patterning |
| Swart, Jacobus W. |
FIB Deposition of Platinum Micropillars in Microchannels for Diffusion Control in Microfluidic devices |
| Syam, A. M. |
Electron-Beam Induced Deposition of Highly Conductive Copper Nanowires from Bulk Liquids |
| Syed, Atif |
Fabrication and characterization of zinc oxide nanowires-based flexible biosensors
|
T |
| Taboryski, R. |
Self-cleaning Properties of Nanostructured Polypropylene Foils Fabricated by Roll-to-Roll Extrusion Coating |
| Tajmar, M. |
Ion Beam Injector based on High Current LMIS |
| Takashima, K. |
Artificial Two-dimensional Lattice Structures Assembled by Atom Manipulation Technique |
| Takeuchi, S. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Tan, S. |
Overview of Atomic Layer Etching – From the Ion Beam Perspective
Monte-Carlo Simulations of Ion Beam Sputtering in Compounds |
| Tanabe, A. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Tanaka, Toshiki |
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM) |
| Taniguchi, J. |
Micropiercing of titanium foil by combination of a roll press method and dry etching
Characteristics of residual layer thickness on liquid transfer imprint lithography and roll press method |
| Taniguchi, Yusuke |
Molecular orientation evaluation of negative-tone and positive-tone photo-cross-linkable liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy |
| Tavakkoli K.G., A. |
Fabrication of Multilayer Complex Nanomesh Patterns
Multidirectional BCP Alignment by Thermal-Coefficient-of-Expansion Mismatch Shear
Lithographically patterned nanostructures for geometric control of coiled-coil protein placement and alignment |
| Telecka, A. |
Self-cleaning Properties of Nanostructured Polypropylene Foils Fabricated by Roll-to-Roll Extrusion Coating |
| Testini, A. |
Fabrication of 3 Dimensional Photonic Crystals with Waveguides for visible Light |
| Thainoi, Supachok |
Local Positional Alignment of InSb Nanostructures by Self-Assembled Epitaxial Growth on Ge Substrate |
| Theogarajan, Luke |
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Thompson, A. |
Metal Free Adhesion of Au onto Si Native Oxide |
| Tian, C. |
DNA Nanostructures Mediated Molecular Imprinting Lithography |
| Tierno, D. |
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Timm, Andrea.C. |
Development of transparent microwell arrays for optical monitoring and dissection of microbial communities |
| Tippens, J. |
Design and Fabrication of an In-Plane Nano structured Solar Concentrator |
| Tisa, T.-A. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Tiwale, N. |
Direct Write Electron Beam Lithography for Top-down Fabrication of sol-gel based ZnO micro-nano FETs |
| Tochino, T. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force
Impact of template stiffness during peeling release in nanoimprint lithography |
| Torres, Clivia M. Sotomayor |
Hierarchical micro/nano structures for enhanced self-cleaning applications |
| Truong, H |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Trusheim, M. E. |
Direct Write Nanofabrication for Quantum Computing in Silicon and Color Centers in Diamond |
| Tsai, H |
Directed Self-Assembly patterning options for FinFET formation at 7nm node |
| Tu, Fan |
Focused Electron Beam Induced Processing in ultra-high vacuum: new routes for the fabrication of clean metallic nanostructures and the reduction of proximity effects
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Tung, M. C. |
Design Strategy for Layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs) |
| Twedt, K. A. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Tyryshkin, A. |
Electron Spin Resonance Characterization of Damage and Recovery of Si/SiO2 Interfaces from Electron Beam Lithography |
U |
| Uehara, T. |
Viscosity range of UV-curable resins usable in screen printing with polyimide through-hole membrane masks for sub-100 nm-wide imprint patterns |
| Uemura, K. |
Effect of Elastic Modulus of UV Cured Resist on Demolding Force |
V |
| Vaz, A. R. |
FIB Deposition of Platinum Micropillars in Microchannels for Diffusion Control in Microfluidic devices
III-V NanoWires for Junctionless Transistors Fabricated by Focused Ion Beam (FIB) System |
| Vervuurt, R.H.J. |
Area-selective atomic layer deposition using e-beam and photosensitive masking layers |
| Voelcker, N.H. |
Silicon nanowire and hole arrays by a combination of self-assembly, laser ablation, and wet chemical etching |
| Volland, Burkhard |
Pattern-generation and pattern-transfer for sub-10nm devices |
| Vollnhals, Florian |
Focused Electron Beam Induced Processing in ultra-high vacuum: new routes for the fabrication of clean metallic nanostructures and the reduction of proximity effects
On the Magnetic Properties of Clean Iron Nanostructures Fabricated by Focused Electron Beam Induced Processing |
| Von Ehr, J. R. |
Tip-assisted Dopant Incorporation Process for Atomic Precision P-in-Si qubit devices |
W |
| Walker, G. |
RF Sputtering of ZnO (002) Thin Films on top of 3C-SiC-on-Si (100) Substrates for Low Cost Piezoelectric Devices |
| Wan, Wenjie |
Nanofluidic Flow-Assisted Assembly (NFAA) of Well-Dispersed Plasmonic Nanostructures into Nanoslit Sensors |
| Wang, Amy |
Nanoscale interdigital electrode arrays for smart water sensing |
| Wang, Honglei |
High-Performance Nanoimprinted Perovskite Nanograting Photodetector
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Wang, Qing |
Effects of Contact States on Polymer Pattern Deformation during Demolding Process in Nanoimprint Lithography |
| Wang, S. |
Flat and highly flexible composite stamps for nanoimprint, their preparation and limits
Nanoimprint-induced orientation of localized wrinkles with SU-8 |
| Wang, Sihao |
Design and Fabrication of Plasmonic Notch Color Filters |
| Wang, Xiqiao |
Atomically Precise Devices: Enabling Fundamentally New Devices at the Ultimate Atomic Limit |
| Wang, Y. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Microwave Characterization of Nanocomposite based on Lithographically Defined Nanoparticles
Full color reflective display based on high contrast gratings |
| Wang, Y.J. |
Fabrication of Nanojunction with Sub-10 nm Nanogap for Surface Enhanced Raman Scattering by Tensile Stress Mechanically Breaking |
| Wang, Yifei |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Ward, C. |
SiO2 plasma etching using SF6 with O2/Ar mixtures down to cryogenic temperatures |
| Ward, Craig |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Ward, T. Z. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Watanabe, A. |
Hexagonal Dot Pattern Fabrication by Self-assembled Colloidal Silica Grafted with a Concentrated Polymer Brush |
| Weber-Bargioni, A. |
Near field campanile probe fabricated by nanoimprint lithography |
| Weber, S. |
Fabrication of High-Coherence Superconducting Qubits |
| Wei, Qi-Huo |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Welander, P. B. |
Fabrication of High-Coherence Superconducting Qubits |
| Welland, M. E. |
Direct Write Electron Beam Lithography for Top-down Fabrication of sol-gel based ZnO micro-nano FETs |
| Wi, S. |
Repetitive Nanoprinting Technique for Producing Vertically Stacked Transition Metal Dichalcogenide Heterostructure Arrays and Photo-Response Devices
Low-Workfunction Metal Doping for Making WSe2 Photovoltaic Devices |
| Wilson, T. M. |
Lithiation of Sn Microspheres: Li FIB vs Electrochemistry |
| Wind, S. J. |
Out-of-plane spatial control at single-molecule resolution on biomimetic surfaces
Probing Breast Cancer Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Wojcik, M. |
Fabrication of High Resolution Zone Plates with High Aspect Ratio using Metal-assisted Chemical Etching |
| Wolfe, J. |
Fabrication of cylindrical neural probes with integrated conductor wiring |
| Wolfenson, H. |
Micro-fabricated elastomeric pillar arrays for studies of cellular sensing of extracellular matrix rigidity |
| Wolter, S.D. |
Multi-Beam Magnetic Sector Mass Spectrometry Utilizing Spatially Coded Apertures |
| Wong, A. |
Ionic Liquid Gating effects on a-IGZO Thin Film Transistors: A Novel Method for Amorphous Metal Oxide Activation |
| Wong, H. S. P. |
Design Strategy for Layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
From Nanodevices to Nanosystems: The Carbon Nanotube Case Study |
| Wood, S. |
Metal Free Adhesion of Au onto Si Native Oxide
Shape Positional Accuracy Optimization via Writing Order Correction |
| Wright, G. |
Selective Directed Self Assembly of Coexisting Morphologies Using Block Copolymer Blends |
| Wu, Ming |
Optical Antennas Make Fast LEDs |
| Wu, W. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Microwave Characterization of Nanocomposite based on Lithographically Defined Nanoparticles
Full color reflective display based on high contrast gratings |
| Wu, Wei |
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Wu, Yueying |
Self and directed assembly of metallic nanoparticles via PLiD and STEM/ EELS characterization of plasmon-related effects |
X |
| Xi, Y. |
Subwavelength Focusing of Light with a Slanted-Nanoaperture-Array Metal Lens |
| Xia, Q. F. |
Metal Cation Motion Induced Resistance Switching in Highly Reliable Hafnium Oxide based Memristive Devices
3D Hybrid Memristor/CMOS Circuits with 8 Monolithically Integrated Crossbar Layers |
| Xiang, Q. |
Sketch and Peel Lithography |
| Xiao, Shuaigang |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Xie, P. |
Mulitiplexed Molecular Assays Using Nanoelectronically Barcoded Beads
Electronic Quantification of Surface Proteins on Circulating Tumor Cells Based on Bead-CTC Aggregate Sizing |
| Xie, S. |
Brain on Chip |
| Xin, H. L. |
Metal Cation Motion Induced Resistance Switching in Highly Reliable Hafnium Oxide based Memristive Devices |
| Xu, C. |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
Dense metasurface with high efficiency dense metasurface for broadband optical vortex by high resolution electron beam lithography
A novel approach for the reduction and inspection of sidewall roughness of patterned resist |
| Xu, Huizhong |
Patterned Fabrication of ZnO Nanowire Arrays for Nanoplasmonic Waveguide Applications |
Y |
| Yager, K.G. |
Selective Directed Self Assembly of Coexisting Morphologies Using Block Copolymer Blends |
| Yajima, Y. |
Replication of Nanostructures on Polyethylene Terephthalate with Laser-Assisted Roller Nanoimprinting |
| Yamamoto, R. |
Hexagonal Dot Pattern Fabrication by Self-assembled Colloidal Silica Grafted with a Concentrated Polymer Brush |
| Yamamoto, T. |
Artificial Two-dimensional Lattice Structures Assembled by Atom Manipulation Technique |
| Yan, F. |
Fabrication of High-Coherence Superconducting Qubits |
| Yang, G.Z. |
Microfabrication of Planar Spectrum Splitting and Beam Concentration Diffractive Optical Element for Lateral Multijunction Photovotaic System |
| Yang, Jia |
A significant vaporized degradable film assisting demoulding technics in nanoimprinting lithography |
| Yang, K. W. |
Design and Fabrication of Plasmonic Notch Color Filters |
| Yang, K. |
Thermal stresses and cracks in a solution-processed ITO nanoparticle-thin film heater |
| Yang, XiaoMin |
Single-digit nanofabrication: ultrahigh density sub-10 nm TiO2 features via the self-aligned double patterning process |
| Yang, Y. |
Characterization of Nanofabricated Electron Transmission Gratings with Electron Diffraction |
| Yang, Zhaogang |
A high-throughput nano-electroporation platform for large-scale manipulation and transfection of adult mouse cardiomyocytes |
| Yao, Y. |
Probing Sub-5 nm Gap Plasmon Using Collapsible Nano-fingers
Full color reflective display based on high contrast gratings
Multiscale Porous Structure Enabled by Variable Voxel Stereolithography |
| Yaroshchuk, Oleg |
Novel Plasmonic Metamasks for Photopatterning Molecular Orientations in Liquid Crystals |
| Yasuda, M. |
Impact of template stiffness during peeling release in nanoimprint lithography
Computational study on novel proximity lithography for deep stepped substrate by Built-in Lens Mask (BILM)
Fabrication of Patterned Multilayer Structure by using Novel Reversal Imprinting |
| Ye, T. |
A CMOS based nano-electrode array for high-throughput electrophysiology |
| Yin, P. |
DNA Nanostructures Mediated Molecular Imprinting Lithography |
| Yoder, J. L. |
Fabrication of High-Coherence Superconducting Qubits |
| Yoon, J.S. |
Nanofluidic Flow-Assisted Assembly (NFAA) of Well-Dispersed Plasmonic Nanostructures into Nanoslit Sensors |
| Yost, D. R. W. |
Fabrication of High-Coherence Superconducting Qubits |
| Yu, Bo |
Nanoimprint technology for patterning functional ZrO2 ceramic materials |
| Yu, F. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy |
| Yu, Gary |
Neutral surface modification by e-beam exposure for PS-b-PMMA self assembly |
| Yu, Ye |
Design and Fabrication of Plasmonic Notch Color Filters |
Z |
| Zajac, D. M. |
High density overlapping gate architecture for Si/SiGe quantum dots |
| Zakhidov, Anvar |
High-Performance Nanoimprinted Perovskite Nanograting Photodetector
Nanoimprinted Perovskite Micro- Nanostructures for Photovoltaics |
| Zeidler, D. |
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM |
| Zhang, Anthony |
Nanometer dimension control on silicon imprint mold using atomic layer deposition for large-area nanofabrication |
| Zhang, C. |
Stretchable Metal-mesh Transparent Electrodes Fabricated through a Solution-processed Approach
Large-area Fabrication of Chirped Gratings |
| Zhang, L. |
Sub-5 nm electron-beam lithography and metrology of poly (methyl methacrylate) using an aberration-corrected scanning transmission electron microscope
Patterning of non-planar surfaces via electron beam lithography and its challenges
Aberration-Corrected Electron-Beam Lithography |
| Zhang, R. |
Suspended two-dimensional MoS2 transistor |
| Zhang, Shaoda |
An Optimized Dual-Axis Electrolytic Tilt Sensor |
| Zhang, Sichao |
Fabrication of Au lamellae nanostructure for high sensitive biosensor applications
The effect of the grating profile on the illumination uniformity of the X-ray condenser
A novel approach for the reduction and inspection of sidewall roughness of patterned resist
Nanofabrication of arch metal structures as gas/biosensors by grayscale electron beam lithography
Nanofabrication of metasurface with gold polycyclic radial apertures for optical vortex by EBL |
| Zhang, X. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Three-Dimensional Colloidal Interference Lithography
Fabrication of Magnetically Tunable Periodic Nanostructures
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Zhao, J. |
Optical Properties of “Air-Like” Ordered 3D Thin-Shell Nanolattice Materials
Lightweight Ultrastrong Thin-Shell Nanolattice Material for Enhanced Energy Dissipation |
| Zheng, Nan |
A New UV-curable Resist with Liquid Volume-Expanding Monomers |
| Zheng, S. |
Mixture of ZEP and PMMA with tunable sensitivity as a liftoff layer with controllable undercut |
| Zhu, Ruichao |
Metrology of Sub-65nm Resist Gratings on Flexible Substrate Made by Jet and Flash Nanoimprint Lithography |
| Zhu, Z. |
Lab-on-a-fiber Sensors with Nanoimprinted Nanostructures on Fiber Sidewall |
| Zmuidzinas, Jonas |
Exploring the Universe with Superconducting Detectors |
| Zonnevylle, A.C. |
Patterning of non-planar surfaces via electron beam lithography and its challenges |
| Zou, Q. |
Design and Implementation of Soft Polymer-Based Cantilever Probe for Atomic Force Microscopy |
