A |
| Abe, Tsukasa | Variation in phase defect volume on extreme ultraviolet mask before and after coating reflective multilayer |
| Afkhami, Shahriar | Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities |
| Agarwal, Akshay | Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction |
| Ahn, Sang Jung | Low Energy Performance of a SEM Using a New Monochromator with Double Offset Cylindrical Lenses |
| Ahn, Seung Joon | A study of characteristics of a microcolumn based on CNT emitters |
| Akahori, Rena | Translocation of Single Stranded DNA through Nano-Cylindrical PEO Passage Self-Assembled by Amphiphilic Block Copolymer |
| Akinwande, Deji | Encapsulated Delamination Transfer and Nanofabrication of Silicene Field-Effect Transistors |
| Aksyuk, Vladimir | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
| Alexander, Justin | Quantitative Analysis of Digital STM Lithography Precision |
| Alexander-Katz, Alfredo | Nano Mesh Patterns by BCP Self-Templating |
| Ali, M. Azam | Fabrication of Free-standing Casein Microstructures with Bioimprinted Cellular Surface Features |
| Alias, Mohd Sharizal | Visible subwavelength dielectric grating reflector fabricated using focused ion beam |
| Alkaisi, Maan M. | Fabrication of Free-standing Casein Microstructures with Bioimprinted Cellular Surface Features |
| Alkemade, Paul | Helium-ion-beam-induced growth of 3-dimensional AFM probes
Protection of graphene against helium-ion-induced damage by h-BN encapsulation |
| Alsager, Omar | Carbon nanotube field effect transistor apatasensors for estrogen detection in liquids |
| Alyalak, Wadha | Neutral surface prepared by vapor phase coating for PS-b-PMMA self assembly |
| Amano, Tsuyoshi | Simulation technique for pattern inspection using projection electron microscope
Variation in phase defect volume on extreme ultraviolet mask before and after coating reflective multilayer |
| Amato, Jim | Direct photo-patterning of thiol-ene thermoset polymer thin film structures by DLP lithography |
| Anderson, Chris | Demonstration of below 30-nm half pitch resolution at the SHARP microscope |
| Andrew, Trisha | Subwavelength NanoPatterning via Selective Dissolution of One-Photoisomer
Super-resolution Optical Nanolithography using two approaches of Absorbance Modulation |
| Andriolo, Jessica | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| Argoud, Maxime | 300mm DSA process qualification and stability |
| Arnold, Georg | High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Arnold, William | EUV Lithography: Separating Fact from Fiction |
| Arreaga-Salas, David | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics |
| Asai, Masaya | 300mm DSA process qualification and stability |
| Asano, Yusuke | High Chi Block Co-polymers for Lithography |
| Ashby, Paul | Encased Cantilevers for Low-Noise Force and Mass Sensing in Liquids |
| Aslam, A. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Avendano-Bolivar, Adrian | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics |
| Aydinoglu, Ferhat | Ultra high aspect ratio sub-50 nm deep silicon trenches by photo-assisted electrochemical etching
Ultra-high resolution nanofabrication using self assembly of salt-polymer nanocomposite film |
| Azuma, Tsukasa | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
B |
| Babin, Sergey | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Bagal, Abhijeet | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures
Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Ballard, Joshua | Quantitative Analysis of Digital STM Lithography Precision |
| Banu, Laila | Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Bastiaens, Alex | Advances in 3D neuronal cell culture |
| Basu, Srismrita | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Baudisch, Frank | Studies on the fully automated printing/imprint process using a double-side patterned soft stamp |
| Bauerdick, Sven | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Beique, Genevieve | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Bekaert, Joost | Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Belgouzi, Mhammed | Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Benk, Markus | Demonstration of below 30-nm half pitch resolution at the SHARP microscope |
| Benkel, Christian | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Berggren, Karl | 3D Nanofabrication by Geometrically-Confined Helium Ions in Diamond Nanostructures
Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction
Lithographic engineering of volume plasmons
Lithographic Evaluation of gL-2000: A High-Resolution Resist for Electron-Beam Lithography
Nano Mesh Patterns by BCP Self-Templating
Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays
Templated Self-Assembly of Block Copolymer Thin Films under Lithographic Confinement |
| Bertagnolli, Emmerich | Characterization of Electrophysiological Properties of Neurites using a Microfluidic-Microelectronic Platform
Characterization of QSil 216 and QSil 218 for Microfluidic and Biomedical Applications
Expanding nanomagnetic logic into the third dimension - new pathways via FEBID
Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Ion-dose controlled etching of Nanoimprint stamps for the fabrication of Fresnell lenses
Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel
Towards high purity FEBID gold nanostructures – a comparison of purification approaches |
| Bertani, Paul | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Biggs, Manus | Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Bilenberg, Brian | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Blachut, Gregory | High Chi Block Co-polymers for Lithography |
| Black, Charles | Directed Assembly of Multiple Pattern Morphologies Using Block Copolymer Blends |
| Blancquaert, Yoann | Multiple e-beam direct write enters pre-production mode |
| Bobko, Christopher | Fabrication and Mechanical Properties of Porous 3D Nanostructures |
| Boehme, Lindsay | Evaluating Process Parameters for Liquid Phase Electron Beam Induced Etching of Copper |
| Bol, Ageeth | Lithography-free fabrication of graphene devices |
| Boltasseva, Alexandra | Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Boreyko, Jonathan | Air-Stable Droplet Interface Bilayers |
| Borsali, Redouane | High-χ Bio-Based Block Copolymers for Self-Assembled Nano-Lithography |
| Borselli, Matthew | Exchange-only Qubits in Si/SiGe Quantum Dots Patterned Using Electron-Beam Lithography |
| Bosch, Eric | A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV |
| Botman, Aurelien | Hydrogen-beam induced deposition of platinum and tungsten microstructures |
| Bouet, N. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Bourhis, Eric | A new Liquid Metal Ion Source configuration for improving Focused Ion Beams machines. |
| Brainard, Robert | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Brannaka, Joseph | Designing Precursors for the Deposition Technique: CVD vs. EBID |
| Briggs, Dayrl | Realization of 2D and 3D All-Dielectric Optical Metamaterials |
| Bruchhaus, Lars | A new Liquid Metal Ion Source configuration for improving Focused Ion Beams machines. |
| Brueck, S.R.J | Scatterometry of a 50-nm Half Pitch Wire Grid Polarizer |
| Brugger, Jürgen | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components |
| Budden, Matthias | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Buitrago, Elizabeth | Towards sub-10 nm node by EUV lithography |
| Bunday, Ben | A single-column, multi-beam SEM for high-resolution, high-throughput imaging
Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Burek, Michael | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond
Faraday Cage Reactive Ion Etching: Simulation and Experiments |
| Burns, Sean | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Byer, Robert | Microstructure-Induced Laser Acceleration of Free Electrons |
C |
| Cabrini, S. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Cabrini, Stefano | Nanoscale Science Research Centers (NSRCs): User facilities for nanoscience and nanotechnology.
Printable Integrated Photonic Devices with a high refractive index |
| Cadarso, Victor J. | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components |
| Cadoux, Cecile | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Cai, Haogang | Molecular Occupancy of Nanodot Arrays |
| Cai, Jingxuan | Three-dimensional Nanofabrication on Hydrogen Silsesquioxane Using Focused Helium Ion Beam Lithography |
| Calafiore, G. | 1.5 nm fabrication of test patterns for characterization of metrological systems
Printable Integrated Photonic Devices with a high refractive index |
| Camden, Jon | Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Cantu, Precious | Subwavelength NanoPatterning via Selective Dissolution of One-Photoisomer |
| Cao, Leifeng | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Cao, Xinnan | Electronic Quantification of Protein Biomarkers Based on Bead Aggregate Sizing
Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Cao, Yi | Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Caputo, Roberto | Enhanced adhesion of electron beam resist by grafted monolayer PMMA brush |
| Carlson, Matthew | High Chi Block Co-polymers for Lithography |
| Celiker, Orhan | Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction |
| Chaker, Mohamed | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Chamiot-Maitral, Gaëlle | 300mm DSA process qualification and stability |
| Chan, BT | Directed Self-Assembly Process Integration – Fin Patterning Approaches and Challenges
Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Chan, E. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Chang, Chieh | Hybrid Nanoscale X-ray Imaging |
| Chang, Chih-Hao | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures
Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Chang, Jae-Byum | Templated Self-Assembly of Block Copolymer Thin Films under Lithographic Confinement |
| Chang, Josephine | Stand-alone Piezoeletronic Transistor |
| Chang, Lingqian | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Chao, Weilun | Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Chaudhary, Narendra | Corner2-EPC: A Layout Image Compression Algorithm for Electron Beam Lithography |
| Chen, Chien-Chun | Atomic Resolution Electron Tomography |
| Chen, Chunhui | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Chen, Hao | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Chen, Kyle | Photoluminescence of Sequential Infiltration Synthesized ZnO nanostructures |
| Chen, Long | Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Chen, Mikai | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit
Fabrication of Transition Metal Dichalcogenide Photovoltaic Devices Using Surface-Charge Transfer (SCT) Doping Mechanism
Multilayer Transition Metal Dichalcogenide Device Arrays Fabricated Using Nanoimprint-Assisted Shear Exfoliation (NASE) |
| Chen, Pengyu | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit |
| Chen, Renkun | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Chen, Rong | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Chen, Xi | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures
Planar interference lithography by exploiting high-k modes |
| Chen, Xiao | Hafnium oxide resistive memory based on cross-bar structures down to sub-20 nm dimensions
High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Chen, Yan | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures |
| Chen, Yifang | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique
A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch
A Study of Nanoimprinted Color Filter with Ultra High Resolution
Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect
Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Chen, Yong | High contrast gratings for 3D additive manufacture |
| Chen, Yulu | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Chen, Zhaohui | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Cheng, Joy | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers
Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Cheng, Xing | Volume-expansion polymerization for UV-curable nanoimprint |
| Cheng, Yao-Te | A Colored Cesium Iodide Photocathode Excited by 405 nm Irradiation |
| Cheng, Zhaohui | Modeling of Local Dielectric Charging-up during SEM Observation |
| Chernev, Boril | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| Cherqui, Charles | Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Chevalier, Xavier | 300mm DSA process qualification and stability |
| Chi, Cheng | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Cho, Boklae | Low Energy Performance of a SEM Using a New Monochromator with Double Offset Cylindrical Lenses |
| Cho, Seong-Yong | Nanopore perforation in various membrane material by focused electron beam in transmission electron microscope |
| Choi, Chulmin | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Choi, Hong Kyoon | Templated Self-Assembly of Block Copolymer Thin Films under Lithographic Confinement |
| Choi, Jin | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Choi, Seong Soo | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Choi, Sung Woong | A study of characteristics of a microcolumn based on CNT emitters |
| Chou, Stephen | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Chu, Yiwen | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond |
| Chun, Dong Won | Fabrication of Nano-Sized MTJ Array for MRAM Devices |
| Chun, Dongwon | Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching |
| Cinquanta, Eugenio | Encapsulated Delamination Transfer and Nanofabrication of Silicene Field-Effect Transistors |
| Clendenning, Scott | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Coady, Daniel | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Colburn, Matthew | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers
Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Collier, Pat | Air-Stable Droplet Interface Bilayers |
| Collins, Philip | Single Molecule Bioelectronics using Carbon Nanotube Circuits |
| Con, Celal | PMMA resist containing metal salt for enhanced dry etching resistance
Ultra high aspect ratio sub-50 nm deep silicon trenches by photo-assisted electrochemical etching
Ultra-high resolution nanofabrication using self assembly of salt-polymer nanocomposite film |
| Conley, R. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Connors, Baili | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| Constancias, Christophe | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis
Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications
Multiple e-beam direct write enters pre-production mode |
| Conway, James | High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Cooke, Mike | Nano Pattern Transfer into Si and ITO using masks made by Electron Beam Induced Deposition |
| Cooper, Ryan | Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Copel, Matthew | Stand-alone Piezoeletronic Transistor |
| Coppersmith, Susan | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Costales, Maya | Development Characteristics of Polymethyl Methacrylate in Alcohol/Water Mixtures |
| Cottle, Hongyun | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Cress, C. | Graphene-derived Materials for NEMS |
| Cui, Bo | Electron beam lithography on irregular surface using grafted PMMA brush
Enhanced adhesion of electron beam resist by grafted monolayer PMMA brush
Neutral surface prepared by vapor phase coating for PS-b-PMMA self assembly
PMMA resist containing metal salt for enhanced dry etching resistance
Ultra high aspect ratio sub-50 nm deep silicon trenches by photo-assisted electrochemical etching
Ultra-high resolution nanofabrication using self assembly of salt-polymer nanocomposite film |
| Culbertson, J. | Graphene-derived Materials for NEMS |
| Cummings, Kevin | Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Czaplewski, David | Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures |
D |
| Dahlberg, Carl | Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Dahmen, Ulrich | Atomic Resolution Electron Tomography |
| Dallorto, Stefano | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Dal'Zotto, B. | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis |
| Dandley, Erinn | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures |
| Daniels-Race, Theda | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Datta, Anurup | Parallel near field optical lithography with sub wavelength resolution using a massive array of bowtie antennas |
| Davanco, Marcelo | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
| de Boer, Guido | Multiple e-beam direct write enters pre-production mode |
| De Teresa, Jose | Growth of functional magnetic and superconducting materials by Focused Beam Induced Deposition techniques |
| de Toonder, Jaap | Advances in 3D neuronal cell culture |
| Delachat, Florian | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Delenia, Eugene | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Delgado, Cyndi | Quantitative Analysis of Digital STM Lithography Precision |
| Delprat, Sebastien | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Denbeaux, Gregory | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Deng, Biao | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique |
| Deng, Shaozhi | Gated Si Tip Field Electron Emitter with Integrated Nano-Conduction-Channel |
| Dey, Ripon | Electron beam lithography on irregular surface using grafted PMMA brush
Enhanced adhesion of electron beam resist by grafted monolayer PMMA brush |
| Dhima, Khalid | A flexible hybrid stamp for T-NIL based on OrmoStamp
Procedure for high temperature nanoimprint of organic semi-conducting polymer
Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Dhuey, S. | Printable Integrated Photonic Devices with a high refractive index |
| Dhuey, Scott | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Di Prima, Matthew | Direct photo-patterning of thiol-ene thermoset polymer thin film structures by DLP lithography |
| Ding, Junjun | Transferring Graphene Nanostructures onto a Transparent Flexible Substrate |
| Ding, Wei | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Divan, Ralu | Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures
Progress in electron-beam-lithography-fabricated Fresnel zone plates on diamond membranes for hard X-ray focusing
ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Do, Hyung Wan | Templated Self-Assembly of Block Copolymer Thin Films under Lithographic Confinement |
| Dobisz, E. A. | Hybrid Nanoscale X-ray Imaging |
| Dobson, Phillip | Fabrication of Topography-Free Samples for Thermal Spatial Resolution Measurement of Scanning Thermal Microscopy |
| Doise, Jan | Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Doktycz, Mitch | Multiscale fluidic architectures for chemical manipulations of biological domains across length scales |
| Doktycz, Mitchel | Fabrication of Nanoporous Membranes for Tuning Microbial Interactions and Biochemical Reactions
Microfluidic Exchange Devices for Cell-free Reactions |
| Drbohlavová, Jana | Determination of Mechanical, Electrical and Surface Properties of an Individual Carbon Nanotube by Single Measurement |
| Du, Ke | Transferring Graphene Nanostructures onto a Transparent Flexible Substrate |
| Duerig, Urs | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Durand, William | High Chi Block Co-polymers for Lithography |
| Duyen, Huynh | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
E |
| Earley, William | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Ekinci, Yasim | Patterned freestanding Carbon Nanomembranes and Graphene via Extreme UV interference Lithography |
| Ekinci, Yasin | Towards sub-10 nm node by EUV lithography |
| Ellison, Christoper | High Chi Block Co-polymers for Lithography |
| Emaminejad, Sam | Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Engelmann, Sebastian | Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Englund, Dirk | Deterministic Creation of Closely-Spaced Single NV Centers in Diamond |
| Ercius, Peter | Atomic Resolution Electron Tomography |
| Eriksson, Mark | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Esfandiarpour, Samaneh | Focused Electron Beam Induced Deposition of Copper from Aqueous Solutions in Micro-wells |
F |
| F. Bent, Stacey | Strategies for selective deposition and selective etching of metal oxide materials on patterned substrates |
| Fainman, Yashaiahu | All-optical control of magnetization in various metallic magnetic systems |
| Fairbrother, D. Howard | Designing Precursors for the Deposition Technique: CVD vs. EBID |
| Fallahi, Arya | Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays |
| Fallica, Roberto | Towards sub-10 nm node by EUV lithography |
| Fan, Linran | Chip-scale Cavity Electro-optomechanics with Aluminum Nitride |
| Fan, Zengju | Volume-expansion polymerization for UV-curable nanoimprint |
| Farinas, E. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Farrell, Richard | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Farrow, Reginald | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Fedorov, Andrei | FOCUSED ELECTRON BEAM INDUCED PROCESSING VIA MULTI-MODE ENERGIZED MICRO/NANO-JETS TO ENABLE ADVANCES IN GRAPHENE NANOELECTRONICS |
| Feldman, Martin | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Felix, Nelson | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Feng, Hongtao | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures |
| Fernandez, Ariadna | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Ferreira, Placid | Direct Writing of Silver Nanostructures and Painting on Phosphate Glass with Electron Beam Irradiation |
| Fillot, Q. | Printable Integrated Photonic Devices with a high refractive index |
| Fisher, Frank | Transferring Graphene Nanostructures onto a Transparent Flexible Substrate |
| Fisher, Jeffrey | FOCUSED ELECTRON BEAM INDUCED PROCESSING VIA MULTI-MODE ENERGIZED MICRO/NANO-JETS TO ENABLE ADVANCES IN GRAPHENE NANOELECTRONICS |
| Fleury, Guillaume | 300mm DSA process qualification and stability |
| Floris, Christian | Electron Beam Induced High Resolution Biofunctionalised Nanopatterns |
| Foerthner, Michael | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Fouchier, Marc | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis |
| Fourkas, John | Principles and Promise of Multicolor, Visible-Light Nanolithography |
| Fowlkes, Jason | Electron beam induced oxidation of direct–write deposits: a simulation
Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process
Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities
Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Francone, Achille | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Fridmann, Joel | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Friedman, A. | Graphene-derived Materials for NEMS |
| Friesen, Mark | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Frimat, Jean-Philippe | Advances in 3D neuronal cell culture |
| Fröch, Johannes | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| Fu, Zugen | Origin of insoluble residual in ZEP520 electron-beam resist development |
| Fuchs, Ehud | Quantitative Analysis of Digital STM Lithography Precision |
| Fujii, Kazuo | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Fullerton, Eric | All-optical control of magnetization in various metallic magnetic systems |
| Furukawa, Tsuyoshi | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Furukawa, Yuki | Computational Study of Resist Pattern Shrinkage under CD-SEM Observation |
G |
| Gaathon, Ophir | Deterministic Creation of Closely-Spaced Single NV Centers in Diamond |
| Gadelrab, Karim | Nano Mesh Patterns by BCP Self-Templating |
| Gallego-Perez, Daniel | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Gamble, John | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Gao, Bo | DNA Origami as Molecular Circuit Boards: Attachment, Patterning, and Stability |
| Garbowski, Tomasz | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Garcia-Sandoval, Aldo | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics |
| Gardner, Donald | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Gavagnin, Marco | Expanding nanomagnetic logic into the third dimension - new pathways via FEBID |
| Ge, Yunfei | Fabrication of Topography-Free Samples for Thermal Spatial Resolution Measurement of Scanning Thermal Microscopy |
| Geier, Barbara | Electron beam induced oxidation of direct–write deposits: a simulation |
| Gergaux, Patrice | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Geurts, Remco | A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV |
| Gharbi, Ahmed | 300mm DSA process qualification and stability |
| Gibb, Ashley | Electron-Beam Induced Atomic-Scale Defects in 2D Materials at Elevated Temperatures using In Situ Transmission Electron Microscopy |
| Gierak, Jacques | A new Liquid Metal Ion Source configuration for improving Focused Ion Beams machines. |
| Gilbert, Matt | Electron-Beam Induced Atomic-Scale Defects in 2D Materials at Elevated Temperatures using In Situ Transmission Electron Microscopy |
| Goekdeniz, Zeynep | Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Towards high purity FEBID gold nanostructures – a comparison of purification approaches |
| Goetze, Bernhard | Backside circuit edit with gas assisted etching on a platform with multiple focused ion beams |
| Goldberg, Kenneth | Demonstration of below 30-nm half pitch resolution at the SHARP microscope
Micro-optics at the diffraction limit: design for manufacture |
| Goltsov, A. | Printable Integrated Photonic Devices with a high refractive index |
| Gölzhäuser, Armin | Patterned freestanding Carbon Nanomembranes and Graphene via Extreme UV interference Lithography |
| Goodman, Sarah | Lithographic engineering of volume plasmons |
| Goodyear, Andy | Nano Pattern Transfer into Si and ITO using masks made by Electron Beam Induced Deposition |
| Gopalakrishnan, Singaram | Cell Migration Direction Switched by Angular Gratings |
| Goswami, Sirjit | Protection of graphene against helium-ion-induced damage by h-BN encapsulation |
| Gosztola, David | Automated Geometry assisted PEC for electron beam direct write nanolithography
Development Characteristics of Polymethyl Methacrylate in Alcohol/Water Mixtures
Photoluminescence of Sequential Infiltration Synthesized ZnO nanostructures |
| Goto, Yusuke | Translocation of Single Stranded DNA through Nano-Cylindrical PEO Passage Self-Assembled by Amphiphilic Block Copolymer |
| Gotszalk, Teodor | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations
Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Grabiec, Piotr | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations
Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Grazianetti, Carlo | Encapsulated Delamination Transfer and Nanofabrication of Silicene Field-Effect Transistors |
| Grbic, Anthony | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces |
| Greer, Clayton M. | Microfluidic platform for studies of self-organizing processes in a bacterial cell |
| Greer, Julia | Materials by Design: 3-Dimensional Architected Nanostructured Meta-Materials |
| Gronheid, Roel | Directed Self-Assembly Process Integration – Fin Patterning Approaches and Challenges
Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Gruetzner, Gabi | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Grütter, Peter | Fabrication of Silicon-on-Insulator Blazed-Grating Optical Couplers using a Thermal Scanning Probe System |
| Grützner, Gabi | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components
Towards a Novel Positive Tone Resist mr-PosEBR for High Resolution Electron Beam Lithography |
| Grützner, Susanne | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components |
| Grzeskowiak, Steven | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Gu, Changzhi | Controllable Synthesis of Single Conducting Polymer Nanowire on electrodes Fabricated by Focused Ion Beam Milling
Tip-Enhanced Surface Enhanced Raman Scattering on Gold Nanoparticle Decorated Silicon Microcone Array Substrate for DNA Sensing |
| Guillorn, Michael | Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Gundel, Lara | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Gunderson, Kevin | Advances in scaling of genomic assays: The role of nanofabrication in the past, present, and future evolution of genome technology. |
| Gunkel, Ilja | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Guo, L. Jay | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces
Planar interference lithography by exploiting high-k modes
Scalable and high-throughput 2D nanopatterning via sequential combination of continuous 1D patterning strokes
Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Guo, Rui | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Gupta, Ashu | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Gustafson, John | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Guttmann, Markus | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
H |
| Hadziioannou, Georges | 300mm DSA process qualification and stability |
| Hagen, Cornelis | Combined Electron Beam Induced Deposition and Etching for 3D shape control
Electron Beam Induced High Resolution Biofunctionalised Nanopatterns
Fabrication of metal nano-antennas with sub-10nm gap by using electron-beam induced deposition etch masks
Nano Pattern Transfer into Si and ITO using masks made by Electron Beam Induced Deposition
Parallel Secondary Electron Imaging in a Multi-Beam SEM |
| Hailer, Katie | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| Halila, Sami | High-χ Bio-Based Block Copolymers for Self-Assembled Nano-Lithography |
| Hallstein, Roy | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit |
| Hamaguchi, Tetsuya | Metallic Nanostructures Controlled by Dewetting Thin Film on Patterned Ceramic Surface |
| Hamaguchi, Tetusya | Damascene of metallic wires on imprinted flexible substrate |
| Han, Chul Hee | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Han, Il Ki | Reusable Moth-Eye nano-patterned PDMS sticker as a versatile function of coating for photovoltaics. |
| Han, Sang Hoon | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Han, Sang Woo | Large-scale formation of three-dimensional plasmonic nanodishes using nanoimprint lithography |
| Hannah, Eric | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Hansen, Ryan | Microwell arrays for high-throughput investigation of microbial interactions |
| Hao, Hanfang | Solid Immersion Optics for Surface Plasmon Excitation in a Transmission Mode Photoemission Electron Microscope |
| Hao, Lin | Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Haraguchi, T. | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| Harder, Irina | Towards a Novel Positive Tone Resist mr-PosEBR for High Resolution Electron Beam Lithography |
| Hardman, Rob | Lithographic Evaluation of gL-2000: A High-Resolution Resist for Electron-Beam Lithography |
| Hari, Sangeetha | Combined Electron Beam Induced Deposition and Etching for 3D shape control
Electron Beam Induced High Resolution Biofunctionalised Nanopatterns |
| Harris, James | Microstructure-Induced Laser Acceleration of Free Electrons |
| Hartley, John | Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Hartnett, Chris | Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities |
| Harukawa, Ryota | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Haruyama, Yuichi | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Hasan, Farhan | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Hashemi, Azadeh | Fabrication of Free-standing Casein Microstructures with Bioimprinted Cellular Surface Features |
| Hashemi, Fatemeh | Strategies for selective deposition and selective etching of metal oxide materials on patterned substrates |
| Hastings, Todd | Evaluating Process Parameters for Liquid Phase Electron Beam Induced Etching of Copper
Focused Electron Beam Induced Deposition of Copper from Aqueous Solutions in Micro-wells
Teflon AF Patterning using Variable Pressure Electron-Beam Lithography |
| Hattori, Azusa | Rapid growth in 30 seconds of thermally induced microphase-separation of PS-b-PMMA for directed self-assembly lithography |
| Havelka, Miloslav | Improvement of Xe Plasma FIB Resolution and its Integration with Electron and Photon Beams |
| Hayashi, Hidetaka | Proton beam writing on polyvinylidene difluoride films for high-aspect-ratio micro-structuring |
| Hayashi, Tatsuya | Residual layer less nano-transfer by roll press and liquid transfer imprint lithography |
| He, Jian | Studies on the fully automated printing/imprint process using a double-side patterned soft stamp |
| Hedrick, James | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Heerkens, Carel | Fabrication of metal nano-antennas with sub-10nm gap by using electron-beam induced deposition etch masks
Laser triggered microfabricated Ultrafast Beam Blanker |
| Henderson, Clifford | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Henry, Matthew | FOCUSED ELECTRON BEAM INDUCED PROCESSING VIA MULTI-MODE ENERGIZED MICRO/NANO-JETS TO ENABLE ADVANCES IN GRAPHENE NANOELECTRONICS |
| Herfst, Rodolf | Helium-ion-beam-induced growth of 3-dimensional AFM probes |
| Hesselink, Lambertus | A Colored Cesium Iodide Photocathode Excited by 405 nm Irradiation |
| Hetzer, David | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Hinds, Bruce | Carbon nanotube membranes as the active element in remotely programmable transdermal addiction treatment device |
| Hirai, Yoshihiko | Computational Study of Resist Pattern Shrinkage under CD-SEM Observation
Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography
High Aspect Nanopore Array Fabrication by Nanoimprint Employing Novel Demolding Process
Impact of side wall angle of mold pattern on release force in nanoimprint lithography
Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography |
| Hirano, Ryoichi | Simulation technique for pattern inspection using projection electron microscope |
| Hiroshiba, Nobuya | Rapid growth in 30 seconds of thermally induced microphase-separation of PS-b-PMMA for directed self-assembly lithography |
| Hishiro, Yoshi | Novel EUV resist development for sub-14 nm half pitch |
| Hobbs, Richard | 3D Nanofabrication by Geometrically-Confined Helium Ions in Diamond Nanostructures
Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction
Lithographic engineering of volume plasmons
Lithographic Evaluation of gL-2000: A High-Resolution Resist for Electron-Beam Lithography
Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays |
| Hobisch, Josefine | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| Hodgkiss, Justin | Carbon nanotube field effect transistor apatasensors for estrogen detection in liquids |
| Holzner, Felix | Fabrication of Silicon-on-Insulator Blazed-Grating Optical Couplers using a Thermal Scanning Probe System |
| Holzwarth, Charles | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Honda, Nao | Lithographic Evaluation of gL-2000: A High-Resolution Resist for Electron-Beam Lithography |
| Hono, Kazuhiro | All-optical control of magnetization in various metallic magnetic systems |
| Hoogenboom, Jacob | Electron Beam Induced High Resolution Biofunctionalised Nanopatterns
Fabrication of metal nano-antennas with sub-10nm gap by using electron-beam induced deposition etch masks
Laser triggered microfabricated Ultrafast Beam Blanker |
| Hosoda, Risa | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Hou, Hsuan-Chao | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Houston, B. | Graphene-derived Materials for NEMS |
| Howitz, Steffen | Studies on the fully automated printing/imprint process using a double-side patterned soft stamp |
| Hrnčíř, Tomáš | Improvement of Xe Plasma FIB Resolution and its Integration with Electron and Photon Beams |
| Hu, Walter | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Huang, Yilei | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Huang, Zhijun | Gated Si Tip Field Electron Emitter with Integrated Nano-Conduction-Channel |
| Hubálek, Jaromír | Determination of Mechanical, Electrical and Surface Properties of an Individual Carbon Nanotube by Single Measurement |
| Humayun, Md Tanim | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Hwang, Kyung-Jun | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Hwang, Nong-moon | In situ observation of Au nanoparticles behavior on different substrate during e-beam irradiation |
I |
| Iberi, Vighter | Lithography and in situ elucidation of conductivity in graphene structures using scanning helium ion microscopy |
| Iida, Susumu | Simulation technique for pattern inspection using projection electron microscope |
| Iqbal, Z. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Ito, A. | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| Iwasaki, Shiko | Metallic Nanostructures Controlled by Dewetting Thin Film on Patterned Ceramic Surface |
| Iwata, Naoya | Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography |
J |
| Jacobs, Kyle | Direct Writing of Silver Nanostructures and Painting on Phosphate Glass with Electron Beam Irradiation |
| Jacobsen, Chris | Multilayer on-chip stacked zone plates with high aspect ratio for hard X-ray nanoscale imaging |
| Jacot-Descombes, Loïc | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components |
| Jang, Taehee | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces |
| Janus, Pawel | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Janus, Paweł | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations |
| Jarnagin, Nathan | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Javanmard, Mehdi | Electronic Quantification of Protein Biomarkers Based on Bead Aggregate Sizing
Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Jede, Ralf | A new Liquid Metal Ion Source configuration for improving Focused Ion Beams machines. |
| Jena, Debdeep | Nanoelectronic Devices with Layered Semiconductors: Challenges, and advances in Fabrication and Performance |
| Jennings, Anna | Microfluidic platform for studies of self-organizing processes in a bacterial cell |
| Jeon, Chan-Uk | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Jeong, Mira | Fabrication of the flexible metallic master using LTIL process for roll nanoimprint lithography |
| Jiang, Hao | Highly Reliable Resistive Switching Devices Based on Tantalum-doped Silicon Oxide |
| Jin, Sungho | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Jin, Wei | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Jiruše, Jaroslav | Improvement of Xe Plasma FIB Resolution and its Integration with Electron and Photon Beams |
| Jones, O. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Joseph, Praveen | Novel Method for Fabrication of Sub-50nm Multi-tier Nanoimprint Lithography Templates |
| Joshi-Imre, Alexandra | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics
Direct photo-patterning of thiol-ene thermoset polymer thin film structures by DLP lithography |
| Joy, David | Lithography and in situ elucidation of conductivity in graphene structures using scanning helium ion microscopy |
| Jozwiak, Grzegorz | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Jugessur, Aju | Nano-scale intra-cavity defects in photonic crystal microcavity filter for enhancing transmission |
| Jussot, Julien | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis |
K |
| Kahl, Michael | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Kakinuma, Norihiro | Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing |
| Kamerbeek, Martin | Nano Pattern Transfer into Si and ITO using masks made by Electron Beam Induced Deposition |
| Kanai, Hideki | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kanakamedala, Kalyan | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Kanwal, A. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Karbasian, Golnaz | Fabrication of Nanodamascene Metallic Single Electron Transistor |
| Karg, Siegfried | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Kärtner, Franz | Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays |
| Kasahara, Yusuke | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kawamonzen, Yoshiaki | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kawamura, Daiji | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Kawata, Hiroaki | Computational Study of Resist Pattern Shrinkage under CD-SEM Observation
Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography
High Aspect Nanopore Array Fabrication by Nanoimprint Employing Novel Demolding Process
Impact of side wall angle of mold pattern on release force in nanoimprint lithography
Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography |
| Kawatsuki, Nobuhiro | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Kehagias, Nikos | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Kemen, Thomas | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Kessels, Erwin | Lithography-free fabrication of graphene devices |
| Khan, Arshad | Cost-effective and Solution Processed Fabrication for Metal Mesh Based Flexible Transparent Conducting Electrodes |
| Kihara, Naoko | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kihm, Yong H. | Reusable Moth-Eye nano-patterned PDMS sticker as a versatile function of coating for photovoltaics. |
| Kikuta, Hisao | Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography |
| Kim, Chung-Soo | 3D Nanofabrication by Geometrically-Confined Helium Ions in Diamond Nanostructures
Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction |
| Kim, Dae Wook | A study of characteristics of a microcolumn based on CNT emitters |
| Kim, Dal-Hyun | Development of head-scanning atomic force microscope in scanning electron microscope |
| Kim, Dohun | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Kim, Dokyun K. | All-optical control of magnetization in various metallic magnetic systems |
| Kim, Ganghun | A Computational Fluorescent Microscopy Through a Glass Needle |
| Kim, GeeHong | Numerical method using modified squeeze model for NIL |
| Kim, Gunwoo | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Kim, Ho Seob | A study of characteristics of a microcolumn based on CNT emitters |
| Kim, Hyung Woo | A study of characteristics of a microcolumn based on CNT emitters |
| Kim, Hyungjun | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
| Kim, Hyunmi | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
| Kim, Hyun-Mi | In situ observation of Au nanoparticles behavior on different substrate during e-beam irradiation
Nanopore perforation in various membrane material by focused electron beam in transmission electron microscope |
| Kim, Jeonghwan | Nano Cost Nano Patterned Template for Surface Enhanced Raman Scattering |
| Kim, Ki-Bum | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores
In situ observation of Au nanoparticles behavior on different substrate during e-beam irradiation
Nanopore perforation in various membrane material by focused electron beam in transmission electron microscope |
| Kim, Kyoung Nan | DNA Origami as Molecular Circuit Boards: Attachment, Patterning, and Stability |
| Kim, Mingon | Fabrication of the flexible metallic master using LTIL process for roll nanoimprint lithography |
| Kim, Ryoung-Han | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Kim, Sang-Kon | Plasmonic Effect of Process Parameters on 10-nm Patterning in Computational Lithography |
| Kim, Songkil | FOCUSED ELECTRON BEAM INDUCED PROCESSING VIA MULTI-MODE ENERGIZED MICRO/NANO-JETS TO ENABLE ADVANCES IN GRAPHENE NANOELECTRONICS |
| Kim, Sung In | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Kim, Tae Kyoung | Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching |
| Kim, Yong Sang | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Kim, Young Chul | A study of characteristics of a microcolumn based on CNT emitters |
| Kim, Young Jin | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching
Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Kim, Youngrok | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
| Kimura, Yoshino | Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing |
| Kimura, Yoshinobu | Modeling of Local Dielectric Charging-up during SEM Observation |
| Kinsey, Nathaniel | Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Kisslinger, Kim | Directed patterning of arbitrary metal oxide nanostructures using polymer template nanoreactors |
| Klein, Jan Jasper | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Klingfus, Joe | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Knoll, Armin | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Ko, Doo-Hyun | Reusable Moth-Eye nano-patterned PDMS sticker as a versatile function of coating for photovoltaics. |
| Ko, Hyungduk | Reusable Moth-Eye nano-patterned PDMS sticker as a versatile function of coating for photovoltaics. |
| Kobayashi, Katsutoshi | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kocsis, Michael | Demonstration of below 30-nm half pitch resolution at the SHARP microscope |
| Kodera, Katsuyoshi | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kometani, Reo | Characterization of mechanical properties of the carbon mechanical nanostructure fabricated from SU-8 resist by FIB/EB dual-beam lithography
Narrowband Photonic Absorber with Nano-Fins in Near-Infrared Region for Wavelength Detection with Mechanical Resonator |
| Komuro, Osamu | Modeling of Local Dielectric Charging-up during SEM Observation |
| Kondic, Lou | Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities |
| Kooi, Steven | Two Photon Lithography Written Defects in 3D Holographic Lithography Structures and Conversion to Higher Index Materials |
| Koops, Hans W.P. | Koops-GranMat, a Bose-Einstein Condensate material working at room temperature being capable to replace superconductors in many applications |
| Kopiec, Daniel | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Koshelev, A. | Printable Integrated Photonic Devices with a high refractive index |
| Koshikawa, Hiroshi | Proton beam writing on polyvinylidene difluoride films for high-aspect-ratio micro-structuring |
| Kothleitner, Gerald | High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Kottke, Peter | FOCUSED ELECTRON BEAM INDUCED PROCESSING VIA MULTI-MODE ENERGIZED MICRO/NANO-JETS TO ENABLE ADVANCES IN GRAPHENE NANOELECTRONICS |
| Koutsos, Vasileios | Fabrication and characterization of zinc oxide nanoneedles for medical/biological applications |
| Koyama, Hikaru | Modeling of Local Dielectric Charging-up during SEM Observation |
| Kravchenko, Ivan | Realization of 2D and 3D All-Dielectric Optical Metamaterials |
| Kraxner, Johanna | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| Krishnan, Kannan | Tunable mesoscale magnetic structures by nanoimprint lithography |
| Kruit, Pieter | Combined Electron Beam Induced Deposition and Etching for 3D shape control
Laser triggered microfabricated Ultrafast Beam Blanker
Parallel Secondary Electron Imaging in a Multi-Beam SEM |
| Kubota, Hitoshi | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Kulkarni, S M | Modelling and analysis of MEMS capacitive microphone with compliant diaphragm |
| Kulmala, Tero | Towards sub-10 nm node by EUV lithography |
| Kulshreshtha, Prashant | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Kunicki, Piotr | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Kurabayashi, Katsuo | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit |
| Kuru, Cihan | Fabrication of Nano-Sized MTJ Array for MRAM Devices |
| Kwak, Moon Kyu | Scalable and high-throughput 2D nanopatterning via sequential combination of continuous 1D patterning strokes |
| Kwon, Byung-Seok | Tunable mesoscale magnetic structures by nanoimprint lithography |
| Kysar, Jeffrey | Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
L |
| Lacey, I. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Lagally, Max | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Lai, Kafai | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Lam, Yun Wah | Cell Migration Direction Switched by Angular Gratings |
| Lambert, Charles H. | All-optical control of magnetization in various metallic magnetic systems |
| Lamprou, Dimitrios | Fabrication and characterization of zinc oxide nanoneedles for medical/biological applications |
| Latawiec, Pawel | Faraday Cage Reactive Ion Etching: Simulation and Experiments |
| Lattard, L. | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis |
| Lattard, Ludovic | Multiple e-beam direct write enters pre-production mode |
| Le Drogoff, Boris | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Lee, Gunwoo | Effects of thermal treatment on the transfer characteristics of sub-100 nm SnS2 thin-film transistor arrays |
| Lee, Jaejong | Fabrication of the flexible metallic master using LTIL process for roll nanoimprint lithography
Numerical method using modified squeeze model for NIL |
| Lee, Jeongsu | Effects of thermal treatment on the transfer characteristics of sub-100 nm SnS2 thin-film transistor arrays |
| Lee, Jiye | Controlling excitons in semiconductor quantum dots for nanophotonic applications |
| Lee, Kim Y | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Lee, L. James | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Lee, Sang-Ho | Numerical method using modified squeeze model for NIL |
| Lee, Seung-Beck | Effects of thermal treatment on the transfer characteristics of sub-100 nm SnS2 thin-film transistor arrays |
| Lee, Soo-Young | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Lee, Tae Geol | Large-scale formation of three-dimensional plasmonic nanodishes using nanoimprint lithography |
| Lee, Taehwa | Scalable and high-throughput 2D nanopatterning via sequential combination of continuous 1D patterning strokes |
| Lee, Young Bok | A study of characteristics of a microcolumn based on CNT emitters |
| Leedle, Ken | Microstructure-Induced Laser Acceleration of Free Electrons |
| Lenczner, Michel | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations |
| Lester, Kevin | Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition |
| Levy, Antonio | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Lewis, Brett | Electron beam induced oxidation of direct–write deposits: a simulation
Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process |
| Lezec, Henri | FIB Milling and Replica Molding of Complex Surfaces with Atomic-Scale Precision |
| Li, Can | Highly Reliable Resistive Switching Devices Based on Tantalum-doped Silicon Oxide |
| Li, Guoliang | Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Li, Junjie | Controllable Synthesis of Single Conducting Polymer Nanowire on electrodes Fabricated by Focused Ion Beam Milling
Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene
Tip-Enhanced Surface Enhanced Raman Scattering on Gold Nanoparticle Decorated Silicon Microcone Array Substrate for DNA Sensing |
| Li, Kenan | Multilayer on-chip stacked zone plates with high aspect ratio for hard X-ray nanoscale imaging |
| Li, Qian | Research on three-dimension current density distribution of a 30kV focused ion beam with Coulomb interactions |
| Li, Shijie | Fiber-facet SERS Probes Fabricated Using Double-Transfer Nanoimprint Lithography |
| Li, Wenbin | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Li, Wen-Di | Cost-effective and Solution Processed Fabrication for Metal Mesh Based Flexible Transparent Conducting Electrodes
Fiber-facet SERS Probes Fabricated Using Double-Transfer Nanoimprint Lithography
Three-dimensional Nanofabrication on Hydrogen Silsesquioxane Using Focused Helium Ion Beam Lithography |
| Li, Wenping | Research on three-dimension current density distribution of a 30kV focused ion beam with Coulomb interactions |
| Li, Xu | Low-leakage current and damage-free silicon nitride deposition at 30oC by inductively coupled plasma with neutral beams by neutralization grid plate |
| Li, Yuanrui | Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles
High contrast gratings for 3D additive manufacture |
| Li, Zheng | Tunable mesoscale magnetic structures by nanoimprint lithography |
| Li, Ziping | Volume-expansion polymerization for UV-curable nanoimprint |
| Liang, Xiaogan | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit
Fabrication of Transition Metal Dichalcogenide Photovoltaic Devices Using Surface-Charge Transfer (SCT) Doping Mechanism
Multilayer Transition Metal Dichalcogenide Device Arrays Fabricated Using Nanoimprint-Assisted Shear Exfoliation (NASE) |
| Liao, Hsien-Yu | Visible subwavelength dielectric grating reflector fabricated using focused ion beam |
| Liao, Jinyu | Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Liao, Kuo-Tang | FIB Milling and Replica Molding of Complex Surfaces with Atomic-Scale Precision |
| Lichtman, Jeff | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Liddle, J. Alexander | Assembly of Superparamagnetic Iron Oxide Nanoparticles on DNA Nanostructures
Micro-optics at the diffraction limit: design for manufacture
The Center for Nanoscale Science and Technology: NIST’s Nanotechnology User Facility |
| Liddy, Madelaine | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond |
| Lieberman, Marya | DNA Origami as Molecular Circuit Boards: Attachment, Patterning, and Stability |
| Lim, HyungJun | Numerical method using modified squeeze model for NIL |
| Lim, Mincheol | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
| Lin, Guanyang | Implementation of Surface Energy Modification in Grapho-Epitaxy Directed Self-Assembly for Hole Multiplication |
| Lin, Zhongtian | Electronic Quantification of Protein Biomarkers Based on Bead Aggregate Sizing
Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Linn, Allison | Lithography and in situ elucidation of conductivity in graphene structures using scanning helium ion microscopy |
| Liu, Bo | High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Liu, Charlie | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Liu, Chi-Chun | Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Liu, Chin-Hung | Fabrication of Nano-Sized MTJ Array for MRAM Devices
Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching |
| Liu, He | Fabrication of passive polarization-dependent asymmetric optical devices using nanoimprint lithography
High contrast gratings for 3D additive manufacture
Low DC-Bias Silicon Nitride Anisotropic Etching |
| Liu, Jianpeng | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique
Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Liu, Jubiao | Research on three-dimension current density distribution of a 30kV focused ion beam with Coulomb interactions |
| Liu, Ming | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Liu, Mingzhao | Origin of insoluble residual in ZEP520 electron-beam resist development |
| Liu, Xiao-Hu | Stand-alone Piezoeletronic Transistor |
| Liu, Yang | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors
Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Livengood, Richard | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit
Focused Neon Ion Beam Induced Sputtering of Copper: Monte Carlo Simulations |
| Lohse, Olga | Towards a Novel Positive Tone Resist mr-PosEBR for High Resolution Electron Beam Lithography |
| Loncar, Marko | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond
Faraday Cage Reactive Ion Etching: Simulation and Experiments |
| Lončar, Marko | Free-standing Nanostructures in Single-crystal Quartz |
| Lopez, Gerald | Automated Geometry assisted PEC for electron beam direct write nanolithography |
| Lovell, Josh | Use of HfC(210) as High Brightness Electron Sources |
| Lu, Bingrui | A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch
A Study of Nanoimprinted Color Filter with Ultra High Resolution
Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect
Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Lu, Ming | Origin of insoluble residual in ZEP520 electron-beam resist development |
| Lu, Wu | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Luiten, Jom | Application of laser-cooling and compression to create a high resolution focused ion beam
Photoionization of a laser-intensified atomic beam: prospects for high resolution focused ion beams |
| Lukin, Mikhail | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond |
| Luo, Yao | Corner2-EPC: A Layout Image Compression Algorithm for Electron Beam Lithography |
| Luttge, Regina | Advances in 3D neuronal cell culture |
M |
| Ma, Yaqi | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique
A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch |
| Ma, Yue | Multiple e-beam direct write enters pre-production mode |
| Maas, Diederik | Helium-ion-beam-induced growth of 3-dimensional AFM probes |
| Mackie, William | Electron sources and applications for electron beams in air
Use of HfC(210) as High Brightness Electron Sources |
| Mackus, Adrie | Lithography-free fabrication of graphene devices |
| Maeda, Etsuo | Characterization of mechanical properties of the carbon mechanical nanostructure fabricated from SU-8 resist by FIB/EB dual-beam lithography
Narrowband Photonic Absorber with Nano-Fins in Near-Infrared Region for Wavelength Detection with Mechanical Resonator |
| Maekawa, Yasunari | Proton beam writing on polyvinylidene difluoride films for high-aspect-ratio micro-structuring |
| Magera, Gerald | Electron sources and applications for electron beams in air
Use of HfC(210) as High Brightness Electron Sources |
| Mahady, Kyle | Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities |
| Maher, Michael | High Chi Block Co-polymers for Lithography |
| Majstrzyk, Wojciech | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Majumder, Apratim | Super-resolution Optical Nanolithography using two approaches of Absorbance Modulation |
| Mäkilä, Ermei | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Maldonado, Juan | A Colored Cesium Iodide Photocathode Excited by 405 nm Irradiation |
| Malkoc, Veysi | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Malloy, Matt | A single-column, multi-beam SEM for high-resolution, high-throughput imaging
Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Mamuro, Minoru | High Aspect Nanopore Array Fabrication by Nanoimprint Employing Novel Demolding Process |
| Manfra, Michael | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Manfrinato, Vitor | 3D Nanofabrication by Geometrically-Confined Helium Ions in Diamond Nanostructures
Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction
Lithographic engineering of volume plasmons |
| Mangin, Stephane | All-optical control of magnetization in various metallic magnetic systems |
| Mankos, Marian | A novel electron monochromator for high resolution imaging and spectroscopy |
| Mannik, Jaan | Microfluidic platform for studies of self-organizing processes in a bacterial cell
Studies of bacterial cells and cellular assemblies using lab-on-a-chip platform |
| Margot, Joelle | Fabrication of high aspect ratio tungsten nanostructures on large area ultrathin c-Si membranes for X rays applications |
| Martinson, Alex B. | Progress in electron-beam-lithography-fabricated Fresnel zone plates on diamond membranes for hard X-ray focusing |
| Martyna, Glenn | Stand-alone Piezoeletronic Transistor |
| Maruyama, Ken | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Marzook, Taisir | Directed Self-Assembly Process Integration – Fin Patterning Approaches and Challenges |
| Masid, Farhana | Super-resolution Optical Nanolithography using two approaches of Absorbance Modulation |
| Masiello, David | Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Mastropaolo, Enrico | Fabrication and characterization of zinc oxide nanoneedles for medical/biological applications |
| Matola, Brad | Lithography and in situ elucidation of conductivity in graphene structures using scanning helium ion microscopy |
| Matsui, Shinji | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Matusoka, Hokuto | Proton beam writing on polyvinylidene difluoride films for high-aspect-ratio micro-structuring |
| Mayer, Raphael | Characterization of QSil 216 and QSil 218 for Microfluidic and Biomedical Applications |
| Mayrhofer, Claudia | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| McClelland, Jabez | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
| McConnell, Casey | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| McElwee-White, Lisa | Designing Precursors for the Deposition Technique: CVD vs. EBID |
| McKinney, W. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Medapalli, Rajasekhar | All-optical control of magnetization in various metallic magnetic systems |
| Medina, Juan | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Megrant, Anthony | Superconducting Resonators: The Canary in the Coherence Coalmine |
| Meiri, Amihai | A Computational Fluorescent Microscopy Through a Glass Needle |
| Meisburger, Dan | A High-Current Miniature Column for a High Volume Manufacturing Multi-Column Wafer Inspection System
Proposed Architecture of a Multi-Column Electron-Beam Wafer Inspection System for High Volume Manufacturing |
| Mejia Prada, C. | Printable Integrated Photonic Devices with a high refractive index |
| Mekaru, Harutaka | Surface Patterning of Protein Matrix Basement |
| Meli, Luciana | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Mellish, Mac | Patterning of ≤ 16 nm defect arrays with electron beam lithography which are used to develop a high throughput electron beam defect inspection tool |
| Menon, Rajesh | A Computational Fluorescent Microscopy Through a Glass Needle
Digital metamaterials & micro-optics for photonics & imaging
Subwavelength NanoPatterning via Selective Dissolution of One-Photoisomer
Super-resolution Optical Nanolithography using two approaches of Absorbance Modulation |
| Mensch, Philipp | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Merrill, Sean | A Computational Fluorescent Microscopy Through a Glass Needle |
| Miao, Jianwei | Atomic Resolution Electron Tomography |
| Michalowski, Marcin | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Mika, Johann | Characterization of Electrophysiological Properties of Neurites using a Microfluidic-Microelectronic Platform
Characterization of QSil 216 and QSil 218 for Microfluidic and Biomedical Applications
Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel |
| Millet, Larry | Multiscale fluidic architectures for chemical manipulations of biological domains across length scales |
| Min, Joong-Hee | Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Minegishi, Shinya | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Miyagi, Ken | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Miyata, Yuto | Characterization of mechanical properties of the carbon mechanical nanostructure fabricated from SU-8 resist by FIB/EB dual-beam lithography |
| Miyazoe, Hiroyuki | Stand-alone Piezoeletronic Transistor |
| Miyoshi, Hidetatsu | Fabrication of a high-resolution mask based on enhanced techniques for line edge roughness improvement with a non-chemically amplified resist and a post-exposure bake |
| Moczala, Magdalena | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Moerland, Robert | Laser triggered microfabricated Ultrafast Beam Blanker |
| Moghaddam, Mahta | Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles |
| Mohammad, Mohammad | Hafnium oxide resistive memory based on cross-bar structures down to sub-20 nm dimensions
High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Mohanty, Nihar | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Mohr, Robert | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Moitra, Parikshit | Realization of 2D and 3D All-Dielectric Optical Metamaterials |
| Moldovan, Nicolaie | Progress in electron-beam-lithography-fabricated Fresnel zone plates on diamond membranes for hard X-ray focusing |
| Molle, Alessandro | Encapsulated Delamination Transfer and Nanofabrication of Silicene Field-Effect Transistors |
| Mondol, Mark | Lithographic Evaluation of gL-2000: A High-Resolution Resist for Electron-Beam Lithography |
| Moon, Bum Kii | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Moon, Euclid | Parallel near field optical lithography with sub wavelength resolution using a massive array of bowtie antennas |
| Moro, Masatoshi | Residual layer less nano-transfer by roll press and liquid transfer imprint lithography |
| Mulders, Hans | Combined Electron Beam Induced Deposition and Etching for 3D shape control
Hydrogen-beam induced deposition of platinum and tungsten microstructures
Lithography-free fabrication of graphene devices |
| Mulders, Johannes | A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV |
| Mundy, J. Zachary | Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Munechika, Keiko | Controlling excitons in semiconductor quantum dots for nanophotonic applications |
| Munoz, Alex | Scatterometry of a 50-nm Half Pitch Wire Grid Polarizer |
| Muray, Lawrence | A High-Current Miniature Column for a High Volume Manufacturing Multi-Column Wafer Inspection System
Proposed Architecture of a Multi-Column Electron-Beam Wafer Inspection System for High Volume Manufacturing |
| Mutreja, Isha | Fabrication of Free-standing Casein Microstructures with Bioimprinted Cellular Surface Features |
| Mutsaers, Peter | Application of laser-cooling and compression to create a high resolution focused ion beam
Photoionization of a laser-intensified atomic beam: prospects for high resolution focused ion beams |
N |
| Nadzeyka, Achim | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Nagarajan, Naveen | A Computational Fluorescent Microscopy Through a Glass Needle |
| Nagaswami, Venkat | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Nagato, Keisuke | Damascene of metallic wires on imprinted flexible substrate
Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing
Metallic Nanostructures Controlled by Dewetting Thin Film on Patterned Ceramic Surface |
| Nakagawa, Masaru | Rapid growth in 30 seconds of thermally induced microphase-separation of PS-b-PMMA for directed self-assembly lithography |
| Nakamura, Naoto | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Nakao, Masayuki | Damascene of metallic wires on imprinted flexible substrate
Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing
Metallic Nanostructures Controlled by Dewetting Thin Film on Patterned Ceramic Surface |
| Nam, Chang-Yong | Directed patterning of arbitrary metal oxide nanostructures using polymer template nanoreactors |
| Nam, Hongsuk | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection LimitFabrication of Transition Metal Dichalcogenide Photovoltaic Devices Using Surface-Charge Transfer (SCT) Doping Mechanism
Multilayer Transition Metal Dichalcogenide Device Arrays Fabricated Using Nanoimprint-Assisted Shear Exfoliation (NASE) |
| Nanda, Gaurav | Helium-ion-beam-induced growth of 3-dimensional AFM probes
Protection of graphene against helium-ion-induced damage by h-BN encapsulation |
| Nannini, Matthieu | Fabrication of Silicon-on-Insulator Blazed-Grating Optical Couplers using a Thermal Scanning Probe System |
| Narasimhan, Amrit | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Nastasescu, Octavian | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit |
| Naulleau, Patrick | Demonstration of below 30-nm half pitch resolution at the SHARP microscope |
| Navarro, Christophe | 300mm DSA process qualification and stability |
| Nealey, Paul | Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures |
| Neuzil, Pavel | Determination of Mechanical, Electrical and Surface Properties of an Individual Carbon Nanotube by Single Measurement
Three weeks at CNST of NIST |
| Newns, Dennis | Stand-alone Piezoeletronic Transistor |
| Ng, Tien Khee | Visible subwavelength dielectric grating reflector fabricated using focused ion beam |
| Nguyen, Mary-Anne | Thin-film electrode patterning for encapsulated and air-stable droplet interface bilayers |
| Nicaise, Samuel | Nano Mesh Patterns by BCP Self-Templating |
| Nicolet, Célia | 300mm DSA process qualification and stability |
| Nielsen, Theodor | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Nishikawa, Hiroyuki | Proton beam writing on polyvinylidene difluoride films for high-aspect-ratio micro-structuring |
| Nishino, Kota | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Niu, Jiebin | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Nock, Volker | Fabrication of Free-standing Casein Microstructures with Bioimprinted Cellular Surface Features |
| Noh, Joo Hyon | Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process |
| Nomura, Satoshi | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Notte, John | Backside circuit edit with gas assisted etching on a platform with multiple focused ion beams |
| Noubani, Adham | Focused Electron Beam Induced Deposition of Copper from Aqueous Solutions in Micro-wells |
O |
| Oae, Y. | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| O'Callaghan, G. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Ocola, Leonidas | Automated Geometry assisted PEC for electron beam direct write nanolithography
Development Characteristics of Polymethyl Methacrylate in Alcohol/Water Mixtures
Photoluminescence of Sequential Infiltration Synthesized ZnO nanostructures
Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures
Progress in electron-beam-lithography-fabricated Fresnel zone plates on diamond membranes for hard X-ray focusing |
| Ocula, Leonidas | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Ogawa, Takashi | Low Energy Performance of a SEM Using a New Monochromator with Double Offset Cylindrical Lenses |
| Oh, Bo-Ram | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit |
| Oh, Sharon | Hybrid Nanoscale X-ray Imaging |
| Oh, Tae Sik | A study of characteristics of a microcolumn based on CNT emitters |
| Oike, Makoto | Injection-Compression Molding of Nanostructures for Three-Dimensional Cell-Culturing |
| Ok, Jong G. | Scalable and high-throughput 2D nanopatterning via sequential combination of continuous 1D patterning strokes |
| Okada, Makoto | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Okubo, Ryo | Rapid growth in 30 seconds of thermally induced microphase-separation of PS-b-PMMA for directed self-assembly lithography |
| Oldham, Christopher | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures |
| Oldham, Christopher J. | Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Olynick, Deirdre | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control
Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Ono, Hiroshi | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Ooi, Boon Siew | Visible subwavelength dielectric grating reflector fabricated using focused ion beam |
| Orlov, Alexei | Fabrication of Nanodamascene Metallic Single Electron Transistor |
| Orlowska, Karolina | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Orthacker, Angelina | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Ostrander, Jonathan | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Oteyza, Dimas | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Ouhab, Djamila | High-χ Bio-Based Block Copolymers for Self-Assembled Nano-Lithography |
| Owen, James | Quantitative Analysis of Digital STM Lithography Precision |
P |
| Panday, Ashwin | Scalable and high-throughput 2D nanopatterning via sequential combination of continuous 1D patterning strokes |
| Pang, Junchao | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures |
| Pang, Stella | Cell Migration Direction Switched by Angular Gratings |
| Papenheim, Marc | A flexible hybrid stamp for T-NIL based on OrmoStamp
Procedure for high temperature nanoimprint of organic semi-conducting polymer
Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Paprotny, Igor | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Park, Byong Chon | Development of head-scanning atomic force microscope in scanning electron microscope |
| Park, Jeongwon | Hybrid Nanoscale X-ray Imaging |
| Park, Kyoung Jin | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Park, Myoung Jin | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Park, Namkyou | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Park, Sooyeon | Fabrication of the flexible metallic master using LTIL process for roll nanoimprint lithography |
| Park, Sunghoon | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Parsons, Gregory | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures
Fabrication of Thin Metallic Nanostructures Using Atomic Layer Deposition |
| Patel, Laxa | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit |
| Patel, Parth | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond |
| Paul, Philip | Fabrication of Silicon-on-Insulator Blazed-Grating Optical Couplers using a Thermal Scanning Probe System |
| Pease, R. Fabian | A Colored Cesium Iodide Photocathode Excited by 405 nm Irradiation
Microstructure-Induced Laser Acceleration of Free Electrons |
| Pedulla, Marisa | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| Pellegrini, Vittorio | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Perera, Pradeep | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Perez-Murano, Francesc | Advances in fabrication and electrical transduction of silicon nanowire mechanical resonators |
| Peroz, C. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Peroz, Christophe | Printable Integrated Photonic Devices with a high refractive index |
| Pfeiffer, Carl | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces |
| Pfeiffer, Loren | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Pfirrmann, Stefan | Towards a Novel Positive Tone Resist mr-PosEBR for High Resolution Electron Beam Lithography |
| Pham, Thang | Electron-Beam Induced Atomic-Scale Defects in 2D Materials at Elevated Temperatures using In Situ Transmission Electron Microscopy |
| Pi, Shuang | Effects of Programming Current and Environment on the Resistive Switching of a Nanoscale Memristive Device |
| Pianetta, Piero | A Colored Cesium Iodide Photocathode Excited by 405 nm Irradiation |
| Pickard, Daniel | Solid Immersion Optics for Surface Plasmon Excitation in a Transmission Mode Photoemission Electron Microscope |
| Pieczulewski, Charles | 300mm DSA process qualification and stability |
| Pillatsch, Lex | O2 and H2O mediated FEBIE for fabrication of sub-10-nm diameter nanopores in few layer graphene |
| Pillers, Michelle | DNA Origami as Molecular Circuit Boards: Attachment, Patterning, and Stability |
| Pimenta-Barros, Patricia | 300mm DSA process qualification and stability |
| Pina-Hernandez, C. | Printable Integrated Photonic Devices with a high refractive index |
| Pinczuk, Aron | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Pint, Cary | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Pitera, Jed | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers
Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Plank, Harald | Electron beam induced oxidation of direct–write deposits: a simulation
Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
Focused Electron Beam Induced Processing: An Application Perspective
Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process |
| Plank, Natalie | Carbon nanotube field effect transistor apatasensors for estrogen detection in liquids |
| Pluska, M. | Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Pollock, Ben | Subwavelength NanoPatterning via Selective Dissolution of One-Photoisomer |
| Pollock, Benjamin | Super-resolution Optical Nanolithography using two approaches of Absorbance Modulation |
| Polster, Jan | Improvement of Xe Plasma FIB Resolution and its Integration with Electron and Photon Beams |
| Post, Chris | Fabrication of metal nano-antennas with sub-10nm gap by using electron-beam induced deposition etch masks |
| Povinelli, Michelle | Fabrication of passive polarization-dependent asymmetric optical devices using nanoimprint lithography |
| Pradelles, Jonathan | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis
Multiple e-beam direct write enters pre-production mode |
| Prakasam, Haripriya | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit |
| Prance, Jonathan | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Preece, J. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Putnam, William | Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays |
Q |
| Qi, Ji | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Qian, Liuxi | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Quan, Baogang | Controllable Synthesis of Single Conducting Polymer Nanowire on electrodes Fabricated by Focused Ion Beam Milling
Tip-Enhanced Surface Enhanced Raman Scattering on Gold Nanoparticle Decorated Silicon Microcone Array Substrate for DNA Sensing |
| Quessab, Yassine | All-optical control of magnetization in various metallic magnetic systems |
R |
| Rack, Philip | Electron beam induced oxidation of direct–write deposits: a simulation
Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
Focused Neon Ion Beam Induced Sputtering of Copper: Monte Carlo Simulations
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process
Laser Induced Liquid Phase Instabilities: Transition From Single Particle Coalescence To Multi-Particle Breakup of Nickel Nano-Rivulets and Programming Instabilities
Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Randall, John | Quantitative Analysis of Digital STM Lithography Precision |
| Randolph, Steven | Hydrogen-beam induced deposition of platinum and tungsten microstructures |
| Rangelow, Ivo | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control
Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Rawlings, Colin | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Ray, Vishva | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces |
| Reche, J. | Experimental Beam Blur characterization in CAR resist for E-beam lithography at 5kV and 100kV using spectral analysis |
| Reche, Jérôme | Multiple e-beam direct write enters pre-production mode |
| Reit, Radu | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics |
| Ren, Jiaxing | Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures |
| Ren, Tian-Ling | Hafnium oxide resistive memory based on cross-bar structures down to sub-20 nm dimensions
High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Ren, Yan | Parallel Secondary Electron Imaging in a Multi-Beam SEM |
| Renau, Anthony | Directed Ribbon Beam Processing |
| Retterer, Scott | Fabrication of Nanoporous Membranes for Tuning Microbial Interactions and Biochemical Reactions
Microfluidic Exchange Devices for Cell-free Reactions
Microfluidic platform for studies of self-organizing processes in a bacterial cell
Microwell arrays for high-throughput investigation of microbial interactions
Multiscale fluidic architectures for chemical manipulations of biological domains across length scales
Thin-film electrode patterning for encapsulated and air-stable droplet interface bilayers |
| Richards, Chris | Air-Stable Droplet Interface Bilayers |
| Ristic, Sasa | Fabrication of Silicon-on-Insulator Blazed-Grating Optical Couplers using a Thermal Scanning Probe System |
| Roberts, Nicholas | Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process |
| Robinson, A. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Robinson, J. | Graphene-derived Materials for NEMS |
| Rochman, Jake | Fabrication of high quality factor optical nanocavities in bulk single-crystal diamond |
| Roediger, Peter | Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine |
| Rommel, Mathias | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Rondinone, Adam | Lithography and in situ elucidation of conductivity in graphene structures using scanning helium ion microscopy |
| Rooks, Michael | Hybrid Nanoscale X-ray Imaging |
| Rosenmann, Daniel | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Ross, Caroline | Nano Mesh Patterns by BCP Self-Templating
Templated Self-Assembly of Block Copolymer Thin Films under Lithographic Confinement |
| Rothschild, Lynn | 3D Printing of Advanced Biocomposites on Earth and Beyond |
| Rozendaal, Jeroen | Electron Beam Induced High Resolution Biofunctionalised Nanopatterns |
| Rudek, Maciej | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations |
| Ruffell, Simon | Directed Ribbon Beam Processing |
| Russell, Thomas | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Russew, Maria-Melanie | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Rustomji, Cyrus | Massively Parallel Silicon Micro-Patterning and Thin Slicing by Magnetically Guided Etching |
| Rymuza, Zygmunt | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Ryu, JiHyeong | Numerical method using modified squeeze model for NIL |
S |
| Sadeghian, Hamed | Helium-ion-beam-induced growth of 3-dimensional AFM probes |
| Sakdinawat, Anne | Hybrid Nanoscale X-ray Imaging |
| Sanchez, Martha | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Sanders, Daniel | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers
Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Sando, Stewart | Wafer-Scale Etching of Nanometer-Scale Features With Low Energy Electron Enhanced Etching (LE4) |
| Sarles, S.A. | Air-Stable Droplet Interface Bilayers
Thin-film electrode patterning for encapsulated and air-stable droplet interface bilayers |
| Sarveswaran, Koshala | DNA Origami as Molecular Circuit Boards: Attachment, Patterning, and Stability |
| Sasago, Masaru | Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography |
| Sassolini, Simone | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Sato, Hironobu | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Savage, Donald | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Savari, Serap | Corner2-EPC: A Layout Image Compression Algorithm for Electron Beam Lithography |
| Sayan, Safak | Directed Self-Assembly Process Integration – Fin Patterning Approaches and Challenges |
| Scarabelli, Diego | Deterministic Creation of Closely-Spaced Single NV Centers in Diamond
Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Schad, Jonathon | Cross Section of Photo Acid Generators (PAGs) in EUV Photoresists vs. Electron Beam Energies |
| Schalek, Richard | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Scheer, Hella-Christin | A flexible hybrid stamp for T-NIL based on OrmoStamp
Procedure for high temperature nanoimprint of organic semi-conducting polymer
Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Scheffler, Chris | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit |
| Schiffels, Daniel | Assembly of Superparamagnetic Iron Oxide Nanoparticles on DNA Nanostructures |
| Schift, Helmut | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components |
| Schleunitz, Arne | Combining UV-nanoimprint lithography and inkjet printing for the fabrication of monolithic micro-optical components
Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Schmidt, Kristin | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Schmied, Roland | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Scholze, Petra | Characterization of Electrophysiological Properties of Neurites using a Microfluidic-Microelectronic Platform
Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel |
| Schrott, Alejandro | Stand-alone Piezoeletronic Transistor |
| Schuller, Patrick | Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel |
| Schumacher, Joshua | FIB Milling and Replica Molding of Complex Surfaces with Atomic-Scale Precision |
| Schurink, Bart | Advances in 3D neuronal cell culture |
| Schwartzberg, Adam | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Schwarz, Karin | Characterization of Electrophysiological Properties of Neurites using a Microfluidic-Microelectronic Platform
Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel |
| Scott, M. | Atomic Resolution Electron Tomography |
| Scotuzzi, Marijke | Nano Pattern Transfer into Si and ITO using masks made by Electron Beam Induced Deposition |
| Segal-Peretz, Tamar | Post-Directed-Self-Assembly Membrane Fabrication for In-situ Analysis of Block Copolymer Structures |
| Seino, Yuriko | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Servin, Isabelle | 300mm DSA process qualification and stability |
| Shadman, Khashayar | A novel electron monochromator for high resolution imaging and spectroscopy |
| Shahrin, Rahnuma | Fabrication and Mechanical Properties of Porous 3D Nanostructures |
| Shalaev, Vladimir M. | Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Shami, Nabeel Rehman | Solid Immersion Optics for Surface Plasmon Excitation in a Transmission Mode Photoemission Electron Microscope |
| Shankles, Peter | Fabrication of Nanoporous Membranes for Tuning Microbial Interactions and Biochemical Reactions
Microfluidic Exchange Devices for Cell-free Reactions |
| Shao, Jinhai | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique
A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch
A Study of Nanoimprinted Color Filter with Ultra High Resolution
Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect
Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Shaw, Thomas | Stand-alone Piezoeletronic Transistor |
| Shawrav, Mostafa Moonir | Expanding nanomagnetic logic into the third dimension - new pathways via FEBID
Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Towards high purity FEBID gold nanostructures – a comparison of purification approaches |
| She, Juncong | Gated Si Tip Field Electron Emitter with Integrated Nano-Conduction-Channel |
| Sheetz, Michael | Molecular Occupancy of Nanodot Arrays |
| Shi, Bailing | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Shi, Peixiong | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Shi, Zhan | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Shimomukai, Kazuma | High Aspect Nanopore Array Fabrication by Nanoimprint Employing Novel Demolding Process
Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Shin, In-Kyun | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error
Analytic Derivation and Minimization of Line Edge Roughness in Electron-beam Lithography |
| Shinada, Hiroyuki | Modeling of Local Dielectric Charging-up during SEM Observation |
| Shiraishi, Masayuki | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Shokouhi, Babak | Neutral surface prepared by vapor phase coating for PS-b-PMMA self assembly |
| Shu, Weiliang | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures |
| Sierakowski, Andrzej | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations
Focused ion beam fabrication of planar probes for high resolution shear force microscopy |
| Simatos, Dimitrios | Controlling excitons in semiconductor quantum dots for nanophotonic applications |
| Simon, Dustin | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics |
| Simpson, Mike | Microwell arrays for high-throughput investigation of microbial interactions |
| Singh, Lovejeet | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Singh, Robin | Modelling and analysis of MEMS capacitive microphone with compliant diaphragm |
| Singhan, Sharwan | Scatterometry of a 50-nm Half Pitch Wire Grid Polarizer |
| Skinner, Jack | Effect of Iron-Doped Apatite Nanoparticles on a Eukaryotic Host-Virus System |
| Snider, Gregory | Fabrication of Nanodamascene Metallic Single Electron Transistor |
| Snow, E. | Graphene-derived Materials for NEMS |
| Sohn, Lydia | Node-Pore Sensing: A Label-Free Method for Cell Screening |
| Sohn, Young-Ik | Faraday Cage Reactive Ion Etching: Simulation and Experiments
Free-standing Nanostructures in Single-crystal Quartz |
| Solomon, Paul | Stand-alone Piezoeletronic Transistor
ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Son, Jin Gyeong | Large-scale formation of three-dimensional plasmonic nanodishes using nanoimprint lithography |
| Song, Boxiang | High contrast gratings for 3D additive manufacture |
| Song, Chengyu | Electron-Beam Induced Atomic-Scale Defects in 2D Materials at Elevated Temperatures using In Situ Transmission Electron Microscopy |
| Song, Xuan | High contrast gratings for 3D additive manufacture |
| Spallas, James | A High-Current Miniature Column for a High Volume Manufacturing Multi-Column Wafer Inspection System
Proposed Architecture of a Multi-Column Electron-Beam Wafer Inspection System for High Volume Manufacturing |
| Sreenivasan, S. V. | Novel Method for Fabrication of Sub-50nm Multi-tier Nanoimprint Lithography Templates
Precision Overlay in UV Nanoimprint Lithography
Scatterometry of a 50-nm Half Pitch Wire Grid Polarizer |
| Srinivasan, Kartik | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
| Staaks, Daniel | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Stach, Eric | Lithographic engineering of volume plasmons |
| Stan, Liliana | ZnO Functionalization of Multi-walled Carbon Nanotubes for Methane Sensing at Single PPM Concentration Levels |
| Stanford, Michael | Electron beam induced oxidation of direct–write deposits: a simulation
Electron Stimulated Purification of Platinum Nanostructures Grown Via Focused Electron Beam Induced Deposition
Laser Assisted Electron Beam Induced Deposition: Towards a Nanoscale Atomic Layer Deposition Process |
| Stang, John | Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles |
| Stavis, Samuel | FIB Milling and Replica Molding of Complex Surfaces with Atomic-Scale Precision |
| Steffen, Matthias | Taking Superconducting Qubits to the Next Generation |
| Stein, Aaron | Directed Assembly of Multiple Pattern Morphologies Using Block Copolymer Blends
Directed patterning of arbitrary metal oxide nanostructures using polymer template nanoreactors |
| Steinberg, Christian | A flexible hybrid stamp for T-NIL based on OrmoStamp
Procedure for high temperature nanoimprint of organic semi-conducting polymer
Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Su, Dong | Lithographic engineering of volume plasmons |
| Sul, Onejae | Effects of thermal treatment on the transfer characteristics of sub-100 nm SnS2 thin-film transistor arrays |
| Sultan, Mansoor | Teflon AF Patterning using Variable Pressure Electron-Beam Lithography |
| Sun, Lei | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Sun, Zhiwei | Selective Laser Ablation in Resists and Block Copolymers for High Resolution Lithographic Patterning |
| Sung, Min Gyu | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Svatos, Vojtech | Determination of Mechanical, Electrical and Surface Properties of an Individual Carbon Nanotube by Single Measurement
Three weeks at CNST of NIST |
| Syed, Atif | Fabrication and characterization of zinc oxide nanoneedles for medical/biological applications |
| Szkudlarek, Aleksandra | High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition
In Situ Transport Properties Measurements of FEBID Cu(II)(hfa)2 During Annealing |
T |
| Tai, Renzhong | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
| Takahashi, Ken | Damascene of metallic wires on imprinted flexible substrate |
| Takahashi, Yukiko K. | All-optical control of magnetization in various metallic magnetic systems |
| Takahata, K. | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| Taksatorn, Nit | Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect |
| Talukder, Niloy | Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Tan, Shida | Exploring Neon GFIS Nano-Machining Applications in Circuit Edit
Focused Neon Ion Beam Induced Sputtering of Copper: Monte Carlo Simulations |
| Tanaka, Hidekazu | Rapid growth in 30 seconds of thermally induced microphase-separation of PS-b-PMMA for directed self-assembly lithography |
| Tanaka, Toshiki | Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography |
| Tang, Hong | Chip-scale Cavity Electro-optomechanics with Aluminum Nitride |
| Taniguchi, Jun | Residual layer less nano-transfer by roll press and liquid transfer imprint lithography |
| Taniguchi, Yusuke | Temperature dependence of molecular orientation of liquid crystalline polymer induced by nanoimprint-graphoepitaxy |
| Tao, Jun | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Tao, Li | Encapsulated Delamination Transfer and Nanofabrication of Silicene Field-Effect Transistors |
| Taus, Philipp | Towards high purity FEBID gold nanostructures – a comparison of purification approaches |
| Tavakkoli K. G., Amir | Nano Mesh Patterns by BCP Self-Templating |
| ten Haaf, Gijs | Application of laser-cooling and compression to create a high resolution focused ion beam
Photoionization of a laser-intensified atomic beam: prospects for high resolution focused ion beams |
| Thamdrup, Lasse | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Thiel, Brad | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Thissen, Nick | Lithography-free fabrication of graphene devices |
| Thomas, G. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Thompson, Leslie | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Tian, He | Hafnium oxide resistive memory based on cross-bar structures down to sub-20 nm dimensions |
| Tian, Yanqing | Volume-expansion polymerization for UV-curable nanoimprint |
| Tiberio, Rich | Hybrid Nanoscale X-ray Imaging |
| Timilsina, Rajendra | Focused Neon Ion Beam Induced Sputtering of Copper: Monte Carlo Simulations
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Timm, Andrea | Fabrication of Nanoporous Membranes for Tuning Microbial Interactions and Biochemical Reactions
Microfluidic Exchange Devices for Cell-free Reactions |
| Timm, Collin | Microwell arrays for high-throughput investigation of microbial interactions |
| Tiron, Raluca | 300mm DSA process qualification and stability
High-χ Bio-Based Block Copolymers for Self-Assembled Nano-Lithography |
| Tobana, Toshikatsu | A simulation study on defect annihilation dynamics in directed self-assembly lithography
Electrical Yield Verification of Half Pitch 15 nm Patterns using Directed Self-assembly of PS-b-PMMA |
| Tochino, Takamitsu | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Tong, Xiao | Origin of insoluble residual in ZEP520 electron-beam resist development |
| Torres, Clivia M. Sotmayor | Novel Structuring Process for Injection Molding Inserts By Free-Form Reverse Nanoimprint Lithography |
| Toth, Milos | Recent advances in gas-assisted electron and ion beam induced surface processing techniques |
| Toyoda, Noriaki | Gas Cluster Ion Beam Stimulated Reaction with Adsorbed Molecules on Metal Surface |
| Traverso, Luis | Parallel near field optical lithography with sub wavelength resolution using a massive array of bowtie antennas |
| Trimmel, Gregor | Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies |
| Trompenaars, Piet | A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV
Combined Electron Beam Induced Deposition and Etching for 3D shape control |
| Trushein, Matthew | Deterministic Creation of Closely-Spaced Single NV Centers in Diamond |
| Tsai, Hsinyu | Selective neutralization for neutral last grapho-epitaxy directed self-assembly |
| Tsou, Chialin | Stencil lithography for damage free fabrication of short channel photo conductive devices in graphene |
| Tsou, Chia-Lin | A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch |
| Tung, Maryann C. | Optimization of Peanut-Shaped Template Geometry for Block Copolymer Directed Self-Assembly |
| Turchanin, Andrey | Patterned freestanding Carbon Nanomembranes and Graphene via Extreme UV interference Lithography |
| Twedt, Kevin | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
U |
| Ueda, Naoki | Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography |
| Uemura, Kimiaki | Impact of side wall angle of mold pattern on release force in nanoimprint lithography |
| Utke, Ivo | High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition
In Situ Transport Properties Measurements of FEBID Cu(II)(hfa)2 During Annealing |
V |
| Vaandrager, Miranda | Electron Beam Induced High Resolution Biofunctionalised Nanopatterns |
| Valentine, Jason | Realization of 2D and 3D All-Dielectric Optical Metamaterials |
| van Tol, Ruud | Laser triggered microfabricated Ultrafast Beam Blanker |
| van Veldhoven, Emile | Helium-ion-beam-induced growth of 3-dimensional AFM probes |
| Vandenbroeck, Nadia | Directed Self-Assembly Process Integration – Fin Patterning Approaches and Challenges |
| Vaz, Alfredo | In Situ Transport Properties Measurements of FEBID Cu(II)(hfa)2 During Annealing |
| Vemareddy, Kaushik | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Vergeer, Niels | Multiple e-beam direct write enters pre-production mode |
| Virzbickas, K. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Viscomi, Francesco Narda | Enhanced adhesion of electron beam resist by grafted monolayer PMMA brush |
| Viswanathan, Vignesh | Solid Immersion Optics for Surface Plasmon Excitation in a Transmission Mode Photoemission Electron Microscope |
| Vladar, A. | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Vockenhuber, Michaela | Patterned freestanding Carbon Nanomembranes and Graphene via Extreme UV interference Lithography
Towards sub-10 nm node by EUV lithography |
| Vogler, Marko | Novel UV-curable Hybrid Polymers with Elevated Refractive Index and Improved PDMS-compatibility |
| Voigt, Anja | Towards a Novel Positive Tone Resist mr-PosEBR for High Resolution Electron Beam Lithography |
| Voit, Walter | A thiol-ene / acrylate thermoset polymer as flexible substrate for implantable electronics
Direct photo-patterning of thiol-ene thermoset polymer thin film structures by DLP lithography |
| Von Ehr, James | Quantitative Analysis of Digital STM Lithography Precision |
| Vredenbregt, Edgar | Application of laser-cooling and compression to create a high resolution focused ion beam
Photoionization of a laser-intensified atomic beam: prospects for high resolution focused ion beams |
W |
| Wachter, Stefan | Expanding nanomagnetic logic into the third dimension - new pathways via FEBID |
| Waid, Simon | Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Ion-dose controlled etching of Nanoimprint stamps for the fabrication of Fresnell lenses |
| Wallace, Charles | Selective Growth and Self-Alignment Requirements for Advanced Patterning Applications |
| Wang, Chunlei | Integrated On-Chip Energy Storage Using Porous-Silicon Electrochemical Capacitors |
| Wang, Honglei | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Wang, Jialin | Damascene of metallic wires on imprinted flexible substrate |
| Wang, Lei | Metallic Nanostructures Controlled by Dewetting Thin Film on Patterned Ceramic Surface |
| Wang, Liansheng | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
| Wang, Qing | Stress and Deformation Behaviors in Polymer Resist during Demolding Process of Hot Embossing via Finite Element Method |
| Wang, Richard | Fabrication of passive polarization-dependent asymmetric optical devices using nanoimprint lithography |
| Wang, Sheng | Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene |
| Wang, Si | A flexible hybrid stamp for T-NIL based on OrmoStamp
Procedure for high temperature nanoimprint of organic semi-conducting polymer
Thermal wrinkling of nanoimprinted SU-8 with masked UV-exposure |
| Wang, Wenhui | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Wang, Yifei | Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles
High contrast gratings for 3D additive manufacture
High-efficiency Water Electrolysis based on Nanoelectrodes
Low DC-Bias Silicon Nitride Anisotropic Etching |
| Wang, Yujin | Tip-Enhanced Surface Enhanced Raman Scattering on Gold Nanoparticle Decorated Silicon Microcone Array Substrate for DNA Sensing |
| Wang, Yuxuan | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Wanzenboeck, Heinz | Characterization of Electrophysiological Properties of Neurites using a Microfluidic-Microelectronic Platform
Characterization of QSil 216 and QSil 218 for Microfluidic and Biomedical Applications
Expanding nanomagnetic logic into the third dimension - new pathways via FEBID
Focused Electron Beam Induced Etching - Advantages, Features and Limitations of FEBIE with Chlorine
Ion-dose controlled etching of Nanoimprint stamps for the fabrication of Fresnell lenses
Nanomedicine of isolated axons - Electrical activity of individual neurites growing in a microfluidic channel
Towards high purity FEBID gold nanostructures – a comparison of purification approaches |
| Ward, Daniel | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Warzecha, Monika | Fabrication and characterization of zinc oxide nanoneedles for medical/biological applications |
| Watanabe, Hidehiro | Simulation technique for pattern inspection using projection electron microscope |
| Weaver, Jonathan | Fabrication of Topography-Free Samples for Thermal Spatial Resolution Measurement of Scanning Thermal Microscopy |
| Weber, Jan-Willem | Lithography-free fabrication of graphene devices |
| Weber-Bargioni, Alexander | Controlling excitons in semiconductor quantum dots for nanophotonic applications |
| Wei, Lai | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Wei, Zhixiang | Controllable Synthesis of Single Conducting Polymer Nanowire on electrodes Fabricated by Focused Ion Beam Milling |
| Weinstein, Dana | Solid State RF NEMS-CMOS Resonators |
| Wen, Xiaolei | Parallel near field optical lithography with sub wavelength resolution using a massive array of bowtie antennas |
| Weppelman, Gerward | Fabrication of metal nano-antennas with sub-10nm gap by using electron-beam induced deposition etch masks
Laser triggered microfabricated Ultrafast Beam Blanker |
| Werder, Kurt | A High-Current Miniature Column for a High Volume Manufacturing Multi-Column Wafer Inspection System
Proposed Architecture of a Multi-Column Electron-Beam Wafer Inspection System for High Volume Manufacturing |
| Whitelam, Stephen | Controlling excitons in semiconductor quantum dots for nanophotonic applications |
| Wi, Jung-Sub | Large-scale formation of three-dimensional plasmonic nanodishes using nanoimprint lithography |
| Wi, Sungjin | Fabrication of Consistent MoS2 Biosensors for Quantifying Cancer-Related Biomarker Molecules with Femtomolar-Level Detection Limit
Fabrication of Transition Metal Dichalcogenide Photovoltaic Devices Using Surface-Charge Transfer (SCT) Doping Mechanism
Multilayer Transition Metal Dichalcogenide Device Arrays Fabricated Using Nanoimprint-Assisted Shear Exfoliation (NASE) |
| Wiedemann, Pablo | Multiple e-beam direct write enters pre-production mode |
| Wieland, Marco | Multiple e-beam direct write enters pre-production mode |
| Willson, Grant | High Chi Block Co-polymers for Lithography |
| Wind, Shalom | Deterministic Creation of Closely-Spaced Single NV Centers in Diamond
Honeycomb Lattice Patterned on GaAs Quantum Well: Artificial Graphene
Molecular Occupancy of Nanodot Arrays
Probing Immune Cell Response to Heterogeneous Rigidity at the Nanoscale |
| Winkler, Robert | Electron beam induced oxidation of direct–write deposits: a simulation
Focused Ion Beam Processing of Polymers: Pushing the Limits by Alternative Patterning Strategies
High-Fidelity Shapes and Disruption Mechanism during Focused Electron Beam Induced Deposition |
| Winter, Andreas | Patterned freestanding Carbon Nanomembranes and Graphene via Extreme UV interference Lithography |
| Wittmann, Bjoern | Improved Instrumentation and Patterning Strategies for Extended and Continuous FIB Nanofabrication |
| Wojcik, Michael | Multilayer on-chip stacked zone plates with high aspect ratio for hard X-ray nanoscale imaging |
| Wojdyla, Antoine | Demonstration of below 30-nm half pitch resolution at the SHARP microscope |
| Wolbers, Floor | Advances in 3D neuronal cell culture |
| Wolf, Heiko | Nanometer precise overlay for sub-20nm thermal scanning probe lithography |
| Wolfenson, Haguy | Molecular Occupancy of Nanodot Arrays |
| Wong, H.-S. Philip | Optimization of Peanut-Shaped Template Geometry for Block Copolymer Directed Self-Assembly |
| Wood, Cameron | Carbon nanotube field effect transistor apatasensors for estrogen detection in liquids |
| Wood, Obert | Line Edge Roughness Frequency Analysis during Pattern Transfer in Semiconductor Fabrication |
| Wouters, Steinar | Application of laser-cooling and compression to create a high resolution focused ion beam
Photoionization of a laser-intensified atomic beam: prospects for high resolution focused ion beams |
| Wright, Gwen | Directed Assembly of Multiple Pattern Morphologies Using Block Copolymer Blends |
| Wu, Wei | Fabrication of passive polarization-dependent asymmetric optical devices using nanoimprint lithography
Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles
High contrast gratings for 3D additive manufacture
High-efficiency Water Electrolysis based on Nanoelectrodes
Low DC-Bias Silicon Nitride Anisotropic Etching |
| Wu, Xian | Nanofabrication of singlet-triplet qubit in Si/SiGe quantum dots with integrated micromagnets |
| Wu, Yanqing | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
| Wu, Yueying | Laser-induced self-assembly of noble metal nanoparticles and EELS characterization |
| Wu, Yung-Chien | Designing Precursors for the Deposition Technique: CVD vs. EBID |
X |
| Xia, Deying | Backside circuit edit with gas assisted etching on a platform with multiple focused ion beams |
| Xia, Qiangfei | Effects of Programming Current and Environment on the Resistive Switching of a Nanoscale Memristive Device
Highly Reliable Resistive Switching Devices Based on Tantalum-doped Silicon Oxide |
| Xiao, Tiqiao | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique |
| Xie, Changqing | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Xie, pengfei | Electronic Quantification of Protein Biomarkers Based on Bead Aggregate Sizing
Impedance Cytometry Based on Multi-fingered Interdigitated Electrodes |
| Xie, Sijia | Advances in 3D neuronal cell culture |
| Xu, Chen | A Study of Nanoimprinted Color Filter with Ultra High Resolution
Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect |
| Xu, Ningsheng | Gated Si Tip Field Electron Emitter with Integrated Nano-Conduction-Channel |
| Xu, Riu | Atomic Resolution Electron Tomography |
| Xu, Xianfan | Parallel near field optical lithography with sub wavelength resolution using a massive array of bowtie antennas |
| Xu, Yongan | Directed Self-Assembly Via Shrink Process with Lamella-forming Block Copolymers |
| Xu, Yuan Hao | Cell Migration Direction Switched by Angular Gratings |
| Xue, Chaofan | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
Y |
| Yabara, H. | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| Yager, Kevin | Directed Assembly of Multiple Pattern Morphologies Using Block Copolymer Blends |
| Yamada, Isao | Gas Cluster Ion Beam Stimulated Reaction with Adsorbed Molecules on Metal Surface |
| Yang, Bin | Design, technology and application of piezoresistive scanning thermal probe for nanoscale investigations |
| Yang, Da | Microfluidic platform for studies of self-organizing processes in a bacterial cell |
| Yang, Eui-Hyeok | Transferring Graphene Nanostructures onto a Transparent Flexible Substrate |
| Yang, Fan | Planar interference lithography by exploiting high-k modes |
| Yang, Shumin | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
| Yang, XiaoMin | Precise measurement of chromium dry etching rate at low temperatures for ultimate profile control |
| Yang, Yi | Hafnium oxide resistive memory based on cross-bar structures down to sub-20 nm dimensions
High performance lithium niobate surface acoustic wave transducers exceeding 10 GHz resonant frequency |
| Yang, Yuanmu | Realization of 2D and 3D All-Dielectric Optical Metamaterials |
| Yang, Yujia | Fabrication and Characterization of Membrane Nano-gratings for Electron Diffraction
Lithographic engineering of volume plasmons
Spatial-Mapping of Photoemission from Plasmonic Nanoparticle Arrays |
| Yao, Yuhan | Fabrication of passive polarization-dependent asymmetric optical devices using nanoimprint lithography
High contrast gratings for 3D additive manufacture |
| Yashchuk, Valeriy | 1.5 nm fabrication of test patterns for characterization of metrological systems |
| Yasuda, Hiroshi | Development of a column using permanent magnet lens for a multi-axis maskless E-beam lithography system |
| Yasuda, Masaaki | Computational Study of Resist Pattern Shrinkage under CD-SEM Observation
Computational study on 3-Dimensional Imaging by Advanced Built-in Lens Mask (BILM) Lithography
High Aspect Nanopore Array Fabrication by Nanoimprint Employing Novel Demolding Process
Impact of side wall angle of mold pattern on release force in nanoimprint lithography
Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography |
| Yavuz, Mustafa | Neutral surface prepared by vapor phase coating for PS-b-PMMA self assembly |
| Yi, He | Optimization of Peanut-Shaped Template Geometry for Block Copolymer Directed Self-Assembly |
| Ying, Y. | Direct Electron Transfer From Single Enzymes to Single Wall Carbon Nanotubes |
| Yoo, Jung Ho | Optical Transmission Via Elliptically Patterned Grooves on Pyramidal Nano-aperture |
| Yoshida, Hiroshi | Translocation of Single Stranded DNA through Nano-Cylindrical PEO Passage Self-Assembled by Amphiphilic Block Copolymer |
| Yu, Hyunung | Development of head-scanning atomic force microscope in scanning electron microscope |
| Yu, Jaesok | A single protein resolution mapping of DNA-ZFP interaction using solid-state nanopores |
| Yu, Meng | Focused Microwave Cancer Therapy Using Lithographically Defined Nanoparticles |
| Yusuf, Ahmed Shamir | Solid Immersion Optics for Surface Plasmon Excitation in a Transmission Mode Photoemission Electron Microscope |
Z |
| Zalalutdinov, Maxim | Graphene-derived Materials for NEMS |
| Zang, Pengyuan | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Zeidler, Dirk | A single-column, multi-beam SEM for high-resolution, high-throughput imaging |
| Zeng, Hongjun | Progress in electron-beam-lithography-fabricated Fresnel zone plates on diamond membranes for hard X-ray focusing |
| Zeng, Xuan | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Zettl, Alex | Electron-Beam Induced Atomic-Scale Defects in 2D Materials at Elevated Temperatures using In Situ Transmission Electron Microscopy |
| Zhang, Baoyue | Fabrication of super-lyophobic surface on thermoplastic substrates with hybrid micro/nano-scale overhang structures |
| Zhang, Cheng | Breaking Malus’ Law: Enhancing Asymmetric Light Transmission with Metasurfaces
Planar interference lithography by exploiting high-k modes
Ultra-thin, Smooth and Low loss Al-doped Ag Film and its Application in Plasmonic Interconnects |
| Zhang, Lihua | Lithographic engineering of volume plasmons |
| Zhang, Qing | Significantly-Enhanced Light Extraction and Power Efficiency of Red Organic Light- Emitting Diode by Nano-Mesh Fabricated by Large-Area Nanoimprint |
| Zhang, Rui | Stress and Deformation Behaviors in Polymer Resist during Demolding Process of Hot Embossing via Finite Element Method |
| Zhang, Sichao | 20 nm Flip Blazed Fresnel zone plates by a PMMA/ZEP bilayer technique
A novel PMMA/NEB bilayer process for sub-20 nm metallic nanoslits by electron beam lithography and dry etch
A Study of Nanoimprinted Color Filter with Ultra High Resolution
Gray scale electron beam lithography for photon-nanojet based nanolens with super resolution lithography prospect |
| Zhang, Wei | Tunable mesoscale magnetic structures by nanoimprint lithography |
| Zhang, Xu | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures |
| Zhang, Yuan | Fabrication of Topography-Free Samples for Thermal Spatial Resolution Measurement of Scanning Thermal Microscopy |
| Zhang, Yucheng | In Situ Transport Properties Measurements of FEBID Cu(II)(hfa)2 During Annealing |
| Zhao, D. | Novel Resist for Electron Beam Lithography on Insulating Substrates |
| Zhao, Jun | The soft X-ray Interference Lithography Beamline(XIL, BL08U1B) at SSRF |
| Zhao, Junjie | Fabrication and Mechanical Properties of Porous 3D Nanostructures
Fabrication of Stretchable Transparent Conductors Using Nano-Accordion Structures |
| Zhao, Xi | Dielectrophoresis-assisted 3D nanochannel electroporation for high-throughput cell transfection with dosage control |
| Zhao, Xinyu | A Practical Approach to Modeling Scanning Electron Microscope Images for Minimization of Line Edge Roughness and Critical Dimension Error |
| Zheng, Hanyue | Carbon nanotube field effect transistor apatasensors for estrogen detection in liquids |
| Zhong, Ying | Sensitivity of Thermo-Moisture Responsive Shape Memory Polymer Controlled by Imprinted Nano-Micro Patterns |
| Zhou, Dian | Post Fabrication of Foundry-Fabricated CMOS Serpentine Nanowire Biosensor with Focused Ion Beam |
| Zhou, Haiping | Low-leakage current and damage-free silicon nitride deposition at 30oC by inductively coupled plasma with neutral beams by neutralization grid plate |
| Zhou, Shu Fan | Cell Migration Direction Switched by Angular Gratings |
| Zhu, Ruichao | Scatterometry of a 50-nm Half Pitch Wire Grid Polarizer |
| Zhu, Xiaoli | Fabrication of X-ray reflection sinusoidal grating using fast electron beam direct writing |
| Zhu, Zhouyang | Fiber-facet SERS Probes Fabricated Using Double-Transfer Nanoimprint Lithography |
| Ziegler, Dominik | Encased Cantilevers for Low-Noise Force and Mass Sensing in Liquids |
| Zou, Jie | Imaging Nanophotonic Modes of Microresonators using a Focused Lithium Ion Beam |
| Zou, Wenjun | Controllable Synthesis of Single Conducting Polymer Nanowire on electrodes Fabricated by Focused Ion Beam Milling |
