EIPBN 2009 Authors Index

A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z

Name	Abstract
A
Abelson, John	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Adesida, Ilesanmi	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS) Investigation Of Surface Roughness Of Poly(Methylmethacrylate) At Reduced Temperatures
Afra, Bamdad	Gas Assisted Focused Electron Beam Induced Etching of Alumina
Ahn, Jinho	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Ahn, S.	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Ahn, Se Hyun	A Novel Dynamic Nano Inscribing Technique For Creating Continuous And Seamless Metal And Polymer Nano Gratings Large-area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography and Analytical Models for Predicting Residual Layer Thickness
Akasaka, Satoshi	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly
Albrecht, Thomas R.	Directing Block Copolymers Assembly within Patterned Media Specifications
Alducin, J. A.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Alkemade, Paul	Pillar Growth Rate Dependences in Ion-Beam-Induced Deposition The Roles of Secondary Electrons and Sputtered Atoms in Ion-Beam-Induced Deposition
Allen, Robert	(Invited ) Directed Polymer Self-assembly for Lithography Application Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Altig, Ronald	Reverse Bio-Engineering: Structural and Mechanical Modeling of Tadpole Teeth through FIB NanoTomography and Finite Element Analysis
Altun, Ali Ozhan	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Alvaro, Virginie Maffini	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Alvine, Kyle	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Amstutz, Platte	Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Anazawa, Toshihisa	Characterization of EUV-Deposited Carboneous Contamination
Anderson, Christopher	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Anderson, David	Fabrication of Nanoscale ZnO Fets Using The Functional Material Zinc Neodecanoate Directly As A Negative E-Beam Lithography Resist
Anderson, Eric	Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Anderson, Erik H.	Magnetic Soft X-ray Imaging of Non-linear Vortex Core Dynamics
Anderson, Erik	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance
Ando, M.	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness
Ando, Manabu	Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics
Andre, L.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Aono , Masakazu	(MNC 2008 Best Paper) Wiring Single Metal-Phthalocyanine Molecules With Conjugeted Polymers
Aratani, Masao	Fabrication Of Seamless Roll Mold Using Electron Beam Direct Writing To Rotating Cylindrical Substrate
Arregui, Francisco J.	Application of C60 to Improve the SPLEBL Reference Signal
Aryal, Mukti	Fabrication Of High Aspect Ratio Polymer Nanopillars By Nanoimprint Induced Elongation For Guided Cell Growth Organic Solar Cells Using Imprinted P3HT Nanostructures: The Effects Of Geometry, Crystallization And Chain Ordering
Attwood, David	Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance
Auciello, Orlando	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Aumayr, Friedrich	Slow Highly Charged Ions As A New Tool For Surface Nanostructuring
Auvray, Loic	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Auzelyte, Vaida	Thermal Development Of Calixerene Resist
Ayachitula, Rajani	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
B
Babin, Sergey	Fabrication of Novel Digital Optical Spectrometer-on-chip Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Baehr-Jones, Tom	Lithographic Scaling In Silicon Photonics: Is Smaller Better?
Ballard, Joshua	Atomic Precision Lithography on Si
Barbastathis, George	Ferrofluid Lithography Stretching And Alignment Of Compliant Nanomembranes By Embedded Nanomagnets
Barber, Samuel	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
Barea, Luis	Low Roughness Microdisk Resonators Fabricated By Focused Ion Beam (FIB)
Bari, M. R.	Conductive Atomic Force Microscopy Study Of Self-Assembled Silicon Nanostructures
Barlow, Phil	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Barnola, Sébastien	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Barriss, Louise	Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Bartha, Johann W.	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography
Bates, Jeffrey	Networks of Nanomagnets Fabricated via Stenciling and Magnetron Sputtering to Investigate Nanoscale Magnetic Switching
Bava, Luisa	Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Baylav, Burak	193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Bean, Jeffrey	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
Bean, John	Ultra-Low Dose Exposure of HSQ using Electron Beam Lithography Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Beaurain, Arnaud	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Beck, Marc	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Bednarzik, Martin	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography
Beidaghi, Majid	Carbon Nanotube-confined MnO₂/C-MEMS Nanostructures for On-Chip Electrochemical Capacitors
Bell, David	Helium-ion Lithography with Hydrogen Silsesquioxane Resist Precision Material Modification and Patterning with Helium Ions
Benisty, Henry	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Berge, G.F. Ten	Mapper: High Throughput Maskless Lithography
Berggren, K. K.	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Berggren, Karl K.	Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer Nanoimprint Lithography for Sub-10 nm Complex Patterns
Berggren, Karl	Controlled Self-Assembly Of Linear Structures For Nanoscale Device Fabrication Helium-ion Lithography with Hydrogen Silsesquioxane Resist Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Low-Cost Interference Lithography Limiting Factors in Sub-10-nm Scanning Electron Beam Lithography Lift-off of Sub-15-nm Hydrogen Silsesquioxane (HSQ) Structures Sub-40-nm patterning of Au on GaAs for Nanowire Catalysis
Berglund, Andrew	3D Nanoparticle Trajectories by Orthogonal Tracking Microscopy
Bergmair, Iris	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Bergmair, Michael	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Bernstein, Gary	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
Bertagnolli, E.	Analysis And Evaluation Process For Quantification Of Residual Gas Deposition By A Focused Electron Beam
Bertagnolli, Emmerich	NIL Stamp Modification Utilizing Focused Ion Beams
Berton, Kevin	A Transparent Multilevel-Electrodes Microfluidic Chip For Dielectrophoretic Colloidal Handling
Berwald, F.	Growing Carbon Nano Tubes With A Simple CVD Process On Predefined Patterns Of Pd Nano Particles That Where Positioned To Charge Patterns Created With A Scanning Electron Microscope
Besacier, Maxime	Dynamic Scatterometry For Profile Control During Resist Trimming Process
Beyer, André	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Blaikie, R. J.	Conductive Atomic Force Microscopy Study Of Self-Assembled Silicon Nanostructures
Blaikie, Richard	Influence Of Polarization On Absorbance Modulated Sub-Wavelength Grating Structures
Blake, David	Carbon Nanotube Field Emitters for Micro-Column Scanning Electron Microscopy and Nanolithography
Bliznetsov, Vladimir	Design Specific Variation In Via/Contact Pattern Transfer - Full Chip Analysis.
Boerger, Brent	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Bogdanov, Alexei L.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Bogdanski, Nicolas	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State Recovery Prevention Via Pressure Control in T-NIL Self-Assembly For The Definition Of Hierarchical Patterns In Thermal Imprint
Bogdeanski, N.	Recovery Prevention Via Pressure Control in T-NIL
Bokor, Jeffrey	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Bonam, Ravi	Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Bondavalli, Paolo	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Boolchand, Punit	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Boriskina, Svetlana	Nanofabrication Of Deterministic Aperiodic Structures For Radiative Engineering In Nanoplasmonics
Borisov, S.	Sub-10nm Test-Sample For Characterization And Tuning Of Focused Electron Beam Used In Technology, Inspection And Diagnostics
Borrise, Xavier	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning
Botman, Aurelien	Focused Electron-Beam-Induced Deposition Of 3 Nm Dots In A Scanning Electron Microscope Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Bottier, Celine	Embedded SiO₂ nanosheets in PDMS using an alternative nanopatterning process.
Bourhis, Eric	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Boussey, Jumana	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Boutami, S.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Bozano, Luisa	Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Bøggild, Peter	Conducting FIB Milled Nanowires
Brainard, Robert	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Braunschweig, Adam	Frontiers of Tip-Based Nanofabrication: From DPN and Beyond
Bret, Tristen	Gas Assisted Focused Electron Beam Induced Etching of Alumina
Brewster, Megan	Sub-40-nm patterning of Au on GaAs for Nanowire Catalysis
Bristol, Robert	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Brogan, A.	Parallel Proximal Probe Arrays With Vertical Interconnections
Bronsgeest, M.S.	Reversible Shape Changes Of The End Facet On Schottky Electron Emitters
Bross, Aimee	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
Brown, Devin	Patterning Unity 4698P with Electron Beam Lithography to Create Submicron Air Cavities
Brown, Evan	Advanced Nanoscale Anode Fabrication for High-Performance Solid Oxide Fuel Cells
Bruchhaus, Lars	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Brueck, Steven	Tailoring Anisotropic Wetting Properties on One-Dimensional Nanopatterned Surfaces Imaging Interferometric Nanoscopy to the Limits of Available Frequency Space
Brugger, Juergen	Stencilled Conducting Bismuth Nanowires
Bucchignano, JU.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Buchanan, Kristen	Magnetic Soft X-ray Imaging of Non-linear Vortex Core Dynamics
Buehler, W.	Analysis And Evaluation Process For Quantification Of Residual Gas Deposition By A Focused Electron Beam
Bugrov, Alexey	Fabrication of Novel Digital Optical Spectrometer-on-chip
Bundesanstalt, Physikalisch-Technische	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Burek, Michael	(Invited) Effective Use of Focused Ion Beam (FIB) and E-beam lithography in Investigating Fundamental Mechanical Properties of Materials at the Nano-Scale. (Invited)
Burkhardt, Martin	(Invited) Overcoming the Patterning Challenges of Extreme K1 Imaging
Buron, Jonas Christian Due	Conducting FIB Milled Nanowires
Bustos, Jessi	Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Byeon, Kyeong-Jae	Direct Indium-Tin-Oxide Patterning Using Thermal Nanoimprint Lithography And ITO Nano-Particle Solution
C
Cabral, Michael	Ultra-Low Dose Exposure of HSQ using Electron Beam Lithography Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Cabrini, Stefano	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Fabrication of Novel Digital Optical Spectrometer-on-chip Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials The Interplay Between Kinetics And Thermodynamics During Development Of Calixarene, A Negative Resist Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Cacao, E.	A Microretroreflector-Based Diagnostic Platform
Caillard, Amael	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Callaghan, Ryan	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Camara, Nicolas	Nanostructuring Of Graphene Layers By AFM Local Anodic Oxidation
Cambie, Rossana	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
Candeloro, Patrizio	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Cantone, Jason	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Carlisle, John	Nanofabrication of Sharp Diamond Tips by E-beam Lithography and ICP-RIE
Carmichael, P.T.	A Dry-on, Dry-off, Long Wavelength Photoresist for NanoPlasmonic Field Metrology and Lithography
Carmichael, Peter	3D Nanoparticle Trajectories by Orthogonal Tracking Microscopy
Caroff, Philippe	Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Carraro, Carlo	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam
Carroll, Allen	Electron Reflection from Metal Targets
Cassette, Simone	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Castaldo, Vincenzo	On The Influence Of Sputtering In Determining The Resolution Of A Scanning Ion Microscope
Cerrina, Franco	Self-Imaging Of Complex Structures With A Table-Top EUV Laser In-Situ Synthesis And Direct Immobilization Of DNA Oligonucleotides On Pre-Patterned HSQ Nanostructures
Cha, Dongho	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Chae, Kisung	Effects Of The Direction Of Magnetic Moment On Magnetic And Electronic Properties Of Co/MgO/Co Magnetic Tunnel Junction System: First-Principles Calculations
Chaix, N.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Chan, Bin-Da	Imprinting with Revolving-belt for Effective and Efficient Replication of Microstructures
Chan, Lei	High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Chan, Tina	Comparison Of Fast 3D Simulation And Actinic Inspection For EUV Masks With Buried Defects And Absorber Features
Chandhok, Manish	Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing
Chang, Alan	Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Chang, Allan S.P.	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach
Chang, Allan	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials
Chang, Chih-Hao	Ferrofluid Lithography (Invited) Lithography With Nanometer Precision On Monster Substrates
Chang, J.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Chang, Jae-Byum	Controlled Self-Assembly Of Linear Structures For Nanoscale Device Fabrication
Chang, Jer-Haur	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Chang, S.M.	Mapper: High Throughput Maskless Lithography
Chang, Shih-Ming	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Chao, Weilun	Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane The Interplay Between Kinetics And Thermodynamics During Development Of Calixarene, A Negative Resist
Chau, Larry	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Chekurov, Nikolai	Novel Nanostructure Fabrication Method Combining Silicon Doping with Focused Ion Beam and Cryogenic Deep Reactive Ion Etching
Chen, Baoqin	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Chen, Chen	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum
Chen, Cheng-Hung	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Chen, Gang	Positioning of Nanocrystals on Prestructured Substrates
Chen, Guan-Yu	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Chen, H. L.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Chen, Huabin	Top-down Fabrication of Monodisperse Non-Spherical Polymer Composite Particles for Nanomedicine Applications
Chen, Jeng-Homg	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Chen, Jian-Wei	Complete Reversal Imprinting For Fabricating Microlens Array With High Height Transcription
Chen, Lien-Sheng	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Chen, Ping	Pillar Growth Rate Dependences in Ion-Beam-Induced Deposition The Roles of Secondary Electrons and Sputtered Atoms in Ion-Beam-Induced Deposition
Chen, Sung-Liang	High Q-Factor Small Size Polymer Micro-Ring Resonators For High-Frequency Ultrasound Detection
Chen, Wei	Carbon Nanotube-confined MnO₂/C-MEMS Nanostructures for On-Chip Electrochemical Capacitors
Chen, Yanfeng	Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Chen, Yifang	Combined Near-Field Lithography And Reversal Imprint For High Resolution Patterning In Wafer Scale
Chen, Yung-Ping	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Cheng, Joy	(Invited ) Directed Polymer Self-assembly for Lithography Application
Cheng, Li-Jing	Ionic Current Rectification and Switching in Heterogeneous Oxide Nanofluidic Channels
Cheng, Sulin	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Cheng, Xing	Single-Walled Carbon Nanotube Alignment by Grating-Guided Electrostatic Self-assembly Solid-State Dye-Sensitized Solar Cell Based on Semiconducting Nanomaterials Infrared Dipole Antenna Enhanced by Surface Phonon Polaritons Step-and-Repeat Thermal Nanoimprint for Functional Polymers Lateral Flow Particle Filtration and Separation with Multilayer Microfluidic Channels
Cheng, Y.-C.	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Cheong, Lin Lee	Application of C60 to Improve the SPLEBL Reference Signal
Cheung, Rebecca	Electrothermal Actuation Of Silicon Carbide Ring Resonators Properties of Single-Walled Carbon Nanotubes Integrated into Polyimide (SWNTs-Pi) Nanocomposites Perturbed Frequency-Selective Surfaces Fabricated on Large Thin Polymer Membranes for Multiband Infrared Applications
Chew, Li-Li	Application of the Helium Ion Microscope to Biological Sciences
Chhim, Bophan	Transmission Electron Microscopy of Fabricated Nanostructures
Chiang, Chieh-Hsiu	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Chiang, Kunyeh	Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery
Chikashige, Yuki	Process Optimization Of Electron Beam Lithography Using High Resolution Resist TEBN-1
Chikkamaranahalli, Summanth	STM-induced Surface Modification with Reactive Ion Etch Pattern Transfer
Chiou, Dai-Wen	Hierarchical Structure Formation Induced By Dewetting And Imprinting And Its Pattern Replication
Chiu, Hsin-Chieh	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Cho, Han Ku	Pattern Placement Error Due To Resist Charging Effect At 50kv E-Beam Writer
Cho, Han-Ku	Estimation of Resist Profile Using Layer-Based Exposure Modeling Application of Neural Network to E-beam Dose Control for 3-D Proximity Effect Correction
Cho, Younghak	Lateral Flow Particle Filtration and Separation with Multilayer Microfluidic Channels
Choi, Dae-geun	Resistive Switching Memory Fabricated by UV-NIL Process
Choi, Dae-Geun	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Choi, Jin	Pattern Placement Error Due To Resist Charging Effect At 50kv E-Beam Writer
Choi, Jun-hyuk	Resistive Switching Memory Fabricated by UV-NIL Process
Choi, Jun-Hyuk	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Choi, K.-H.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Choi, Keebong	Fabrication Of The Transparent Cylindrical Stamp With Sub 50nm Linewidth By Means Of The Step & Flash Nanoimprint Lithography
Choi, Kwangsik	Thin Film Antenna Coupled Conductor-Barrier-Conductor (CBC) Diode Implementation Using E-Beam Proximity Correction for Light Detection
Choi, Seong-woon	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Choi, Sookyung	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS) Investigation Of Surface Roughness Of Poly(Methylmethacrylate) At Reduced Temperatures
Choi, Yang-kyu	Resistive Switching Memory Fabricated by UV-NIL Process
Choi, Youngjae	Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Choo, Hyuck	Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Chopdekar, Rajesh	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Chou, Stephen	Novel Fabrication of 3D Combined Nanoscale and Microscale Structures Using Functionalized SPEL Self-Limited Self-Perfection by Liquefaction for Sub-20nm Trench/Line Fabrication Fabrication of Large-Area 100nm Checker Board Mold Using 3D Patterning with Multiple Nanoimprint Lithography and Self-Aligned Selective Etching Negative Tone Quantum Lithography at 200-nm Pitch Nanoimprinted Blanks Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP) Self-Aligned Fabrication of 10 nm-Wide Asymmetric Trenches in Si for Heterojunction Tunneling FETs Using Nanoimprint Lithography
Choy, Jun-Ho	Design Specific Variation In Via/Contact Pattern Transfer - Full Chip Analysis.
Chuang, S. Y.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Chuang, Vivian	Self-Assembled Nanostructures With Ring Arrays And Square Pattern From Organometallic-Containing Triblock Terpolymers
Chumakov, N.K.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Chung, Yong-Chae	Effects Of The Direction Of Magnetic Moment On Magnetic And Electronic Properties Of Co/MgO/Co Magnetic Tunnel Junction System: First-Principles Calculations
Clifford, Chris	Comparison Of Fast 3D Simulation And Actinic Inspection For EUV Masks With Buried Defects And Absorber Features EUV Pattern Defect Detection Sensitivity Based On Aerial Image Linewidth Measurements
Cohen, Bruce	Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Cojocaru, Costel-Sorin	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Cojocaru, Cristian-Victor	Networks of Nanomagnets Fabricated via Stenciling and Magnetron Sputtering to Investigate Nanoscale Magnetic Switching
Coll, Mariona	Transfer Printing Approach for Fabricating Molecular Electronic Junctions
Coluccio, Maria Laura	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Comboroure, Corinne	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors Ebeam Lithography for Platform of Multiple SET Architectures
Combrié, Sylvain	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Constancias, Christophe	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography Diffraction Grating Fabrication On 100nm Silicon Membrane For EUV Interferometry Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Cord, Bryan	Helium-ion Lithography with Hydrogen Silsesquioxane Resist Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Limiting Factors in Sub-10-nm Scanning Electron Beam Lithography
Cornejo, Marina	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Costas, P	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Craighead, Harold	Nanostructure Incorporation in Analytical Systems
Crosland, Nigel	Simulation and Experimental Studies of Blanking Speed Limitations on Exposure Speed of Electron Beam Lithography Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Crouch, Adam	Fabrication Of High Aspect Ratio Polymer Nanopillars By Nanoimprint Induced Elongation For Guided Cell Growth
Cui, Dehu	Step-and-Repeat Thermal Nanoimprint for Functional Polymers
Cunanan, John	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Curri, M. L.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Curtis, Jennifer	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
D
Da Silva, M. M.	Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Dai, Bing	Non-iterative Reconstruction for Detecting Buried Deviant Structures in Integrated Circuits using Coherent Hard X-ray Diffraction
Dai, Qing	Estimation of Resist Profile Using Layer-Based Exposure Modeling
Dai, Zhenting	A General Strategy for Directly Writing Nanoscale Patterns of Nanoparticles and Polymer-Nanoparticle Composites.
Daj, Mohammad Reza	Nanoscale Deposition and Etching of Silicon Quantum Dots Using Field-Assisted AFM-Based CVD
Dalzotto, Bernard	Diffraction Grating Fabrication On 100nm Silicon Membrane For EUV Interferometry
Danielsen, Nils	Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Darnon, M.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Das, Gobind	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Dastmalchi, Babak	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
David, Christian	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Davis, Ronald	Detection of Biomarkers Using Bio-Functionalized Microfluidic Channels Fabrication of Nanoneedle Array for High Throughput Biomarker Detection in a Lab-On-a-Chip Device Real-Time DNA Sequencing via Detection of Polymerization with Silicon based Pico-calorimeter chips
Davydov, Albert	Gallium Nitride Nanowire Devices-Assembly, Fabrication And Applications
De Angelis, Francesco	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
De Boer, G.	Mapper: High Throughput Maskless Lithography
De Lamaestre, R. Espiau	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
De Pablo, Juan J.	Directing Block Copolymers Assembly within Patterned Media Specifications
De Rooij, N.F.	Microcolumn Design For A Large Scan Field And Pixel Number
Deeth, Steven	Model Based OPC Runtime Saving With Multi-Segment Solver
DeFranco, John	(Invited) Photolithographic Patterning for Organic Electronics
Denham, Paul	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Derose, guy	Transmission Electron Microscopy of Fabricated Nanostructures
Desieres, Y.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Despont, Michel	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Detcheverry, Francois	Directing Block Copolymers Assembly within Patterned Media Specifications
Deterre, Martin	Stretching And Alignment Of Compliant Nanomembranes By Embedded Nanomagnets
Devin, Nicole	Patterning Unity 4698P with Electron Beam Lithography to Create Submicron Air Cavities
Dhindsa, Manjeet	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels
Dhuey, Scott	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach Fabrication of Novel Digital Optical Spectrometer-on-chip Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Di Fabrizio, Enzo	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Diaz, Javier	Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Dierolf, Martin	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Diest, Kenneth	Advanced Silicon Processing for Active Integrated Photonic Devices
Dilli, Zeynep	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
DiManna, Mark	Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Dimov, Stefan	Fabrication Of Templates For Large Area Patterning And The Replication Of "Motheye Lenses" Using Step And Flash Imprint Lithography (S-FIL)
DiNatale, William	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Ding, Baoquan	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Ding, Yifu	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Dinu-Gurtler, L.	Mapper: High Throughput Maskless Lithography
Dirani, Ali	DUV-Induced Nanopatterning Of Polyanhydride Films Deposited By Pulsed Plasma Polymerization
Dirriwachter, Antonius	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Dissing, Daniel	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Divan, Ralu	Nanofabrication of Sharp Diamond Tips by E-beam Lithography and ICP-RIE Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Dobisz, Elizabeth	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly GISAXS A New Metrology To Characterize Nano-Patterned Samples Directing Block Copolymers Assembly within Patterned Media Specifications
Domanski, Maciej	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Donev, E.U.	Electron-Beam Induced Deposition using Liquid-Phase Precursors
Doran, Sam	Simulation and Experimental Studies of Blanking Speed Limitations on Exposure Speed of Electron Beam Lithography
Dornajafi, Mahsa	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Doyeux, H.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Doyle, H.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Drechsler, Ute	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Dubon, Oscar D.	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Duerig, Urs	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Dunn, Kathleen	Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Dunn, Shannon	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Dupre, Cecilia	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
E
Ea-Kim, Buntha	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Ebm, Christoph	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Eder-Kapl, S.	Positioning of Nanocrystals on Prestructured Substrates
Eder-Kapl, Stefan	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Edinger, Klaus	Gas Assisted Focused Electron Beam Induced Etching of Alumina
El Kodadi, Mohamed	Dynamic Scatterometry For Profile Control During Resist Trimming Process
Engellmann, S.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Engineering, Quantum	Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Ernst, Thomas	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Ervin, Matthew	Electron Beam Induced Deposition of Cobalt for Use as Single-Wall Carbon Nanotube Growth Catalyst
Esfandyarpour, Hesaam	Fabrication of Nanoneedle Array for High Throughput Biomarker Detection in a Lab-On-a-Chip Device Real-Time DNA Sequencing via Detection of Polymerization with Silicon based Pico-calorimeter chips
Esfandyarpour, Rahim	Fabrication of Nanoneedle Array for High Throughput Biomarker Detection in a Lab-On-a-Chip Device
Etching	Self-Aligned Fabrication of 10 nm-Wide Asymmetric Trenches in Si for Heterojunction Tunneling FETs Using Nanoimprint Lithography
Evaporation, Shadow	Self-Aligned Fabrication of 10 nm-Wide Asymmetric Trenches in Si for Heterojunction Tunneling FETs Using Nanoimprint Lithography
F
Fang, Nicholas	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS)
Fang, T.Y.	Mapper: High Throughput Maskless Lithography
Fang, V.	Conductive Atomic Force Microscopy Study Of Self-Assembled Silicon Nanostructures
Farkas, Lou	Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Fay, Patrick	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
Fazio, Teresa	Observing Protein-DNA Interactions Using Double-Tethered DNA Curtains
Fechner, Renate	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Fedkiw, Timothy	Implementation and Characterization of an Iodine Field Emission Ion Source for FIB Applications
Fedynyshyn, Theodore	Lithographically Directed Surface Modification
Fei, Zhengzheng	Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery
Ferralis, Nicola	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam
Fillman, Ryan W.	Ultra-Thin F-DLC Coating for Nanoimprint Lithography Imprinters
Fischer, Clovis	Formation Of High-Aspect Ratio Silicon Nanopillars Using Deep Reactive Ion Etching
Fischer, Peter	Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance Magnetic Soft X-ray Imaging of Non-linear Vortex Core Dynamics
Fitzgerald, Edward	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Flauta, Randolph	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Fleischer, M.	Microcolumn Design For A Large Scan Field And Pixel Number
Floresca, C.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Floresca, Carlos	Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Fong, H.H.	(Invited) Photolithographic Patterning for Organic Electronics
Foulkes, John	Influence Of Polarization On Absorbance Modulated Sub-Wavelength Grating Structures
Fowlkes, Jason D.	Time Dependent Effects of Electron Beam Induced Etching (EBIE)
Fowlkes, Jason	Optical Imaging and Processing in a SEM/FIB: The Three Beam System Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Fragala, Joe	Frontiers of Tip-Based Nanofabrication: From DPN and Beyond
Francone, Achille	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Frank, Andreas	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Franssila, Sami	Novel Nanostructure Fabrication Method Combining Silicon Doping with Focused Ion Beam and Cryogenic Deep Reactive Ion Etching
Frateschi, Newton	Low Roughness Microdisk Resonators Fabricated By Focused Ion Beam (FIB)
Freedman, Daniel	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Frennesson, Goran	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Frost, Frank	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Fu, Joe	STM-induced Surface Modification with Reactive Ion Etch Pattern Transfer
Fu, Zengli	Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP)
Fucetola, Corey P.	Low-Cost Interference Lithography
Fujii, Noriyoshi	Impact of Exposure Doses on De-Molding Process in UV-NIL
Fujita, Hiroshi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Fujita, Hiroyuki	Embedded SiO₂ nanosheets in PDMS using an alternative nanopatterning process.
Fujita, Jun-ichi	Graphitization at Interface between Amorphous Carbon and Liquid Gallium for Fabricating Large Area Graphene Sheets
Fujiwara, Kazuma	Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics
Fukushima, Eri	2D to 3D Imprinting on Surface of Teflon PFA Inlet Tube
Fuller, N.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Fumar-Pici, Anita	Line Edge Roughness Contribution from Mask to Wafer
G
Gaevski, Mikhail	High Density Submicron Features Using A Laser Pattern Generator And Double Patterning
Gao, Jinming	Top-down Fabrication of Monodisperse Non-Spherical Polymer Composite Particles for Nanomedicine Applications
Gardeniers, Han	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Garner, Sean R.	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Gautsch, S.	Microcolumn Design For A Large Scan Field And Pixel Number
Ge, Haixiong	Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Gelamo, Rogerio	Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Gentile, Francesco	Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
George, Hubert C.	Effects Of Visible Light Illumination On The Conductance Of Al/Alox Single-Electron Transistors
George, Simi	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Ghasssemi, Saba	Gold-Tipped Elastomeric Pillars for Cellular Mechanotransduction
Giam, Louise	Frontiers of Tip-Based Nanofabrication: From DPN and Beyond Multiplexing and Transport Phenomena in Dip-Pen Nanolithography
Giannuzzi, Lucille	Material Contrast from Ga Ion Induced Secondary Electron Images
Gibbons, Sarah	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Gierak, Jacques	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Gilchrist , Kristin	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Gimi, Barjor	Novel Immunoisolative Microcontainer With Nanoslots Defined By Nano Imprint Lithography
Girolami, Greg	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Glass, Jeff	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Glinsner, T.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Glinsner, Thomas	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Gobrecht, Jens	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Godignon, Philippe	Nanostructuring Of Graphene Layers By AFM Local Anodic Oxidation
Goldberg, Kenneth	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes EUV Pattern Defect Detection Sensitivity Based On Aerial Image Linewidth Measurements
Golden, Jeremy	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
Goldsman, Neil	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Goltsov, Alexandr	Fabrication of Novel Digital Optical Spectrometer-on-chip
Gölzhäuser, Armin	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Goodman, Russell	Lithographically Directed Surface Modification
Gopalan, Padma	Control of the Critical Dimensions and Line Edge Roughness with Pre-organized Block Copolymer Pixelated Photoresists Self-Aligned Double Patterning By Directed Self-Assembly Of Block Copolymer
Gopinath, Ashwin	Nanofabrication Of Deterministic Aperiodic Structures For Radiative Engineering In Nanoplasmonics
Gorman, Jason	Observing Protein-DNA Interactions Using Double-Tethered DNA Curtains
Gotsmann, Bernd	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Gotszalk, T.	Parallel Proximal Probe Arrays With Vertical Interconnections
Gotszalk, Teodor	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Goussetis, George	Perturbed Frequency-Selective Surfaces Fabricated on Large Thin Polymer Membranes for Multiband Infrared Applications
Gradecak, Silvija	Sub-40-nm patterning of Au on GaAs for Nanowire Catalysis
Graham, W.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Granik, Yuri	Design Specific Variation In Via/Contact Pattern Transfer - Full Chip Analysis.
Graupera, Armand	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Gravelin, James	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Greene, Eric	Observing Protein-DNA Interactions Using Double-Tethered DNA Curtains
Greenzweig, Yuval	Sub-Surface Damage from Helium Ion as a Function of Dose and Beam Energy
Greer, Julia	(Invited) Effective Use of Focused Ion Beam (FIB) and E-beam lithography in Investigating Fundamental Mechanical Properties of Materials at the Nano-Scale. (Invited)
Griedel, Brian	Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane
Grigoras, Kestutis	Novel Nanostructure Fabrication Method Combining Silicon Doping with Focused Ion Beam and Cryogenic Deep Reactive Ion Etching
Grigoropoulos	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Gross, G.	Positioning of Nanocrystals on Prestructured Substrates
Groves, Tim	Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Groves, Timothy	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Gruetzner, Gabi	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Grütter, Peter	Networks of Nanomagnets Fabricated via Stenciling and Magnetron Sputtering to Investigate Nanoscale Magnetic Switching
Gu, Changzhi	Removing Pt Contamination In FIB Assisted Deposition Of Electrodes For Nanodevices
Guillorn, M.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Gunasekaran, V.	Micro Fabrication Of Planar-Type Structures On Graphite Layer Using Focused Ion Beam And Transport Characterization
Guo, Cheng	Application of Neural Network to E-beam Dose Control for 3-D Proximity Effect Correction
Guo, Hong-Jie	A Point Source Of Energetic Helium Atoms For Proximity Lithography
Guo, L. Jay	Ionic Current Rectification and Switching in Heterogeneous Oxide Nanofluidic Channels High Q-Factor Small Size Polymer Micro-Ring Resonators For High-Frequency Ultrasound Detection High-density Sub-20 nm Plasmonic Nanostructures Fabricated by Nanoimprint Lithography using a Block Copolymer Template Large Area Negative Refractive Index Structures at Optical Frequencies Using Nanoimprint Lithography A Novel Dynamic Nano Inscribing Technique For Creating Continuous And Seamless Metal And Polymer Nano Gratings Large-area Roll-to-Roll and Roll-to-Plate Nanoimprint Lithography and Analytical Models for Predicting Residual Layer Thickness ITO-Free Organic Solar Cells On Flexible Plastic Substrates
Gurovich, Boris A.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Gwyther, Jessica	Self-Assembled Nanostructures With Ring Arrays And Square Pattern From Organometallic-Containing Triblock Terpolymers
Gyrsting, Yvonne	Conducting FIB Milled Nanowires
H
Haatainen, Tomi	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Hacker, Christina A.	Transfer Printing Approach for Fabricating Molecular Electronic Junctions
Haensch, W.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Hagen, C.W.	Growing Carbon Nano Tubes With A Simple CVD Process On Predefined Patterns Of Pd Nano Particles That Where Positioned To Charge Patterns Created With A Scanning Electron Microscope
Hagen, C.W	Measurements On The Electron Optical Properties Of A Multi-Electron Beam Source in a SEM Chamber
Hagen, Cornelis Wouter	Optimization of Focused Ion Beam Performance.
Hagen, Kees	Focused Electron-Beam-Induced Deposition Of 3 Nm Dots In A Scanning Electron Microscope Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Haile, Sossina	Advanced Nanoscale Anode Fabrication for High-Performance Solid Oxide Fuel Cells
Hainberger, Rainer	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Halle, Scott	Experimental Determination of Image Placement Accuracy in EUV Lithography
Hällström, Waldemar	(Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Activation of Macrophages by High Aspect Ratio Nanostructures. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires. Nanowire Templated Nanotubes for Cell Injection
Hamaguchi, Tetsuya	Rapid Thermal Imprint Of High-Aspect-Ratio Nanostructures
Han, Arum	Lateral Flow Particle Filtration and Separation with Multilayer Microfluidic Channels
Han, Eungnak	Self-Aligned Double Patterning By Directed Self-Assembly Of Block Copolymer
Han, Hakseung	Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes
Han, Keping	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
Han, Woosung	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Harada, Tetsuo	Mask Observation Result using Coherent EUV Scattering Microscopy at New SUBARU
Hardman, Rob	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
Harrell, Lee E.	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Harriott, Lloyd	Ultra-Low Dose Exposure of HSQ using Electron Beam Lithography Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Harteneck, Bruce	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Fabrication of Novel Digital Optical Spectrometer-on-chip Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Hartfield, Cheryl	Optical Imaging and Processing in a SEM/FIB: The Three Beam System
Hartley, John	Experimental Determination of Image Placement Accuracy in EUV Lithography Simulation and Experimental Studies of Blanking Speed Limitations on Exposure Speed of Electron Beam Lithography Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Haruyama, Yuichi	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Hasegawa, Hirokazu	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly
Hasegawa, Tsuyoshi	(MNC 2008 Best Paper) Wiring Single Metal-Phthalocyanine Molecules With Conjugeted Polymers
Hasko, David	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Hastings, J. Todd.	Electron-Beam Induced Deposition using Liquid-Phase Precursors
Hastings, J. Todd	Amino-Propyl-Triethoxy-Silane (APTES) on Aluminum Fiducial Grids for Spatial-Phase-Locked Electron-Beam Lithography
Hattori, Shuntaro	Rapid Thermal Imprint Of High-Aspect-Ratio Nanostructures
Hauptmann, Marc	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography
He, Xiang	Tailoring Anisotropic Wetting Properties on One-Dimensional Nanopatterned Surfaces
Hedrick, James	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Heidari, Babak	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Heikenfeld, Jason	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels
Heilmann, Ralf	(Invited) Lithography With Nanometer Precision On Monster Substrates
Heiss, W.	Positioning of Nanocrystals on Prestructured Substrates
Hellwig, Olav	Directing Block Copolymers Assembly within Patterned Media Specifications
Henderson, Clifford	High Performance Negative Tone Molecular Resists Using Cationic Polymerization Ultra-Thin Film Effects on Photoresist Imaging Performance Quantitative Structure-Property Relations for the Prediction of the Glass Transition Temperature of Molecular Resists
Henry, Anne	Electrothermal Actuation Of Silicon Carbide Ring Resonators
Henry, David	Techniques Of Cryogenic Reactive Ion Etching In Silicon For Fabrication Of Sensors
Henslee, Brian	Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery
Hensley, Dale	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels
Hertz, Hans	15-nm Nickel Zone Plates Achieved Using Cold-Developed Electron-Beam Patterned ZEP7000
Hickman, Steven A.	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Hieda, Hiroyuki	Curing Process of Silsesquioxane in Self-Organized Diblock Copolymer Template
Higgins, Craig	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Hilken, Dawn	Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane
Hill, Richard J. W.	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Hinds, Bruce	Dramatic Nano-Fluidic Properties Of Carbon Nanotube Membranes
Hines, Daniel R.	Transfer Printing Approach for Fabricating Molecular Electronic Junctions
Hingerl, Kurt	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Hinsberg, William	(Invited ) Directed Polymer Self-assembly for Lithography Application
Hinze, Peter	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Hirai, Yoshihiko	Impact Of Resist Shrinkages On De-Molding Process In Thermal and UV NIL Impact of Exposure Doses on De-Molding Process in UV-NIL Molecular Dynamics Study On Fracture Of Si Mold In Nanoimprint For Glass Film Numerical Study on Bubble Trapping in UV Nanoimprint Lithography Comparison of Demolding Forces for Various Si Molds and Mold with Extremely Smooth Side Wall Molecular Dynamics Study on Bending Deformation of Carbon Nanotubes by Electron Beam Irradiation
Hiratsuka, Kenji	Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-shifted Diffraction Gratings of Distributed Feedback Laser Diodes
Hiroshima, Hiroshi	Release Force Reduction in UV-Nanoimprint By Mold Orientation Control And By Gas Environment Numerical Study on Bubble Trapping in UV Nanoimprint Lithography
Hirsch, Dietmar	Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Hiyama, Yoshihito	2D to 3D Imprinting on Surface of Teflon PFA Inlet Tube
Ho, Harvey	Fabrication Methods For Passive Sensor Tags On Flexible Polymer Substrates
Hoang, Hung	A Toroidal Spectrometer For Signal Detection In Scanning Ion/Electron Microscopes
Hobler, Gerhard	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Hochberg, Michael	Lithographic Scaling In Silicon Photonics: Is Smaller Better?
Hoef, Brian	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Hoelle, Robert	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Hoertlackner, M.	Analysis And Evaluation Process For Quantification Of Residual Gas Deposition By A Focused Electron Beam
Hoffbauer, Mark	Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Hoffman, Galen	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Hoffmann, Patrik	Gas Assisted Focused Electron Beam Induced Etching of Alumina
Hofmann, Thorsten	Gas Assisted Focused Electron Beam Induced Etching of Alumina
Hofmann, Tommy	GISAXS A New Metrology To Characterize Nano-Patterned Samples
Hohle, C.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Holland, Martin C.	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Holmberg, Anders	15-nm Nickel Zone Plates Achieved Using Cold-Developed Electron-Beam Patterned ZEP7000
Hon, Min-Hsiung	Hierarchical Structure Formation Induced By Dewetting And Imprinting And Its Pattern Replication
Hone, James	Gold-Tipped Elastomeric Pillars for Cellular Mechanotransduction Highly Robust Single-Wall Carbon Nanotube-Molecule Junction Device Fabrication Process
Honegger, Thibault	A Transparent Multilevel-Electrodes Microfluidic Chip For Dielectrophoretic Colloidal Handling
Hong, Jiseok	Real-Time Detection Of Airborne Dust Particles Using Highly Sensitive Paddle Type Silicon Cantilevers
Hoshino, Hiromi	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Howe, Roger T.	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam
Howe, Roger	Laser Print Patterning of Planar Spiral Inductors
Hoyle, Robert	Fabrication Of Templates For Large Area Patterning And The Replication Of "Motheye Lenses" Using Step And Flash Imprint Lithography (S-FIL)
Hsu, Keng	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS)
Hu, Evelyn	Information on a Small Scale: The Power of Nanophotonics
Hu, W.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Hu, Walter	Fabrication Of High Aspect Ratio Polymer Nanopillars By Nanoimprint Induced Elongation For Guided Cell Growth Novel Immunoisolative Microcontainer With Nanoslots Defined By Nano Imprint Lithography Top-down Fabrication of Monodisperse Non-Spherical Polymer Composite Particles for Nanomedicine Applications
Hu, Wenchuang (Walter)	Dimension Reduction Of Nano-Gratings By Controlled Melting Of Patterned Polymer Mask Organic Solar Cells Using Imprinted P3HT Nanostructures: The Effects Of Geometry, Crystallization And Chain Ordering Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Hu, Xin	Design And Fabrication Of Electrokinetic Microfluidics For Transportation And Manipulation Of Biomolecules
Huang, Chong	Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP)
Huang, Hinqing	Transmission Electron Microscopy of Fabricated Nanostructures
Huang, Po-Hsun	Complete Reversal Imprinting For Fabricating Microlens Array With High Height Transcription Ultra-Large And Thin Light Guide Plates Fabricated Using UV Imprinting Process
Huang, Tzu-Chien	Imprinting with Revolving-belt for Effective and Efficient Replication of Microstructures Ultra-Large And Thin Light Guide Plates Fabricated Using UV Imprinting Process
Hubert, Alexandre	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Huh, Sungmin	Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes EUV Pattern Defect Detection Sensitivity Based On Aerial Image Linewidth Measurements
Huq, Ejaz	Combined Near-Field Lithography And Reversal Imprint For High Resolution Patterning In Wafer Scale
Hwang, David J.	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Hwang, N.W.	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Hyun, M. S.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Hyun, Moon Seop	Step Width Adjustment in Fabrication of Staircase Structures
I
Iacopino, D.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Icard, Béatrice	Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Ichihashi, Toshinari	Graphitization at Interface between Amorphous Carbon and Liquid Gallium for Fabricating Large Area Graphene Sheets
Ide, Shouichi	Nano Scale Three-Dimensional Metal Pattern Transfer By Nanoimprint Lithography Using Metal Oxide As A Release Layer
Ignatova, Olesya	Resist Residues and Transistor Gate Fabrication
Im, Mi-Young	Magnetic Soft X-ray Imaging of Non-linear Vortex Core Dynamics
Imprints, Molecular	(Invited) Toward Automated Pattern Inspection and Defect Characterization for Patterned Media Lithography
Imre, Alexandra	Large Area Direct-Write Focused Ion-Beam Lithography With A Dual-Beam Microscope Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Institute, Kurchatov	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Irmscher, Mathias	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Ishihara, Sunao	Evaluations Of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam
Ishikawa, Kiyoshi	Fabrication Of Nano Dots Array Mold Using Inorganic Electron Beam Resist And Post Exposure Bake
Ishikawa, Shoichiro	Nano Scale Three-Dimensional Metal Pattern Transfer By Nanoimprint Lithography Using Metal Oxide As A Release Layer
Isoyan, Artak	Self-Imaging Of Complex Structures With A Table-Top EUV Laser Fast Resist Development Model for Photolithography Process Simulation Modeling Strategies for the Incorporation and Correction of Proximity Effects in High-Resolution Electron-Beam Lithography
Itani, Toshiro	Alternative Developer Solutions For EUV Resist
Ito, Masaru	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Ivanov, A. Frank. T.	Parallel Proximal Probe Arrays With Vertical Interconnections
Ivanov, Tzvetan	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Ivanova, K.	Parallel Proximal Probe Arrays With Vertical Interconnections
Iwai, Jun	Process Optimization Of Electron Beam Lithography Using High Resolution Resist TEBN-1
Iwasaki, Fumiaki	Process Optimization Of Electron Beam Lithography Using High Resolution Resist TEBN-1
Iwata, Tetsu	Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics
J
Jacobsen, Chris	Evaluation Of The Optical Performance Of X-Ray Zone Plates Made With Overlay Nanofabrication Technique
Jacobson, Joseph	FIB-Assisted Bending Of Patterned Grown Silicon Nanowires
Jager, R.	Mapper: High Throughput Maskless Lithography
Jalabert, Laurent	Embedded SiO₂ nanosheets in PDMS using an alternative nanopatterning process.
Jang, Dongchan	(Invited) Effective Use of Focused Ion Beam (FIB) and E-beam lithography in Investigating Fundamental Mechanical Properties of Materials at the Nano-Scale. (Invited)
Jansen, John	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Jantsch, W.	Positioning of Nanocrystals on Prestructured Substrates
Janzén, Eric	Electrothermal Actuation Of Silicon Carbide Ring Resonators
Jarvholm, Jonas	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Jaschinsky, Pl	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Javanmard, Mehdi	Detection of Biomarkers Using Bio-Functionalized Microfluidic Channels
Jede, Ralf	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Jefimovs, Konstantins	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Jen, Timothy	The Interplay Between Kinetics And Thermodynamics During Development Of Calixarene, A Negative Resist
Jeon, S. C.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Jeon, Sang Cheol	Step Width Adjustment in Fabrication of Staircase Structures
Jeon, Seokwoo	Highly Robust Single-Wall Carbon Nanotube-Molecule Junction Device Fabrication Process
Jeon, Sohee	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Jeong, Chang Young	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Jeong, Jun-ho	Resistive Switching Memory Fabricated by UV-NIL Process
Jeong, Jun-Ho	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Ji, Shengxiang	Pathways For Implementation Of Block Copolymer Lithography In Nanomanufacturing Self-Aligned Double Patterning By Directed Self-Assembly Of Block Copolymer
Jiang, Aiqin	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Jiang, Fan	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Jiang, Ying-Bing	Tailoring Anisotropic Wetting Properties on One-Dimensional Nanopatterned Surfaces
Jin, Aizi	Removing Pt Contamination In FIB Assisted Deposition Of Electrodes For Nanodevices
Jin, S.W.	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Joechl, P.	Positioning of Nanocrystals on Prestructured Substrates
Joechl, Peter	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Johansson, Fredrik	Activation of Macrophages by High Aspect Ratio Nanostructures.
Jompol, Yodchay	Template Based Fabrication Of Size Tunable Single-Walled Carbon Nanotube Single Electron Transistors
Jones, Geraint	Fabrication of Nanoscale ZnO Fets Using The Functional Material Zinc Neodecanoate Directly As A Negative E-Beam Lithography Resist
Jones, Gideon	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Jones, Simon	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Joo, Jaebum	FIB-Assisted Bending Of Patterned Grown Silicon Nanowires
Joseph, E.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Joung, Daeha	Template Based Fabrication Of Size Tunable Single-Walled Carbon Nanotube Single Electron Transistors
Joy, David	Limiting Factors in Sub-10-nm Scanning Electron Beam Lithography
Jun, Kimin	FIB-Assisted Bending Of Patterned Grown Silicon Nanowires
Jung, Byungki	Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing
Jung, Hyunchul	Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery Design And Fabrication Of Electrokinetic Microfluidics For Transportation And Manipulation Of Biomolecules
Jung, Yeon Sik	Controlled Self-Assembly Of Linear Structures For Nanoscale Device Fabrication Nanolithography Applications Of Siloxane Block Copolymers: Systematic Pattern Tunability And Pattern-transfer
Jurisch, Michael	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning
K
Kalyanaraman, Ramki	Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Kamijo, Kazuma	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness
Kampherbeek, B.J.	Mapper: High Throughput Maskless Lithography
Kanda, Kazuhiro	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Kang, Huiman	Control of the Critical Dimensions and Line Edge Roughness with Pre-organized Block Copolymer Pixelated Photoresists Directing Block Copolymers Assembly within Patterned Media Specifications
Kang, Myung-Gyu	High-density Sub-20 nm Plasmonic Nanostructures Fabricated by Nanoimprint Lithography using a Block Copolymer Template Large Area Negative Refractive Index Structures at Optical Frequencies Using Nanoimprint Lithography ITO-Free Organic Solar Cells On Flexible Plastic Substrates
Kang, S.J.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Kang, Yuji	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Kanje, Martin	(Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Activation of Macrophages by High Aspect Ratio Nanostructures. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires. Nanowire Templated Nanotubes for Cell Injection
Kanouff, Michael	Gas Dosing for Tip Based Nano-Fabrication Processes
Kaplan, Alex	Large Area Negative Refractive Index Structures at Optical Frequencies Using Nanoimprint Lithography
Kato, Hiroyuki	Ion Beam Sharpening Of Diamond Tools Having Small Apex Angle Without Facet And Ripple Formation
Kawamura, Junki	Study On Ripple Or Nano Pattern Formation On Si By Low Energy Ar Ion Beam And Smoothing Of Rippled Or Nano Patterned Surface
Kawata, Hiroaki	Impact Of Resist Shrinkages On De-Molding Process In Thermal and UV NIL Impact of Exposure Doses on De-Molding Process in UV-NIL Molecular Dynamics Study On Fracture Of Si Mold In Nanoimprint For Glass Film Comparison of Demolding Forces for Various Si Molds and Mold with Extremely Smooth Side Wall Molecular Dynamics Study on Bending Deformation of Carbon Nanotubes by Electron Beam Irradiation
Kehagias, Nikolaos	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Kehoe, Timothy	Sub-Wavelength Diffraction Metrology For Inline And Critical Dimension Monitoring Of The Nanoimprint Lithography Process
Keil, K.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Keil, Katja	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography
Keil, Matthias	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Kellogg, Sean	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Kemper, S.	A Microretroreflector-Based Diagnostic Platform
Kenney, Linda	Application of the Helium Ion Microscope to Biological Sciences
Kenny, Thomas	Invited) The Tip-Based Nanofabrication Program
Kercher, Dan S.	Directing Block Copolymers Assembly within Patterned Media Specifications
Kercher, Dan	(Invited) Nanoimprint Lithography: Enabling Discrete Track and Bit-patterned Media Disk Manufacturing
Kern, D.P.	Microcolumn Design For A Large Scan Field And Pixel Number
Kettle, Jeff	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography Fabrication Of Templates For Large Area Patterning And The Replication Of "Motheye Lenses" Using Step And Flash Imprint Lithography (S-FIL)
Kewish, Cameron	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Keyvanfar, Kian	Ultra-Low Dose Exposure of HSQ using Electron Beam Lithography Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Kharanjole, Uday	Transmission Electron Microscopy of Fabricated Nanostructures
Khondaker, Saiful I.	Template Based Fabrication Of Size Tunable Single-Walled Carbon Nanotube Single Electron Transistors
Khursheed, Anjam	A Toroidal Spectrometer For Signal Detection In Scanning Ion/Electron Microscopes A Multiple-Electron-Beam Imaging Technique For Surface Inspection
Khusnatdinov, Niyaz	(Invited) Toward Automated Pattern Inspection and Defect Characterization for Patterned Media Lithography
Kidd, Deborah	Ultra-Low Dose Exposure of HSQ using Electron Beam Lithography Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Kihara, Naoko	Curing Process of Silsesquioxane in Self-Organized Diblock Copolymer Template
Kim , Sangjong	Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Kim, Byung Gook	Pattern Placement Error Due To Resist Charging Effect At 50kv E-Beam Writer
Kim, Byung-Gook	Estimation of Resist Profile Using Layer-Based Exposure Modeling Application of Neural Network to E-beam Dose Control for 3-D Proximity Effect Correction
Kim, Dae Wook	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Kim, Geehong	Fabrication Of The Transparent Cylindrical Stamp With Sub 50nm Linewidth By Means Of The Step & Flash Nanoimprint Lithography
Kim, Ho Seob	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Kim, Ho-Cheol	(Invited ) Directed Polymer Self-assembly for Lithography Application
Kim, Hochul	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Kim, Hyun Chul	Infrared Dipole Antenna Enhanced by Surface Phonon Polaritons
Kim, Hyun-Mi	Noise Reduction Process for Atomic Image Projection Electron-Beam Lithography (AIPEL) Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Kim, J W.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Kim, J. S.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Kim, Jeoung Woo	Step Width Adjustment in Fabrication of Staircase Structures
Kim, Jihoon	Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane
Kim, Jin Soo	Step Width Adjustment in Fabrication of Staircase Structures
Kim, Ju-Young	(Invited) Effective Use of Focused Ion Beam (FIB) and E-beam lithography in Investigating Fundamental Mechanical Properties of Materials at the Nano-Scale. (Invited)
Kim, K. N.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Kim, Ki Nam	Step Width Adjustment in Fabrication of Staircase Structures
Kim, Ki-Bum	Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Noise Reduction Process for Atomic Image Projection Electron-Beam Lithography (AIPEL) Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Kim, Ki-don	Resistive Switching Memory Fabricated by UV-NIL Process
Kim, Ki-Don	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Kim, M.J.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Kim, Moon	Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Kim, Ryoung-han	Optimization Of Multilayer Absorptive Antireflection Coatings For Hyper-NA Optical Lithography
Kim, S. -J.	Fabrication Of Nano-Periodic Josephson Junction Array In Bi₂Sr₂Ca₂Cu₃O_10+δ (Bi-2223) Single Crystal Whiskers
Kim, S.J.	Micro Fabrication Of Planar-Type Structures On Graphite Layer Using Focused Ion Beam And Transport Characterization
Kim, Sungho	Resistive Switching Memory Fabricated by UV-NIL Process
Kim, Tae Geun	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography
Kim, Y.C.	Inspection Method For Contact/Via-Holes Using A Low-Energy Electron Microcolumn
Kim, Yun Jun	Control of the Critical Dimensions and Line Edge Roughness with Pre-organized Block Copolymer Pixelated Photoresists
Kimmel, Jyrki	Fabrication of overhanging triangular gratings
King, Willaim	A General Strategy for Directly Writing Nanoscale Patterns of Nanoparticles and Polymer-Nanoparticle Composites.
King, William	(Invited) Nanometer-Scale Polymer Flow During Nanoimprint Lithography High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Kingsborough, Richard	Lithographically Directed Surface Modification
Kinoshita, Hiroo	Mask Observation Result using Coherent EUV Scattering Microscopy at New SUBARU
Kishimoto, Junki	Mask Observation Result using Coherent EUV Scattering Microscopy at New SUBARU
Klaus , David P.	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
Klaus, D.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Klein, Christof	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning
Klejwa, Nathan	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam Laser Print Patterning of Planar Spiral Inductors
Klejwa, S.J.	Laser Print Patterning of Planar Spiral Inductors
Klejwa, Steven	Laser Print Patterning of Planar Spiral Inductors
Kley, E.-Bernhard	Fabrication of Novel Digital Optical Spectrometer-on-chip
Kley, Ernst B.	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Klingfus, Joe	Limiting Factors in Sub-10-nm Scanning Electron Beam Lithography
Klingfus, Joseph	Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Large Area Direct-Write Focused Ion-Beam Lithography With A Dual-Beam Microscope
Klukowska, Anna	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Knoll, Armin	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Knoop, J.	A Microretroreflector-Based Diagnostic Platform
Ko, Ki-Young	Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Kodali, Vamsi	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Koeck, Anton	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Koh, Chawon	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Kohl, Paul	Patterning Unity 4698P with Electron Beam Lithography to Create Submicron Air Cavities
Komami, Hideaki	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Kometani, Reo	Evaluations Of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam
Kondic, Lou	Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Kong, Lingshu	Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP)
Kono, Naoya	Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-shifted Diffraction Gratings of Distributed Feedback Laser Diodes
Korre, Hasan	Low-Cost Interference Lithography
Kostic, I.	Parallel Proximal Probe Arrays With Vertical Interconnections
Koutake, Masayoshi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Koutsos, Vasileios	Properties of Single-Walled Carbon Nanotubes Integrated into Polyimide (SWNTs-Pi) Nanocomposites
Kratschmer, e.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Kratschmer, Ernst	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
Krchnavek, Robert R.	Ultra-Thin F-DLC Coating for Nanoimprint Lithography Imprinters
Krecinic, F.	Mapper: High Throughput Maskless Lithography
Kreindl, G.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Kreindl, Gerald	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Kretz, J.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Kretz, Johannes	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography
Krishna, Hare	Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Krishnan, Prasanna Venkatesh	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Kristensen, Anders	Origins of Stamp Bending in Nano-Imprint Lithography
Krug, Dave	High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Kruger, Seth	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Kruit, P.	Reversible Shape Changes Of The End Facet On Schottky Electron Emitters Growing Carbon Nano Tubes With A Simple CVD Process On Predefined Patterns Of Pd Nano Particles That Where Positioned To Charge Patterns Created With A Scanning Electron Microscope
Kruit, Pieter	On The Influence Of Sputtering In Determining The Resolution Of A Scanning Ion Microscope Optimization of Focused Ion Beam Performance. Focused Electron-Beam-Induced Deposition Of 3 Nm Dots In A Scanning Electron Microscope Measurements On The Electron Optical Properties Of A Multi-Electron Beam Source in a SEM Chamber
Kubo, Kensuke	Comparison of Demolding Forces for Various Si Molds and Mold with Extremely Smooth Side Wall
Kuehn, Seppe	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Kuekes, Phil	Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Kuemmel, M.	Positioning of Nanocrystals on Prestructured Substrates
Kuemmel, Marco	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Kuittinen, Markku	Fabrication of overhanging triangular gratings Coating Technique For E-Beam Sensitive Polymers On Non-Flat Surfaces And Their Suitability For E-Beam Exposure
Kuleshova, Evgenia A.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Kulkarni, Manish	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography
Kumar, Anil	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS)
Kumar, Navneet	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Kumemura, Momoko	Embedded SiO₂ nanosheets in PDMS using an alternative nanopatterning process.
Kuo, Cheng-Tzu	Process And Properties Of The Carbon Nanotube Assisted LiCoO₂ Thin Film Battery Electrode By The Pulsed Laser Deposition Method
Kuo, S. S.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Kutchoukov, V.G	Measurements On The Electron Optical Properties Of A Multi-Electron Beam Source in a SEM Chamber
Kuznetsova, Yuliya	Imaging Interferometric Nanoscopy to the Limits of Available Frequency Space
Kwon, Joonbum	Novel Immunoisolative Microcontainer With Nanoslots Defined By Nano Imprint Lithography
Kwon, Seyeoul	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels
Kye, Jongwook	Line Edge Roughness Contribution from Mask to Wafer
L
La Fontaine, Bruno	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
LaFontaine, Bruno	Line Edge Roughness Contribution from Mask to Wafer
Lafyatis, Gregory	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
Lai, G. S.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Laine, Richard	High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Laitinen, Mikko	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Lal, Amit	Self-Powered Electron Lithography
Lamers, Edwin	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Landis, S.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Langner, Andreas	Substrate Effects in EUV Lithography
Lassiter, Matthew G.	Time Dependent Effects of Electron Beam Induced Etching (EBIE)
Latimier, Paul-Emile	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Laukkanen, Janne	Fabrication of overhanging triangular gratings
Laur, Dustin	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Lawrence, Melvin III S.	Model Based OPC Runtime Saving With Multi-Segment Solver Fast Resist Development Model for Photolithography Process Simulation Modeling Strategies for the Incorporation and Correction of Proximity Effects in High-Resolution Electron-Beam Lithography
Lawson, Richard	High Performance Negative Tone Molecular Resists Using Cationic Polymerization Ultra-Thin Film Effects on Photoresist Imaging Performance Quantitative Structure-Property Relations for the Prediction of the Glass Transition Temperature of Molecular Resists
Le Cunff, Yves	Diffraction Grating Fabrication On 100nm Silicon Membrane For EUV Interferometry
Lee, Chih-Hsien	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Lee, Dong Gun	Mask Observation Result using Coherent EUV Scattering Microscopy at New SUBARU
Lee, Eung-sug	Resistive Switching Memory Fabricated by UV-NIL Process
Lee, Eung-Sug	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Lee, Heon	Fabrication of TiO₂ Nano Patterns using Direct Imprinting with TiO₂ Sol Direct Indium-Tin-Oxide Patterning Using Thermal Nanoimprint Lithography And ITO Nano-Particle Solution
Lee, J.-K.	(Invited) Photolithographic Patterning for Organic Electronics
Lee, Jaejong	Fabrication Of The Transparent Cylindrical Stamp With Sub 50nm Linewidth By Means Of The Step & Flash Nanoimprint Lithography
Lee, Jaesun	Investigation Of Surface Roughness Of Poly(Methylmethacrylate) At Reduced Temperatures
Lee, James	Design And Fabrication Of Electrokinetic Microfluidics For Transportation And Manipulation Of Biomolecules
Lee, Jeong-Bong	Novel Immunoisolative Microcontainer With Nanoslots Defined By Nano Imprint Lithography
Lee, Ji-hye	Resistive Switching Memory Fabricated by UV-NIL Process
Lee, Ji-Hye	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Lee, Kim	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media Directed Block Copolymer Assembly to 4 Teradot/in Patterned Media: Chemical or Topographic Guiding?
Lee, L. James	Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery
Lee, Min-Hyun	Noise Reduction Process for Atomic Image Projection Electron-Beam Lithography (AIPEL)
Lee, S.-Y.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Lee, S.H.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Lee, Sang Hee	Estimation of Resist Profile Using Layer-Based Exposure Modeling Application of Neural Network to E-beam Dose Control for 3-D Proximity Effect Correction
Lee, Sangsul	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography
Lee, Seung-Beck	Real-Time Detection Of Airborne Dust Particles Using Highly Sensitive Paddle Type Silicon Cantilevers
Lee, Shone	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Lee, Soo-Young	Estimation of Resist Profile Using Layer-Based Exposure Modeling Step Width Adjustment in Fabrication of Staircase Structures Application of Neural Network to E-beam Dose Control for 3-D Proximity Effect Correction
Lee, Soon-Won	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Lee, Sunwoo	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Lee, Tao-Hua	Solid-State Dye-Sensitized Solar Cell Based on Semiconducting Nanomaterials
Lee, W. H.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Lee, Woo Kyung	A General Strategy for Directly Writing Nanoscale Patterns of Nanoparticles and Polymer-Nanoparticle Composites.
Legagneux, Pierre	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Lehoucq, Gaëlle	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Lei, Anders	Conducting FIB Milled Nanowires
Leinonen, Kari	Coating Technique For E-Beam Sensitive Polymers On Non-Flat Surfaces And Their Suitability For E-Beam Exposure
Lemme, Max	Precision Material Modification and Patterning with Helium Ions
Leon, Jorge	Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Leonard, Francois	Diameter-Dependent Electronic Transport Properties Of Au-Catalyst/Ge-Nanowire Schottky Diodes
Letzkus, Florian	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Leu, Ing-Chi	Hierarchical Structure Formation Induced By Dewetting And Imprinting And Its Pattern Replication
Leu, Joshua	Sub-40-nm patterning of Au on GaAs for Nanowire Catalysis
Levinson, Harry	Line Edge Roughness Contribution from Mask to Wafer Optimization Of Multilayer Absorptive Antireflection Coatings For Hyper-NA Optical Lithography
Levola, Tapani	Fabrication of overhanging triangular gratings
Lewis, Mark	The Interplay Between Kinetics And Thermodynamics During Development Of Calixarene, A Negative Resist
Li, Hailiang	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography
Li, Huifeng	Single-Walled Carbon Nanotube Alignment by Grating-Guided Electrostatic Self-assembly
Li, J.J.	Removing Pt Contamination In FIB Assisted Deposition Of Electrodes For Nanodevices
Li, Jianliang	Model Based OPC Runtime Saving With Multi-Segment Solver
Li, Juntao	Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Li, Kai	STM-induced Surface Modification with Reactive Ion Etch Pattern Transfer
Li, Mo	(Invited) Light Force Silicon Devices
Li, Pengcheng	Step Width Adjustment in Fabrication of Staircase Structures
Li, Rui	Nanofabrication Of Deterministic Aperiodic Structures For Radiative Engineering In Nanoplasmonics
Li, Wen-Di	Self-Limited Self-Perfection by Liquefaction for Sub-20nm Trench/Line Fabrication Fabrication of Large-Area 100nm Checker Board Mold Using 3D Patterning with Multiple Nanoimprint Lithography and Self-Aligned Selective Etching Negative Tone Quantum Lithography at 200-nm Pitch Nanoimprinted Blanks
Li, Xiaohai	Model Based OPC Runtime Saving With Multi-Segment Solver
Li, Xu	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Li, Xuema	Fabrication of Nanoscale Memristor Arrays with One Nanoimprint Lithography Step Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip Nanoimprint Lithography for Sub-10 nm Complex Patterns
Li, Yunlong	Removing Pt Contamination In FIB Assisted Deposition Of Electrodes For Nanodevices
Li, Zhiwei	Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Liang, Ted	EUV Pattern Defect Detection Sensitivity Based On Aerial Image Linewidth Measurements Gas Assisted Focused Electron Beam Induced Etching of Alumina
Liang, Xiaogan	Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane Negative Tone Quantum Lithography at 200-nm Pitch Nanoimprinted Blanks Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials
Liang, Yixing	Self-Limited Self-Perfection by Liquefaction for Sub-20nm Trench/Line Fabrication
Liberale, Carlo	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Liddle, J. Alexander	Characterizing The Latent Image In Block Copolymer Resists With X-Ray Diffraction 3D Nanoparticle Trajectories by Orthogonal Tracking Microscopy
Liddle, J.A.	A Dry-on, Dry-off, Long Wavelength Photoresist for NanoPlasmonic Field Metrology and Lithography
Lim, Kipil	Noise Reduction Process for Atomic Image Projection Electron-Beam Lithography (AIPEL)
Lin, J.H.	Mapper: High Throughput Maskless Lithography
Lin, S.J.	Mapper: High Throughput Maskless Lithography
Lin, Shy-Jay	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Lindblom, Magnus	15-nm Nickel Zone Plates Achieved Using Cold-Developed Electron-Beam Patterned ZEP7000
Lindner, Friedrich	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Lindner, P.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Ling, Tao	High Q-Factor Small Size Polymer Micro-Ring Resonators For High-Frequency Ultrasound Detection
Linsmeier, Cecilia Eriksson	Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Litvinov, D.	Near-Neighbor Averaging Technique: A Method For Controlling Size Uniformity In Multigenerational Masks
Litvinov, J.	Suspended Gold Particles With Magnetic Cores For In Vitro Diagnostics
Liu, Chang	Frontiers of Tip-Based Nanofabrication: From DPN and Beyond
Liu, Chi-Chun	Pathways For Implementation Of Block Copolymer Lithography In Nanomanufacturing Self-Aligned Double Patterning By Directed Self-Assembly Of Block Copolymer
Liu, Chun-Hung	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Liu, Guoliang	Pathways For Implementation Of Block Copolymer Lithography In Nanomanufacturing Modification of the Wetting Behavior of PS Brush Layer by Inserting PMMA Molecules
Liu, Kun	Off-Axis Emission Properties for the Schottky Electron Source
Liu, Ming	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Liu, Ran	Combined Near-Field Lithography And Reversal Imprint For High Resolution Patterning In Wafer Scale
Liu, Tao	Integrated Strain Sensing on Flexible Waveguides with Bragg Gratings Fabricated by Focus Ion Beam
Liu, Wenchao	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Livengood, Richard	Sub-Surface Damage from Helium Ion as a Function of Dose and Beam Energy
Llobet, Jordi	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning
Lo, An-Ya	Process And Properties Of The Carbon Nanotube Assisted LiCoO₂ Thin Film Battery Electrode By The Pulsed Laser Deposition Method
Loeschner, H.	Positioning of Nanocrystals on Prestructured Substrates
Loeschner, Hans	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning (Invited) Charged Particle Nanopatterning (CHARPAN) Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Lombard, Christian	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Longo, Paulo	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Lopez, Gabriel	Tailoring Anisotropic Wetting Properties on One-Dimensional Nanopatterned Surfaces
Lou, Yi	Enhanced Transmission of Nanodots Metallic Arrays Fabricated by a Low Cost Directed Nanosphere Lithography (DNL)
Lozano, Paulo	Implementation and Characterization of an Iodine Field Emission Ion Source for FIB Applications
Lu, Bing-Rui	Combined Near-Field Lithography And Reversal Imprint For High Resolution Patterning In Wafer Scale
Lu, Ming	Evaluation Of The Optical Performance Of X-Ray Zone Plates Made With Overlay Nanofabrication Technique
Lu, Minghui	Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Lu, Wu	A Simple Technique for Beam Focusing in Electron Beam Lithography on Optically Transparent Substrates Fabrication and Characterization of Electroporation Devices with Micropore Arrays for Drug/Gene Delivery Design And Fabrication Of Electrokinetic Microfluidics For Transportation And Manipulation Of Biomolecules
Lu, Yuerui	Self-Powered Electron Lithography
Lucot, Dalien	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Luebke, Kevin	Fabrication Of High Aspect Ratio Polymer Nanopillars By Nanoimprint Induced Elongation For Guided Cell Growth
Lugg, Robert	Model Based OPC Runtime Saving With Multi-Segment Solver
Lukasczyk, Thomas	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum Lithographic Fabrication Of Clean Iron Nanostructures By Electron-Beam Induced Deposition In Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Lunardi, Leda	Enhanced Transmission of Nanodots Metallic Arrays Fabricated by a Low Cost Directed Nanosphere Lithography (DNL)
Luo, Qiang	Removing Pt Contamination In FIB Assisted Deposition Of Electrodes For Nanodevices
Luo, Tao	A Multiple-Electron-Beam Imaging Technique For Surface Inspection
Luo, Xiangang	Large Area Negative Refractive Index Structures at Optical Frequencies Using Nanoimprint Lithography
Luo, Xiaoquan	Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP)
Luo, Yi	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Luttge, Regina	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Lutz, Theresa	Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Lyding, Joseph	Atomic Precision Lithography on Si Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
M
Ma, Jie	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Ma, Yuansheng	Line Edge Roughness Contribution from Mask to Wafer
Maboudian, Roya	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam
Machida, Yasuhide	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Machin, Mikhail	Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Macintyre, Douglas S.	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Macintyre, Douglas	Resist Residues and Transistor Gate Fabrication
Mack, Chris	Stochastic Approach to Modeling Photoresist Development
Madec, Marie	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Madsen, Kristen Høeg	Conducting FIB Milled Nanowires
Makarova, Olga	Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Maldonado, Juan R.	Electron Reflection from Metal Targets
Malik, Sanjay	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Malliaras, George	(Invited) Photolithographic Patterning for Organic Electronics
Manabe, Tetsuro	Fabrication Of Nano Dots Array Mold Using Inorganic Electron Beam Resist And Post Exposure Bake
Manakli, Serdar	Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Manners, Ian	Self-Assembled Nanostructures With Ring Arrays And Square Pattern From Organometallic-Containing Triblock Terpolymers
Marbach, Hubertus	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum Lithographic Fabrication Of Clean Iron Nanostructures By Electron-Beam Induced Deposition In Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Marconi, Mario	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Marcus, Charles	Precision Material Modification and Patterning with Helium Ions
Marder, Seth	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Markosian, Ara	Design Specific Variation In Via/Contact Pattern Transfer - Full Chip Analysis.
Markwitz, A.	Conductive Atomic Force Microscopy Study Of Self-Assembled Silicon Nanostructures
Marohn, John A.	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Marrows, Christopher	Fabrication Of Nanomagnetic Spin Ice Arrays of CoFeB with Controlled Resist Profile For Lift Off Of Sputtered Films
Martin, Pamela	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Maruyama, Takashi	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Mary, A.	Substrate Patterning By Nanoimprint For Efficiency Enhancement Of Organic Light-Emitting Devices
Mastropaolo, Enrico	Electrothermal Actuation Of Silicon Carbide Ring Resonators
Mastue, Masato	Impact Of Resist Shrinkages On De-Molding Process In Thermal and UV NIL
Mathew, Sinu	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Matias, Ignacio R.	Application of C60 to Improve the SPLEBL Reference Signal
Matsue, Masato	Impact of Exposure Doses on De-Molding Process in UV-NIL
Matsui, Shinji	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Mayaterials	High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Mayer , Andre	Recovery Prevention Via Pressure Control in T-NIL
Mayer, A.	Recovery Prevention Via Pressure Control in T-NIL
Mayer, Andre	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State Self-Assembly For The Definition Of Hierarchical Patterns In Thermal Imprint
Mayer, Joachim	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
McCarthy, Brendan	Sub-Wavelength Diffraction Metrology For Inline And Critical Dimension Monitoring Of The Nanoimprint Lithography Process
McClelland, Andrew	Operation And Performance The CNSE Vistec VB300 Electron Beam Lithography System
McClelland, Jabez	3D Nanoparticle Trajectories by Orthogonal Tracking Microscopy
McCulloch, Michael	(Invited) Lithography With Nanometer Precision On Monster Substrates
McKinney, Wayne	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
McMahon, Matthew	3D Nanoparticle Trajectories by Orthogonal Tracking Microscopy
McPhail, Betsy	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
McVey, Shawn	Sub-Surface Damage from Helium Ion as a Function of Dose and Beam Energy Understanding Imaging Modes In The Helium Ion Microscope
Mecarini, Federico	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Mecerreyes, D.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Mekaru, Harutaka	2D to 3D Imprinting on Surface of Teflon PFA Inlet Tube Thermal Imprinting on Quartz Fiber using Glass-Like Carbon Mold
Melechko, Anatoli	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Mello, Russ	Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Melngailis, John	Gallium Nitride Nanowire Devices-Assembly, Fabrication And Applications
Mendels, David A.	Origins of Stamp Bending in Nano-Imprint Lithography
Meng, Xiao Fan	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Menon, Rajesh	Dual Wavelength Interference Lithography
Menoni, C.	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Merino, Santos	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning
Mesler, Brooke L.	Magnetic Soft X-ray Imaging of Non-linear Vortex Core Dynamics
Mestres, Narcis	Nanostructuring Of Graphene Layers By AFM Local Anodic Oxidation
Mialichi, José	Low Roughness Microdisk Resonators Fabricated By Focused Ion Beam (FIB)
Miao, Jianmin	Ferrofluid Lithography
Miao, Jianwei	Iterative Phase Recovery Using Wavelet Domain Constraints
Michallon, Philippe	Diffraction Grating Fabrication On 100nm Silicon Membrane For EUV Interferometry
Miller, Danielle	Fabrication Of High Aspect Ratio Polymer Nanopillars By Nanoimprint Induced Elongation For Guided Cell Growth
Miller, R.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Miller, Ron	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Miller, Suzanne	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Miller, Tom	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Mimura, Ryosuke	Molecular Dynamics Study on Bending Deformation of Carbon Nanotubes by Electron Beam Irradiation
Ming, Bin	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Minor, Andrew M.	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Minoux, Eric	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Mirkin, Chad	Frontiers of Tip-Based Nanofabrication: From DPN and Beyond Multiplexing and Transport Phenomena in Dip-Pen Nanolithography
Misra, Raj	Laser Print Patterning of Planar Spiral Inductors
Miyahara, Yoichi	Networks of Nanomagnets Fabricated via Stenciling and Magnetron Sputtering to Investigate Nanoscale Magnetic Switching
Miyakawa, Ryan	Iterative Procedure For In-Situ Optical Testing Of EUV Exposure Tools With An Incoherent Source Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes
Miyamoto, Iwao	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics Study On Ripple Or Nano Pattern Formation On Si By Low Energy Ar Ion Beam And Smoothing Of Rippled Or Nano Patterned Surface Ion Beam Sharpening Of Diamond Tools Having Small Apex Angle Without Facet And Ripple Formation
Miyazawa, Yousuke	Graphitization at Interface between Amorphous Carbon and Liquid Gallium for Fabricating Large Area Graphene Sheets
Mochi, Iacopo	Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes EUV Pattern Defect Detection Sensitivity Based On Aerial Image Linewidth Measurements
Mogi, Hiroshi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Mohammad, Noor	Gallium Nitride Nanowire Devices-Assembly, Fabrication And Applications
Mohammadi-Gheidari, Ali	Measurements On The Electron Optical Properties Of A Multi-Electron Beam Source in a SEM Chamber
Moldovan, Nicolaie	Nanofabrication of Sharp Diamond Tips by E-beam Lithography and ICP-RIE
Mollenbeck, S.	Recovery Prevention Via Pressure Control in T-NIL
Möllenbeck, Saskia	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State Recovery Prevention Via Pressure Control in T-NIL Self-Assembly For The Definition Of Hierarchical Patterns In Thermal Imprint
Mondol, Mark	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Montelius, Lars	(Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Activation of Macrophages by High Aspect Ratio Nanostructures. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires. Nanowire Templated Nanotubes for Cell Injection Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Montgomery, Warren	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Moon, Euclid E.	Reproducible Periodic Patterns Using Coherent Diffraction Lithography And Interferometric Spatial-Phase Imaging
Moon, Euclid	Application of C60 to Improve the SPLEBL Reference Signal
Moore, Thomas	Optical Imaging and Processing in a SEM/FIB: The Three Beam System
Morecroft, D.	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Morecroft, Deborah	Lift-off of Sub-15-nm Hydrogen Silsesquioxane (HSQ) Structures Nanoimprint Lithography for Sub-10 nm Complex Patterns
Morgan, Jason	Fabrication Of Nanomagnetic Spin Ice Arrays of CoFeB with Controlled Resist Profile For Lift Off Of Sputtered Films
Morihara, Daisuke	Numerical Study on Bubble Trapping in UV Nanoimprint Lithography
Morss, Andrew	Robust, Efficient Grating Couplers for Planar Optical Waveguides Using No-PAG SU-8 EBL
Moshkalev, Stanislav	Formation Of High-Aspect Ratio Silicon Nanopillars Using Deep Reactive Ion Etching Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Motayed, Abhishek	Gallium Nitride Nanowire Devices-Assembly, Fabrication And Applications
Mühlberger, Michael	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Mulders, Hans	Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Murali, Raghu	Impact of Edge Roughness on Graphene Nanoribbons
Murphy, Patrick	Self-Limited Self-Perfection by Liquefaction for Sub-20nm Trench/Line Fabrication
Muth, John	Enhanced Transmission of Nanodots Metallic Arrays Fabricated by a Low Cost Directed Nanosphere Lithography (DNL)
N
Nagae, Mitsutaka	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Nagaoka, Yoshinori	Numerical Study on Bubble Trapping in UV Nanoimprint Lithography
Nagase, Takashi	Ion Beam Sharpening Of Diamond Tools Having Small Apex Angle Without Facet And Ripple Formation
Nagato, Keisuke	Rapid Thermal Imprint Of High-Aspect-Ratio Nanostructures
Nakamatsu, Ken-ichiro	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Nakamura, Yuya	Ion Beam Sharpening Of Diamond Tools Having Small Apex Angle Without Facet And Ripple Formation
Nakao, Masayuki	Rapid Thermal Imprint Of High-Aspect-Ratio Nanostructures
Nam, Dong Seok	Pattern Placement Error Due To Resist Charging Effect At 50kv E-Beam Writer
Nam, Sung-Wook	Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Namboodiri, Pradeep	STM-induced Surface Modification with Reactive Ion Etch Pattern Transfer
Nasrullah, A.	Suspended Gold Particles With Magnetic Cores For In Vitro Diagnostics
Natarajan, S.	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Naulleau, Patrick	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch Iterative Procedure For In-Situ Optical Testing Of EUV Exposure Tools With An Incoherent Source Using Aberration Test Patterns To Optimize The Performance Of EUV Aerial Imaging Microscopes Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Nealey, Paul F.	Directing Block Copolymers Assembly within Patterned Media Specifications
Nealey, Paul	Pathways For Implementation Of Block Copolymer Lithography In Nanomanufacturing Control of the Critical Dimensions and Line Edge Roughness with Pre-organized Block Copolymer Pixelated Photoresists Modification of the Wetting Behavior of PS Brush Layer by Inserting PMMA Molecules Self-Aligned Double Patterning By Directed Self-Assembly Of Block Copolymer In-Situ Synthesis And Direct Immobilization Of DNA Oligonucleotides On Pre-Patterned HSQ Nanostructures
Negrete, Omar	In-Situ Synthesis And Direct Immobilization Of DNA Oligonucleotides On Pre-Patterned HSQ Nanostructures
Negro, Luca Dal	Nanofabrication Of Deterministic Aperiodic Structures For Radiative Engineering In Nanoplasmonics
Nemat-Gorgani, Mohsen	Detection of Biomarkers Using Bio-Functionalized Microfluidic Channels
Neumann , Alexander	Imaging Interferometric Nanoscopy to the Limits of Available Frequency Space
Neumann, Martin	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Neureuther, Andrew	Comparison Of Fast 3D Simulation And Actinic Inspection For EUV Masks With Buried Defects And Absorber Features
Neuser, Sam	Stencilled Conducting Bismuth Nanowires
Newbury, J.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Newcomb, S.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Ng, Hoi-Tou	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Ng, Vivian	Fabrication Of Arrays Of Magnetic Nanostructures Using Nanosphere Lithography And Ion Beam Etching Magnetic Properties Of Diamond Shaped Elements And Chains Fabricated By Nanosphere Lithography
Nguyen, Cattien	Carbon Nanotube Field Emitters for Micro-Column Scanning Electron Microscopy and Nanolithography
Nguyen, Hoa	Low Dose Patterning of HSQ For Use As A Silicon Etch Mask
Nichol, Anthony	Stretching And Alignment Of Compliant Nanomembranes By Embedded Nanomagnets
Nichols, Barbara	Electron Beam Induced Deposition of Cobalt for Use as Single-Wall Carbon Nanotube Growth Catalyst
Niemann, Darrell	Carbon Nanotube Field Emitters for Micro-Column Scanning Electron Microscopy and Nanolithography
Nikolov, N.	Parallel Proximal Probe Arrays With Vertical Interconnections
Nikolov, Nikolai	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Nilsson, Nicklas	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Nishimura, Motoyuki	Study On Ripple Or Nano Pattern Formation On Si By Low Energy Ar Ion Beam And Smoothing Of Rippled Or Nano Patterned Surface
Nishiyama, Iwao	Characterization of EUV-Deposited Carboneous Contamination
Nishiyama, Yasushi	Characterization of EUV-Deposited Carboneous Contamination
Niu, Jiebin	X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Noga, David	High Performance Negative Tone Molecular Resists Using Cationic Polymerization Ultra-Thin Film Effects on Photoresist Imaging Performance
Nottbohm, Christoph T.	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Notte, John	Sub-Surface Damage from Helium Ion as a Function of Dose and Beam Energy Understanding Imaging Modes In The Helium Ion Microscope High Spatial Resolution Sample Analysis Using A Helium Ion Microscope
Novembre, Anthony	High Density Submicron Features Using A Laser Pattern Generator And Double Patterning
Nuckolls, Colin	Highly Robust Single-Wall Carbon Nanotube-Molecule Junction Device Fabrication Process
Numata, A.	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics
O
O'Reilly, Thomas	Dual Wavelength Interference Lithography
Ober, Christopher	(Invited) Photolithographic Patterning for Organic Electronics Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing 193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Ocko, Ben	GISAXS A New Metrology To Characterize Nano-Patterned Samples
Ocola, Leonidas E.	Large Area Direct-Write Focused Ion-Beam Lithography With A Dual-Beam Microscope
Ocola, Leonidas Ernesto	Geometry Assisted PEC For Electron Beam Direct Write Nanolithography
Ocola, Leonidas	Shot Noise In Light Ion And Neutral Particle Lithography A Point Source Of Energetic Helium Atoms For Proximity Lithography
Odom, Teri	(Invited) Designing Hierarchical and Quasi-3D Plasmonic Lattices
Oizumi, Hiroaki	Characterization of EUV-Deposited Carboneous Contamination
Okada, Makoto	Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint Characteristics of Antisticking Layer Formed by Plasma Irradiation using Mixture Gas with CHF₃ and O₂ for Nanoimprint Effect of UV Irradiation on Sol-Gel ITO Nanopatterns Replicated by Room-Temperature Nanoimprint
Okada, Takashi	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Okawa, Yuji	(MNC 2008 Best Paper) Wiring Single Metal-Phthalocyanine Molecules With Conjugeted Polymers
Okuyama, Chieko	Thermal Imprinting on Quartz Fiber using Glass-Like Carbon Mold
Olynick, Deirdre	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures Understanding The Mechanism Of Base Development Of Hydrogen Silsesquioxane Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials The Interplay Between Kinetics And Thermodynamics During Development Of Calixarene, A Negative Resist
Ong, Jeremy C.	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Ong, Wei-Yi	Application of the Helium Ion Microscope to Biological Sciences
Onses, M. Serdar	In-Situ Synthesis And Direct Immobilization Of DNA Oligonucleotides On Pre-Patterned HSQ Nanostructures
Orlov, Alexei O.	Effects Of Visible Light Illumination On The Conductance Of Al/Alox Single-Electron Transistors
Osterberg, Mans	A Multiple-Electron-Beam Imaging Technique For Surface Inspection
Ott, J.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Ou, Neil	Diameter-Dependent Extraordinary Optical Transmission Of Dielectric Hole-Array Membrane
Ouerghi, Abdelkarim	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Özyilmaz, Barbaros	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
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Pahlovy, S. Ahmed	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness Low Energy Ar+ Ion Beam Machining Of Si Thin Layer Deposited On A Zerodur® Substrate For EUVL Optics Ion Beam Sharpening Of Diamond Tools Having Small Apex Angle Without Facet And Ripple Formation
Pahlovy, Shahjada A.	Study On Ripple Or Nano Pattern Formation On Si By Low Energy Ar Ion Beam And Smoothing Of Rippled Or Nano Patterned Surface
Pai, I-Ting	Hierarchical Structure Formation Induced By Dewetting And Imprinting And Its Pattern Replication
Pain, Laurent	Alpha Parameter, Resolution, Line Width Roughness and its Focus Dependencies in E-Beam Lithography Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Päivänranta, Birgit	Coating Technique For E-Beam Sensitive Polymers On Non-Flat Surfaces And Their Suitability For E-Beam Exposure
Palm, Roland	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Panepucci, Roberto	Integrated Strain Sensing on Flexible Waveguides with Bragg Gratings Fabricated by Focus Ion Beam
Panniello, A.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Park, Bonghyun	Real-Time Detection Of Airborne Dust Particles Using Highly Sensitive Paddle Type Silicon Cantilevers
Park, Chulmin	Noise Reduction Process for Atomic Image Projection Electron-Beam Lithography (AIPEL)
Park, Hui Joon	High-density Sub-20 nm Plasmonic Nanostructures Fabricated by Nanoimprint Lithography using a Block Copolymer Template
Park, Hyunsoo	Lateral Flow Particle Filtration and Separation with Multilayer Microfluidic Channels
Park, In-Sung	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography Effect Of Electrical Characteristics By Surface Modification In Pentacene Field Effect Transistor With Thin Al₂O₃ Gate Oxide Layer
Park, Jungwon	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels
Park, Sooyeon	Fabrication Of The Transparent Cylindrical Stamp With Sub 50nm Linewidth By Means Of The Step & Flash Nanoimprint Lithography
Parker, Charles	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Patel, Amil A.	Reproducible Periodic Patterns Using Coherent Diffraction Lithography And Interferometric Spatial-Phase Imaging
Patel, J.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Pauliac-Vaujour, Sébastien	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Pauliac-Vaujour, Sebastien	Ebeam Lithography for Platform of Multiple SET Architectures
Pease, Fabian	Non-iterative Reconstruction for Detecting Buried Deviant Structures in Integrated Circuits using Coherent Hard X-ray Diffraction Detection of Biomarkers Using Bio-Functionalized Microfluidic Channels Fabrication of Nanoneedle Array for High Throughput Biomarker Detection in a Lab-On-a-Chip Device Electron Reflection from Metal Targets Iterative Phase Recovery Using Wavelet Domain Constraints Real-Time DNA Sequencing via Detection of Polymerization with Silicon based Pico-calorimeter chips
Peckerar, Martin	Thin Film Antenna Coupled Conductor-Barrier-Conductor (CBC) Diode Implementation Using E-Beam Proximity Correction for Light Detection Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Pedersen, Rasmus	Origins of Stamp Bending in Nano-Imprint Lithography
Pedrau, Richard	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Peijster, J.J.M	Mapper: High Throughput Maskless Lithography
Pelissier, Bernard	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Peltonen, Antti	Novel Nanostructure Fabrication Method Combining Silicon Doping with Focused Ion Beam and Cryogenic Deep Reactive Ion Etching
Pépin-Donat, Brigitte	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Perez-Murano, Francesc	Nanostructuring Of Graphene Layers By AFM Local Anodic Oxidation
Perks, Richard	Fabrication Of Templates For Large Area Patterning And The Replication Of "Motheye Lenses" Using Step And Flash Imprint Lithography (S-FIL)
Pernice, Wolfram	(Invited) Light Force Silicon Devices
Peroz, Christophe	Imprint And Pattern Transfer Of Silica Sol-Gel Resist: A Powerful Nanofabrication Approach Fabrication of Novel Digital Optical Spectrometer-on-chip Planarization of High-Aspect Ratio Nanostructures by Infiltration and Pressing of Organic and Inorganic Curable Materials Automatic Measurement Of Electron Beam Size By BEAMETR Technique Using 20nm Test Patterns
Persson, Magnus	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Pertsch, Thomas	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Petersen, Dirch Hjorth	Conducting FIB Milled Nanowires
Petrillo, Karen	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Peyrade, David	A Transparent Multilevel-Electrodes Microfluidic Chip For Dielectrophoretic Colloidal Handling
Pianetta, Piero	Non-iterative Reconstruction for Detecting Buried Deviant Structures in Integrated Circuits using Coherent Hard X-ray Diffraction Electron Reflection from Metal Targets Iterative Phase Recovery Using Wavelet Domain Constraints
Piascik, Jeff	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Pickard, Daniel	Application of the Helium Ion Microscope to Biological Sciences Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Picraux, Tom	Diameter-Dependent Electronic Transport Properties Of Au-Catalyst/Ge-Nanowire Schottky Diodes
Pilvi, Tero	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Pilz, Wolfgang	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning
Pires, David	Nanometer-Scale Direct-Write 3D-Patterning using Probes
Pitkänen, Olli	Coating Technique For E-Beam Sensitive Polymers On Non-Flat Surfaces And Their Suitability For E-Beam Exposure
Placido, T.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Platzgummer, E.	Positioning of Nanocrystals on Prestructured Substrates
Platzgummer, Elmar	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning (Invited) Charged Particle Nanopatterning (CHARPAN) Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Ponche, Arnaud	DUV-Induced Nanopatterning Of Polyanhydride Films Deposited By Pulsed Plasma Polymerization
Popova, Vera	High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Porod, Wolfgang	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
Postek, Michael	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Prévitali, Bernard	Ebeam Lithography for Platform of Multiple SET Architectures
Pribat, Didier	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Prikhod'ko, Kirill E.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Principe, Edward	Reverse Bio-Engineering: Structural and Mechanical Modeling of Tadpole Teeth through FIB NanoTomography and Finite Element Analysis
Prinz, Christelle	(Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires. Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Prinz, Fritz	(Invited) The Convergence Of Science And Engineering: Energy Conversion At Nano Scale
Provine, J	Epitaxial Growth of Graphene on High Topology SiC Structures Patterned by Focused Ion Beam Laser Print Patterning of Planar Spiral Inductors
Pshenay-Severin, Ekaterina	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Pudas, Marko	Coating Technique For E-Beam Sensitive Polymers On Non-Flat Surfaces And Their Suitability For E-Beam Exposure
Pujia, Antonella	3D Self-Similar Chain Nanolens Fabrication And Their Use In Single Molecule Detection
Pyzyna, A.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
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Qi, Minghao	Large-Area Manhattan Patterns via Cutting of Gratings
Qu, Xin-Ping	Combined Near-Field Lithography And Reversal Imprint For High Resolution Patterning In Wafer Scale
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Raabe, Jörg	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Rack, Philip D.	Time Dependent Effects of Electron Beam Induced Etching (EBIE)
Rack, Philip	The Fabrication And Characterization Of Electrically Addressable Microfluidic Electrowetting Channels Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Rack, Phillip	Optical Imaging and Processing in a SEM/FIB: The Three Beam System
Rad, Leili Baghaei	Non-iterative Reconstruction for Detecting Buried Deviant Structures in Integrated Circuits using Coherent Hard X-ray Diffraction Iterative Phase Recovery Using Wavelet Domain Constraints
Raghunathan, Ananthan	Simulation and Experimental Studies of Blanking Speed Limitations on Exposure Speed of Electron Beam Lithography
Raghunthan, Sudhar	Experimental Determination of Image Placement Accuracy in EUV Lithography
Rahkila, Paavo	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Rahman, Mahmud	Carbon Nanotube Field Emitters for Micro-Column Scanning Electron Microscopy and Nanolithography
Raju, Ramasamy	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Randall, John	Atomic Precision Lithography on Si Gas Dosing for Tip Based Nano-Fabrication Processes
Rangelow, I.W.	Parallel Proximal Probe Arrays With Vertical Interconnections
Rangelow, Ivo	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Rauschenbach, Bernd	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Reano, Ronald	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Reboud, Vincent	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures Sub-Wavelength Diffraction Metrology For Inline And Critical Dimension Monitoring Of The Nanoimprint Lithography Process IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Redmond, G.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Reed, Lloyd P.	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
Reed, Mark	Locally-Gated, Suspended Silicon Nanowire FETs for Biomolecular Sensing
Reinspach, Julia	15-nm Nickel Zone Plates Achieved Using Cold-Developed Electron-Beam Patterned ZEP7000
Reitinger, R.	Positioning of Nanocrystals on Prestructured Substrates
Reitinger, Ruediger	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Rekawa, Senajith	Double Patterning HSQ Processes Of Zone Plates For 10nm Diffraction Limited Performance
Research, Seagate Media	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media
Resnick, Douglas	(Invited) Toward Automated Pattern Inspection and Defect Characterization for Patterned Media Lithography
Retolaza, Aritz	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning
Rettner, Charles	(Invited ) Directed Polymer Self-assembly for Lithography Application
Reuther, Freimut	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Revuru, Srividya	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Ribaya, Bryan	Carbon Nanotube Field Emitters for Micro-Column Scanning Electron Microscopy and Nanolithography
Ribeiro, Gio	Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Rich, Lauren E.	Large Area Direct-Write Focused Ion-Beam Lithography With A Dual-Beam Microscope
Richter, Curt A.	Transfer Printing Approach for Fabricating Molecular Electronic Junctions
Riedo, Elisa	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Ring, Johan	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Rio, David	Study On Writing Strategy For Multiple Electron-Beam Lithography At 5keV
Ritala, Mikko	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Rius, Gemma	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning Nanostructuring Of Graphene Layers By AFM Local Anodic Oxidation
Ro, Hyun Wook	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Robinett, Warren	Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Rocca, J.	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Rockett, Angus	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Roediger, Peter	Analysis And Evaluation Process For Quantification Of Residual Gas Deposition By A Focused Electron Beam
Rooks, M.J.	Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Rooks, Michael	Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography
Ross, Caroline	Controlled Self-Assembly Of Linear Structures For Nanoscale Device Fabrication Nanolithography Applications Of Siloxane Block Copolymers: Systematic Pattern Tunability And Pattern-transfer Self-Assembled Nanostructures With Ring Arrays And Square Pattern From Organometallic-Containing Triblock Terpolymers
Rossier, Olivier	Application of the Helium Ion Microscope to Biological Sciences
Roucoules, Vincent	DUV-Induced Nanopatterning Of Polyanhydride Films Deposited By Pulsed Plasma Polymerization
Routenberg, David	Locally-Gated, Suspended Silicon Nanowire FETs for Biomolecular Sensing
Roy, Ananya	Shot Noise In Light Ion And Neutral Particle Lithography A Point Source Of Energetic Helium Atoms For Proximity Lithography
Roy, E.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Ruan, Junru	Simulation and Experimental Studies of Blanking Speed Limitations on Exposure Speed of Electron Beam Lithography
Ruchhoeft, P.	Near-Neighbor Averaging Technique: A Method For Controlling Size Uniformity In Multigenerational Masks Suspended Gold Particles With Magnetic Cores For In Vitro Diagnostics A Microretroreflector-Based Diagnostic Platform
Ruiz, Ricardo	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly Directing Block Copolymers Assembly within Patterned Media Specifications
Rumi, Mariacristina	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Russell, Phillip	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Russell, Zachary	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Ruzic, David	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Rytkönen, Tuomo	Fabrication of overhanging triangular gratings
Ryu, Sangil	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
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Sagari, Ananda	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Saidani, Menouer	Substrate Effects in EUV Lithography Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography
Saini, Rahul	Atomic Precision Lithography on Si
Saini, S.	Fabrication Of Nano-Periodic Josephson Junction Array In Bi₂Sr₂Ca₂Cu₃O_10+δ (Bi-2223) Single Crystal Whiskers
Sajavaaraa, Timo	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Salemink, Huub	Method For Improvement Of Aspect Ratio Of Ultra High Resolution Structures In Negative Electron Beam Resist. Pillar Growth Rate Dependences in Ion-Beam-Induced Deposition The Roles of Secondary Electrons and Sputtered Atoms in Ion-Beam-Induced Deposition
Samantaray, Chandan	Amino-Propyl-Triethoxy-Silane (APTES) on Aluminum Fiducial Grids for Spatial-Phase-Locked Electron-Beam Lithography
Samuelson, Lars	(Invited) Nanowires For Basic Science And For Applications In Electronics And Photonics (Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires. Nanowire Templated Nanotubes for Cell Injection Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Sanchez, Martha	Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Sanders, Daniel	(Invited ) Directed Polymer Self-assembly for Lithography Application
Sanford, Colin	Understanding Imaging Modes In The Helium Ion Microscope High Spatial Resolution Sample Analysis Using A Helium Ion Microscope
Sanford, Collin	Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Sangyuenyongpipat, Somjai	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Sanquer, Marc	Ebeam Lithography for Platform of Multiple SET Architectures
Santillan, Julius Joseph	Alternative Developer Solutions For EUV Resist
Sanz-Fernandez, Juan Jose	Perturbed Frequency-Selective Surfaces Fabricated on Large Thin Polymer Membranes for Multiband Infrared Applications
Sardan, Ozlem	Conducting FIB Milled Nanowires
Sarov, Yanko	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes Parallel Proximal Probe Arrays With Vertical Interconnections
Savu, Veronica	Stencilled Conducting Bismuth Nanowires
Schatttenburg, Mark	(Invited) Lithography With Nanometer Precision On Monster Substrates
Scheer, H.-C.	Recovery Prevention Via Pressure Control in T-NIL
Scheer, Hella-Christin	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State Recovery Prevention Via Pressure Control in T-NIL Self-Assembly For The Definition Of Hierarchical Patterns In Thermal Imprint
Scherer, Axel	Advanced Silicon Processing for Active Integrated Photonic Devices Techniques Of Cryogenic Reactive Ion Etching In Silicon For Fabrication Of Sensors Transmission Electron Microscopy of Fabricated Nanostructures
Schiavone, Patrick	Dynamic Scatterometry For Profile Control During Resist Trimming Process
Schiedt, Birgitta	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Schift, Helmut	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Schirmer, Michael	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum Lithographic Fabrication Of Clean Iron Nanostructures By Electron-Beam Induced Deposition In Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Schmid, Gerard	(Invited) Toward Automated Pattern Inspection and Defect Characterization for Patterned Media Lithography
Schmidt , Holger	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Schmidt-Ott, A.	Growing Carbon Nano Tubes With A Simple CVD Process On Predefined Patterns Of Pd Nano Particles That Where Positioned To Charge Patterns Created With A Scanning Electron Microscope
Schmidt, B.	Parallel Proximal Probe Arrays With Vertical Interconnections
Schmidt, Holger	Fabrication of Novel Digital Optical Spectrometer-on-chip
Schmits, Ruud	Method For Improvement Of Aspect Ratio Of Ultra High Resolution Structures In Negative Electron Beam Resist.
Schmucker, Scott	Atomic Precision Lithography on Si
Schneider, R.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Schöftner, Rainer	Fabrication Of Large Area Negative Index Structures By Nanoimprint Lithography
Schouenborg, Jens	Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Schuck, James	Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Schuck, P. James	Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter
Schuck, Peter Jim	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Schuette, Michael	A Simple Technique for Beam Focusing in Electron Beam Lithography on Optically Transparent Substrates
Schuster, S	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Schuster, Simon	Lift-off of Sub-15-nm Hydrogen Silsesquioxane (HSQ) Structures
Schvartzman, Mark	Fabrication of Sub-5nm Nanoscale Arrays by Nanoimprint Lithography Combined with an Angle-Evaporated Hard Mask and Lift-off
Schwind, Greg	Off-Axis Emission Properties for the Schottky Electron Source
Scipioni, Larry	Understanding Imaging Modes In The Helium Ion Microscope
Seley, David	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Semichem, Dongjim	Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Seok, Tae Joon	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Sha, Jing	Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing
Shan, Yuyao	Highly Robust Single-Wall Carbon Nanotube-Molecule Junction Device Fabrication Process
Sharma, Ashutosh	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography
Shearn, Michael	Advanced Silicon Processing for Active Integrated Photonic Devices
Sheehan, Paul	A General Strategy for Directly Writing Nanoscale Patterns of Nanoparticles and Polymer-Nanoparticle Composites.
Sheetz, Michael	Application of the Helium Ion Microscope to Biological Sciences
Shen, Liangguo	Nanoscale Deposition and Etching of Silicon Quantum Dots Using Field-Assisted AFM-Based CVD
Sherlock, T.	Suspended Gold Particles With Magnetic Cores For In Vitro Diagnostics A Microretroreflector-Based Diagnostic Platform
Shibata, Mayuko	Impact Of Resist Shrinkages On De-Molding Process In Thermal and UV NIL
Shibuya, Takeshi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Shieh, J.	Extraordinary Transmittance In Three-Dimensional Metal Structure Prepared Through Reversal Imprinting Of Metal Films
Shiely, James	Wafer Topography Proximity Effect Modeling and Correction for Patterning the Implant Layer
Shim, Jongyoup	Enhancement of Power Efficiency in Photonic Crystal Structured OLED
Shin, Hyun-Duck	The Improvement Of Imaging Properties By Optimizing The Capping Structure In Extreme Ultraviolet Lithography
Shin, Jangho	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Sidler, Katrin	Stencilled Conducting Bismuth Nanowires
Sidorkin, Vadim	Method For Improvement Of Aspect Ratio Of Ultra High Resolution Structures In Negative Electron Beam Resist.
Siitonen, Samuli	Fabrication of overhanging triangular gratings
Sijbrandij, Sybren	High Spatial Resolution Sample Analysis Using A Helium Ion Microscope
Silver, Richard	STM-induced Surface Modification with Reactive Ion Etch Pattern Transfer
Sirotkin, Vadim	Coarse-Grain Simulation Of Resist Flow In SFIL IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Skinner, Jack	Fabrication Methods For Passive Sensor Tags On Flexible Polymer Substrates
Sköld, Niklas	Nanowire Templated Nanotubes for Cell Injection
Smith, Bruce	Sidewall Spacer Double Patterning Technique With Reduced Process Complexity 193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Smith, D.	Near-Neighbor Averaging Technique: A Method For Controlling Size Uniformity In Multigenerational Masks
Smith, Douglas	(Invited) Lithography With Nanometer Precision On Monster Substrates
Smith, Henry I.	Reproducible Periodic Patterns Using Coherent Diffraction Lithography And Interferometric Spatial-Phase Imaging Application of C60 to Improve the SPLEBL Reference Signal
Smith, Sean	(Invited) Lithography With Nanometer Precision On Monster Substrates
Smith, Thomas	193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Snider, Greg	Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Snider, Gregory L.	Effects Of Visible Light Illumination On The Conductance Of Al/Alox Single-Electron Transistors
Socquet-Clerc, Carole	Diffraction Grating Fabrication On 100nm Silicon Membrane For EUV Interferometry
Solak, Harun H.	Thermal Development Of Calixerene Resist
Solak, Harun Hadi	Substrate Effects in EUV Lithography
Solak, Harun	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography
Soldate, Paul	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
Soles, Christopher	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography High Quality Secondary Templates for Nanoimprint Lithography from Cubic Silsesquioxanes (SSQs)
Sologubenko, Alla	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Song, Aimin	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Song, Hua	Wafer Topography Proximity Effect Modeling and Correction for Patterning the Implant Layer
Song, Xi	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography
Sooryakumar, R.	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Soppera, Olivier	DUV-Induced Nanopatterning Of Polyanhydride Films Deposited By Pulsed Plasma Polymerization
Soulan, Sebastien	Dynamic Scatterometry For Profile Control During Resist Trimming Process
Spreu, Christian	Easy Mask-Mold Fabrication For Combined Nanoimprint And Photolithography Transparent Hybrid Polymer Stamp Copies With Sub-50nm Resolution For Thermal And UV-Nanoimprint Lithography
Staffaroni, Matteo	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Staufer, U.	Microcolumn Design For A Large Scan Field And Pixel Number
Steenbrink, S.W.H.K.	Mapper: High Throughput Maskless Lithography
Stegemann, Bernd	The Promises Of Graphene Structures Nano-Patterned Using High Resolution Focused Ion Beams
Stein, Aaron	Fabrication Of Nanomagnetic Spin Ice Arrays of CoFeB with Controlled Resist Profile For Lift Off Of Sputtered Films
Stein, Gila	Characterizing The Latent Image In Block Copolymer Resists With X-Ray Diffraction
Steinrück, Hans-Peter	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum Lithographic Fabrication Of Clean Iron Nanostructures By Electron-Beam Induced Deposition In Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Stern, Lewis	Helium-ion Lithography with Hydrogen Silsesquioxane Resist Beam Induced Deposition Of Metal Using A Helium Ion Microscope
Stokes, Paul	Template Based Fabrication Of Size Tunable Single-Walled Carbon Nanotube Single Electron Transistors
Stoner, Brian	Characterization, Simulation, and Fabrication of a CNT Based Micro Mass Spectrometer
Stosch, Reiner	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Strahan, J.R.	A Dry-on, Dry-off, Long Wavelength Photoresist for NanoPlasmonic Field Metrology and Lithography
Striccoli, Marinella	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Strohmaier, W.	Microcolumn Design For A Large Scan Field And Pixel Number
Struck, Corey	Line Edge Roughness Reduction Studies Employing Grazing Incidence Ion Beam
Subramanian, K.R.V.	Investigation Of Surface Roughness Of Poly(Methylmethacrylate) At Reduced Temperatures
Sue, Hung-Jue	Single-Walled Carbon Nanotube Alignment by Grating-Guided Electrostatic Self-assembly Solid-State Dye-Sensitized Solar Cell Based on Semiconducting Nanomaterials
Suga, Osamu	Characterization of EUV-Deposited Carboneous Contamination
Sugatani, Shinji	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Sukharev, Valeriy	Design Specific Variation In Via/Contact Pattern Transfer - Full Chip Analysis.
Sumant, Anirudha	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Sun, Chuan-Shu	Process And Properties Of The Carbon Nanotube Assisted LiCoO₂ Thin Film Battery Electrode By The Pulsed Laser Deposition Method
Sun, Dazhi	Single-Walled Carbon Nanotube Alignment by Grating-Guided Electrostatic Self-assembly Solid-State Dye-Sensitized Solar Cell Based on Semiconducting Nanomaterials
Sun, Xiankai	Advanced Silicon Processing for Active Integrated Photonic Devices
Sun, Yanming	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Sun, Yun	Electron Reflection from Metal Targets
Suyatin, Dmitry	(Invited) Guiding, Rectifying and Sorting of Regenerating Axons by Free Standing Nanowire Patterns: A highway for nerve fibers. Subcellular Force Dynamics of Outgrowing Axons Measured by Free-standing Nanowires.
Svintsov, A.	Sub-10nm Test-Sample For Characterization And Tuning Of Focused Electron Beam Used In Technology, Inspection And Diagnostics
Svintsov, Alexander	Coarse-Grain Simulation Of Resist Flow In SFIL IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Swanson, Lyn	Off-Axis Emission Properties for the Schottky Electron Source
Swart, Jacobus Willibrordus	Formation Of High-Aspect Ratio Silicon Nanopillars Using Deep Reactive Ion Etching
Swart, Jacobus	Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Swartzentruber, Brian	Diameter-Dependent Electronic Transport Properties Of Au-Catalyst/Ge-Nanowire Schottky Diodes
Swarup, Sanjay	Application of the Helium Ion Microscope to Biological Sciences
Szakmany, Gergo	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
Szoszkiewicz, Robert	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
T
Tabib-Azar, Massood	Nanoscale Deposition and Etching of Silicon Quantum Dots Using Field-Assisted AFM-Based CVD
Tada, Kazuhiro	Molecular Dynamics Study On Fracture Of Si Mold In Nanoimprint For Glass Film
Tada, Yasuhiko	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly
Tago, Haruyuki	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Takacs, Peter	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
Takahashi, Masaharu	2D to 3D Imprinting on Surface of Teflon PFA Inlet Tube Thermal Imprinting on Quartz Fiber using Glass-Like Carbon Mold
Takahashi, Tatsumi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Takashima, Yuzuru	Iterative Phase Recovery Using Wavelet Domain Constraints
Takenaka, Mikihito	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly
Takizawa, Kazutaka	Curing Process of Silsesquioxane in Self-Organized Diblock Copolymer Template
Talasaz, Amirali	Detection of Biomarkers Using Bio-Functionalized Microfluidic Channels
Taldenkov, A.N.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Talin, Alec	Diameter-Dependent Electronic Transport Properties Of Au-Catalyst/Ge-Nanowire Schottky Diodes
Tallerico, Rossana	Silver-Based SERS Substrate Fabrication Using Nanolithography And Site Selective Electroless Deposition
Tan, Chee-Wee	Ferrofluid Lithography
Tan, Hua	Nanotrench Filling Via Planarization by Laser Assisted Direct Imprint (PLADI) and Air Cushion Press (ACP)
Tan, Shida	Sub-Surface Damage from Helium Ion as a Function of Dose and Beam Energy
Tanabe, Toshiaki	Impact of Exposure Doses on De-Molding Process in UV-NIL
Tang, Cha-Mei	Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Tang, Hong	(Invited) Light Force Silicon Devices
Taniguchi, Jun	Nano Scale Three-Dimensional Metal Pattern Transfer By Nanoimprint Lithography Using Metal Oxide As A Release Layer Fabrication Of Nano Dots Array Mold Using Inorganic Electron Beam Resist And Post Exposure Bake Fabrication Of Seamless Roll Mold Using Electron Beam Direct Writing To Rotating Cylindrical Substrate
Tao, Li	Top-down Fabrication of Monodisperse Non-Spherical Polymer Composite Particles for Nanomedicine Applications
Taylor, Priscilla	(Invited) Photolithographic Patterning for Organic Electronics
Tchikoulaeva, Anna	Line Edge Roughness Contribution from Mask to Wafer
Technology, Seagate	Directed Block Copolymer Assembly to 4 Teradot/in Patterned Media: Chemical or Topographic Guiding?
Teepen, T.F.	Mapper: High Throughput Maskless Lithography
Tegenfeldt, Jonas	Nanowire Templated Nanotubes for Cell Injection
Tekniker, Fundacion	Fabrication of CMOS Integrated Nanomechanical Devices By Ion Beam Patterning
Terrell, Eric	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Tesauro, M.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Thamdrup, Lasse	Origins of Stamp Bending in Nano-Imprint Lithography
Thayne, Iain G.	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Thayne, Iain	Resist Residues and Transistor Gate Fabrication
Theis, Thomas	How Will We Manufacture at the Nanoscale?
Thibaudeau, Giselle	Reverse Bio-Engineering: Structural and Mechanical Modeling of Tadpole Teeth through FIB NanoTomography and Finite Element Analysis
Thibault, Pierre	(Invited) High-Resolution Scanning X-Ray Diffraction Microscopy Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Thiel, Brad	Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Thompson, Bill	Understanding Imaging Modes In The Helium Ion Microscope
Thompson, Michael	Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing
Thoms, Stephen	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs Resist Residues and Transistor Gate Fabrication
Thong, John	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Thrum, F.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Thuau, Damien	Properties of Single-Walled Carbon Nanotubes Integrated into Polyimide (SWNTs-Pi) Nanocomposites
Tittonen, Ilkka	Novel Nanostructure Fabrication Method Combining Silicon Doping with Focused Ion Beam and Cryogenic Deep Reactive Ion Etching
Tiwari, Badri	Fabrication of Antenna-Coupled Metal-Oxide-Metal Diode Thermal Infrared Detectors Using In-Situ Oxidation
To, B.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Tolbert, Laren	High Performance Negative Tone Molecular Resists Using Cationic Polymerization Ultra-Thin Film Effects on Photoresist Imaging Performance Quantitative Structure-Property Relations for the Prediction of the Glass Transition Temperature of Molecular Resists
Tong, Will	Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Tono, Seiji	Process Optimization Of Electron Beam Lithography Using High Resolution Resist TEBN-1
Torres, Clivia M. Sotomayor	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Torres, Clivia Sotomayor	Sub-Wavelength Diffraction Metrology For Inline And Critical Dimension Monitoring Of The Nanoimprint Lithography Process
Toth, Milos	Electron Post-Irradiation Of Platinum Nanostructures Created By Electron-Beam-Induced Deposition From Pt(PF₃)₄
Treiblmayr, D.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Treiblmayr, Dominik	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Trivedi, K.	Lithographically Defined Silicon Nanowires And Quantum Dots For Quantum Devices
Trivedi, Krutarth	Dimension Reduction Of Nano-Gratings By Controlled Melting Of Patterned Polymer Mask Organic Solar Cells Using Imprinted P3HT Nanostructures: The Effects Of Geometry, Crystallization And Chain Ordering Novel Immunoisolative Microcontainer With Nanoslots Defined By Nano Imprint Lithography Fabrication Of High Aspect Ratio Nano-Trenches And Characterization Of Spin-On Dielectric Filling
Truffier-Boutry, Delphine	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Truong, Hoa	(Invited ) Directed Polymer Self-assembly for Lithography Application Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Tsai, Kuen-Yu	A New Parametric Proximity Effect Model Calibration Method for Improving Accuracy of Post-lithography Patterning Prediction in Sub-32-nm Half-Pitch Low-Voltage Electron Beam Direct-Write Lithography
Tsai, Richard	Electron Reflection from Metal Targets
Tseng, Ching-Tung	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Tsuchikawa, Haruo	Design for EB(DFEB), a Novel Approach to EBDW Throughput Enhancement For Volume Production
Tsuji, Yukihiro	Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-shifted Diffraction Gratings of Distributed Feedback Laser Diodes
Turchanin, Andrey	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Turner, Michael	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Turnidge, Martin	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
Tzvetkov, George	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
U
Ueki, Ryuuichi	Graphitization at Interface between Amorphous Carbon and Liquid Gallium for Fabricating Large Area Graphene Sheets
Ueno, Akihisa	Thermal Imprinting on Quartz Fiber using Glass-Like Carbon Mold
Underwood, William	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Unno, Noriyuki	Nano Scale Three-Dimensional Metal Pattern Transfer By Nanoimprint Lithography Using Metal Oxide As A Release Layer
Uozumi, Ryou	Two Stage Ion Beam Figuring And Smoothing Method For Shape Error Correction Of ULE®Substrates Of EUVL Multilayer Mirrors - Evaluation Of Surface Roughness
Urbanski, L.	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Ushijima, Hirobumi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Utlaut, Mark	Material Contrast from Ga Ion Induced Secondary Electron Images
V
Vallini, Felipe	Low Roughness Microdisk Resonators Fabricated By Focused Ion Beam (FIB)
Van De Peut, T.	Mapper: High Throughput Maskless Lithography
Van Delden, Jay	Fabrication of Ultra-Sensitive Silicon Cantilevers with Integrated, Overhanging Nickel Magnet Tips for Magnetic Resonance Force Microscopy
Van Der Drift, Emile	Method For Improvement Of Aspect Ratio Of Ultra High Resolution Structures In Negative Electron Beam Resist.
Van Dommelen, Youri	Defectivity Solutions for Topcoat-Free Photoresists at the 22nm Node
Van Kouwen, Leon	Focused Electron-Beam-Induced Deposition Of 3 Nm Dots In A Scanning Electron Microscope
Van Veen, A.H.V.	Mapper: High Throughput Maskless Lithography
Van Wolferen, Henk	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Van Wyck, Neil	Fabrication of Flexible Ultracapacitor/Galvanic Cell Hybrids Using Advanced Nanoparticle Coating Technology
Vaz, Alfredo	Low Roughness Microdisk Resonators Fabricated By Focused Ion Beam (FIB) Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Vazquez-Mena, Oscar	Stencilled Conducting Bismuth Nanowires
Venkatesan, Thirumalai	Application of the Helium Ion Microscope to Biological Sciences
Venkatesan, Venky	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Veres, T.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Verissimo, Carla	Formation Of High-Aspect Ratio Silicon Nanopillars Using Deep Reactive Ion Etching Effects Of Ion Irradiation On Electrical Properties Of Carbon Nanotubes
Verma, L K	Magnetic Properties Of Diamond Shaped Elements And Chains Fabricated By Nanosphere Lithography
Verma, L. K.	Fabrication Of Arrays Of Magnetic Nanostructures Using Nanosphere Lithography And Ion Beam Etching
Vig, Asger L.	Origins of Stamp Bending in Nano-Imprint Lithography
Vila-Comamala, Joan	Ultrahigh Resolution X-Ray Fresnel Zone Plates Made By Thin Film Deposition
Villanueva, Guillermo	Stencilled Conducting Bismuth Nanowires
Vinet, Maud	Ebeam Lithography for Platform of Multiple SET Architectures
Viswanathan, R.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Viswanathan, Raman	Image Processing Using Shape Recognition for Alignment to Damaged Registration Marks in Electron Beam Lithography
Viswanathan, Vignesh	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Vizioz, Christian	High Aspect Ratio Fabrication Process For 3D Nanowire Gate-All-Around (GAA) And Double-Gate Transistors
Vladar, Andras	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Vogel, Konstantin	Brain Tissue Response To Nanowires Implanted Into The Rat Striatum.
Vogel, Viola	(Invited) Why Mechanical Forces Matter in Health and Disease: proteins as mechano-chemical switches
Volland, B.	Parallel Proximal Probe Arrays With Vertical Interconnections
Völlner, Jens	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Vollnhals, Florian	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Von Ehr, James	Atomic Precision Lithography on Si
Voronov, Dmytro	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
W
Wachulak, P.W.	Self-Imaging Of Complex Structures With A Table-Top EUV Laser
Wacquez, Romain	Ebeam Lithography for Platform of Multiple SET Architectures
Waid, Simon	NIL Stamp Modification Utilizing Focused Ion Beams
Walboomers, Frank	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Wallow, Tom	Pushing EUV Lithography Development Beyond 22-Nm Half Pitch
Wallraff, Gregory	Comparing The RLS Tradeoffs At EUV, E-Beam And 193 Nm For Common Resist Platforms
Walz, Marie-Madeleine	Selective Fabrication of Pure Titanium Oxide Nanocrystals via Electron-Beam Induced Deposition in Ultra-High Vacuum Lithographic Fabrication Of Clean Iron Nanostructures By Electron-Beam Induced Deposition In Ultra-High Vacuum The Influence Of Lithographic Parameters On EBID
Wang, Chao	Fabrication of Large-Area 100nm Checker Board Mold Using 3D Patterning with Multiple Nanoimprint Lithography and Self-Aligned Selective Etching Self-Aligned Fabrication of 10 nm-Wide Asymmetric Trenches in Si for Heterojunction Tunneling FETs Using Nanoimprint Lithography
Wang, Chunlei	Carbon Nanotube-confined MnO₂/C-MEMS Nanostructures for On-Chip Electrochemical Capacitors
Wang, Debin	High-speed, Sub-15 nm Feature Size Thermochemical Nanolithography
Wang, Feng	Observing Protein-DNA Interactions Using Double-Tethered DNA Curtains
Wang, L. Shengnian	Design And Fabrication Of Electrokinetic Microfluidics For Transportation And Manipulation Of Biomolecules
Wang, Lon	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Wang, Shih-Yuan	Nanoimprint Lithography for Sub-10 nm Complex Patterns
Wang, Ying	Novel Fabrication of 3D Combined Nanoscale and Microscale Structures Using Functionalized SPEL
Wang, Zhihong	Ferrofluid Lithography
Wang, Ziqian	Direct Patterning and Imaging of Graphene Structures with a Helium Ion Microscope
Wanzenboech, H.D.	Analysis And Evaluation Process For Quantification Of Residual Gas Deposition By A Focused Electron Beam
Wanzenboeck, Heinz D.	NIL Stamp Modification Utilizing Focused Ion Beams
Warisawa, Sin'ichi	Evaluations Of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam
Watanabe, Takeo	Mask Observation Result using Coherent EUV Scattering Microscopy at New SUBARU
Watson, G. Patrick	High Density Submicron Features Using A Laser Pattern Generator And Double Patterning
Weber-Bagioni, Alex	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Weber-Bargioni, Alexander	Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter
Weigand, H.	Microcolumn Design For A Large Scan Field And Pixel Number
Weimann, Thomas	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Weiss, Paul	Nanoscale Chemical Patterning
Wellenzohn, Markus	Ion Multi-Beam Nanopatterning for Photonic Applications: Experiments And Simulations, Including Study Of Precursor Gas Induced Etching And Deposition
Weller, Dieter	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media Directed Block Copolymer Assembly to 4 Teradot/in Patterned Media: Chemical or Topographic Guiding?
Whitelegg, Stephen	Fabrication of poly(3 -hexylthiophene) (P3HT) in-plane gate transistors by low temperature thermal nanoimprint lithography
Whitlow, Harry	Step & Stamp Imprinting Microlithography Studies of Chemical and Topographical Signaling on Osteoblast Cells.
Wieland, M.J.	Mapper: High Throughput Maskless Lithography
Wieser, T.	Fully Automated Hot Embossing Processes Utilizing High Resolution Working Stamps
Wilke, Stephen	Advanced Nanoscale Anode Fabrication for High-Performance Solid Oxide Fuel Cells
Williams, R. S.	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Williams, R. Stanley	Fabrication of Nanoscale Memristor Arrays with One Nanoimprint Lithography Step Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip Nanoimprint Lithography for Sub-10 nm Complex Patterns Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Williamson, Todd	Fabrication Of High Density, High-Aspect-Ratio Polyimide Nanofilters
Willson, R. C.	Suspended Gold Particles With Magnetic Cores For In Vitro Diagnostics A Microretroreflector-Based Diagnostic Platform
Wilson, C.G.	A Dry-on, Dry-off, Long Wavelength Photoresist for NanoPlasmonic Field Metrology and Lithography
Wilson, R.	Parallel Proximal Probe Arrays With Vertical Interconnections
Wimplinger, Markus	Positive And Negative Counterpart Working Stamps For Soft UV-NIL Using One Master Design
Wind, Shalom	Gold-Tipped Elastomeric Pillars for Cellular Mechanotransduction Fabrication of Sub-5nm Nanoscale Arrays by Nanoimprint Lithography Combined with an Angle-Evaporated Hard Mask and Lift-off Observing Protein-DNA Interactions Using Double-Tethered DNA Curtains Highly Robust Single-Wall Carbon Nanotube-Molecule Junction Device Fabrication Process
Winnubst, Louis	Large-area Silicon Masters for the Fabrication of Nanostructured Bioactive Surfaces utilizing Laser Interference Nanolithography and Dry Etching.
Winston, Donald	Helium-ion Lithography with Hydrogen Silsesquioxane Resist
Wiraatmadja, Sandy	Comparison Of Fast 3D Simulation And Actinic Inspection For EUV Masks With Buried Defects And Absorber Features
Witt, Martin	(Invited) Programmable Aperture Plate System with integrated CMOS electronics for projection maskless nanolithography and nanopatterning
Wolfe, J.C.	Shot Noise In Light Ion And Neutral Particle Lithography A Point Source Of Energetic Helium Atoms For Proximity Lithography
Wolkow, Robert	Applying Lessons From Atom-Scale Science To Develop True Single-Atom Sized Electron And Ion Sources
Woo, Sang-Gyun	Pattern Placement Error Due To Resist Charging Effect At 50kv E-Beam Writer
Wood, Obert	Experimental Determination of Image Placement Accuracy in EUV Lithography
Wu, Jing-Tang	Imprinting with Revolving-belt for Effective and Efficient Replication of Microstructures
Wu, Jong-Ching	Diameter-Dependent Extraordinary Optical Transmission Of Dielectric Hole-Array Membrane
Wu, Ming	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Wu, W.	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Wu, Wei	Fabrication of Nanoscale Memristor Arrays with One Nanoimprint Lithography Step Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip Nanoimprint Lithography for Sub-10 nm Complex Patterns Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Wu, Xuan	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography
Wu, Yueying	Directed, Liquid Phase Assembly of Patterned and Thin Metallic Films by Pulsed Laser Dewetting
Wullinger, Michaela	Line Edge Roughness Contribution from Mask to Wafer
X
Xavier, Stephane	Versatile Applications Of 80 Kv Electron Beam Lithography : From Nanotubes To Biochips
Xia, Deying	Tailoring Anisotropic Wetting Properties on One-Dimensional Nanopatterned Surfaces
Xia, Q.	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Xia, Qiangfei	Fabrication of Nanoscale Memristor Arrays with One Nanoimprint Lithography Step Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip Nanoimprint Lithography for Sub-10 nm Complex Patterns Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Xiang, Bin	Nanoscale Laser Processing Using Near-Field Optics Combined With Electron Microscopy
Xiao, Shuaigang	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media Directed Block Copolymer Assembly to 4 Teradot/in Patterned Media: Chemical or Topographic Guiding?
Xie, Changqing	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Xie, Peng	Sidewall Spacer Double Patterning Technique With Reduced Process Complexity 193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Xiong, Gang	Fabrication of Nanoscale ZnO Fets Using The Functional Material Zinc Neodecanoate Directly As A Negative E-Beam Lithography Resist
Xu, Bing	(Invited) Lithography With Nanometer Precision On Monster Substrates
Xu, Ting	Large Area Negative Refractive Index Structures at Optical Frequencies Using Nanoimprint Lithography
Xu, Yuan	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media
Y
Yablonovitch, Eli	Nanofabrication and Optical Characterization of Optical Transformer with 2-D Tapered Tip
Yakimov, Eu.	Sub-10nm Test-Sample For Characterization And Tuning Of Focused Electron Beam Used In Technology, Inspection And Diagnostics
Yakubovsky, Andrei Yu.	Fabrication Of Metal Nanowires By Ion Beam Irradiation Of Metal Oxide Through High Aspect Ratio Resist Mask
Yamabe, Masaki	Evaluation of Each Electron Beam and Exposure Results with Four Column Cells in Multi Column E-Beam Exposure System
Yamada, Akio	Evaluation of Each Electron Beam and Exposure Results with Four Column Cells in Multi Column E-Beam Exposure System
Yamada, Shoko	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Yan, Minjun	Ultra-Dense Gold Nanostructures Fabricated Using Hydrogen Silsesquioxane (HSQ) Resist And Applications For Surface-Enhanced Raman Spectroscopy (SERS) Investigation Of Surface Roughness Of Poly(Methylmethacrylate) At Reduced Temperatures
Yanagisawa, Masaki	Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-shifted Diffraction Gratings of Distributed Feedback Laser Diodes
Yang, J. Joshua	Fabrication of Nanoscale Memristor Arrays with One Nanoimprint Lithography Step Reconfigurable Logic Circuits in a Memristor-Transistor Hybrid Chip
Yang, J. K. W	Sub-10-nm Pattern Transfer and Nanoimprint Molds.
Yang, Joel K.W.	Contrast Enhancement Behavior of Hydrogen Silsesquioxane (HSQ) in a Salty Developer
Yang, Joel	Controlled Self-Assembly Of Linear Structures For Nanoscale Device Fabrication Helium-ion Lithography with Hydrogen Silsesquioxane Resist Understanding Of Hydrogen Silsesquioxane Resist For Sub-5-Nm Half-Pitch Electron-Beam Lithography Limiting Factors in Sub-10-nm Scanning Electron Beam Lithography Lift-off of Sub-15-nm Hydrogen Silsesquioxane (HSQ) Structures Nanoimprint Lithography for Sub-10 nm Complex Patterns
Yang, Ki-yeon	Fabrication of TiO₂ Nano Patterns using Direct Imprinting with TiO₂ Sol
Yang, Ki-Yeon	Direct Indium-Tin-Oxide Patterning Using Thermal Nanoimprint Lithography And ITO Nano-Particle Solution
Yang, Peidong	Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter
Yang, Sen-Yeu	Imprinting with Revolving-belt for Effective and Efficient Replication of Microstructures Complete Reversal Imprinting For Fabricating Microlens Array With High Height Transcription Ultra-Large And Thin Light Guide Plates Fabricated Using UV Imprinting Process
Yang, Su-Geun	Top-down Fabrication of Monodisperse Non-Spherical Polymer Composite Particles for Nanomedicine Applications
Yang, XiaoMin	Advantages And Challenges In The Directed Block Copolymer Assembly Approach For Bit Patterned Media
Yang, Xiaomin	Directed Block Copolymer Assembly to 4 Teradot/in Patterned Media: Chemical or Topographic Guiding?
Yang, Yinxiao	Impact of Edge Roughness on Graphene Nanoribbons
Yankov, Vladimir	Fabrication of Novel Digital Optical Spectrometer-on-chip
Yariv, Amnon	Advanced Silicon Processing for Active Integrated Photonic Devices
Yase, Kiyoshi	Fabrication Of Organic TFT Arrays On A Flexible Sheet By Microcontact Printing
Yashchuka, Valeriy	Development of Pseudo-random Binary Gratings and Arrays for Calibration of Surface Profile Metrology Tools
Yasuda, Hiroshi	Evaluation of Each Electron Beam and Exposure Results with Four Column Cells in Multi Column E-Beam Exposure System
Yasuda, Masaaki	Molecular Dynamics Study On Fracture Of Si Mold In Nanoimprint For Glass Film Comparison of Demolding Forces for Various Si Molds and Mold with Extremely Smooth Side Wall Molecular Dynamics Study on Bending Deformation of Carbon Nanotubes by Electron Beam Irradiation
Ye, Tianchun	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography X-Ray Transmission Gratings With Enhanced Second Orders And Deflected Odd Orders
Ye, Wei	Direct Writing Of Nanoscale Hafnium Diboride Metallic Nanostructures On Hydrogen Passivated Silicon (100) Surfaces Using A UHV-STM
Yen, Jia-Yush	Stitching Periodic Submicron Fringes By Utilizing Step-And-Align Interference Lithography (SAIL)
Yeo, Jeongho	Characterization Of Pattern Placement Error For Sub-40-Nm Memory Devices
Yerci, Selcuk	Nanofabrication Of Deterministic Aperiodic Structures For Radiative Engineering In Nanoplasmonics
Yesilkoy, Filiz	Thin Film Antenna Coupled Conductor-Barrier-Conductor (CBC) Diode Implementation Using E-Beam Proximity Correction for Light Detection
Yin, Ran	193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Yoo, J. J.	Spatial Dose Control for Fabrication of Saw-tooth Structures
Yoo, Jung Jae	Step Width Adjustment in Fabrication of Staircase Structures
Yoon, Dae-geun	Resistive Switching Memory Fabricated by UV-NIL Process
Yoon, Kyung-min	Fabrication of TiO₂ Nano Patterns using Direct Imprinting with TiO₂ Sol
Yoon, Kyung-Min	Direct Indium-Tin-Oxide Patterning Using Thermal Nanoimprint Lithography And ITO Nano-Particle Solution
Yoshida, Hiroshi	9x Density Multiplication Of HCP Lattice Pattern By Chemically Directed Block Copolymer Self-Assembly Directing Block Copolymers Assembly within Patterned Media Specifications
Yoshimizu, Norimasa	Self-Powered Electron Lithography
Yoshinaga, Hiroyuki	Evaluation of Nanoimprint Lithography as a Fabrication Process of Phase-shifted Diffraction Gratings of Distributed Feedback Laser Diodes
Younkin, Todd	High Performance Negative Tone Molecular Resists Using Cationic Polymerization Sub-millisecond Post Exposure Bake of Chemically Amplified Resists by CO₂ Laser Spike Annealing Can Acid Amplifiers Help Beat the RLS Trade-Off?
Yuan, Changsheng	Patterning Curved Surface Using Hybrid Nanoimprint-Soft Lithography Mold
Yueh, Wang	Can Acid Amplifiers Help Beat the RLS Trade-Off?
Z
Zach, Michael	Electrodeposition of Patterned Metal and Semiconductor Microwires on Ultrananocrystaline Diamond Electrodes
Zadok, Avi	Advanced Silicon Processing for Active Integrated Photonic Devices
Zaitsev, S.	Sub-10nm Test-Sample For Characterization And Tuning Of Focused Electron Beam Used In Technology, Inspection And Diagnostics
Zaitsev, Sergey	Coarse-Grain Simulation Of Resist Flow In SFIL IMPRINT Software: Stamp Bending Compensation, Residual Layer And Cavities Fullness Prediction
Zajadacz, Joachim	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State
Zakhidov, Alex	(Invited) Photolithographic Patterning for Organic Electronics
Zakhor, Avideh	Iterative Procedure For In-Situ Optical Testing Of EUV Exposure Tools With An Incoherent Source
Zamarreno, Carlos Ruiz	Application of C60 to Improve the SPLEBL Reference Signal
Zawierucha, P.	Parallel Proximal Probe Arrays With Vertical Interconnections
Zawierucha, Pawel	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Zelsmann, M.	Surface Plasmons Coupled To Excitons For Photoluminescence Enhancement In Printed 2D Polymer Photonic Structures
Zelsmann, Marc	Double-Anchoring Fluorinated Molecules For Anti-Adhesion Mold Treatment in UV Nanoimprint Lithography
Zeng, Hongjun	Nanofabrication of Sharp Diamond Tips by E-beam Lithography and ICP-RIE
Zhang, Qiaolin (Charlie)	Wafer Topography Proximity Effect Modeling and Correction for Patterning the Implant Layer
Zhang, Shouyin	A System For Massive, Rapid Material Removal For Device Analysis In Monolithic 3D Integrated Circuits
Zhang, Xianhui	1nm Thin Carbon Nanosheets With Tunable Conductivity And Stiffness
Zhang, Y.	Hydrogen Silsesquioxane-Based Hybrid Electron Beam And Optical Lithography For High Density CMOS Prototyping
Zhang, Yuegang	Electrostatic Exfoliation of Pre-Patterned Graphene Micro- and Nanostructures
Zhang, Zhaoyu	Manipulating Nano-scale Light Fields With The Plasmonic Color Nanosorter
Zhao, Lin	Large-Area Manhattan Patterns via Cutting of Gratings
Zhao, Meng	193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Zhao, Wei	Direct Write Reliefs in Excess of One Micrometer on Chalcogenide Thin-Films Using Electron Beams
Zhao, Yong	(Invited) Lithography With Nanometer Precision On Monster Substrates
Zhou, Haiping	Fully Self-Aligned Process For Fabricating 100 Nm Gate Length Enhancement Mode GaAs MOSFETs
Zhou, Jing	A Competition Between Vertical and Lateral Instabilities in Parallel Line-Space Gratings Fabricated by Nanoimprint Lithography
Zhou, Min	Organic Solar Cells Using Imprinted P3HT Nanostructures: The Effects Of Geometry, Crystallization And Chain Ordering
Zhou, Ye	High Volume Manufacturing Based on NanoImprint Lithography on Rough and Non-Planar Substrates
Zhu, Xiaoli	Fabrication Of Hard X-Ray Zone Plates With Very High Aspect-Ratio By X-Ray Lithography
Ziberi, Bashkim	Self-Organized Pattern Formation By Ion-Beam Erosion For Antireflection Surfaces Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Zielong, M.	Parallel Proximal Probe Arrays With Vertical Interconnections
Zielony, Michal	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Zier, M.	Parallel Proximal Probe Arrays With Vertical Interconnections
Zimmer, Klaus	Preparation Of Diamond-Like Channels In SU-8 For Optical Control Of The Filling State Hierarchical Nano-Structuring By Combining Ion Induced Self-Organization And Lithographic Pre-Patterning
Zimmerman, Paul	193nm Photoresist Hybrids for Sub-32nm Resolution, LER, and Sensitivity Requirements
Zimmermann, R.	(Invited) Design Verification for sub 70 nm DRAM nodes via Metal Fix using E-Beam Direct Write
Zollner, J.	Parallel Proximal Probe Arrays With Vertical Interconnections
Zöllner, Jens	Parallel Imaging With Micromachined Self-Actuated Piezoresistive Proximal Probes
Zonnevylle, A. C.	Growing Carbon Nano Tubes With A Simple CVD Process On Predefined Patterns Of Pd Nano Particles That Where Positioned To Charge Patterns Created With A Scanning Electron Microscope
Zonnevylle, A.C	Measurements On The Electron Optical Properties Of A Multi-Electron Beam Source in a SEM Chamber
Zuckermann, Ronald	Precise Placement of a Single Quantum Dot in a Bowtie Nanoantenna Gap
Zurich, ETH	(Invited) Why Mechanical Forces Matter in Health and Disease: proteins as mechano-chemical switches

EIPBN Abstracts