A |
| Adiga, vivekananda | High quality factors in graphene and ultra thin Silicon nitride nanomechanical drums |
| Ahn, Se Hyun | Vibrational Indentation Patterning of Grating Structures with Real-time Period Tunability |
| Alkemade, Paul | Helium ion beam lithography of thick HSQ resists |
| Altana, Mirco | Sidewall-angle dependent pre-filling of three-dimensional microcavities in thermal nanoimprint |
| Alvis, Roger | Optimization of the Gun, Lenses, and Detectors for High-Vacuum SEM Studies of Non-Conductive Specimens |
| Amano, Tsuyoshi | Residual-type mask defect printability for EUV lithography |
| Appleton, Bill R. | Nanofabrication of Graphene on SiC by Multi-Ion Beam Lithography and Low-Temperature Processing |
| Araki, Kosei | Molecular simulation of electron-irradiation damages in resist materials (Invited) |
| Ashiba, Hiroki | Nanomechanical Tuning Forks Fabricated by Focused-ion-beam Chemical Vapor Deposition |
| Asayama, Yoshiki | Molecular dynamics study on structural modifications of graphene by electron beam irradiation |
| Atasoy, Hakan | Release-Optimized UV-NIL Resists |
| Ayothi, Ramakrishnan | Fundamental Study of EUV Resist Line Edge Roughness: Characterization, Experiment and Modeling |
B |
| Babin, Sergey | SEM dimensional metrology on sub-15 nm bit-patterned media using model-based analysis |
| Barton, Robert | Fabricating Graphene-Silicon Nitride Heterostructures for High-Q Tunable Nanomechanical Resonators |
| Beck, TJ | Electron Beam Lithography of Antidot Arrays for the Fabrication of Nanogenerators and Detectors in 2DEG Materials |
| Bell, David | Nanoscale imaging, analysis and nano-fabrication using Helium Ion Microscope |
| Bergmair, Iris | High aspect ratio lift-off process and silver optimization for negative index materials in the visible |
| Berry, Shaun | Electrically Controlled Switchable Adhesion of Dual Nanometer and Micrometer Structured Surfaces |
| Binh, Vu Thien | X-rays and field-emission gun: an intrinsic quasi-monochromatic X-ray source (Invited) |
| Bishop, James | A Mechanism for Dendritic Nano-Pillar Growth using EBID |
| Böttger, Roman | Taming Nanostructures: From Sponge to Dot Pattern on Ge Controlled by Heavy-Ion-Deposited Energy |
| Bresin, M. | Liquid phase electron beam induced deposition of CdS |
| Brodoceanu, Daniel |
Metal Nanoparticle Arrays by Controlled Decomposition of Polymer Particles |
| Brown, Devin | Point spread function analysis of dense high resolution nanodots in hydrogen silsesquioxane |
| Bruccoleri, Alexander | Fabrication of Nano-scale, High Throughput, High Aspect Ratio Freestanding Gratings |
| Bruley, John | Combining SIMS with GPA of aberration corrected HAADF STEM images for measurement of misfit strain in epitaxial SiGe layers |
| Burckel, D. Bruce | Interferometrically Defined 3D Pyrolyzed-Carbon Sensors |
| Byeon, Kyeong-Jae | Thermal Imprinting Process using ZnO Nanoparticles-Dispersed Resin for the Improvement of Light Extraction Efficiency of GaN-based LEDs |
C |
| Cadarso, Víctor J. | Polymeric freestanding structures by direct write laser without sacrificial layers |
| Cantu, Precious | Deep-subwavelength patterning with photoswitchable molecules |
| Chan, Wei Min | Directed Patterning for Electronics Using Multiple Block Copolymers Orthogonally |
| Chang, Jae-Byum | Complex self-assembled patterns from a square grid template with restricted geometry |
| Chang, Long | Multi-domain storage in graded bit patterned media (Invited) |
| Chen, Hao | Significant Enhancement of Colloidal Quantum Dots Fluorescence by 3D Disk-dot Coupled Nanoantenna Array |
| Chen, Lichuan | Development of jet rollable nanoimprint process to fabricate bio-polymer nanostructures |
| Chen, Tao | Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators |
| Chen, Yifang | Dry-Release Self-assembling of Microtube Arrays for Catalytic Micropump Application |
| Chen, Yijian | Near-Field EUV Imaging for Spatial Frequency Multiplication |
| Cheng, Yao-Te | Nanoscale Photoelectron Emission Using C-shaped Nanoapertures with Cesium Bromide Photocathode |
| Cheng, Xing | High-Resolution Non-Destructive Patterning of Isolated Organic Semiconductors |
| Choi, Chulmin | Di-block Copolymer Guided Patterning of Graphene |
| Choi, Duyoung | Di-block Copolymer Guided Patterning of Graphene |
| Choi, Heon | Concentric Ring Metal-Dielectric Structures for Surface Electromagnetic Wave Assisted Compact Photoelectron Source (Invited) |
| Chun, Sungwoo |
Fabrication of On-Chip Fluidic Ion Channels using Self-Aligned Double Layer Resist Processing Technique |
| Con, Celal | Electron beam lithography using dry thermal development |
| Cord, Bryan | High-Speed Patterning of Hexagonal Dot Arrays Using Electron-Beam Lithography |
| CORDEIRO, Julien | 3D Capillary Force Assembly : Fabrication of a white light emitter |
| Crnogorac, Filip | Monolithic 3D Integration via Al-Ge Bonding of Single Crystal Islands (Invited) |
| Cui, Ajuan | Fabrication of Sealed Nano-channels Based on Sacrificial Nanotemplates by Focused-ion-beam Induced Chemical Vapor Deposition |
| Cui, Bo | Effect of molecular weight distribution on e-beam resist polystyrene |
| Czaplewski, David | Variation of Proximity Effect Correction Parameters with Density |
D |
| Dai, Jun | Superconductivity of tungsten-containing carbon nanowires fabricated by focused-ion-beam chemical vapor deposition |
| Dai, Q. | Optimization of Spatial Dose Distribution for Vertical Sidewall of Resist Profile Minimizing Total Dose in Electron-beam Lithography |
| Dai, Xiaoguang | Electron-beam Patterned PEG Microgels for DNA Detection |
| Dais, Christian | Phase shifting mask for high-throughput high-contrast patterning with Displacement Talbot Lithography (DTL) |
| de Angelis, Francesco | Surface Chemical Imaging at the Nanoscale (Invited) |
| de Pablo, Juan | Directed Assembly of Symmetric ABA Triblock Copolymers on Chemically Nanopatterned Substrates |
| DeRose, Guy | Determination of Base Dose and Scattering Coefficients for Proximity Effect Correction in Electron Beam Lithography |
| Despont, Michel | Probe nanopatterning: Towards a smarter lithography technology (Invited) |
| Dey, Ripon Kumar | Effect of molecular weight distribution on e-beam resist polystyrene |
| Dhima, Khalid | Study of defect mechanisms in partly filled stamp cavities for thermal nano imprint control |
| Dhuey, Scott | Single digit nanoimprint lithography achieved by template modification with atomic layer deposition |
| Ding, Wei | New Nanoplasmonic Devices and Fabrication for Large Enhancement and Tunability of Second Harmonic Light Generation |
| Dobisz, Elizabeth | Fabrication of CoCrPt Alloy Bit Patterned Media at 1 Td/in2 for Recording Measurement |
| Doh, Jonggul | Lithographic Performance of EUV Mask using Coherent Scattering Microscopy |
| Douglas, Erica | Inductively Coupled Plasma Etching of Benzocyclobutene with SF6 Chemistry |
| Du, Ke | Fabrication of Polymer Nanostructures via Maskless O2 Plasma Etching |
E |
| Ekinci, Yasin | High-resolution patterning with EUV interference lithography |
| Eriksson, Torbjörn | High Volume Nanoimprint Lithography technology and applications |
F |
| Fan, Li | Sub-20 nm Metal Gratings by Nanoimprint Lithography |
| Fan, Rong | Fabrication and Characterization of Field Effect Reconfigurable Nanofluidic Ionic Diodes: Building Blocks Towards Digitally-Programmed Manipulation of Biomolecules |
| Farshchian, Bahador | 3-D Nanomolding |
| Fernandez-Cuesta, Irene | 30 nm nanochannels with plasmonic bowtie nanoantenna |
| Fischer, Andreas C. | 3D Patterning of Si Micro and Nano Structures by Focused Ion Beam Implantation, Si Deposition and Selective Si Etching |
| Fleischer, Monika | Potential modulation by plasmonic sub-micron structures for the manipulation of ultracold atomic gas clouds |
G |
| Gavagnin, Marco | Focused Electron Beam Induced Deposition as novel nanofabrication approach for magnetic nanosensors and nanomagnet logic |
| Geiss, Reinhard | Lithium Niobate Nanowaveguides fabricated by Ion-Beam Enhanced Etching |
| Ghadarghadr, Shabnam | The Membrane-Alignment Stage in Fabricating 3-Dimensional Nanostructures |
| Ghassemi, Saba | Sub-micron scale gold-tipped elastomeric pillar arrays for human T cell activation and culture |
| Gondarenko, Alexander |
Fabricating Graphene-Silicon Nitride Heterostructures for High-Q Tunable Nanomechanical Resonators |
| Goodwin, Frank | EUV Mask Challenges, Status & Closing The Remaining Technology Gaps (Invited) |
| Gorisse, Therese | Directed Self-Assembled Porous Anodic Alumina by NanoImprinting Lithography |
| Graczyk, Mariusz | Optimization of a Self-Closing Effect to Produce Bottle-Shaped Nanochannels in Quartz |
| Grogg, Daniel | Curved cantilever design for a robust and scalable microelectromechanical switch |
| Guan, Weihua | Fabrication and Characterization of Field Effect Reconfigurable Nanofluidic Ionic Diodes: Building Blocks Towards Digitally-Programmed Manipulation of Biomolecules |
| Guillorn, Michael | Electron beam lithography-based grating customization strategies for gate level patterning in high density SRAM circuits (Invited) |
| Guo, L. Jay | Vibrational Indentation Patterning of Grating Structures with Real-time Period Tunability |
H |
| Harada, Tetsuo | Development of Standalone Coherent EUV Scatterometry Microscope for EUV Mask Observation |
| Harris-Jones, Jenah | EUV Mask Challenges, Status & Closing The Remaining Technology Gaps (Invited) |
| hendrickx, eric | EUV lithography in pre-production mode (Invited) |
| Hendel, Rudi | An all-optical process for extending GRATE to the 11nm (20nm hp) Technology Node (Invited) |
| Henderson, Clifford | High Resolution Negative Tone Resists via Controlled Polymerization |
| Hoffman, Galen | Electron Beam Direct Write of Chalcogenide Glass Integrated Optics |
| Hojeij, Mohamad | Resonant Dielectric Nanostructures for biosensor applications (Invited) |
| Hornung, Michael | Mask Aligner Process Simulation for Advanced Lithography and Resolution Enhancement Techniques |
| Hu, Walter | Nanoimprinted Polymer Solar Cell |
| Hu, Weihua | SPM Local Oxidation and In-situ Characterization Using AFM Probes in Multiple Modes |
| Huang, Zhihong | Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing |
| Hwang, Ing-Shouh | Low-Energy Electron Diffraction Microscopy Based on a Single-Atom Electron Source |
I |
| Iida, Susumu | Dependence of Image Characteristics Dependece on Incident Electron Beam Energy for EUV Mask inspection using Monte Carlo simulation |
| Ilg, Michael | Improved single ion implantation with scanning probe alignment |
| Inomata, Naoki | Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid (MNC Paper) |
| Itani, Toshiro | An In situ Analysis of EUV Resist Film Inhomogeneity during the Dissolution Process |
| Ito, Shunya | Release Layer Free Acrylate Resins for Ultraviolet Nanoimprinting Prepared by Adding Segregation Auxiliary Agents |
| Iwase, Taku | Etching Process for Patten Transfer from Sphere-type PMMA-b-PMAPOSS Block Copolymer |
| Iyoshi, Shuso | Study of demolding Characteristics in continuous UV nanoimprinting |
J |
| Jaksch, Heiner | The contrast mechanisms of LL-BSE electrons from Hybridization & Band Gaps |
| Jarnagin, Nathan | Production of sub-20nm Pitch Features from Directed Self Assembly of High Chi Polymers via a Selective Block Removal Process Utilizing Atomic Layer Deposition (Invited) |
| Jarro, Carlos Andres | Patterning Silver Using an Atomic Force Microscope and Laser-induced Deposition from Liquids (Invited) |
| Jin, Chongjun | Non-planar nano-arc-gap arrays fabricated via colloidal lithography |
| Jin, Peng | Model of Curing Shrinkage and Kinetics Parameters of Acrylate-based UV-embossing Resist Based on Free Volume Theory |
| Joy, David | Modeling for Multi-Beam Ion Imaging and Analysis |
| Jugessur, Aju | Nanolithography and pattern transfer of dense sub-10 nm lines |
| Jun, David | Energy Spread Measurement of an Electron Impact Gas Ion Source Equipped with a Miniaturized Gas Chamber |
| Jung, Yunbum | Dual-Layer Thermal Nanoimprint Lithography without Dry Etching |
K |
| Kadowaki, Takuya | Strain characteristics of free-standing graphene induced by low-energy electron beam irradiation |
| Kanwal, Alokik | Bio-Fuel Cell Operational Enhancements using Nanoscale Electrodes |
| Kaplan, Alex | High aspect-ratio doped Si nanostructures for plasmonics induced light funneling applications |
| Karbasian, Golnaz | High Aspect Ratio Features in PMGI using Electron Beam Lithography and Solvent Developers |
| Kawata, Hiroaki |
Filling Characteristics of Imprint Process for Concave Pattern Molds |
| Kearney, Patrick |
Understanding the sources of unwanted etch in ion beam sputter deposition production of EUV mask blanks |
| Kehagias, Nikolaos | Sub-100 nm three dimensional diffractive optical elements fabricated by UV light assisted roll-to-roll nanoimprint lithography |
| Khaira, Gurdaman | Defect Evolution in Thin Films of Self-Assembling Lamella Forming Block Copolymers on a Neutral Surface |
| Kihara, Naoko | Fabrication of 5 Tb/in2 Bit Patterned Media with Servo Pattern using Directed Self-Assembly |
| Kim, Kang Yuji | Characteristics of mechanical vibration in imprinted nanostructures |
| Kim, Min-Chul | Image Compensation of Mask Misalignment in Aerial Image Microscope System |
| Kim, Sang-Kon | Electric Field Induced Patterning in Computational Lithography |
| Knapp, Jeffrey M. | Overcoming 3DIC Technology Hurdles (Invited) |
| Knuffman, Brenton | Focused Ion Beam Implantation of Li+ in WO3 Using A Magneto-Optical Trap Ion Source (Invited) |
| Kobrin, Boris | Large area optical lithography using cylindrical masks |
| Kolacek, Karel | Direct nano-structuring of solid surface by extreme ultraviolet Ar8+ laser |
| Kometani, Reo | Superconductivity of tungsten-containing carbon nanowires fabricated by focused-ion-beam chemical vapor deposition |
| Kong, Seong Deok | The Blood-Brain-Barrier Crossing in vivo using Magnetic Nanocapsules |
| Koshelev, Kirill | Study of Line-Edge Roughness in ZEP Resist Nanopatterns from Electron Beam Lithography by Numerical Modeling |
| Kotera, Masatoshi | Measurement of fogging electron current in scanning electron microscope |
| Kravchenko, Ivan | Fabrication of a band-limited mask for PHARO |
| Kumar, Karthik | Lithographically-Defined Nanostructures for Color Plasmonic Printing |
| Kwak, Moon Kyu | Vibrational Indentation Patterning of Grating Structures with Real-time Period Tunability |
L |
| Lawson, Richard | High Resolution Negative Tone Resists via Controlled Polymerization |
| Lee, Chookiat |
Fabrication of an 18-layer 3D Woodpile Photonic Crystal via Stacking of Pre-Patterned Free-Standing Membranes |
| Lee, JaeJong | Fabrication of Adhesion-free Transparent Roll Stamp for Large Area Patterning using UV-typed Roller Nanoimprint Lithography |
| Lee, Jongho | Graphene transistors with record mobilities on polyimide for high-performance flexible nanoelectronics |
| Lee, Sunwoo | Fabricating Graphene-Silicon Nitride Heterostructures for High-Q Tunable Nanomechanical Resonators |
| Lee, Tao-Hua | Template-Assisted Self-Assembly and Alignment of ZnO Nanowires with Post-Deposition Growth |
| Lezec, H.J. | Stable Field Emission from Nanoporous Silicon Carbide Tips Patterned by a Focused Ion Beam(Invited) |
| Li, Jiseok |
Design and fabrication of micro optical system for multi-optical probe confocal microscopy for large areal measurement |
| Li, Jinxing | Dry-Release Self-assembling of Microtube Arrays for Catalytic Micropump Application |
| Li, shuhong | Study of nanospheres lithography technology with super-lens for fabricating nano holes |
| Li, Wen-Di | Demonstration of sub-4 nm nanoimprint lithography using a template fabricated by helium ion beam lithography |
| Liang, Yixing | A Tri-layer Method to Fabricate Wafer Scale Nanoimprint Mold by Copolymer Lithography |
| Likhanskii, Alex | Modeling of defect transport in EUVL plasma chambers |
| Lin, Burn | New Era of Electron Beam Lithography |
| Liu, Changzhi | Fabrication of Sealed Nano-channels Based on Sacrificial Nanotemplates by Focused-ion-beam Induced Chemical Vapor Deposition |
| Liu, Nannan | Electron impact gas ion source development; evaluation of different electron injection sources (Invited) |
| Liu, Shiyuan | Fast Aerial Image Simulation for Partially Coherent Systems by TCC Decomposition with Analytical Kernels (Invited) |
| Liu, Wenhan | Patterning of porous silicon nitride membrane by CsCl self assembly |
| Liu, Yi-Chen | High-Resolution Non-Destructive Patterning of Isolated Organic Semiconductors |
| Liu, Yuyang | Fabrication of Polymer Nanostructures via Maskless O2 Plasma Etching |
| Liu, Zuwei | Sub-10 nm area-selective ALD using block copolymer lithography |
| Loeffler, Ronny | Pyramid Array Substrates for Biomedical Studies |
| Luce, Stephen | CMOS Compatible RF MEMs Technology (Invited) |
| Luttge, Regina | Micro-nanofabricated platform technology for cell seeding experiments in neuro-nanobiology |
M |
| Mackie, William | Cold Field, Thermal-Field, and Schottky Emission from HfC(310) Sources |
| Mankos, Marian | Progress Towards An Aberration-Corrected Low Energy Electron Microscope for DNA Sequencing and Surface Analysis |
| Manfrinato, Vitor R. | Templated Placement of Colloidal Quantum Dots |
| Martin, Aiden | Electron Beam Etching Kinetics of Diamond and Graphite |
| Martin, Frederick | A Large-Aperture Ion-Beam Lens Corrected For Both Chromatic And Spherical Aberration |
| Martinez-Perdiguero, Josu | Enhanced Transmission through Gold Nanohole Arrays Fabricated by Thermal Nanoimprint Lithography for Surface Plasmon Based Biological Sensing |
| Mastropaolo, Enrico | Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators |
| Mayer, Andre | Study of defect mechanisms in partly filled stamp cavities for thermal nano imprint control |
| McMorran, Benjamin | Sculpting Electron Beam Profile and Phase with Nanofabricated Diffractive Optics |
| Mehrotra, Prateek | Ultra-high-Numerical Aperture Interference Lithography at High Aspect Ratios using Surface States on Effective Gain Media |
| Mekaru, Harutaka | Control of Inclined Angle of Glass-like Carbon Mold by Defocus UV Exposure on Si Containing Photoresist |
| Melli, Mauro | Hyperspectral NanoPhoto Luminescence Spectroscopy on InP Nanowires by Means of “Campanile” Tips |
| Menon, Rajesh | Deep-subwavelength patterning with photoswitchable molecules |
| Michels, Thomas | Ultrafast Cantilever for High Speed Scanning Force Microscopy |
| Mirza, Muhammad | Nanofabrication of high aspect ratio (~50:1) sub-10 nm silicon nanowires using plasma etch technologies |
| Møller-Nilsen, R. | Reproducibility of Drift Tolerant Focused Ion Beam Lithography Method |
| Mohammad, Mohammad Ali | High Aspect Ratio SML Resist Patterning using 30 keV Electron Beam Lithography |
| Moldovan, Nicolaie | Nanofabrication with Si(311) |
| Moon, J. S. | Graphene for RF Applications: Opportunities & Challenges (Invited) |
| Morton, Keith | High Aspect Ratio, Triangular Silicon Pillars for Bump Array Concentration of Pathogenic Bacteria |
| Motavas, Saloome | Diameter Dependence of the Effect of Light Polarization on Interband Transitions in Zigzag Carbon Nanotubes |
| Muhammad, Mustafa | Nano-Patterning of PMMA on Insulating Surfaces With Various Anti-Charging Schemes Using 30 Kev Electron Beam Lithography |
| Murray, Lynn M. | Polymeric Substrates with Bioimprinted Micro- and Nanoscale Topography for Regulation of Chondrocyte Re-Differentiation |
N |
| Nagato, Keisuke | Large-Area Nanostructures by Laser-Scanning Imprinting (Invited) |
| Nakamura, Hiroko | Spin on Glass as an Orientation Control Layer for Block Copolymer Direct Self-Assembly |
| Nakagawa, Masaru | Release Layer Free Acrylate Resins for Ultraviolet Nanoimprinting Prepared by Adding Segregation Auxiliary Agents |
| Namboodiri, Pradeep | Fabrication of nano structures for Dimensional Metrology and Device Applications |
| Nealey, Michelle J. | Arrays of Topographically and Peptide-Functionalized Hydrogels for Analysis of Biomimetic Extracellular Matrix Properties (Invited) |
| Nemutudi, Rudzani | Multiple phase-formation in Ni-Ge system monitored by SEM, AFM and PIXE analytical techniques |
| Nicaise, Samuel | Investigation of Templated Self-assembly of High-χ Diblock Copolymer |
| Nilsson, Bengt | Dose to clear in EBL: comparison of Monte Carlo predictions with experiment |
| Nishino, Tomoki | Impact of Mold-Resist Roughness on Friction and Adhesion Properties by Nano Tribological Inspection |
| Noh, Kunbae | Di-block Copolymer Directed Anodization of Hexagonally Ordered Nanoporous Aluminum Oxide |
| Nojeh, Alireza | Solar Electron Source and Thermionic Solar Cell |
| Notte, John | Progress Towards a Commercial Neon Gas Field Ion Source |
| Nowak, Matt | High Density 3D Through Silicon Stacking (TSS) – Game Changing Technology? |
O |
| Ocola, Leonidas Ernesto | Growth Characterization of Electron Beam Induced Silver Deposition from Liquid Precursor |
| Ocypa, Łukasz | Impact of Mold-Resist Roughness on Friction and Adhesion Properties by Nano Tribological Inspection |
| Oh, Young | Multi-Tip AFM Lithography System for High Throughput Nano-patterning |
| Ohara, Yasuhiro | Measurement of fogging electron current in scanning electron microscope |
| Ohki, Hirofumi | The New Method of Electron-Beam Lithography on HSQ at Overlay Writing |
| Ohtomo, Akihiro | Fast and Continuous Patterning on the Surface of Plastic Fiber by Using Thermal Roller Imprint |
| Okai, Nobuhiro | Electron scattering simulation for subsurface metrology in scanning electron microscope |
| Okada, Makoto | Pattern-size Effect of Reorientation of Photoinduced Liquid Crystalline Polymer by Thermal Nanoimprinting |
| Ok, Jong G. | Continuous fabrication of polymer waveguides with smooth sidewalls by Dynamic Nano-Inscribing (DNI) and NanoChannel-guided Lithography (NCL) processes (Invited) |
| Olynick, Deirdre | Sub-10 nm area-selective ALD using block copolymer lithography |
| Omoto, Shinya | Evaluation of SiOx Containing UV Nanoimprint Resin |
| Oshidari, Yuta | Quality factor improvement of graphene resonator by SU-8 shrinkage-induced strain |
| Otaki, Katsura | On-Machine Wavefront Evaluation of the Full-Field Extreme Ultra-Violet Lithography Exposure System |
| Otani, Masaru | Measurement of Surface Potential Distribution at an Insulating Film Produced by Fogging Electrons in a Scanning Electron Microscope |
| Otis, Charles | A Mass Filtered Plasma FIB |
| Ovtchinnikov, Serguei | Modeling of Counter Streaming Charged Beams in MICHELLE–eBEAM |
| Owen, James | Determining Tip Position Tolerances for Atomically Precise STM lithography of Si(001):H |
P |
| Panday, Ashwin | Nanostructured, Active Electrostatic Trap for Confining Nanometric Objects in a Fluid: mimicking DNA-Protein interactions in a synthetic system |
| Park, Hui Joon | Controlling Nanostructures in Organic Photovoltaic Cells (Invited) |
| Park, Kyung Jin | Fabrication of Plasmonic Nano-Pore Array for Nanobio Sensor |
| Park, Min-Chul | Image Compensation of Mask Misalignment in Aerial Image Microscope System |
| Patti, Robert | Heterogeneous 3D Integration (Invited) |
| Pauliac-Vaujour, Sébastien | Capped carbon hard mask an innovative route to nanoscale device fabrication |
| Penzo, Erika | Directed assembly of one-dimensional functional nanostructures |
| Peng, Zhen | Non-periodic sub-wavelength gratings fabricated by helium ion beam lithography |
| Perera, Ginusha | Measurements of the Latent Image in Chemically-Amplified Resists |
| Perez-Martinez, C. | Visualization of Ion Beams from IonicLiquid Ion Sources for Focused Ion Beam Applications |
| Peroz, Christophe | Fabrication of High Resolution Digital Spectrometers-on-Chip |
| Petric, Paul | REBL: A Lithography Solution for High Volume Manufacturing at 16 nm (Invited) |
| Petrone, Nick | Scalable Graphene Field Effect Transistors with Boron Nitride Dielectrics (Invited) |
| Philipp, Peter | Taming of Ga droplets on DLC layers – Size tuning and local arrangement with nm accuracy |
| Phillips, Matthew | Growth of SiOx Nano-Pillars Using Electron Beam Induced Deposition in an Environmental SEM |
| Pina-Hernandez, Carlos | Direct Nanoimprinting of Functional Inorganic Layers for Nanophotonic Chip Devices |
| Pinto, Mark | Silicon Photovoltaics: Accelerating To Grid Parity |
| Pitters, Jason | Tip shaping of gas field ion sources for optimal ion beam generation |
| Polyakov, Aleksandr | Tunable Plasmonic Light Trapping Metal Structures |
| Probst, Jürgen | Embedding and Combining Plasmonic Elements and Photonic Crystal Structures |
| Provine, J | Transfer Processes of Silicon Nanomembranes for Three Dimensional Integration of Photonics and Electronics |
Q |
| Quan, Baogang | The Sensing Properties of IR Nanostructed Plasmonic Crystals Fabricatied by Electron Beam Lithography and Argon Ion Milling |
R |
| Rahman, FHM | Progress Towards a Commercial Neon Gas Field Ion Source |
| Ramanathan, Muruganathan | Probing Nanostructures of Aged Active Layer Materials for Organic Solar Cells |
| Rank, Andreas | Nanometer Size Protein Patterning using nCP for the Investigation of Protein-Protein Interactions in Live Cells |
| Raub, Alex | An all-optical process for extending GRATE to the 11nm (20nm hp) Technology Node (Invited) |
| Ray, Vishva | High Resolution Patterning on Non-Planar Substrates with Large Height Variation Using Electron-Beam Lithography |
| Rizal, Binod | Imprint-Templated Nanocoaxial Array Architecture |
| Roberts, Kevin | E-Beam Patterning of Nanoparticle Filled Sucrose Resist |
| Ruiz, Ricardo | Image quality and pattern transfer in block copolymer directed assembly with block-selective atomic layer deposition |
| Ruoff, Rod | Graphene-based & Graphene-derived Materials (Invited) |
| Ryu, JiHyeong | Flow behaviors of a polymer according to the imprint velocity during pressing step in NIL |
S |
| Sanabia, Jason | Stitch-Error Free Electron Beam Lithography of Periodic Structures |
| Sato, Takashi | Talbot effect immersion lithography by self-imaging of very fine grating pattern |
| Sato, Toshimi | Large-Area Nanostructures by Laser-Scanning Imprinting (Invited) |
| Savu, Veronica | Stencil-nanopatterned back reflector increases efficiency of thin-film solar cells |
| Schleunitz, Arne | Sidewall-angle dependent pre-filling of three-dimensional microcavities in thermal nanoimprint |
| Scholten, Robert | Arbitrarily Shaped High-Coherence Electron and Ion Bunches from Laser-Cooled Atoms |
| Schwartzberg, Adam | High resolution dry photo-ablation development (Invited) |
| Schwind, G.A. | Computer Modeling of the Schottky Electron Source |
| Scipioni, Larry | Nanoscale Photoelectron Emission Using C-shaped Nanoapertures with Cesium Bromide Photocathode |
| Shulaker, Max | Atomic Layer Deposition Encapsulation of Carbon Nanotubes with Al2O3 |
| Silva, S. R. P. | Electron emission from carbon nanotubes |
| Simao, Claudia | Directed self-assembly of PS-PEO using solvent vapors assisted nanoimprint lithography |
| Smayling, Michael | Sub-20nm Hybrid Lithography enabled by Highly Regular Layout,Pitch Division, and e-Beam Exposure (Invited) |
| Smith, Henry I. | The Membrane-Alignment Stage in Fabricating 3-Dimensional Nanostructures |
| Sreenivasan, SV | Nanoscale Manufacturing Using Jet and Flash Imprint Lithography (Invited) |
| Stocker, Michael | Photodeactivatable photoresists for visbile-light nanolithography? |
| Strobel, Sebastian | In-situ Study of Rate of Hydrogen Silsesquioxane Dissolution in both Alkaline and Electrochemical Systems |
| Sung, CY | Graphene Nanoelectronics (Invited) |
| Suntharalingam, Vyshnavi | Overcoming 3DIC Technology Hurdles (Invited) |
| Sundberg, Richard | Nanoimprinted Electrodes for Highly Efficient and Stable Bio-Fuel Cells |
| Sviličić, Boris | Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators |
| Szymanska, Joanna | Fabrication of high resolution computer-generated holograms using 3D electron beam lithography. |
T |
| Tada, Yasuhiko | Directed Self-Assembly of Perpendicularly Oriented Nano-Cylinders with Liquid Crystalline Block Copolymer |
| Tan, Shida | A Quantitative Probe Current Distribution Characterization Technique for Focused Ion Beam |
| Tanenbaum, David | Stability and degradation of organic photovoltaic devices fabricated, aged, and characterized by the ISOS 3 inter-laboratory collaboration |
| Taniguchi, Jun | High Density Pattern Transfer via Roll to Roll Ultraviolet Nanoimprint Lithograpy using Replica Mold |
| Tansarawiput, Chookiat | Horizontal Growth of Silicon Nanowire Arrays for Large-Scale Circuit Applications |
| Tao, Li | Graphene transistors with record mobilities on polyimide for high-performance flexible nanoelectronics |
| Teng, Lichao | Experimental Investigation on the Short Channel Effect of Nano-Imprinted Organic Field Effect Transistors (Invited) |
| Tesch, Paul | Thermionic Electron Gun with Small Virtual Source Size for Electron Beam Lithography Applications (Invited) |
| Thackeray, James | Low Diffusion EUV Resists using Bound PAG Technology (Invited) |
| Thoms, Stephen | Long Narrow Gaps for III-V Transistors Fabricated by Electron Beam Lithography |
| Thorsen, Todd | Microfluidics Beyond Basic Biology- From Fertility Monitoring to Artificial Respiration (Invited) |
| TIberio, Richard | System to Measure the Shear Modulus of Iron at high temperature and pressure using Transverse Displacement Interferometry Fabricated by Electron Beam Lithography |
| Tomioka, Tatsuya | Au Nanorods and Nanogap Split-Ring Structures Fabricated by Reactive-Monolayer-Assisted Thermal Nanoimprinting and Electrodeposition |
| Toyoda, Mitsunori | At-Wavelength EUV Lithography Mask Observation Using a High-Magnification Objective with Three Multilayer Mirrors |
| Tsai, Hsin-Yu | Sub-30 nm pitch circuit relevant patterning in Si, SiO2 and SiN using directed self assembly based pattern generation (Invited) |
| Tseng, Ching-Tung | Fabrication of a Binary Phase Grating on a Fiber End by Utilizing Interference Lithography |
| Tseng, Yu-Chih | Enhancing the Etch Resistance of PMMA-Based Photoresist to Meet ITRS Target from Year 2022 |
| Turchanin, Andrey | 1 nm Thick Chemically Functionalized Carbon Nanomembranes (CNMs): Two-dimensional Materials for Nanoengineering |
U |
| Ulin-Avila, Erick | Sub-22nm High Throughput Maskless Nanolithography Using Quasi-3D Plasmonic Lens |
| Unno, Noriyuki | Fast and Continuous Patterning on the Surface of Plastic Fiber by Using Thermal Roller Imprint |
| Urbanski, Lukasz | Defect Tolerant Extreme Ultraviolet Lithography |
V |
| Vahdani Moghaddam, Mehran | Solar Electron Source and Thermionic Solar Cell |
| Varghese, Leo T. | Horizontal Growth of Silicon Nanowire Arrays for Large-Scale Circuit Applications |
| Vasko, Stephanie | Scanning Probe Nanostructure Direct-Write: Serial and Parallel Patterning via High Field Chemistry |
| Vartiainen, Ismo | Surface-Relief Polarization Gratings for Visible Light |
| Veres, Teodor | High Aspect Ratio, Triangular Silicon Pillars for Bump Array Concentration of Pathogenic Bacteria |
| Viswanathan, Vignesh | Patterning of Sub-10 nm Optical Apertures on Single Crystal Metallic Films with the Helium Ion Microscope (Invited) |
| Vladar, Andras | On Clean Samples and High-Resolution Quantitative Charged Particle Microscopy |
| Vladov, Nikola | Surface-Finishing of Focused Ion Beam Milled Features by Pulsed Electron Irradiation |
W |
| Wang, Lon | Employing Nano Imprint to Fabricate Space-Charge-Limited Transistors (SCLTs) |
| Wang, Qing | Full area real time monitoring of filling process by dark field illumination in UV nanoimprint lithography (Invited) |
| Wang, Si | Study of defect mechanisms in partly filled stamp cavities for thermal nano imprint control |
| Wan, Lei | Image quality and pattern transfer in block copolymer directed assembly with block-selective atomic layer deposition |
| Wanzenboeck, Heinz D. | Focused Electron Beam Induced Deposition as novel nanofabrication approach for magnetic nanosensors and nanomagnet logic |
| Wathuthanthri, Ishan |
Fabrication of Polymer Nanostructures via Maskless O2 Plasma Etching |
| Wi, Jung-Sub | Lithographically Designed Porous Plasmonic Nanostructures (Invited) |
| Wilson, Michelle J. | Arrays of Topographically and Peptide-Functionalized Hydrogels for Analysis of Biomimetic Extracellular Matrix Properties (Invited) |
| Wirtz, Tom | Towards Secondary Ion Mass Spectrometry on the Helium Ion Microscope |
| Wong, H.-S. Philip | Directed Self-Assembly for the Semiconductor Industry (Invited) |
| Winroth, Gustaf | Relationship between Film Thickness Loss and Polymer Deprotection for EUV and ArF Photoresists |
| Wu, Ji | Electrophoretic and electroosmotic flow through carbon nanotube membranes as chemical pumps |
| Wu, Jiahao | Bonding of PMMA nanofluidic devices and its effect on DNA behavior in nanochannels |
| Wu, Yi-Kuei | Angle Independent Reflective Color Filters by Plasmonic-induced Light Funneling Effect |
X |
| Xiao, Shuaigang | Progress and Challenges in Bit Patterned Media Nanofabrication (Invited) |
| Xu, Qian Feng | A superhydrophobic surface made from hydrophilic materials with micro-umbrella structures |
| Xu, Shuang | Sensitivity Analysis for Lens Aberration Measurement in Lithographic Tools Using CTC-Based Quadratic Aberration Model |
| Xu, Xu A. | Fabrication of Hollow-Shell Nano-volcanoes from Mie Scattering of Colloidal Nanospheres |
Y |
| Yaghoobi, Parham | Solar Electron Source and Thermionic Solar Cell |
| Yamada, Akio | Multi Column Cell Writer Architecture and a Correction Technique for Consistent CD Uniformity Between Column Cells |
| Yang, Chang | Horizontal Growth of Silicon Nanowire Arrays for Large-Scale Circuit Applications |
| Yang, Joel | Plasmonics At The Single-Nanometer Scale (Invited) |
| Yang, XiaoMin | Progress and Challenges in Bit Patterned Media Nanofabrication (Invited) |
| Yamazaki, Kenji | New Technique of Three-Dimensional Nanofabrication in Semiconductors by Using Electron Beam Lithography |
| Yasuda, Hiroshi | Multi-axis and Multi-beam technology for high throughput maskless E-beam lithography |
| Yasuda, Masaaki | Molecular simulation of electron-irradiation damages in resist materials (Invited) |
| Ye, Ziliang | Sub-22nm High Throughput Maskless Nanolithography Using Quasi-3D Plasmonic Lens |
| Yesilkoy, Filiz | Strain Assisted Self Lift-Off Process for the Fabrication Ultra Low Capacitive Antenna Coupled MIM Tunnel Diodes for the Application of Infrared Detection and Energy Harvesting |
| Yi, He | Design Space for One-hole Pattern using Block Copolymer Directed Self-Assembly |
| Yoshida, Hiroshi | Directed Self-Assembly of Perpendicularly Oriented Nano-Cylinders with Liquid Crystalline Block Copolymer |
| Yu, Hang | Fabrication of Nanostructured Hydrophobic Surfaces with Laser Interference Lithography |
| Yu, Zhaoning | Cleaning Induced Imprint Template Erosion |
Z |
| Zaluzec, N.J. | Plasmonic Nanostructures Fabricated using Helium and Gallium Ion Beam Instruments. |
| Zelsmann, Marc | Control of the PS-b-PDMS directed self-assembly by silsesquioxane-based graphoepitaxial substrate engineering |
| Zhang, Weihua | Giant and Uniform Fluorescence Enhancement of Organic Dye by 3D Plasmonic NanoCavity Array |
| Zhang, Wenjun | Tunable silver nano-pillar arrays as a surface-enhanced Raman scattering sensor by a self-aligned nanofabrication process |
| Zhang, Zhiping | Monolithic 3D Integration (Invited) |
| Zhao, Yuning | Via-Hole Fabrication for III-V Triple-Junction Solar Cells |
| Zheng, Zhen | Fabrication of dense non-circular nanomagnetic device arrarys using self-limiting low-energy glow-discharge processing |
| Zhou, Liangcheng | New Nanoplasmonic Devices and Fabrication for Large Enhancement and Tunability of Second Harmonic Light Generation |
