A |
| Abbas, Arwa |
Polycarbonate as an ideal grayscale electron beam resist using diluted cyclopentanone developer |
| Adams, Daniel |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Agrawal, Amit |
All-angle Negative Refraction and Active Flat Lensing in the Ultraviolet (Invited) |
| Ahn, Se Hyun |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Akamatsu, Hideki |
Three dimensional hologram-ROM duplication by UV-NIL |
| Akinwande, Deji |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Alaee, Rasoul |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Alayo, Nerea |
Novel nanofabrication method to achieve high aspect ratio metallic patterns by thermal nanoimprint lithography
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography |
| Albrecht, Thomas |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Alessandri, Ivano |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads |
| Alexander-Katz, Alfredo |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Alexander, Justin |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Alhazmi, Manal |
Contrast curve engineering by using multi-layer polystyrene electron beam resist |
| Ali, Mohamed Sultan Mohamed |
High Temperature Gradient in a Conductor: Carbon Nanotube Forest under the “Heat Trap” Condition, Mike Chang, Mehran Vahdani Moghaddam, Amir Khoshaman, Masoud Dahmardeh, Kenichi Takahata, Alireza Nojeh |
| Alkemade, Paul F. A. |
Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane |
| Alqarni, Sondos |
Out-of-plane nanofabrication using evaporated electron beam resist |
| Amador, Jennie |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Amano, Tsuyoshi |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope
Unveiling success rate of defect mitigation by experiment with EUV Actinic Blank Inspection Prototype for 16 nm hp
Influence of EUV mask structure on electron trajectories |
| Ambesi, Davide |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Amirsadeghi, Alborz |
An investigation into the role of self-assembled monolayers of silane in UV nano-imprint lithography |
| Amstutz, Platte |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| An, Sanghun |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Anderson, Chri |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Anderson, Erik |
Efficient Packaged Zoneplates for EUV Instruments
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Andresen, Nord |
Efficient Packaged Zoneplates for EUV Instruments |
| Andrew, Trisha. L |
Optical patterning of features with spacing below the far-field diffraction limit using absorbance modulation |
| Andrews, Trisha |
Patterning via Optical Saturable Transformations via Solubility Rate Difference |
| Appavoo, Kannatassen |
Electromagnetically Induced Transparency in Au:VO2 Nanoparticles |
| Appleton, Bill Ray |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications |
| Ardanuc, Serhan |
Planar Electronic Picosecond Electron Pulser |
| Argoud, Maxime |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Arkema |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Arrington, Christian |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Ashby, Paul D. |
Modulus Mapping in High Resolution Patterned Features
Negative-Tone Chemically-Amplified for Sub-20nm Lithography |
| Awale, Apeshka |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists |
| Azimi, Sara |
Fabrication of Complex Three-Dimensional Multilevel Silicon Micro- and Nano-Structures using High Energy Ion Irradiation |
B |
| Babin, Sergey |
Simulation of dose variation and charging due to fogging in electron beam lithography |
| Baca, Ehren |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Bagal, Abhijeet |
Liquid-Immersion Lloyd’s Mirror Interference Lithography |
| Baker, Bowen |
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Balakrishnan, Kaushik |
Fabrication of Patterned Interference-Based and Absorption-Based Polarizers |
| Baldwin, Kirk |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Balik, Charles |
Ga+ Focused Ion Beam Micromachining of Thermoplastic Polymers |
| Ballard, Joshua |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Bao, Wei |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads |
| Barbastathis, George |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Barnola, Sebastien |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Batchelor, Alan |
Ga+ Focused Ion Beam Micromachining of Thermoplastic Polymers |
| Bauer, Anton |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Bauerdick, Sven |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| Baum, Mario |
Functional Nano Patterns realized by Thermal and UV Nano Imprint Lithography |
| Baylav, Burak |
Investigating effects of aerial image averaging and pupil plane filtering on line edge roughness (LER) |
| Beck, Corey |
Ionic Transportation through DNA-based Nanochannels |
| Belloni, Jacqueline |
Synthesis of metal nanoparticles in polymeric films induced by electron beam |
| Bender, Markus |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Berggren, Karl K. |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Berggren, Karl |
Optically Actuated Nanostructured Electron-Emitter Arrays
Sacrificial Post Templating Method for Block Copolymer Self-Assembly
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM
Lithographically-Defined ZnO Nanowire Growth |
| Berglund, Andrew |
DNA Origami: Prospects for Nanomanufacturing |
| Bertani, Paul |
Ionic Transportation through DNA-based Nanochannels |
| Besacier, Maxime |
A method for dynamic parameterized shape reconstruction. Application to scatterometry |
| Besser, Jan |
Functional Nano Patterns realized by Thermal and UV Nano Imprint Lithography |
| Best, Keith |
High accuracy dual side overlay with KOH through wafer etching |
| Beyer, André |
Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography |
| Biafore, John |
Stochastic Exposure Kinetics of EUV Photoresists: A Simulation Study |
| Bilenberg, Brian |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Black, Charles T. |
Plasmonic Conductors for Organic Solar Cells |
| Blackwell, James |
Modulus Mapping in High Resolution Patterned Features
Negative-Tone Chemically-Amplified for Sub-20nm Lithography |
| Bojko, Richard |
Process Monitoring of an Electron Beam Lithography Process for Silicon Photonics in a University Facility |
| Bokor, Jeffrey |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Bonanni, Valentina |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| Boots, Henk |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Borgohain, Debabrot |
Development of a Mask-less Nanofabrication Process for SnO2 Periodic Nanostructure |
| Borgström, Magnus T. |
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Borisov, Sergey |
Simulation of dose variation and charging due to fogging in electron beam lithography |
| Borodovsky, Yan |
NGL for NGL: Next Generation Lithography for Next Generation Logic (Invited) |
| Borrisé, Xavier |
Novel nanofabrication method to achieve high aspect ratio metallic patterns by thermal nanoimprint lithography |
| Bosman, Michel |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Botman, Aurelien |
In-situ Microfluidics using a Liquid Injector for the Study of Beam Induced and Dynamic Processes |
| Breese, Mark |
Fabrication of Complex Three-Dimensional Multilevel Silicon Micro- and Nano-Structures using High Energy Ion Irradiation |
| Bresin, Matthew |
Liquid-phase electron-beam-induced-deposition on bulk substrates without liquid cells
Controlling the Morphology of Silver Nanoparticle Films formed by Laser-induced Deposition from Liquids |
| Brink, Markus |
Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning |
| Bro, Tobias Hedegaard |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Brodie, Alan |
Image distortion in REBL system: the correctable and the residual
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Brougher, Gii |
Small-Pitch Electron Diffraction Holograms Patterned on Inorganic Resist with Electron Beam Lithography |
| Brown, Devin |
Pattern exposure order dependence in hydrogen silsequioxane |
| Brown, Keith A. |
Active Cantilever-free Scanning Probe Lithography (Invited) |
| Bruccoleri, Alexander |
KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings |
| Bruchhaus, Lars |
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| Brugger, Jürgen |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Bucchignano, James J. |
Dot-Matrix Marks for Dynamic Overlay Measurements in Electron Beam Lithography |
| Bunting, Andrew |
High yield fabrication of graphene resonators array with poly-Si sacrificial layer |
| Burcham, Kevin E. |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Burek, Michael |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Burke, Conor |
Field Effect Transistor Performance of Hydrothermal ZnO Nanowires (Invited) |
| Burr, Justin |
Optimization of Electron Beam Patterned HSQ Mask Edge Roughness for Low-Loss Silicon Waveguides |
| Bustos, Jessy |
Line width roughness reduction strategies for resist patterns printed via electron beam lithography |
C |
| Cabrini, Stefano |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads
A novel route for fabricating Printable Photonic Devices with a high refractive index, Carlos Pina Hernandez, Giuseppe Calafiore, Christophe Peroz, aBeam Tech
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Cai, Haogang |
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| Cai, Jingxuan |
Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane |
| Calafiore, Giuseppe |
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography |
| Camino, Fernando E. |
Plasmonic Conductors for Organic Solar Cells |
| Cantu, Precious |
Patterning via Optical Saturable Transformations via Solubility Rate Difference |
| Cao, Yi |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Carbone, Corrado |
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna |
| Carlton, David |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Carnevale, Santino |
GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes |
| Carroll, Allen |
Image distortion in REBL system: the correctable and the residual |
| Cau, Jean-Christophe |
Magnetic field assisted micro contact printing: a new concept of fully automated and calibrated process |
| Chandorkar, Saurabh |
Thermally-Modulated Alignment for Nanoimprinting |
| Chang, Cheng-Kai |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Chang, Chih-Hao |
Multifunctional Nanostructured Materials: Blurring the Lines between Optical Interfaces (Invited)
Fabrication of Hierarchical Three-Dimensional Nanostructures Using Template-Directed Assembly of Colloidal Particles
Fabrication of Periodic Hollow-Shell Nano-Volcano Arrays for Particle Trapping
Liquid-Immersion Lloyd’s Mirror Interference Lithography |
| Chang, En-Chiang |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Chang, Hsiao-Yu |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Chang, Jae-Byum |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Chang, Long |
Magnetic patterning by oxygen reduction using low energy Helium irradiation |
| Chang, Mike |
Laser Induced Structural Damage to Multi-walled Carbon Nanotubes in a Controlled-Pressure Environment |
| Chang, Mu-Tung |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Chang, Robert |
Infrared nanophotonics based on indium-tin-oxide nanorod array |
| Chang, Sehoon |
Lithographically-Defined ZnO Nanowire Growth |
| Chang, Wei-Tse |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Chao, Weilun |
Efficient Packaged Zoneplates for EUV Instruments
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Chapuis, Yves-Andre |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Charley, Anne-Laure |
CD Matching between CD-SEM and Scatterometry Metrology |
| Charpin, Christelle |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Chau, Kenneth |
All-angle Negative Refraction and Active Flat Lensing in the Ultraviolet (Invited) |
| Chen, Edward |
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| Chen, Hao |
Double External Quantum Efficiency/Light Extraction and Widen Viewing Angle of Organic Light-Emitting Diodes with New Plasmonic Cavity with Subwavelength Hole Array (PlaCSH)
Sub-30 nm Roller Nanoimprint Lithography Using Flexible Hybrid Molds and Applications to Large-Area High-Performance Nanoplasmonic Sensors and Solar Cells
Fabrication of Large-area Flexible Roll-to-Roll Nanoimprint Molds with Sub-100nm Features Using Step-and-Repeat Duplication
Patterning of Light-Extraction Nanostructures on Sapphire Substrates Using Nanoimprint, SiO2 Masking and ICP Dry Etching |
| Chen, Hsuen-Li |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Chen, Kuei-Hsien |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Chen, Li-Chyong |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Chen, Li |
Optimization of Electron Beam Patterned HSQ Mask Edge Roughness for Low-Loss Silicon Waveguides |
| Chen, Qin |
Direct write and nanoprinting for plasmon resonance color filters (Invited) |
| Chen, T. C. |
Magnetic domain wall motion in permalloy wires with nanometer-scaled notches |
| Chen, Tao |
High yield fabrication of graphene resonators array with poly-Si sacrificial layer |
| Chen, Yi-Sheng |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Chen, Yifang |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates |
| Chenet, D. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
| Cheng, Guanglei |
Oxide Nanoelectronics on Demand (Invited) |
| Cheng, Jian Wei Jayce |
Lithographically-Defined ZnO Nanowire Growth |
| Cheng, Jing |
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Cheng, Xing |
Fabrication of organic MESFET device by dual-layer thermal nanoimprint
High-Throughput Transfer Imprinting for Organic Semiconductor
Exceptional Thermal Stability of Thermoplastic Polymer Nanostructures Patterned by Nanoimprint
Polymeric Sidewall Transfer Lithography |
| Cheng, Yao-Te |
Dual Layer Negative Tone Metal Liftoff Electron Beam Lithography process for nanometer scale Plasmonic and Photonic devices |
| Cheong, K. H. |
Parallel Auger Electron Analysis inside Scanning Electron Microscopes |
| Cheong, Lin Lee |
3 D Nanostructures via Aligned Stacking of Pre-patterned Membranes |
| Cheshmekhani, Ameneh |
Methods for Controlled Polymerization in Negative Tone Resists |
| Cheung, Rebecca |
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout
Control of stress in sputtered tantalum films for MEMS applications, Enrico Mastropaolo
High yield fabrication of graphene resonators array with poly-Si sacrificial layer |
| Chevalier, Xavier |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Chhim, Bophan |
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Chihara, Yoshinori |
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study |
| Chirumamillaa, M. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Cho, H.-K. |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography |
| Cho, Han-Ku |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Choi, Chang-Hwan |
Fabrication of hierarchical nanostructures using free-standing tri-layer membrane
Plasmonic Nanogap Arrays Fabricated via Moiré Holographic Lithography
Fabrication of Nano-Bowl Arrays via Simple Holographic Patterning and Lift-Off Process |
| Choi, Hong Kyoon |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Choi, Hyungryul |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Choi, Jun-Hyuk |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Choi, Keebong |
The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography |
| Choo, Gihoon |
High-Throughput Transfer Imprinting for Organic Semiconductor |
| Chou, Stephen |
Double External Quantum Efficiency/Light Extraction and Widen Viewing Angle of Organic Light-Emitting Diodes with New Plasmonic Cavity with Subwavelength Hole Array (PlaCSH)
Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography
Sub-30 nm Roller Nanoimprint Lithography Using Flexible Hybrid Molds and Applications to Large-Area High-Performance Nanoplasmonic Sensors and Solar Cells
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint
Ultrathin, High-Efficiency, Broad-Band, Omni-Acceptance Organic Solar Cells Using New Plasmonic Cavity with Subwavelength Hole Array
Fabrication of Large-area Flexible Roll-to-Roll Nanoimprint Molds with Sub-100nm Features Using Step-and-Repeat Duplication
Patterning of Light-Extraction Nanostructures on Sapphire Substrates Using Nanoimprint, SiO2 Masking and ICP Dry Etching |
| Chouiki, M. |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| Chu, Yiwen |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Chueh, Ching-Hao |
Structural properties and electroforming-free resistive switching characteristics of Nd2O3, Dy2O3 and Er2O3 memory devices fabricated in full room temperature |
| Civay, Deniz |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Cohen, Robert |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Cohen, Ross |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Coleman, Johnathan |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Colle, Dominique |
Advanced Maskless Grayscale Lithography using a new writing strategy to increase the number of grayscale levels |
| Colombe, Yves |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Comboroure, Corinne |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Con, Celal |
Nanofabrication of high aspect ratio structures using evaporated polystyrene resist containing metal
Effect of toluene treatment on PDMS molding into nanoholes |
| Consultant |
A Multiple electron beam wafer inspection system design using permanent magnetic lens arrays |
| Conway, James W |
Dual Layer Negative Tone Metal Liftoff Electron Beam Lithography process for nanometer scale Plasmonic and Photonic devices |
| Cooke, Simon |
Image distortion in REBL system: the correctable and the residual
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Crozier, Kenneth |
The nano-optics of plasmonic optical tweezers, SERS substrates and multi-colored silicon nanowires (Invited) |
| Cui, Bo |
Theoretical study of the effects of substrate material refractive index on the optical transmission of nano-hole arrays
Fabrication of Gold Bowtie Nano-antenna by E-beam Lithography on Si3N4 Membrane for SERS
Electron beam optimization using self-developing resist for large write-field electron beam lithography
Write-field alignment optimization using self-developing electron beam resist
Effect of toluene treatment on PDMS molding into nanoholes
Contrast curve engineering by using multi-layer polystyrene electron beam resist
Polycarbonate as an ideal grayscale electron beam resist using diluted cyclopentanone developer |
| Cui, Celal Con Bo |
Out-of-plane nanofabrication using evaporated electron beam resist |
Cui, Xugao
Enhanced up-conversion luminescence in a microtubular optical resonator |
| Cui,, Bo |
Nanofabrication of high aspect ratio structures using evaporated polystyrene resist containing metal |
| Cumming, David |
Direct write and nanoprinting for plasmon resonance color filters (Invited) |
| Curtis, Todd |
HfC(310) high brightness sources for advanced imaging applications (Invited) |
| Czaplewski, David |
Design and Fabrication of Ultrananocrystalline Diamond Based Nanoelectromechanical Switches
Determining the range and intensity of backscattered electrons from the substrate density and atomic number (Invited) |
D |
| Dai, Qing |
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Dani, John |
Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain |
| Daniels-Race, Theda |
Nano-Rough Gold for Enhanced Raman Scattering |
| Dansberg, M.P. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Dasa, G. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Dash, Raj Kishora |
Development of a Mask-less Nanofabrication Process for SnO2 Periodic Nanostructure |
| De Angelisa, F. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| De Bisschop, Peter |
Continuous and Stochastic effects for 2D structures in EUV Lithography |
| De Boeck, Jo |
Breaking through the scaling boundaries, key for a sustainable society |
| de Boer, G. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| de Coulomb, C. Thanner |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| de Leon, Nathalie |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| De Oteyza, Dimas Garcia |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| de Pablo, Juan |
Non Equilibrium Block Copolymer Directed Self Assembly. Multiblocks, Solvents, and Thick Films (Invited) |
| Decker, Shawn |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Delgadillo, Paulina A. Rincon |
Directed Self-Assembly of Ternary Blends of Block Copolymer and Homopolymers on Chemical Patterns |
| Denby, Phil |
Mm2 size arrays of metal nano-particles for solar cell applications fabricated by Electron Beam Lithography (EBL) |
| Denham, Paul |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Depero, Laura |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads |
| Depoil, David |
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| DeRose, Guy |
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Dew, Steven K. |
Study of multilayer systems in electron beam lithography
Application of EBL fabricated nanostructured substrates for SERS detection of protein A in aqueous solution |
| Dey, Ripon Kumar |
Electron beam optimization using self-developing resist for large write-field electron beam lithography
Write-field alignment optimization using self-developing electron beam resist |
| Dhima, Khalid |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Reflow minimization via viscosity control by exposure
Underestimated impact of instabilities with nanoimprint
2D- visualization of imprint-induced flow by means of crystallizing polymers |
| Dhuey, Scott |
Negative-Tone Chemically-Amplified for Sub-20nm Lithography
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna
A novel route for fabricating Printable Photonic Devices with a high refractive index, Carlos Pina Hernandez, Giuseppe Calafiore, Christophe Peroz, aBeam Tech
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Di Fabrizio, Enzo |
The five whys (and one h) of super hydrophobic surfaces in medicine (Invited) |
| Di Fabrizioa, E. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Ding, Wei |
Double External Quantum Efficiency/Light Extraction and Widen Viewing Angle of Organic Light-Emitting Diodes with New Plasmonic Cavity with Subwavelength Hole Array (PlaCSH)
Ultrathin, High-Efficiency, Broad-Band, Omni-Acceptance Organic Solar Cells Using New Plasmonic Cavity with Subwavelength Hole Array |
| Diniz, José Alexandre |
Fabrication of p-type Silicon Nanowires for 3D FETs Using Focused Ion Beam |
| Divan, Ralu |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Diziain, Séverine |
Freestanding Photonic Crystals in Lithium Niobate |
| Dmitriev, Alexandre |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| dos Santos, Marcos Vinicius Puydinger |
Fabrication of p-type Silicon Nanowires for 3D FETs Using Focused Ion Beam |
| Dou, Hong-Yan |
SPR-based Surface-enhanced Raman Scattering for the Detection of Organophosphorus Pesticide |
| Dou, Hongyan |
2D Azobenzene Liquid-crystalline Polymer-based Switchable Photonic Crystals via Nanoimprint |
| Dowsett, David |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Druzhinina, Tamara |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Du, Kan |
DNA Origami: Prospects for Nanomanufacturing |
| Du, Ke |
Fabrication of hierarchical nanostructures using free-standing tri-layer membrane
Plasmonic Nanogap Arrays Fabricated via Moiré Holographic Lithography
Fabrication of Nano-Bowl Arrays via Simple Holographic Patterning and Lift-Off Process |
| Duan, Huigao |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Duan, Jinsong |
Pronounced Effects of Anisotropy on Plasmonic Properties of Nanorings Fabricated by Electron Beam Lithography, Rachel Near, Georgia Institute of Technology |
| Dumond, J. |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| Dustin, Michael |
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
E |
| Ehr, Jim Von |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Eichelsdoerfer, Daniel J. |
Active Cantilever-free Scanning Probe Lithography (Invited) |
| Eisenbraun, Eric |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Ekinci, Yasin |
EUV Bessel beam lithography
Single-digit patterning using EUV light |
| El Kodadi, Mohamed |
A method for dynamic parameterized shape reconstruction. Application to scatterometry |
| El-Sayed, Mostafa |
Pronounced Effects of Anisotropy on Plasmonic Properties of Nanorings Fabricated by Electron Beam Lithography, Rachel Near, Georgia Institute of Technology |
| Elam, Jeffrey |
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column |
| Elek, Jonathan |
Fabrication of Hierarchical Three-Dimensional Nanostructures Using Template-Directed Assembly of Colloidal Particles |
| Elezi, Eljon |
Nanograting–Mediated Growth of Bismuth Selenide Topological Insulator Nanoribbons |
| Emanuel, M |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Emmrich, Daniel |
Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography |
| Endo, Akira |
Extendability of LPP EUV source technology in kW average power and 6.x nm wavelength operation (Invited) |
| Engelmann, Sebastian U. |
Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning |
| Englund, Dirk |
Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| Ercius, Peter |
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Esashi, Masayoshi |
Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography, Naokatsu Ikegami, Nobuyoshi Koshida, Tokyo University of Agriculture and Technology |
| Evans-Lutterodt, Kenneth |
Measuring Field-Stitch Boundary Error of Electron Beam Lithography With X-ray Diffraction |
F |
| Fader, Robert |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Fang, Cheng-Yi |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Fang, Yangfu |
Enhanced up-conversion luminescence in a microtubular optical resonator |
| Farrow, Reginald |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Fay, Patrick |
Inductively Coupled Plasma Etching of Through-Cell Vias in Indium-Bearing III-V Solar Cells Using SiCl4/Ar plasma |
| Fegadolli, William |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) |
| Feldman, Martin |
Nano-Rough Gold for Enhanced Raman Scattering |
| Feng, Philip |
Silicon Carbide Nanoelectromechanical Systems and Nanomechanical Logic (Invited) |
| Fenger, Germain |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Fernandez-Cuesta, Irene |
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna |
| Ferranti, D. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Ferranti, David |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Filho, José Godoy |
Fabrication of p-type Silicon Nanowires for 3D FETs Using Focused Ion Beam |
| Finders, Jo |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Finn, Andreas |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| Finnegan, Patrick |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Fischer, Peter |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Fischer, Wolf-Joachim |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| Fito, Taras |
Study of multilayer systems in electron beam lithography |
| Flauraud, Valentin |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Fleger, Markus |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Fleming, Yves |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Fleury, Guillaume |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Foundry, Molecular |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Fowlkes, Jason D. |
Enhanced purity via laser assisted electron beam induced deposition of tungsten |
| Frey, Lothar |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Fridmann, Joel |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| Fu, Chien-Chung |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Fu, Joseph |
Atom-based Pitch and Length Standards |
| Fu, Wangyang |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Fucetola, Corey |
3 D Nanostructures via Aligned Stacking of Pre-patterned Membranes |
| Fuchs, Ehud |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Fujita, Honoka |
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Fukuda, Hiroshi |
Reconstructing Cross-Sectional Profiles from Top-View SEM Images Using Edge Fluctuation Characteristics |
| Funakoshi, Kota |
Durability assessment of mold release agents for ultraviolet nanoimprint lithography |
G |
| G., Amir Tavakkoli K. |
Sacrificial Post Templating Method for Block Copolymer Self-Assembly |
| G.Kreindl |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| Gadegaard, Nikolaj |
Targeted nanopatterning for medical applications (Invited) |
| Gallatin, Gregg |
DNA Origami: Prospects for Nanomanufacturing |
| Gao, He |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Garfunkel, Eric |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Gargas, Daniel |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna |
| Gauzner, Gene |
Defect-tracking For Nanoimprint Lithography Using Optical Surface Analyzer and Scanning Electron Microscope |
| Gaylord, Thomas K. |
Pattern-integrated interference lithography: vector modeling of the single-exposure recording of integrated photonic-crystal structures |
| Ge, Haixiong |
A Light-driven Micro-motor Based on Angular Momentum Transfer through Subwavelength Grating Waveplates |
| Geer, Robert |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Geiss, Reinhard |
Freestanding Photonic Crystals in Lithium Niobate |
| Gely, Marc |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Gentile, Francesco |
The five whys (and one h) of super hydrophobic surfaces in medicine (Invited) |
| Gerard, Mathieu |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Gessner, Thomas |
Functional Nano Patterns realized by Thermal and UV Nano Imprint Lithography |
| Gharbi, Ahmed |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Gheewala, Mufaddal |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists
Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain
Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates |
| Giannelis, Emmanuel |
Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) |
| Gila, Brent |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications |
| Glatzel, Thilo |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Glinskis, Simas |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Gobrecht, Jens |
EUV Bessel beam lithography
Single-digit patterning using EUV light |
| Goh, Xiao Ming |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Goldberg, Kenneth |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Gölzhäuser, Armin |
Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography |
| Gonzalez, Carlos M. |
Enhanced purity via laser assisted electron beam induced deposition of tungsten |
| Gonzalez, G.M. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Gopalakrishnana,b, A. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Gosselin, David |
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography |
| Gotrik, Kevin |
Sacrificial Post Templating Method for Block Copolymer Self-Assembly |
| Graczyk, Mariusz |
Replication of NIL Stamps by Metal-Assisted Chemical Etching of Silicon
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Gradecak, Silvija |
Lithographically-Defined ZnO Nanowire Growth |
| Grady, Eldad |
Control of stress in sputtered tantalum films for MEMS applications, Enrico Mastropaolo |
| Graves, William |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Greer, Frank |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Grella, Luca |
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Grepstad, Jon Olav |
Advances on e-beam fabrication of photonic crystal membranes |
| Greve, Martin |
Mm2 size arrays of metal nano-particles for solar cell applications fabricated by Electron Beam Lithography (EBL) |
| Griffis, Dieter |
Ga+ Focused Ion Beam Micromachining of Thermoplastic Polymers |
| Grill, Leonhard |
Controlled bottom-up assembly of functional molecules: From wires to networks (Invited) |
| Gronheid , Roel |
Directed Self-Assembly of Ternary Blends of Block Copolymer and Homopolymers on Chemical Patterns |
| Gu, C.Z. |
Hexagonal three-dimensional plasmonic nanoantenna arrays |
| Gu, Jing |
Cryogenic imaging of biological specimens using Helium Ion Microscope |
| Gu, Xiaodan |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Gu, Zheng |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Guan, Dong |
KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings |
| Guillorn, Michael A. |
Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning
Dot-Matrix Marks for Dynamic Overlay Measurements in Electron Beam Lithography |
| Gullikson, Eric |
Efficient Packaged Zoneplates for EUV Instruments
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Guo, Dengji |
Mechanical characteristics of the ultra-long horizontal free-space-nanowire grown by real-time feedback control on focused-ion-beam chemical vapor deposition |
| Guo, Hong-Jie |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists |
| Guo, L. Jay |
Moving Towards Structural Color Display: Angle Insensitive Structural Colors Based on Metallic Gratings and Color Pixels beyond the Diffraction Limit
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Guo, Lingjie |
Tapered hyperbolic metamaterials for broadband absorption |
| Guo, Peijun |
Infrared nanophotonics based on indium-tin-oxide nanorod array |
| Guo, Rui |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Gutierrez-Rivera, Luis |
Study of multilayer systems in electron beam lithography
Application of EBL fabricated nanostructured substrates for SERS detection of protein A in aqueous solution |
| Gysin, Urs |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
H |
| Hack, Paul |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Hadziioannou, Georges |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Hagen, Kees |
Fabrication of a rotation corrector for electron multi beam array micro-lenses |
| Haglund, Richard |
Electromagnetically Induced Transparency in Au:VO2 Nanoparticles |
| Hah, Dooyoung |
Nano-Rough Gold for Enhanced Raman Scattering |
| Hamaguchi, Shin-ichi |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Hamden, Erika |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Han, Xue |
Electro-Active Single Mode Integrated Optical Waveguide Application in Spectroelectrochemistry |
| Hannon, Adam F. |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Hannon, Adam |
Sacrificial Post Templating Method for Block Copolymer Self-Assembly |
| Hansen, Ole |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Hansen, Robin |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Hao, Hanfang |
Patterning Plasmonic Nanostructures - Regimes of the Gallium Focused Ion Beam and Helium Ion Microscope |
| Harada, Tetsuo |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope |
| Harteneck, Bruce |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Hartfield, Cheryl. D. |
Enhanced purity via laser assisted electron beam induced deposition of tungsten |
| Hartley, John |
Print based estimation of probe size distribution in electron beam lithography |
| Hartung, Holger |
Freestanding Photonic Crystals in Lithium Niobate |
| Haruyama, Yuichi |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint
Abrasion Test for Antisticking Layer by Scanning Probe Microscopy
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy
Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Harvey, Tyler |
Small-Pitch Electron Diffraction Holograms Patterned on Inorganic Resist with Electron Beam Lithography |
| Hastings, J. Todd |
Liquid-phase electron-beam-induced-deposition on bulk substrates without liquid cells
Controlling the Morphology of Silver Nanoparticle Films formed by Laser-induced Deposition from Liquids |
| Hausmann, Birgit |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| He, Xiaoli |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Heerkens, Carel |
Fabrication of a rotation corrector for electron multi beam array micro-lenses |
| Heidari, Babak |
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Heilmann, Ralf |
KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings |
| Henderson, Clifford L. |
Methods for Controlled Polymerization in Negative Tone Resists
Detailed Molecular Dynamics Studies of Block Copolymer Directed Self-Assembly: Effect of Guiding Layer Properties on Block Copolymer Directed Self-Assembly
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Henein, Gerard |
Wafer Scale Fabrication of High-Aspect Ratio Gold Nanostructures using Ar+ - Ion Beam Etching |
| Hennessy, John |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Hensel, René |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| Her, Jim-Long |
Structural properties and electroforming-free resistive switching characteristics of Nd2O3, Dy2O3 and Er2O3 memory devices fabricated in full room temperature |
| Herman, Gregory |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Heurlin, Magnus |
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Hillenbrand, Rainer |
Infrared nanospectroscopy meets FIB and TEM (Invited) |
| Hirai, Yoshihiko |
Simulation Study on Template Releasing Process in Nanoimprint Lithography
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study
Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Hirano, Ryoichi |
Influence of EUV mask structure on electron trajectories |
| Hiroshima, Hiroshi |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint |
| Hite, Dustin |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Hobbs, Richard |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Hodges, Jonathan |
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| Hoenk, Michael |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Hofer, Manuel |
Mix&Match Electron Beam and Scanning Probe Lithography for sub-5 nm Patterning |
| Hoga, Morihisa |
Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography |
| Hojeij, Mohamad |
EUV Bessel beam lithography
Single-digit patterning using EUV light |
| Hollowell, Andrew E. |
Moving Towards Structural Color Display: Angle Insensitive Structural Colors Based on Metallic Gratings and Color Pixels beyond the Diffraction Limit |
| Hollowell, Andrew |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Holst, Bodil |
Advances on e-beam fabrication of photonic crystal membranes
Mm2 size arrays of metal nano-particles for solar cell applications fabricated by Electron Beam Lithography (EBL) |
| Holt, Martin |
Determining the range and intensity of backscattered electrons from the substrate density and atomic number (Invited) |
| Homyk, Andrew |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) |
| Hone, J. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
| Hone, James |
Graphene Field-Effect Transistors with Gigahertz-Frequency Power Gain on Flexible Substrates |
| Hong, SungEun |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Hornung, Michael |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Hozumi, Takashi |
Application of Proton Beam Writing to a Direct Etching of PTFE for PDMS Replica Molding |
| Hsu, Wei-Hao |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Hsu, Wei-Liang |
Fabrication of Patterned Interference-Based and Absorption-Based Polarizers |
| Hu, Huan |
Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) |
| Hu, Xiaolong |
Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes |
| Huang, Gaoshan |
Enhanced up-conversion luminescence in a microtubular optical resonator
Thermal dewetting of gold particles on a template surface |
| Huang, Tao |
SPR-based Surface-enhanced Raman Scattering for the Detection of Organophosphorus Pesticide |
| Huang, Tzer-Bin |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Huard, Chad |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Huebner, Uwe |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Humbach, Oliver |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Huynh, Chuong |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Hwang, Ing-Shouh |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Hwang, JuneHo |
Towards an RF Planar Waveguide Electron LINAC
Planar Electronic Picosecond Electron Pulser |
| Hwu, Justin |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
I |
| Icard, Beatrice |
Line width roughness reduction strategies for resist patterns printed via electron beam lithography |
| Ichimura, Takashi |
High throughput scanning electron microscopes with MEMS-based multi-beam optics |
| Iida, Susumu |
Influence of EUV mask structure on electron trajectories |
| Im, Mi Young |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Iqbal, Zafer |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Irannejad, Mehrdad |
Theoretical study of the effects of substrate material refractive index on the optical transmission of nano-hole arrays
Fabrication of Gold Bowtie Nano-antenna by E-beam Lithography on Si3N4 Membrane for SERS |
| Ishchuk, Valentyn |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Ishihara, Sunao |
Mechanical characteristics of the ultra-long horizontal free-space-nanowire grown by real-time feedback control on focused-ion-beam chemical vapor deposition
Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection |
| Ishikawa, Manabu |
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold |
| Itani, Toshiro |
An in situ analysis of EUV resist dissolution characteristics by high speed AFM |
| Iyoshi, Shuso |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy |
Iyoshi, Syuso
Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly |
J |
| Jager, R. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Jahn, Andreas |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| Jan, Neuman |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Jarnagin, Nathan |
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Jarro, Carlos A. |
Controlling the Morphology of Silver Nanoparticle Films formed by Laser-induced Deposition from Liquids |
| Jeanmaire, Damien |
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Jede, Ralf |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications |
| Jedrasik, Piotr |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| Jeon, C.-U. |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography |
| Jeon, Chan-Uk |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Jeong, Jun-Ho |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Jewell, April |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Ji, Ran |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Ji, Xin-Ming |
SPR-based Surface-enhanced Raman Scattering for the Detection of Organophosphorus Pesticide |
| Ji, Xinming |
2D Azobenzene Liquid-crystalline Polymer-based Switchable Photonic Crystals via Nanoimprint |
| Jiang, Hao |
Improved Switching Uniformity for TiO2/HfO2 Bi-layer Memristive Devices
Voltage Dependent Electroforming of TiO2-based Memristive Devices
Low-power Resistive Switching in Ultra-smooth Native AlOx Thin Films Fabricated by Template Stripping
Ultralow Voltage Resistive Switching in Ultrathin Silicon Oxide |
| Jiang, Li |
Nano-structure Modified Thin-Film Paper Energy Storage Device |
| Jiang, Youwei |
Exceptional Thermal Stability of Thermoplastic Polymer Nanostructures Patterned by Nanoimprint |
| Jiruše, Jaroslav |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Jones, Geb |
Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography |
| Jordens, Robert |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Jorntell, Henrik |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Jost, John |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Jun, David |
First focused ion beam images using a novel electron impact gas ion source |
| Jung, Daewoong |
Analysis and understanding the regrowth of Multi-walled carbon nanotube forests
Effect of thickness of the catalyst film and the hydrogen gas on the spin-capability of a MWCNT forest |
| Jung, Joo-Yeon |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Jung, Yun Suk |
Si MOSFET with a Nanoscale Void Channel (Invited) |
| Jung, Yunbum |
Fabrication of organic MESFET device by dual-layer thermal nanoimprint |
| Jussot, Julien |
Line width roughness reduction strategies for resist patterns printed via electron beam lithography |
K |
| Kaestner, Marcus |
Mix&Match Electron Beam and Scanning Probe Lithography for sub-5 nm Patterning |
| Kahl, Michael |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Kaichi, Tokyo Yuya |
Pre-hardening Ultraviolet nanoimprint lithography using opaque mold |
| Kamata, Yoshiyuki |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Kanamaru, Masahiro |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Kaneko, Shu |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint |
| Kang, Kyung-Nam |
Nano-Rough Gold for Enhanced Raman Scattering |
| Kang, Woowon |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Kanwal, Alokik |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Kaplan, Alex |
Tapered hyperbolic metamaterials for broadband absorption |
| Kärtner, Franz |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Kasica, Richard |
Wafer Scale Fabrication of High-Aspect Ratio Gold Nanostructures using Ar+ - Ion Beam Etching |
| Kataoka, Masaya |
Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography |
| Katz, Alexander |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Kawata, Hiroaki |
Simulation Study on Template Releasing Process in Nanoimprint Lithography
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study
Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Kawatsuki, Nobuhiro |
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Keathley, Phillip |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Kellogg, Sean |
Off Axis Modeling and Measurement of Emission Parameters for the Schottky Emitter |
| Keszler, Douglas |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Khan, F |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Kharel, Prashanta |
Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes |
| Khizroev, Sakhrat |
Magnetic patterning by oxygen reduction using low energy Helium irradiation |
| Khoshaman, Amir |
Laser Induced Structural Damage to Multi-walled Carbon Nanotubes in a Controlled-Pressure Environment |
| Khursheed, A. |
Parallel Auger Electron Analysis inside Scanning Electron Microscopes |
| Khursheed, Anjam |
Design of ring-cathode focused electron beam columns
A Multiple electron beam wafer inspection system design using permanent magnetic lens arrays |
| Kiani, Amirreza |
Lithographically-Defined ZnO Nanowire Growth |
| Kidwingira, Françoise |
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column |
| Kihara, Naoko |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Kikitsu, Akira |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Killge, Sebastian |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| Kim, B.-G. |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography |
| Kim, B. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
| Kim, Byung-Gook |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography |
| Kim, Byung-Guk |
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Kim, Chul-Hyun |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Kim, Donghyun |
Analysis and understanding the regrowth of Multi-walled carbon nanotube forests
Effect of thickness of the catalyst film and the hydrogen gas on the spin-capability of a MWCNT forest |
| Kim, Geehong |
The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography |
| Kim, Hong Koo |
Si MOSFET with a Nanoscale Void Channel (Invited) |
| Kim, Hyowook |
Graphene-based Broadband THz Modulators, Haidong Zhang, Ye Shao |
| Kim, Jeong-Gil |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Kim, Jeonghwan |
Nano-Rough Gold for Enhanced Raman Scattering |
| Kim, Jongmin |
Nanotechnology Convergence for IT, ET, and BTs |
| Kim, Sang-Kon |
Impact of pattern profile on surface plasmon polaritons in computational lithography |
| King, William |
Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) |
| Kinoshita, Hiroo |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope |
| Kitagawa, Takuya |
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Klaus, David P. |
Dot-Matrix Marks for Dynamic Overlay Measurements in Electron Beam Lithography |
| Klein, K. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Klein, Kate L. |
Understanding Nanomachining in Gold Substrates |
| Klein, Kate |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Kley, Ernst-Bernhard |
Freestanding Photonic Crystals in Lithium Niobate |
| Ko, Seung Hyeon |
DNA Origami: Prospects for Nanomanufacturing |
| Kobayashi, Kei |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint |
| Kojima, Akira |
Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography, Naokatsu Ikegami, Nobuyoshi Koshida, Tokyo University of Agriculture and Technology |
| Kojima, Shinichi |
Image distortion in REBL system: the correctable and the residual |
| Kometani, Reo |
Mechanical characteristics of the ultra-long horizontal free-space-nanowire grown by real-time feedback control on focused-ion-beam chemical vapor deposition
Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection |
| Kondo, Mizuho |
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Konno, Yuki |
Control of carbon nanofibers configuration on glassy carbon by two-step ion beam irradiation method |
| Korivi, Naga |
Nano-structure Modified Thin-Film Paper Energy Storage Device |
| Kozawa, Takahiro |
Nanochemistry in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography (Invited)
Synthesis of metal nanoparticles in polymeric films induced by electron beam
Process Dependence of Line Width Roughness in Electron Beam Resists |
| Kozicki, Michael |
Ionic memory and the future of the semiconductor industry (Invited) |
| Kratschmer, Ernst |
Dot-Matrix Marks for Dynamic Overlay Measurements in Electron Beam Lithography |
| Kratschmer, Ernst |
Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning |
| Krishna, M Ghanashyam |
Development of a Mask-less Nanofabrication Process for SnO2 Periodic Nanostructure |
| Kristensen, Anders |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Kruit, P. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Kruit, Pieter |
High throughput scanning electron microscopes with MEMS-based multi-beam optics
First focused ion beam images using a novel electron impact gas ion source
Fabrication of a rotation corrector for electron multi beam array micro-lenses |
| Krysak, Marie |
Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) |
| Kshirsagar, Sachin D |
Development of a Mask-less Nanofabrication Process for SnO2 Periodic Nanostructure |
| Kubo, Shoichi |
Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography |
| Kulshreshtha, Prashant |
Modulus Mapping in High Resolution Patterned Features
Negative-Tone Chemically-Amplified for Sub-20nm Lithography |
| Kumar, Ajay |
EUV Lithography and 3D IC (Invited) |
| Kumar, Karthik |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Kuo, C. Y. |
Magnetic domain wall motion in permalloy wires with nanometer-scaled notches |
| Kurashima, Yuichi |
Improvement of Bonding Strength in Room Temperature Wafer Bonding using Surface Smoothing by Ne Beam |
| Kurataka, Nobuo |
Defect-tracking For Nanoimprint Lithography Using Optical Surface Analyzer and Scanning Electron Microscope |
| Kurokawa, Masaki |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Kvennefors, Anders |
Replication of NIL Stamps by Metal-Assisted Chemical Etching of Silicon |
| Kwak, Moon Kyu |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
L |
| Lacatena, Valeria |
A novel route for fabricating Printable Photonic Devices with a high refractive index, Carlos Pina Hernandez, Giuseppe Calafiore, Christophe Peroz, aBeam Tech |
| Lafforgue, Ludovic |
Magnetic field assisted micro contact printing: a new concept of fully automated and calibrated process |
| Lal, Amit |
Towards an RF Planar Waveguide Electron LINAC
Planar Electronic Picosecond Electron Pulser |
| Lam, Y. W. |
Influence of Engineered Surface on Cell Motility and Directionality |
| Lambson, Brian |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Landis, Stefan |
8” and 12” wafer scale Nano Imprint Lithography: from process control to optical functions (Invited) |
| Langworthy, Kurt |
Small-Pitch Electron Diffraction Holograms Patterned on Inorganic Resist with Electron Beam Lithography |
| Larsen, Simon T. |
Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach |
| Latta, Nancy |
Dual Layer Negative Tone Metal Liftoff Electron Beam Lithography process for nanometer scale Plasmonic and Photonic devices |
| Lauer, Isaac |
Contamination Mitigation from Salty HSQ Development for Nanoscale CMOS Device Patterning |
| Lawler, Kristopher |
Process Monitoring of an Electron Beam Lithography Process for Silicon Photonics in a University Facility |
| Lawrence |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Lawson, Richard A. |
Methods for Controlled Polymerization in Negative Tone Resists |
| Lawson, Richard |
Detailed Molecular Dynamics Studies of Block Copolymer Directed Self-Assembly: Effect of Guiding Layer Properties on Block Copolymer Directed Self-Assembly
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Lee, Eung-Sug |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Lee, Gil Sik |
Analysis and understanding the regrowth of Multi-walled carbon nanotube forests
Effect of thickness of the catalyst film and the hydrogen gas on the spin-capability of a MWCNT forest |
| Lee, Hyomin |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Lee, Jae Jong |
An investigation into the role of self-assembled monolayers of silane in UV nano-imprint lithography |
| Lee, Jae Yong |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Lee, JaeJong |
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology
The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology |
| Lee, Ji-Hye |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Lee, Jongho |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Lee, Jung-Hyun |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Lee, Kyu-Tae |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Lee, L. James |
Ionic Transportation through DNA-based Nanochannels |
| Lee, S.-H. |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography |
| Lee, S.-Y. |
Analytic Model of Line Edge Roughness from Stochastic Exposure Distribution in Electron-beam Lithography |
| Lee, Sang-Ho |
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology |
| Lee, Sanghee |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Lee, Soo-Young |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography
A Fast Path-based Method for 3-D Resist Development Simulation in Electron-beam Lithography |
| Lee, SungWhi |
The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography |
| Leibfried, Dietrich |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Leibovici, Matthieu |
Pattern-integrated interference lithography: vector modeling of the single-exposure recording of integrated photonic-crystal structures |
| Leonidas, Ocola. E. |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Leray, Philippe |
CD Matching between CD-SEM and Scatterometry Metrology |
| Levush, Baruch |
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Lewis, Scott |
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Lezec, Henri |
All-angle Negative Refraction and Active Flat Lensing in the Ultraviolet (Invited) |
| Li, Can |
Ultralow Voltage Resistive Switching in Ultrathin Silicon Oxide |
| Li, Hui |
Thermal dewetting of gold particles on a template surface |
| Li, Huifeng |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Li, J.J. |
Hexagonal three-dimensional plasmonic nanoantenna arrays |
| Li, Jie Hui |
2D Azobenzene Liquid-crystalline Polymer-based Switchable Photonic Crystals via Nanoimprint |
| Li, Jie-Hui |
SPR-based Surface-enhanced Raman Scattering for the Detection of Organophosphorus Pesticide |
| Li, Kai |
Atom-based Pitch and Length Standards |
| Li, Luozhou |
Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| Li, Shi-Qiang |
Infrared nanophotonics based on indium-tin-oxide nanorod array |
| Li, Shuhong |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Li, Wei |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system |
| Li, Wen-Di |
Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane
A Light-driven Micro-motor Based on Angular Momentum Transfer through Subwavelength Grating Waveplates
Forward sputtering of thin films using focused helium ion beam |
| Li, Xiuling |
Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) |
| Liang, Chi-Te |
Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography |
| Liang, Xiaogan |
Transfer-Printing of Prepatterned Semiconducting Few-Layer-Molybdenum Disulfide Structures for Electronic Applications |
| Liang, Yixing |
Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography |
| Liao, Xing |
Active Cantilever-free Scanning Probe Lithography (Invited) |
| Liddle, James |
DNA Origami: Prospects for Nanomanufacturing |
| Lim, HyungJun |
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology
The Effect of Improved Hardness using Polyurethane Acrylate in Replica Mold for Substrate Conformal Imprint Lithography
Polymer filling behaviors with imprinting velocity in NIL, JiHyeong Ryu, University of Science and Technology |
| Lin, Chun-Yueh |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Lin, De-Shiun |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Lin, Guanyang |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Lin, Pao-Te |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Lin, Peng |
Integration of Planar Memristors with CMOS for Hybrid Circuits
Crossbar Arrays of Sub-10 nm Memristive Devices Fabricated with Nanoimprint Lithography
Low-power Resistive Switching in Ultra-smooth Native AlOx Thin Films Fabricated by Template Stripping |
| Lithography, MAPPER |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Litvinov, Dmitri |
Magnetic patterning by oxygen reduction using low energy Helium irradiation |
| Liu, Amy |
Nanograting–Mediated Growth of Bismuth Selenide Topological Insulator Nanoribbons |
| Liu, Hui |
Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection |
| Liu, Kun |
Off Axis Modeling and Measurement of Emission Parameters for the Schottky Emitter |
| Liu, Ran |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates
Thermal dewetting of gold particles on a template surface |
| Liu, Yu-Lun |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Liu, Yuyang |
Fabrication of hierarchical nanostructures using free-standing tri-layer membrane
Fabrication of Nano-Bowl Arrays via Simple Holographic Patterning and Lift-Off Process |
| Liu, Z. |
Hexagonal three-dimensional plasmonic nanoantenna arrays |
| Liu, Zhaoqian |
Thermal dewetting of gold particles on a template surface |
| Liu, Zuwei |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Livengood, Richard |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Llobet, Jordi |
Novel nanofabrication method to achieve high aspect ratio metallic patterns by thermal nanoimprint lithography |
| Lo, Yi-Chen |
Polymeric Sidewall Transfer Lithography |
| Loeschner, Hans |
Proof of 50keV Electron Multi-Beam Writing at 0.1nm Address Grid (Invited) |
| Loncar, Marko |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Lovell, Josh |
HfC(310) high brightness sources for advanced imaging applications (Invited) |
| Low, Hong Yee |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| Lozano, Gabriel |
Substrate Conformal Imprint Lithography for nanophotonics in applications (Invited) |
| Lu, Bingrui |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates |
| Lu, Chih-Hung |
Structural properties and electroforming-free resistive switching characteristics of Nd2O3, Dy2O3 and Er2O3 memory devices fabricated in full room temperature |
| Lu, Ming |
Fabrication of single-crystal diamond nano-slabs for photonic applications
Hard resist masks prepared with sequential infiltration synthesis process for high-resolution deep etch |
| Lu, Wu |
Ionic Transportation through DNA-based Nanochannels
GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes
Graphene-based Broadband THz Modulators, Haidong Zhang, Ye Shao |
| Ludovice, Peter |
Detailed Molecular Dynamics Studies of Block Copolymer Directed Self-Assembly: Effect of Guiding Layer Properties on Block Copolymer Directed Self-Assembly |
| Lukin, Mikhail |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Luo, Gang |
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Luo, Tao |
A Multiple electron beam wafer inspection system design using permanent magnetic lens arrays |
| Luttge, Regina |
Approach to an on-chip 3D neural-network in a hydrogel based bioreactor |
M |
| Ma, Y |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Ma, Ya-Qi |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates |
| Mack, Chris |
Stochastic Exposure Kinetics of EUV Photoresists: A Simulation Study |
| Mackie, Willilam |
HfC(310) high brightness sources for advanced imaging applications (Invited) |
| Maeda, Atsuhiko |
Improvement of Bonding Strength in Room Temperature Wafer Bonding using Surface Smoothing by Ne Beam |
| Maeda, Tomoyuki |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Magera, Gerald |
HfC(310) high brightness sources for advanced imaging applications (Invited) |
| Maier, Urs |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Majumder, Apratim |
Maskless Subwavelength Nanopatterning Using Vortex Phase Plates and Absorbance Modulation |
| Makarova, Olga |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Mane, Anil |
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column |
| Manfrinato, Vitor |
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Mangat, Pawitter |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Mao, Xiang |
Optoelectronic Devices on-Fiber Enabled by Micro-Assembly Process Using Polydimethylsiloxane Probes |
| Marconi, Mario |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system |
| Marignier, Jean-Louis |
Synthesis of metal nanoparticles in polymeric films induced by electron beam |
| Martin, Chris |
Direct write and nanoprinting for plasmon resonance color filters (Invited) |
| Maruyama, Ken |
Modulus Mapping in High Resolution Patterned Features
Negative-Tone Chemically-Amplified for Sub-20nm Lithography |
| Masid, Farhana |
Optical patterning of features with spacing below the far-field diffraction limit using absorbance modulation |
| Masoero, Lia |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Mastropaolo, Enrico |
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout
High yield fabrication of graphene resonators array with poly-Si sacrificial layer |
| Matsuda, Yasuhiro H. |
Structural properties and electroforming-free resistive switching characteristics of Nd2O3, Dy2O3 and Er2O3 memory devices fabricated in full room temperature |
| Matsui, Shinji |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint
Abrasion Test for Antisticking Layer by Scanning Probe Microscopy
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy
Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Matteucci, Marco |
Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach |
| Maximov, Ivan |
Replication of NIL Stamps by Metal-Assisted Chemical Etching of Silicon
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Mayer, Andre |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Reflow minimization via viscosity control by exposure
Underestimated impact of instabilities with nanoimprint
2D- visualization of imprint-induced flow by means of crystallizing polymers |
| Mazarov, Paul |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| McCord, Mark |
Image distortion in REBL system: the correctable and the residual
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| McCrindle, Iain |
Direct write and nanoprinting for plasmon resonance color filters (Invited) |
| McGahan, Christina |
Electromagnetically Induced Transparency in Au:VO2 Nanoparticles |
| McKay, Kyle |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| McKinley, Gareth |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| McMorran, Benjamin |
Small-Pitch Electron Diffraction Holograms Patterned on Inorganic Resist with Electron Beam Lithography |
| Mehregany, Mehran |
Silicon Carbide Nanoelectromechanical Systems and Nanomechanical Logic (Invited) |
| Mei, Yongfeng |
Enhanced up-conversion luminescence in a microtubular optical resonator
Thermal dewetting of gold particles on a template surface |
| Melli, Mauro |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Mendes, Sergio |
Electro-Active Single Mode Integrated Optical Waveguide Application in Spectroelectrochemistry |
| Meng, Xianghai |
Hard resist masks prepared with sequential infiltration synthesis process for high-resolution deep etch |
| Menon, Rajesh |
Patterning via Optical Saturable Transformations via Solubility Rate Difference
Optical patterning of features with spacing below the far-field diffraction limit using absorbance modulation
Maskless Subwavelength Nanopatterning Using Vortex Phase Plates and Absorbance Modulation
Optical microlithography on oblique surfaces via a novel diffractive phase mask |
| Menoni, Carmen |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system |
| Menzel, Christoph |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Meric, Inanc |
Graphene Field-Effect Transistors with Gigahertz-Frequency Power Gain on Flexible Substrates |
| Meyer, Ernst |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Michal, Kvapil |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Mikolas, David |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Milczarski, Stephanie |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Mirkin, Chad A. |
Active Cantilever-free Scanning Probe Lithography (Invited) |
| Mironov, Andrej |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Miroslav, Rudolf |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Mishra, A. K. |
Magnetic domain wall motion in permalloy wires with nanometer-scaled notches |
| Miyai, Hiroki |
Unveiling success rate of defect mitigation by experiment with EUV Actinic Blank Inspection Prototype for 16 nm hp |
| Miyake, Hiroto |
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy |
| Mizuta, Tomoya |
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy |
| Mkrtchyan, Masis |
Image distortion in REBL system: the correctable and the residual
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Mochi, Iacopo |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Moghaddam, Mehran Vahdani |
Shaped and multiple electron beams from a single thermionic cathode |
| Mohseni, Parsian |
Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) |
| Mojarad, Nassir |
EUV Bessel beam lithography
Single-digit patterning using EUV light |
| Molas, Gabriel |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Moldovan, N. |
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Möllenbeck, Saskia |
Free-standing filaments in thermal nanoimprint induced by pre-filling |
| Montelius, Lars |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Moon, Euclid |
Thermally-Modulated Alignment for Nanoimprinting
3 D Nanostructures via Aligned Stacking of Pre-patterned Membranes |
| Moore, Tom M. |
Enhanced purity via laser assisted electron beam induced deposition of tungsten |
| Mostafavi, Mehran |
Synthesis of metal nanoparticles in polymeric films induced by electron beam |
| Motwani, Pratik |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists
Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates |
| Mu, Jinhua |
Patterning of Nanoparticles Using Electric Field Assisted Coffee Ring Effect |
| Mukherjee, Pran |
KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings |
| Murachi, Tetsunori |
Unveiling success rate of defect mitigation by experiment with EUV Actinic Blank Inspection Prototype for 16 nm hp |
| Mustafa, Ali |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Mutunga, Eva M. |
Understanding Nanomachining in Gold Substrates |
| Myers, Roberto |
GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes |
| Myhre, Graham |
Fabrication of Patterned Interference-Based and Absorption-Based Polarizers |
N |
| Nacci, Christophe |
Controlled bottom-up assembly of functional molecules: From wires to networks (Invited) |
| Nadzeyka, Achim |
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| Naieni, Ali Kashefian |
Tracking the Movement of Carbon Nanotubes during Dielectrophoretic Deposition |
| Nakagawa, Masaru |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint
Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography |
| Nakamura, Takayuki |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Nam, Chang-Yong |
Plasmonic Conductors for Organic Solar Cells |
| Nam, Hongsuk |
Transfer-Printing of Prepatterned Semiconducting Few-Layer-Molybdenum Disulfide Structures for Electronic Applications |
| Naulleau, Patrick |
Dipole-Coupled Nanomagnet Chains Fabricated on Silicon Nitride Membranes for Time-Resolved X-Ray Microscopy Experiments |
| Navarro, Christophe |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Nealey, Paul F. |
Directed Self-Assembly of Ternary Blends of Block Copolymer and Homopolymers on Chemical Patterns |
| Nef, Cornelia |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Nehru, Neha |
Liquid-phase electron-beam-induced-deposition on bulk substrates without liquid cells |
| Nemutudi, Rudzani |
Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography |
| Nicaise, Sam |
Sacrificial Post Templating Method for Block Copolymer Self-Assembly |
| Nicaise, Samuel |
Lithographically-Defined ZnO Nanowire Growth |
| Nielsen, Theodor |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Nigra, Micheal |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Nikzad, Shouleh |
Enabling High Performance Detectors and Optics for Astronomy and Planetary Exploration with PEALD (Invited) |
| Nilsson, Bengt |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| Nishikawa, Hiroyuki |
Application of Proton Beam Writing to a Direct Etching of PTFE for PDMS Replica Molding |
| Nishikura, Naoki |
Simulation Study on Template Releasing Process in Nanoimprint Lithography
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold |
| Nishino, Tomoki |
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Nishioka, Emi |
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Nojeh, Alireza |
Shaped and multiple electron beams from a single thermionic cathode
Tracking the Movement of Carbon Nanotubes during Dielectrophoretic Deposition
Laser Induced Structural Damage to Multi-walled Carbon Nanotubes in a Controlled-Pressure Environment |
| Noma, Hayato |
Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns |
| Nørregaard, Jesper |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Notte, John |
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Nuckolls, C. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
O |
| O'Toole, Alexander |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Ober, Christopher |
Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) |
| Ocola, Leonidas E. |
Advances in Ion Beam micromachining for complex 3D microfluidics
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Ocola, Leonidas |
Determining the range and intensity of backscattered electrons from the substrate density and atomic number (Invited)
Infrared nanophotonics based on indium-tin-oxide nanorod array |
| Ogando, Karim |
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Ogletree, D. Frank |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Ohyi, Hideyuki |
Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography, Naokatsu Ikegami, Nobuyoshi Koshida, Tokyo University of Agriculture and Technology |
| Ok, Jong G. |
Continuous and Scalable Fabrication of Functional films via Vibrational Indentation Patterning and Photo Roll Lithography |
| Okada, Makoto |
Effects of Fluorosurfactants on Antisticking Layer Resistance in Repeated UV Nanoimprint
Abrasion Test for Antisticking Layer by Scanning Probe Microscopy
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy
Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Okino, Takeshi |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Oleksak, Richard |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Olynick, Deirdre |
Modulus Mapping in High Resolution Patterned Features
Negative-Tone Chemically-Amplified for Sub-20nm Lithography
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited)
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Ono, Hiroshi |
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Østergaard, Peter, F. |
Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach |
| Ouyang, Christine |
Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) |
| Ovtchinnikov, Serguei |
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Owen, James |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Owen, William |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Oyama, Takahiro |
Evaluation of fluorine additive segregation in UV nanoimprint resin by X-ray photoelectron spectroscopy |
P |
| Pachter, Ruth |
Pronounced Effects of Anisotropy on Plasmonic Properties of Nanorings Fabricated by Electron Beam Lithography, Rachel Near, Georgia Institute of Technology |
| Pain, Laurent |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process
Line width roughness reduction strategies for resist patterns printed via electron beam lithography |
| Palma, Matteo |
Ordered arrays of carbon nanotube segments by directed assembly
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| Palmer, Shane R. |
Fluctuation Control of Measurement Interferometers: Application of algorithms to correct for local stage-motion induced pressure surges |
| Pan, Tung-Ming |
Structural properties and electroforming-free resistive switching characteristics of Nd2O3, Dy2O3 and Er2O3 memory devices fabricated in full room temperature |
| Pang, S. W. |
Influence of Engineered Surface on Cell Motility and Directionality |
| Papenheim, Marc |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Underestimated impact of instabilities with nanoimprint |
| Pappas, David |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Pargon, Erwine |
Line width roughness reduction strategies for resist patterns printed via electron beam lithography |
| Park, Hongkun |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Park, Kyoo-Chul |
Fabrication of transparent superoleophobic surfaces by multiple shrinking mask etching and layer-by-layer coating |
| Park, Sunggook |
An investigation into the role of self-assembled monolayers of silane in UV nano-imprint lithography |
| Patel, Dinesh |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system |
| Patel, Kanaiyalal |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Patjukova, Elena |
Simulation of dose variation and charging due to fogging in electron beam lithography |
| Pau, Stanley |
Fabrication of Patterned Interference-Based and Absorption-Based Polarizers |
| Paul, Lemaillet |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Pauliac-Vaujour, Sebastien |
Fabrication of 18 nm split-gate charge trap memories by hybrid lithography (e-beam/DUV) |
| Paveau, Vincent |
Magnetic field assisted micro contact printing: a new concept of fully automated and calibrated process |
| Pease, R. Fabian |
Thermally-Modulated Alignment for Nanoimprinting |
| Peeters, Emiel |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Pei, S.S. |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists |
| Peijster, J.J.M. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Peng, Ruoming |
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint |
| Penzo, Erika |
Ordered arrays of carbon nanotube segments by directed assembly |
| Perera, Pradeep |
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Perez-Murano, Francesc |
Novel nanofabrication method to achieve high aspect ratio metallic patterns by thermal nanoimprint lithography |
| Peroz, Christophe |
Sub-10nm nanofabrication by step-and-repeat UV nanoimprint lithography |
| Pertsch, Thomas |
Freestanding Photonic Crystals in Lithium Niobate
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Peters, Andrew |
Detailed Molecular Dynamics Studies of Block Copolymer Directed Self-Assembly: Effect of Guiding Layer Properties on Block Copolymer Directed Self-Assembly |
| Peters, Robert F. |
Study of multilayer systems in electron beam lithography
Application of EBL fabricated nanostructured substrates for SERS detection of protein A in aqueous solution |
| Petillo, John |
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Petric, Paul |
Image distortion in REBL system: the correctable and the residual |
| Petrone, Nicholas |
Graphene Field-Effect Transistors with Gigahertz-Frequency Power Gain on Flexible Substrates |
| Pfeiffer, Loren |
Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Phillips, Richard |
Changing to TiOx Based Nanostructured Catalyst Support Materials for PEM Fuel Cells Utilizing ALD and PEALD |
| Pi, Shuang |
Integration of Planar Memristors with CMOS for Hybrid Circuits
Crossbar Arrays of Sub-10 nm Memristive Devices Fabricated with Nanoimprint Lithography |
| Piccirillo, Lucio |
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Pickard, D.S. |
Cryogenic imaging of biological specimens using Helium Ion Microscope |
| Pickard, Daniel |
Patterning Plasmonic Nanostructures - Regimes of the Gallium Focused Ion Beam and Helium Ion Microscope |
| Pillatsch, Lex |
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Pimenta-Barros, Patricia |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Piner, Richard |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Plank, Natalie |
Field Effect Transistor Performance of Hydrothermal ZnO Nanowires (Invited) |
| Platzgummer, Elmar |
Proof of 50keV Electron Multi-Beam Writing at 0.1nm Address Grid (Invited) |
| Polyakov, Aleksandr |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Polyakov, Alexander |
A novel route for fabricating Printable Photonic Devices with a high refractive index, Carlos Pina Hernandez, Giuseppe Calafiore, Christophe Peroz, aBeam Tech |
| Pradeep, Namboodiri |
Atom-based Pitch and Length Standards |
| Pret, Alessandro Vaglio |
Continuous and Stochastic effects for 2D structures in EUV Lithography |
| Prinz, Christelle |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Pshenay-Severin, Ekaterina |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Purushothaman, Gopathy |
Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain |
Q |
| Qi, Ji |
Active-illumination parallel Raman/SERS imaging
Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates |
| Qu, Xin-Ping |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates |
| Quan, B.G. |
Hexagonal three-dimensional plasmonic nanoantenna arrays |
| Quan, Qimin |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Quintero, Kenneth J Perez |
Design and Fabrication of Ultrananocrystalline Diamond Based Nanoelectromechanical Switches |
R |
| Rack, P.D. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Rack, Philip |
Monte Carlo Simulations of Helium and Neon Ions Beam Induced Deposition, Rajendra Timilsina, Daryl Smith |
| Radke, André |
Direct laser writing: Finer, faster and more flexible (Invited) |
| Raghunathan, Ananthan |
Print based estimation of probe size distribution in electron beam lithography |
| Raghunathan, Sudharshanan |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Rahman, Muhammad |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) |
| Ramos, Daniel |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Randall, John |
Multi-spot-size vector writing approach to atomically precise H depassivation lithography |
| Randolph, Steven |
In-situ Microfluidics using a Liquid Injector for the Study of Beam Induced and Dynamic Processes |
| Rangelow, Ivo |
Mix&Match Electron Beam and Scanning Probe Lithography for sub-5 nm Patterning
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Ray, Vishva |
Nanograting–Mediated Growth of Bismuth Selenide Topological Insulator Nanoribbons |
| Reano, Ronald |
Optimization of Electron Beam Patterned HSQ Mask Edge Roughness for Low-Loss Silicon Waveguides |
| Reboud, Vincent |
8” and 12” wafer scale Nano Imprint Lithography: from process control to optical functions (Invited) |
| Reisinger, Thomas |
Advances on e-beam fabrication of photonic crystal membranes |
| Rekawa, Senajith |
Efficient Packaged Zoneplates for EUV Instruments |
| Ren, Yan |
High throughput scanning electron microscopes with MEMS-based multi-beam optics |
| Renner, Michael |
Direct laser writing: Finer, faster and more flexible (Invited) |
| Rishton, S |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Ritchie, Dave |
Mesoscopic Electronic Devices Fabricated using Atomic Force Lithography |
| Ro, Hyun Wook |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Roberts, Nicholas A. |
Enhanced purity via laser assisted electron beam induced deposition of tungsten |
| Rockstuhl, Carsten |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Rodríguez, Said |
Substrate Conformal Imprint Lithography for nanophotonics in applications (Invited) |
| Rolff, Haiko |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Rommel, Marcus |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| Rommel, Mathias |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Rosenman, Daniel |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Rosenmann, Daniel |
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Rosenthal, Daniel |
Metal-Assisted Etching of Silicon Molds for Electroforming |
| Ross, Caroline A. |
Rule-Based Directed Self-Assembly of Circuit-Like Block-Copolymer Patterns |
| Ross, Caroline |
Sacrificial Post Templating Method for Block Copolymer Self-Assembly
Lithographically-Defined ZnO Nanowire Growth |
| Roukes, Michael |
Single Molecule and Single Cell Sensing with Nanomechanical Systems |
| Rowen, Adam |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Ruchhoeft, Paul |
Magnetic patterning by oxygen reduction using low energy Helium irradiation |
| Rudzinski, Axel |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Rui, Huang |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Ruiz, Ricardo |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Rumler, Maximilian |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Ruoff, Rodney |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Russell, Thomas |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Ruther, Rose |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
S |
| Sabri, Firouzeh |
Low Temperature Electrical and Optical Characterization of Lithographically-Defined Au Microchannels on an Elastomeric Substrate |
| Sadek, Akram |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) |
| SAIC |
Image distortion in REBL system: the correctable and the residual |
| Sakamoto, Jyunji |
Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns |
| Sakamoto, Kiichi |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Salmistraro, Marco |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads |
| Samuelson, Lars |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Sanabia, Jason E. |
An Innovative EBL Writing Strategy for High Speed and Precision Lithography of Large Circle Arrays for Microfiltration and Photonics in Solar Cells |
| Sanabia, Jason Elliot |
Progress Report on the Multi-Species Focused Ion Beam Lithography System and Its Applications
Direct Ga and Si Ion Beam Lithography for Nanopore Fabrication with High Resolution and Reproducibility |
| Sanche, Marc |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Sanchez, Martha |
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Santhakumar, K. |
Graphene-based Broadband THz Modulators, Haidong Zhang, Ye Shao |
| Santillan, Julius Joseph |
An in situ analysis of EUV resist dissolution characteristics by high speed AFM |
| Sarkar, Anirban |
Nano-Rough Gold for Enhanced Raman Scattering |
| Sarwar, A.T.M. |
GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes |
| Sasaki, Shinya |
Durability assessment of mold release agents for ultraviolet nanoimprint lithography |
| Sasaki, Tomoyuki |
Reorientation Evaluation of Photoinduced Liquid Crystalline Polymer Pattern Fabricated by Hybrid Nanoimprinting with Linearly Polarized Ultra Violet Irradiation |
| Sasao, Norikatsu |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Satake, Shin-ichi |
Three dimensional hologram-ROM duplication by UV-NIL |
| Savu, Veronica |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Schattenburg, Mark |
KOH Polishing of Nanoscale Deep Reactive-Ion Etched Ultra-High Aspect Ratio Gratings |
| Schedel, Thorsten |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Scheer, Hella-Christin |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Reflow minimization via viscosity control by exposure
Underestimated impact of instabilities with nanoimprint
2D- visualization of imprint-induced flow by means of crystallizing polymers |
| Scherer, Axel |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited)
Exposure Strategy: Investigation of the Relationship between Exposure Speed and Ultra High Resolution in electron beam lithography |
| Schiavone, Patrick |
A method for dynamic parameterized shape reconstruction. Application to scatterometry |
| Schift, Helmut |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Nanopatterned micromechanical elements by polymer injection molding with hybrid molds |
| Schönenberger, Christian |
Morphological characterization of metallic nano-structures evaporated through stencil on graphene |
| Schouenborg, Jens |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Schrempel, Frank |
Freestanding Photonic Crystals in Lithium Niobate |
| Schuck, Jim |
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna |
| Schuck, P. Jim |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Schurink, Bart |
Approach to an on-chip 3D neural-network in a hydrogel based bioreactor |
| Schwartzberg, Adam |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads
Comparison of Au feature formation using two Au-calixarene resists, electron beam lithography, and low temperature organic removal |
| Schwind, Gregory |
Off Axis Modeling and Measurement of Emission Parameters for the Schottky Emitter |
| Scipioni, Larry |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Seagate |
Sub-10 nm silicon nano-structures based on block copolymer lithography and high selectivity, cryogenic temperature dry etching (Invited) |
| Sfeir, Matthew |
Plasmonic Conductors for Organic Solar Cells |
| Shannon, Mark |
Fabricating arbitrary silicon nanostructures using thermal dip pen nanolithography (tDPN) |
| Shao, Ye |
GaN/AlN Double Barrier Nanowire Resonant Tunneling Diodes |
| Shapera, Ethan |
Electromagnetically Induced Transparency in Au:VO2 Nanoparticles |
| Sheetz, Michael |
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| Shepard, Kenneth |
Graphene Field-Effect Transistors with Gigahertz-Frequency Power Gain on Flexible Substrates |
| Shi, P. |
Influence of Engineered Surface on Cell Motility and Directionality |
| Shi, Yue |
Towards an RF Planar Waveguide Electron LINAC |
| Shields, Brendan |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Shih, Wei-Chuan |
Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain
Active-illumination parallel Raman/SERS imaging
Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates |
| Shim, Wooyoung |
Active Cantilever-free Scanning Probe Lithography (Invited) |
| Shiotsu, Takahiro |
Simulation Study on Template Releasing Process in Nanoimprint Lithography
Novel template releasing process Novel template releasing process by multi-axis controlled systems in nanoimprint lithography |
| Shirato, Syo |
Durability assessment of mold release agents for ultraviolet nanoimprint lithography |
| Shriyan, Sameet |
Image distortion in REBL system: the correctable and the residual |
| Shtokhammer, Roman |
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Sijbrandij, Sybren |
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Šikola, Tomáš |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Silver, Richard |
Atom-based Pitch and Length Standards |
| Singapore |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Singer, Sherwin |
Ionic Transportation through DNA-based Nanochannels |
| Slot, E. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Smistrup, Kristian |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Smith, Bruce |
Investigating effects of aerial image averaging and pupil plane filtering on line edge roughness (LER)
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Smith, Henry |
3 D Nanostructures via Aligned Stacking of Pre-patterned Membranes |
| Smith, Mark |
Stochastic Exposure Kinetics of EUV Photoresists: A Simulation Study
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Sohn, Lydia |
Label-Free Cell Screening (Invited) |
| Soles, Christopher |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Song, Yi |
CD Matching between CD-SEM and Scatterometry Metrology |
| Soo, Ong Kian |
Roll-to-Roll Hot Embossing of Micron and Nanoscale Structures for the Fabrication of Plastic Devices |
| Soulan, Sebastien |
A method for dynamic parameterized shape reconstruction. Application to scatterometry |
| Spreu, Christian |
Free-standing filaments in thermal nanoimprint induced by pre-filling |
| Srisonphan, Siwapon |
Si MOSFET with a Nanoscale Void Channel (Invited) |
| Stach, Eric |
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Stafford, Christopher |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Steenbrink, S.W.H.K. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Steffen, Diez |
Advanced Maskless Grayscale Lithography using a new writing strategy to increase the number of grayscale levels |
| Stein, Aaron |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system
Measuring Field-Stitch Boundary Error of Electron Beam Lithography With X-ray Diffraction |
| Steinberg, Christian |
Underestimated impact of instabilities with nanoimprint |
| Steinert, Michael |
Freestanding Photonic Crystals in Lithium Niobate |
| Stepanova, Maria |
Study of multilayer systems in electron beam lithography
Application of EBL fabricated nanostructured substrates for SERS detection of protein A in aqueous solution |
| Stern, L.A. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Stern, Lewis A. |
Understanding Nanomachining in Gold Substrates |
| Stern, Lewis |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Stevens, M. M. |
Designing Bio-inorganic Nanomaterials for Ultrasensitive Biosensing |
| Stickle, William |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Su, Dong |
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Sumant, Anirudha |
Diamond based Micro and Nano Systems (Invited)
Design and Fabrication of Ultrananocrystalline Diamond Based Nanoelectromechanical Switches |
| Sun, Kai |
Nanograting–Mediated Growth of Bismuth Selenide Topological Insulator Nanoribbons |
| Sun, Lei |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Sung, Sang-Kuen |
Planarized Ag Nanopattern Array for Plasmonic Resonance-driven Electroluminescence Enhancement |
| Suyatin, Dmitry |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Svilicic, Boris |
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout |
| Swanson, Lynwood |
Off Axis Modeling and Measurement of Emission Parameters for the Schottky Emitter |
| Swanwick, Michael |
Optically Actuated Nanostructured Electron-Emitter Arrays |
T |
| Taber, Andrew |
A lab-on-a-chip with 30 nm nanochannels and plasmonic bowtie nanoantenna |
| Tabor, Christopher |
Pronounced Effects of Anisotropy on Plasmonic Properties of Nanorings Fabricated by Electron Beam Lithography, Rachel Near, Georgia Institute of Technology |
| Taboryski, Rafael |
Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach |
| Tada, Kazuhiro |
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study |
| Tagawa, Seiichi |
Synthesis of metal nanoparticles in polymeric films induced by electron beam |
| Takagi, Hideki |
Improvement of Bonding Strength in Room Temperature Wafer Bonding using Surface Smoothing by Ne Beam |
| Takizawa, Masahiro |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Tan, Shawn |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Tan, Shida |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Tanaka, Yusuke |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope |
| Tang, Cha-Mei |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Tang, Q. Y. |
Influence of Engineered Surface on Cell Motility and Directionality |
| Taniguchi, Jun |
Control of carbon nanofibers configuration on glassy carbon by two-step ion beam irradiation method
Three dimensional hologram-ROM duplication by UV-NIL
Pre-hardening Ultraviolet nanoimprint lithography using opaque mold
Durability assessment of mold release agents for ultraviolet nanoimprint lithography |
| Tanzi, Simone |
Large scale fabrication scheme for all-polymer multilevel nano-microfluidic Lab-on-Chip (LoC) systems: the PolyNano approach |
| Tao, Li |
Analog and digital flexible nanoelectronics fabricated from advanced 2D nanomaterials |
| Tarequzzaman, Mohammad |
Replication of NIL Stamps by Metal-Assisted Chemical Etching of Silicon |
| Terasawa, Tsuneo |
Influence of EUV mask structure on electron trajectories |
| TESCAN |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
| Thelin, Jonas |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Thiel, Michael |
Direct laser writing: Finer, faster and more flexible (Invited) |
| Thomas, Germer |
Dual scale controlled surface roughness by wrinkling of polymer imprints |
| Thomas, Gordon |
A Model for Nano-manufactured Electrodes utilizing Vertical Carbon Nanotubes |
| Thompson, B. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Tiberio, Richard |
Dual Layer Negative Tone Metal Liftoff Electron Beam Lithography process for nanometer scale Plasmonic and Photonic devices |
| Tiron, Raluca |
Defectivity and uniformity evaluation of block copolymer directed self-assembly for contact hole shrink 300mm-process |
| Tolbert, Laren M. |
Methods for Controlled Polymerization in Negative Tone Resists
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography |
| Tolbert, Laren |
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Tomaa, A. |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Tomioka, Tatsuya |
Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography |
| Tomohiro, Kohei |
Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) Novel Ordered Hetero Junction Organic Photovoltaics (OHJ-OPV) by multi-layered direct nanoimprint using buli-in electrode mold |
| Tong, W. Y. |
Influence of Engineered Surface on Cell Motility and Directionality |
| Tong, William |
Nanoengineered charge-drain film for electron-optical MEMS in the REBL E-beam column |
| Tran, Hieu |
Defect-tracking For Nanoimprint Lithography Using Optical Surface Analyzer and Scanning Electron Microscope |
| Trikeriotis, Markos |
Nanoparticle Photoresists: Highly Sensitive EUV Resists with a New Patterning Mechanism (Invited) |
| Trusheim, Matthew |
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| Tseng, Kuo-Chun |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Tsong, Tien-Tzou |
Low-Energy Electron Diffractive Imaging Based on a Single-Atom Electron Source |
| Tsuboi, Ryo |
Durability assessment of mold release agents for ultraviolet nanoimprint lithography |
| Tu, Charles |
Graphene-based Broadband THz Modulators, Haidong Zhang, Ye Shao |
| Tünnermann, Andreas |
Freestanding Photonic Crystals in Lithium Niobate |
U |
| Uehara, Takuya |
Au split-ring resonator arrays responsive to a magnetic field in a visible frequency region fabricated by UV nanoimprint lithography |
| University, Auburn |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography |
| University, Columbia |
Fabrication of single-crystal diamond nano-slabs for photonic applications |
| University, Osaka Prefecture |
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study |
| University, Osaka |
Nanochemistry in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography (Invited) |
| University, Princeton |
Sub-30 nm Roller Nanoimprint Lithography Using Flexible Hybrid Molds and Applications to Large-Area High-Performance Nanoplasmonic Sensors and Solar Cells |
| University, Tohoku |
Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography, Naokatsu Ikegami, Nobuyoshi Koshida, Tokyo University of Agriculture and Technology |
| Unno, Noriyuki |
Three dimensional hologram-ROM duplication by UV-NIL |
| Urbanski, Lukasz |
Periodic metallic structures fabricated by coherent Talbot lithography in a table top system |
| Urwyler, Prabitha |
Nanopatterned micromechanical elements by polymer injection molding with hybrid molds |
| Usui, Youichi |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope |
V |
| van de Laar, Robert |
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Van den hove, Luc |
Breaking through the scaling boundaries, key for a sustainable society |
| Van der heijden, Eddy |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| Van eesch, Chris |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
| van Kouwen, Leon |
First focused ion beam images using a novel electron impact gas ion source |
| van Veldhoven, Emile |
Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane |
| Vangari, Manisha |
Nano-structure Modified Thin-Film Paper Energy Storage Device |
| Vanhove, Nico |
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Velásquez-García, Luis |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Verschuuren, Marc |
Substrate Conformal Imprint Lithography for nanophotonics in applications (Invited)
Accuracy of Wafer Level Alignment with Substrate Conformal Imprint Lithography |
| Vieker, Henning |
Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography |
| Viswanathan, Vignesh |
Patterning Plasmonic Nanostructures - Regimes of the Gallium Focused Ion Beam and Helium Ion Microscope |
| Vladar, Andras E. |
Understanding Nanomachining in Gold Substrates |
| Vladar, Andras |
Chemical Assisted Etching with Ne+ & He+ Ion Microscope (Invited) |
| Vlasov, Alexander |
Multi-Source, Complex Beamline Modeling Development in MICHELLE eBEAM |
| Vochenhuber, Michaela |
EUV Bessel beam lithography |
| Vockenhuber, Michaela |
Single-digit patterning using EUV light |
| Vogelsang, Konrad |
Free-standing filaments in thermal nanoimprint induced by pre-filling |
| von Freymann, Georg |
Direct laser writing: Finer, faster and more flexible (Invited) |
W |
| Wakaba, Hitomi |
Selective Patterning of Fluorinated Self-assembled Monolayer by UV Nanoimprinting for Directed Self-Assembly |
| Walavalkar, Sameer |
Nanofabricated Silicon Devices: From Nanosensors to Medical Implants (Invited) |
| Wallentin, Jesper |
Nanoimprint-Based Lift-off Process for a Large-Scale Epitaxial Growth of Nanowires |
| Waller, Erik |
Direct laser writing: Finer, faster and more flexible (Invited) |
| Wallman, Lars |
Nanowire-Based Electrode for Neural Recordings in the Brain |
| Wallow, Thomas |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Wallraff, Greg |
Investigation into Shot Noise Effects of Direct Write Electron Beam Lithography Using High Energy Electron Beams |
| Wan, Lei |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Wan, Ling-Shu |
Directed Self-Assembly of Ternary Blends of Block Copolymer and Homopolymers on Chemical Patterns |
| Wang, Chao |
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint |
| Wang, Jiao |
Enhanced up-conversion luminescence in a microtubular optical resonator |
| Wang, Li |
EUV Bessel beam lithography
Single-digit patterning using EUV light |
| Wang, Peng |
Optical microlithography on oblique surfaces via a novel diffractive phase mask |
| Wang, Risheng |
Ordered arrays of carbon nanotube segments by directed assembly |
| Wang, Si |
Free-standing filaments in thermal nanoimprint induced by pre-filling
Reflow minimization via viscosity control by exposure
Underestimated impact of instabilities with nanoimprint
2D- visualization of imprint-induced flow by means of crystallizing polymers |
| Wang, Szu-Ying |
Chemical Composition and Pattern Development in Inorganic Photoresist Materials Deposited from Aqueous Solution |
| Wang, Yue |
Patterning Plasmonic Nanostructures - Regimes of the Gallium Focused Ion Beam and Helium Ion Microscope |
| Wang, Yuxuan |
Double External Quantum Efficiency/Light Extraction and Widen Viewing Angle of Organic Light-Emitting Diodes with New Plasmonic Cavity with Subwavelength Hole Array (PlaCSH)
Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography |
| Wang, Zhong Lin |
Triboelectric Generators for Self-Powered Electronics (Invited) |
| Warisawa, Shin'ichi |
Mechanical characteristics of the ultra-long horizontal free-space-nanowire grown by real-time feedback control on focused-ion-beam chemical vapor deposition
Optomechanical resonator fabrication with the surface plasmon antenna for the wavelength detection |
| Warring, Ulrich |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Watanabe, Hidehiro |
Influence of EUV mask structure on electron trajectories |
| Watanabe, Takeo |
Phase Defect Characterization on an EUV Blank Mask using Micro Coherent EUV Scatterometry Microscope |
| Wathuthanthri, Ishan |
Fabrication of hierarchical nanostructures using free-standing tri-layer membrane
Plasmonic Nanogap Arrays Fabricated via Moiré Holographic Lithography
Fabrication of Nano-Bowl Arrays via Simple Holographic Patterning and Lift-Off Process |
| Weber-Bargioni, Alex |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope |
| Weber-Bargioni, Alexander |
Triggering and monitoring plasmon enhanced reactions by optical nanoantennas coupled to photocatalytic beads |
| Wegmann, Urs |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis |
| Weides, Martin |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Weis, Jürgen |
Sub-10nm Resolution after Lift-Off using HSQ/PMMA Double Layer Resist (Invited) |
| Werner, Carsten |
Fabrication of Polymer Structures with Undercuts by Reverse Imprint Lithography (Invited) |
| West, Ken |
Fabrication of Electronic Fabry-Perot Interferometer in the Quantum Hall Regime |
| Wi, Sungjin |
Nanograting–Mediated Growth of Bismuth Selenide Topological Insulator Nanoribbons
Transfer-Printing of Prepatterned Semiconducting Few-Layer-Molybdenum Disulfide Structures for Electronic Applications |
| Wibowo, Andree |
Inductively Coupled Plasma Etching of Through-Cell Vias in Indium-Bearing III-V Solar Cells Using SiCl4/Ar plasma |
| Wieland, M.J. |
MAPPER progress towards a High Volume Manufacturing EBDW system (Invited) |
| Wiemer, Maik |
Functional Nano Patterns realized by Thermal and UV Nano Imprint Lithography |
| Wijnaendts, Niels |
Advanced Maskless Grayscale Lithography using a new writing strategy to increase the number of grayscale levels |
| Wilson, Andrew |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Wilson, R. |
Low Temperature Electrical and Optical Characterization of Lithographically-Defined Au Microchannels on an Elastomeric Substrate |
| Wind, Shalom |
Ordered arrays of carbon nanotube segments by directed assembly
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| Wineland, David |
Micromachined stylus ion traps through high aspect ratio lithography and electrochemical deposition |
| Wirtz, Tom |
Combined SIMS-SPM instrument for high sensitivity and high resolution elemental 3D analysis
Towards SIMS on the Helium Ion Microscope: detection limits and experimental results on the ORION |
| Wolfe, Jack |
Development of a low energy neutral particle printer for atomically precise patterning of desorption resists |
| Wolfe, John |
Fabrication of neural probes for simultaneous in vivo optical stimulation and electrical recording in the brain
Surface-enhanced Raman Spectroscopy with monolithic, hierarchical nanoporous gold disk substrates |
| Wolfenson, Haguy |
Bifunctional Nanoarrays for Probing the Immune Response at the Single-Molecule Level |
| Wong, H.-S. Philip |
Block Copolymer Directed Self-Assembly Two-Hole Pattern inside Peanut-Shaped Templates |
| Wong, Ka |
Ga+ Focused Ion Beam Micromachining of Thermoplastic Polymers |
| Wood, Cameron |
Field Effect Transistor Performance of Hydrothermal ZnO Nanowires (Invited) |
| Wood, Michael |
Optimization of Electron Beam Patterned HSQ Mask Edge Roughness for Low-Loss Silicon Waveguides |
| Wood, Obert |
EUVL Aberration Metrology using Resist Images from a Strong Phase Shifting Mask |
| Wu, , Wei |
Forward sputtering of thin films using focused helium ion beam |
| Wu, Banqiu |
EUV Lithography and 3D IC (Invited) |
| Wu, Huimeng |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Wu, J. C. |
Magnetic domain wall motion in permalloy wires with nanometer-scaled notches |
| Wu, Wei |
A Light-driven Micro-motor Based on Angular Momentum Transfer through Subwavelength Grating Waveplates |
| Wu, Yi-Kuei |
Moving Towards Structural Color Display: Angle Insensitive Structural Colors Based on Metallic Gratings and Color Pixels beyond the Diffraction Limit |
| Wuister, Sander |
Thermodynamic origin of placement errors for contact holes created by directed self-assembly |
X |
| Xia, D. |
Metal Depositions Induced by Helium and Neon Ion Beams |
| Xia, Qiangfei |
Integration of Planar Memristors with CMOS for Hybrid Circuits
Improved Switching Uniformity for TiO2/HfO2 Bi-layer Memristive Devices
Voltage Dependent Electroforming of TiO2-based Memristive Devices
Patterning of Nanoparticles Using Electric Field Assisted Coffee Ring Effect
Crossbar Arrays of Sub-10 nm Memristive Devices Fabricated with Nanoimprint Lithography
Low-power Resistive Switching in Ultra-smooth Native AlOx Thin Films Fabricated by Template Stripping
Ultralow Voltage Resistive Switching in Ultrathin Silicon Oxide |
| Xia, X.X. |
Hexagonal three-dimensional plasmonic nanoantenna arrays |
| Xu, Ting |
All-angle Negative Refraction and Active Flat Lensing in the Ultraviolet (Invited) |
Y |
| Yamada, Akio |
Low line edge roughness patterning with Character Projection EB Lithography for Photonic Devices |
| Yamamoto, Hiroki |
Synthesis of metal nanoparticles in polymeric films induced by electron beam
Process Dependence of Line Width Roughness in Electron Beam Resists |
| Yamamoto, Manabu |
Three dimensional hologram-ROM duplication by UV-NIL |
| Yamamoto, Ryosuke |
Directed Self-Assembling Lithography Process for High-Density Bit Patterned Magnetic Recording Media (Invited) |
| Yamazaki, Tomoharu |
Process Dependence of Line Width Roughness in Electron Beam Resists |
| Yang, Ai-Guo |
Soft- and near-field lithography on glass hemisphere surface for spherical zone plates |
| Yang, J. Joshua |
Memristive Nanodevices: Mechanisms, Promises and Challenges (Invited) |
| Yang, Joel |
Hydrogen Silsesquioxane As A Resist And Material Of Choice In Fabricating Plasmonic Antennas |
| Yang, Peiyan |
Forward sputtering of thin films using focused helium ion beam |
| Yang, Tai-Chi |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Yang, Yin-Kuang |
Lloyd’s Mirror Interferometer Using a Single-Mode Fiber Spatial Filter |
| Yang, Yujia |
Optically Actuated Nanostructured Electron-Emitter Arrays |
| Yasuda, Masaaki |
Simulation Study on Template Releasing Process in Nanoimprint Lithography
Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study
Selective Edge Lithography for Fabricating Imprint Mold with Nano Size and Large Size Mixed Patterns |
| Yavuz, Mustafa |
Contrast curve engineering by using multi-layer polystyrene electron beam resist
Polycarbonate as an ideal grayscale electron beam resist using diluted cyclopentanone developer |
| Yeh, Wei-Ming |
PS-b-PHEMA: A Promising High χ Polymer for Directed Self-Assembly Lithography
Directly-Photodefinable Guiding Layers: Enabling Simple 3-Step DSA Processes for Lithographic Patterning |
| Yen, Anthony |
Defect Management of EUV Masks: Progress and Outlook (Invited) |
| Yi, He |
Block Copolymer Directed Self-Assembly Two-Hole Pattern inside Peanut-Shaped Templates |
| Yin, Jian |
Pattern Transfer from Directed PS-b-PMMA Films with Sub-25 nm Full Pitch |
| Yoshida, Shuhei |
Three dimensional hologram-ROM duplication by UV-NIL |
| Yoshida, Takashi |
Prototype Active-Matrix Nanocrystalline Silicon Electron Emitter Array for Massively Parallel Direct-Write Electron Beam Lithography, Naokatsu Ikegami, Nobuyoshi Koshida, Tokyo University of Agriculture and Technology |
| Youtsey, Chris |
Inductively Coupled Plasma Etching of Through-Cell Vias in Indium-Bearing III-V Solar Cells Using SiCl4/Ar plasma |
| Yu, Chen-Chieh |
Study of optical anisotropy property to rapidly characterize structural qualities of CVD prepared graphene films |
| Yu, J. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
| Yu, Yanlei |
2D Azobenzene Liquid-crystalline Polymer-based Switchable Photonic Crystals via Nanoimprint |
| Yu, Zhaoning |
Defect-tracking For Nanoimprint Lithography Using Optical Surface Analyzer and Scanning Electron Microscope |
Z |
| Zaccariaa, R. Proetti |
2D and 3D Plasmonic Nanostars for Bio-sensing Applications - Single Molecule Detection |
| Zeijl, Henk Van |
High accuracy dual side overlay with KOH through wafer etching |
| Zeiss, Carl |
Reaching theoretical resonance quality factor limit in coaxial plasmonic nano resonators fabricated by Helium Ion Microscope
Understanding Nanomachining in Gold Substrates |
| Zhang, Cheng |
Moving Towards Structural Color Display: Angle Insensitive Structural Colors Based on Metallic Gratings and Color Pixels beyond the Diffraction Limit |
| Zhang, Jian |
Fabrication of Gold Bowtie Nano-antenna by E-beam Lithography on Si3N4 Membrane for SERS
Effect of toluene treatment on PDMS molding into nanoholes |
| Zhang, Jing |
Enhanced up-conversion luminescence in a microtubular optical resonator |
| Zhang, Lihua |
Point-spread function of energy deposition by an electron-beam determined by using energy-filtered TEM |
| Zhang, Qi |
Sub-30 nm Roller Nanoimprint Lithography Using Flexible Hybrid Molds and Applications to Large-Area High-Performance Nanoplasmonic Sensors and Solar Cells
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint
Fabrication of Large-area Flexible Roll-to-Roll Nanoimprint Molds with Sub-100nm Features Using Step-and-Repeat Duplication
Patterning of Light-Extraction Nanostructures on Sapphire Substrates Using Nanoimprint, SiO2 Masking and ICP Dry Etching |
| Zhang, Weihua |
Fabrication of Plasmonic-enhanced Nanostructured Electron Source (PNE) Using Epitaxial Lift-off and Nanoimprint Lithography
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint |
| Zhang, X. |
Fabrication of hundreds of field effect transistors on a single carbon nanotube for basic studies and molecular devices |
| Zhang, Xianghui |
Fabrication and Modification of Carbon Nanomembranes (CNMs) by Helium Ion Lithography |
| Zhang, Xu |
Fabrication of Hierarchical Three-Dimensional Nanostructures Using Template-Directed Assembly of Colloidal Particles
Fabrication of Periodic Hollow-Shell Nano-Volcano Arrays for Particle Trapping |
| Zhang, Y |
DWDM laser arrays fabricated using thermal nanoimprint lithography on Indium Phosphide substrates |
| Zhao, Xi |
Ionic Transportation through DNA-based Nanochannels |
| Zhao, Xinyu |
Dependency Analysis of Line Edge Roughness in Electron-beam Lithography |
| Zhao, Yuning |
Inductively Coupled Plasma Etching of Through-Cell Vias in Indium-Bearing III-V Solar Cells Using SiCl4/Ar plasma |
| Zheng, Hannah |
Field Effect Transistor Performance of Hydrothermal ZnO Nanowires (Invited) |
| Zheng, Zhen |
Magnetic patterning by oxygen reduction using low energy Helium irradiation |
| Zhiya, Dang |
Fabrication of Complex Three-Dimensional Multilevel Silicon Micro- and Nano-Structures using High Energy Ion Irradiation |
| Zhong, Jian |
Enhanced up-conversion luminescence in a microtubular optical resonator |
| Zhou, Jing |
Tapered hyperbolic metamaterials for broadband absorption |
| Zhou, Liangcheng |
Fabrication and Demonstration of Ultra-sensitive and Fast Immunoassay Platform With 3D Nanoplasmonic Cavity Antenna and Microfluidics Using Nanoimprint |
| Zhu, Guang |
Triboelectric Generators for Self-Powered Electronics (Invited) |
| Zhu, Peixuan |
Microfilters with Nanotopography for Isolation of Circulating Tumor Cell from Blood |
| Zhu, Zhou-Yang |
Visualizing the Interaction Volume of Helium Ions in Hydrogen Silsesquioxane |
| Zhu, Zhouyang |
A Light-driven Micro-motor Based on Angular Momentum Transfer through Subwavelength Grating Waveplates |
| Zibrov, Alexander |
Free-standing nanoscale mechanical and photonic devices fabricated in single-crystal diamond |
| Ziegler, Dominik |
Modulus Mapping in High Resolution Patterned Features |
| Ziegler, Mario |
Exploiting extreme coupling to realize a metamaterial perfect absorber (Invited) |
| Zonnevylle, Aernout Christiaan |
Fabrication of a rotation corrector for electron multi beam array micro-lenses |
| Zuzana, Lišková |
Ion and Electron Beam Lithography in a Multifunctional Tool FIB/SEM with in-situ SPM |
